Vertical acid tank group automatic acid adding equipment for quartz glass tube hydrofluoric acid pickling

Abstract

The utility model discloses a vertical acid tank group automatic acid adding equipment for quartz glass tube hydrofluoric acid pickling belongs to quartz glass tube processing equipment technical field, and this equipment includes liquid supplementing tank, pure water tank, independent acid tank, liquid supplementing pump, pure water pump and acid adding pipeline system, and the pipeline system is constituted by main pipeline, original acid supply branch, pure water supply branch and distribution branch, wherein original acid supply branch is connected main pipeline first end through pump export independent valve, and pure water supply branch is connected main pipeline middle section through pure water independent valve, and distribution branch is connected main pipeline end and independent acid tank upper feeding port through the sub -pipeline of acid tank independent valve of branch, and the middle section of main pipeline is equipped with flowmeter, the utility model discloses through the closed pipeline step -by -step delivery original acid and pure water to acid tank, and the real -time monitoring of accurate control and flow is coordinated with the valve, eliminates the safety risk and environmental pollution caused by manual pouring acid liquor, realizes that the stable controllable of acid concentration is realized, and the management efficiency of multi -tank position is promoted.

Description

Technical Field

[0001] This utility model relates to the technical field of quartz glass tube processing equipment, and in particular to an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes. Background Technology

[0002] Quartz glass tubes are widely used in high-tech industries such as semiconductors and optical communications due to their excellent optical properties and chemical stability. During their production, hydrofluoric acid solutions are often used for surface etching and cleaning (pickling) to remove impurities or adjust surface properties. To ensure continuous production, pickling production lines typically employ a vertically arranged group of acid tanks. Preparing hydrofluoric acid solutions of specific concentrations and accurately replenishing each tank is a crucial step in ensuring pickling quality.

[0003] Currently, the main method for preparing and replenishing hydrofluoric acid solution in vertical acid tanks relies on manual operation. Specifically, workers need to lift plastic drums containing high-concentration hydrofluoric acid to an operating platform above the acid tank, then open the lids and manually pour the highly corrosive and toxic acid into the corresponding acid tank for dilution or replenishment. This method has a significant and insurmountable core drawback: operators inevitably have to be in close proximity to and directly handle hydrofluoric acid, a highly hazardous chemical, above the acid tank. Hydrofluoric acid is extremely corrosive and permeable; contact with skin or inhalation of its vapors can cause severe burns or even fatal injuries. During manual pouring, acid splashes, spills, or accidental spills due to unstable operation are highly likely, posing a very high risk of personal injury to operators. At the same time, the method of pouring with the lid open also allows a large amount of acid fumes to evaporate and spread in the working environment, not only endangering the health of operators but also increasing the risk of pollution to the workplace and the surrounding environment.

[0004] Therefore, this utility model proposes an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes to overcome the shortcomings of the prior art. Utility Model Content

[0005] In view of the high risk of manual operation in the preparation of hydrofluoric acid in vertical acid tank groups in the existing technology, such as the need for personnel to pour highly corrosive acid at close range, resulting in acid splashing injuries and leakage pollution to the environment, this utility model aims to provide an automatic acid adding device for vertical acid tank groups for hydrofluoric acid pickling with quartz glass tubes, with an improved structure that can effectively solve the above problems.

[0006] This utility model provides an automatic acid addition device for a vertical acid tank assembly for hydrofluoric acid pickling of quartz glass tubes, including a replenishment tank, a pure water tank, and at least one independent acid tank with a vertical structure, as well as a replenishment pump and a pure water pump with their inlets connected to the replenishment tank and the pure water tank respectively, and an acid addition pipeline system consisting of pipes and valves.

[0007] The acid addition pipeline system includes a main pipeline, raw acid supply branches, pure water supply branches, and distribution branches.

[0008] The original acid supply branch includes a pipe connected to the outlet of the replenishment pump, the end of which is connected to the first end of the main pipeline via an independent valve at the pump outlet.

[0009] The pure water supply branch includes a pure water pipe whose inlet end is connected to the outlet end of the pure water pump, and whose outlet end is connected to the middle section of the main pipeline through an independent pure water valve. A water meter is installed on the outer periphery of the water pipe.

[0010] The distribution branch includes at least one secondary pipe, with its inlet end connected to the second end of the main pipe and its outlet end connected to the upper feed port of the independent acid tank. An independent valve for the acid tank is also connected in series on the secondary pipe.

[0011] Furthermore, the raw acid supply branch is fixedly connected to the first end of the main pipeline through an independent valve at the pump outlet, the pure water supply branch is fixedly connected to the middle section of the main pipeline through an independent pure water valve, and the distribution branch is slidably connected to the second end of the main pipeline through a secondary pipeline connected in series with an independent valve for the acid tank, forming separate fluid pathways to ensure that the raw acid and pure water enter the main pipeline in sequence and are controllably transported to the independent acid tank.

[0012] Preferably, a flow meter is installed on the middle section of the main pipeline. The flow meter is installed after the connection point between the pure water independent valve and the main pipeline to accurately monitor the amount of raw acid and pure water added to ensure a stable acid concentration.

[0013] Preferably, an acid discharge pipe is fixedly connected to the lower part of the side wall of the independent acid tank for discharging waste acid and cleaning wastewater, ensuring environmentally friendly operation.

[0014] Preferably, an acid discharge valve is also installed in series on the acid discharge pipeline to controllably open or close the discharge process and prevent accidental leakage.

[0015] Preferably, the distribution branch includes multiple secondary pipelines, each of which is connected to a corresponding independent acid tank via an independent acid tank valve, thereby enabling parallel management of multiple acid tanks and improving efficiency.

[0016] Preferably, components in the equipment that come into contact with hydrofluoric acid are made of hydrofluoric acid-resistant materials, such as replenishment pumps, main pipelines, and auxiliary pipelines. Using this material enhances corrosion resistance and extends service life.

[0017] Preferably, the replenishment tank and the pure water tank are placed horizontally on the ground, which facilitates daily maintenance and material replenishment and reduces operational risks.

[0018] Preferably, the connection point between the pure water independent valve and the main pipeline is located after the connection point of the pump outlet independent valve to prevent pure water backflow and support step-by-step accurate metering.

[0019] This utility model has the following beneficial effects: 1. This utility model adopts a closed-loop automated acid filling pipeline system consisting of a main pipeline, separate raw acid supply branches and pure water supply branches, and distribution branches with independent valves. This system replaces the traditional manual high-altitude acid dumping operation mode. Operators only need to control the valves and pumps from the ground to complete the acid filling operation. Personnel do not need to come into contact with the acid throughout the process, which solves the major safety risk of acid splashing and injury and avoids the problem of acid leakage polluting the environment.

[0020] 2. This utility model integrates a flow meter on the key main pipeline and precisely controls its installation position. Combined with the step-by-step operation process of adding raw acid and pure water separately, it achieves high-precision online real-time measurement and control of the amount of hydrofluoric acid and pure water added. This solves the problem of difficulty in accurately controlling the dosage when manually preparing acid, ensuring that the concentration of the prepared hydrofluoric acid solution is highly stable and meets the process requirements. It also effectively prevents incomplete pickling or excessive corrosion of quartz glass tubes and ensures product quality.

[0021] 3. This utility model, by setting up a distribution branch with independent acid tank valves to connect multiple independent acid tanks, realizes parallel management and flexible operation of multiple workstations on the pickling production line, solves the problem of low efficiency of traditional manual acid preparation and difficulty in meeting the needs of multiple production lines operating at the same time, improves the efficiency of acid preparation and equipment utilization, and reduces the labor intensity of operators. Attached Figure Description

[0022] Figure 1 This is a three-dimensional schematic diagram of an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes, as proposed in this utility model. Figure 2 This is a schematic diagram of the replenishment tank of an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes, as proposed in this utility model. Figure 3 This is a schematic diagram of the replenishment pump of an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes, as proposed in this utility model. Figure 4 This is a schematic diagram of the pure water independent valve of an automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes, as proposed in this utility model.

[0023] Legend: 1. Replenishment tank; 2. Replenishment pump; 3. Main pipeline; 4. Secondary pipeline; 5. Pure water pipeline; 6. Acid discharge pipeline; 7. Pure water pump; 8. Pure water tank; 9. Pump outlet independent valve; 10. Pure water independent valve; 11. Acid tank independent valve; 12. Flow meter; 13. Independent acid tank; 14. Water meter. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please refer to Figures 1 to 4 This utility model provides an automatic acid addition device for a vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes. It aims to solve the structural defects and safety and environmental problems existing in the prior art when manually preparing hydrofluoric acid solutions, such as acid splashing causing injury, acid leakage polluting the environment, and unstable acid concentration.

[0026] like Figure 1 and Figure 2 As shown, the automatic acid-adding equipment for hydrofluoric acid pickling of quartz glass tubes includes a replenishment tank 1, a pure water tank 8, and at least one independent acid tank 13 with a vertical structure. The inlet pipe of the replenishment pump 2 is connected to the replenishment tank 1, and the inlet pipe of the pure water pump 7 is connected to the pure water tank 8. The replenishment tank 1 is used to store the raw hydrofluoric acid required for acid preparation, and its volume can be customized according to actual production needs. The pure water tank 8 is used to store the pure water required for acid preparation, and its volume can also be customized according to actual production capacity needs. The independent acid tank 13 is a container for pickling quartz glass tubes. It is usually vertical to adapt to the pickling process, and the number of independent acid tanks 13 can be flexibly increased or decreased according to the scale of the production line.

[0027] The acid supply pipeline system of this equipment includes a main pipeline 3, a raw acid supply branch, a pure water supply branch, and a distribution branch. The main pipeline 3 has a first end, a second end, and an intermediate section located between the first end and the second end. As the core trunk line of the entire fluid transport network, it carries the task of transporting raw acid and pure water to the independent acid tank 13.

[0028] The raw acid supply branch is a pipeline specifically designed for transporting hydrofluoric acid. It includes a pipe connected to the outlet of the replenishment pump 2. The end of this pipe is connected to the first end of the main pipeline 3 via an independent pump outlet valve 9. After the replenishment pump 2 is started, it can provide stable power to transport the hydrofluoric acid in the replenishment tank 1 to the main pipeline 3 through this branch. The independent pump outlet valve 9 serves as an independent control node, which can precisely control whether the raw acid enters the main pipeline 3.

[0029] The pure water supply branch is a pipeline specifically designed for transporting pure water. It includes a pure water pipe 5, the inlet of which is connected to the outlet of the pure water pump 7. The outlet of the pure water pipe 5 is connected to the middle section of the main pipeline 3 via a pure water independent valve 10. A water meter 14 is installed around the outer periphery of the water pipe 5 to observe the water volume. After the pure water pump 7 starts, it can transport pure water from the pure water tank 8 to the main pipeline 3 through the pure water pipe 5. The pure water independent valve 10 is also an independent control node used to precisely control whether pure water enters the main pipeline 3. The connection point between the pure water independent valve 10 and the main pipeline 3 is located after the connection point between the pump outlet independent valve 9 and the main pipeline 3, that is, at a later position in the direction of fluid flow along the main pipeline 3. This connection position ensures that the raw acid and pure water can be initially mixed or injected in a controlled area after entering the main pipeline 3, avoiding cross-contamination.

[0030] The distribution branch is a pipeline connecting the main pipeline 3 to each independent acid tank 13. It includes at least one secondary pipeline 4. The inlet end of the secondary pipeline 4 is connected to the second end of the main pipeline 3, and the outlet end of the secondary pipeline 4 is connected to the upper feed port of the independent acid tank 13. An independent acid tank valve 11 is installed in series on the secondary pipeline 4. When the mixed liquid or single liquid in the main pipeline 3 needs to be injected into a specific independent acid tank 13, the corresponding independent acid tank valve 11 is opened, and the liquid will be accurately injected through the secondary pipeline 4. This multi-branch distribution structure allows a set of acid adding systems to flexibly perform acid mixing operations for multiple independent acid tanks 13.

[0031] To solve the above-mentioned technical problems, the automatic acid addition equipment for the vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes also includes a flow meter 12, and the flow meter 12 and the aforementioned main pipe 3 form a specific structural fit and connection relationship to achieve accurate liquid metering.

[0032] The flow meter 12 is a key component for accurately measuring the volume of liquid flowing through it. It is installed in the middle section of the main pipeline 3, after the connection point between the pure water independent valve 10 and the main pipeline 3, and before the connection point between the auxiliary pipeline 4 and the main pipeline 3. This series installation on the main pipeline 3 allows the flow meter 12 to effectively monitor the amount of hydrofluoric acid and pure water flowing through the main pipeline 3. When the hydrofluoric acid enters the main pipeline 3 through the acid supply branch, the flow meter 12 can record its volume in real time. Similarly, when pure water enters the main pipeline 3 through the pure water supply branch, the flow meter 12 can also accurately measure the volume of pure water. The data from the flow meter 12 is transmitted to the control system to guide the operator to accurately control the start and stop of the pump and the opening and closing of the valve, thereby ensuring the accuracy of the amount of acid and pure water added, and ultimately achieving the precise standard of the concentration of the prepared hydrofluoric acid solution.

[0033] In addition, to ensure the safe discharge of waste acid and cleaning wastewater, an acid discharge pipe 6 is fixedly connected to the lower side wall of the independent acid tank 13 in this embodiment. The acid discharge pipe 6 serves as a dedicated channel for waste acid discharge, and an acid discharge valve is installed in series on it. When the hydrofluoric acid solution in the independent acid tank 13 has completed the acid washing operation and the concentration has dropped to the lower limit of the process and waste liquid needs to be discharged, the operator only needs to open the acid discharge valve. The waste acid will be transported to the waste acid treatment system in the plant area through the acid discharge pipe 6 under the action of gravity or the action of the auxiliary pump, thus avoiding the direct discharge of waste acid and causing pollution to the environment. The wastewater generated when cleaning the independent acid tank 13 is also discharged through the acid discharge pipe 6. The setting of the acid discharge valve ensures the controllability and safety of the waste liquid discharge process.

[0034] Based on the above embodiments, the present invention may further include the following preferred technical solutions: As a preferred implementation method, to achieve flexible management of multiple pickling stations, please refer to... Figure 1 The distribution branch includes multiple secondary pipes 4, each of which is connected to the corresponding independent acid tank 13 through an independent acid tank valve 11. By independently controlling the opening and closing of each independent acid tank valve 11, acid mixing operations can be performed individually or in batches on any one or more independent acid tanks 13, thereby improving the adaptability and operational efficiency of the production line.

[0035] As another preferred embodiment, in order to enhance the durability and extend the service life of the equipment, all structural components that come into direct contact with hydrofluoric acid are made of materials resistant to hydrofluoric acid corrosion. Specifically, the replenishment tank 1, replenishment pump 2, main pipeline 3, auxiliary pipeline 4, pump outlet independent valve 9, pure water independent valve 10, and acid tank independent valve 11 are all made of materials with excellent acid and alkali corrosion resistance.

[0036] As another preferred embodiment, in order to facilitate the installation, maintenance and operation of the equipment, the replenishment tank 1 and the pure water tank 8 are placed horizontally on the ground. This layout lowers the overall center of gravity of the equipment, increases the stability of the system, and also makes the replenishment of raw materials and the daily inspection of the equipment more convenient and safe.

[0037] As another preferred embodiment, in order to further optimize the fluid logic inside the pipeline system, the connection point of the pure water independent valve 10 in the pure water supply branch and the main pipeline 3 is located after the connection point of the pump outlet independent valve 9 in the raw acid supply branch and the main pipeline 3. That is, along the normal flow direction of the fluid in the main pipeline 3, the pure water injection point is downstream of the raw acid injection point. This arrangement ensures the order in which the two liquids enter the main pipeline 3, provides structural protection for step-by-step accurate metering, and effectively prevents the risk of pure water backflow into the raw acid supply branch.

[0038] Working principle: First, based on the target concentration of hydrofluoric acid required by the process and the effective volume of the independent acid tank 13, the required amount of raw hydrofluoric acid and pure water is accurately calculated. At the same time, the raw acid storage in the replenishment tank 1 and the pure water storage in the pure water tank 8 are checked to ensure they are sufficient. The operation and sealing status of the motors of the replenishment pump 2 and the pure water pump 7 are confirmed. The valve stem flexibility of the pump outlet independent valve 9, the pure water independent valve 10, and the acid tank independent valve 11 is checked. It is ensured that there are no cracks or looseness at the connection of the main pipeline 3, the auxiliary pipeline 4, the pure water pipeline 5, and the acid discharge pipeline 6. By checking the equipment status in advance, acid leakage caused by structural failure during subsequent transportation is avoided, reducing environmental and safety hazards from the source. At the same time, accurate calculation lays the foundation for achieving the required acid concentration.

[0039] After preparation, workers only need to operate the valves on the ground: open the independent acid tank valve 11 and the pump outlet valve 9 corresponding to the target independent acid tank 13, close the pure water independent valve 10, then start the replenishment pump 2, observe the flow meter 12, and control the amount of raw acid added. Once the preset value is reached, the hydrofluoric acid in the replenishment tank 1, under the stable power of the replenishment pump 2, enters the main pipeline 3 through the pump outlet valve 9, and then is precisely injected into the target independent acid tank 13 through the corresponding auxiliary pipeline 4. The entire process eliminates the need for hoisting plastic buckets for high-altitude acid transfer as in traditional methods, and workers do not need to come into contact with hydrofluoric acid, completely eliminating the risk of acid splashing and injury. Furthermore, the closed-loop pipeline transport replaces open-loop acid transfer, preventing acid leakage and environmental pollution. When the flow meter 12 on the main pipeline 3 or auxiliary pipeline 4 shows that the amount of raw acid added has reached the calculated value, the replenishment pump 2, the pump outlet valve 9, and the corresponding acid tank valve 11 are closed. This process relies on precise equipment control to ensure the accuracy of subsequent concentration adjustments.

[0040] Next, pure water is added. Keep the independent acid tank valves 11 of the other independent acid tanks 13 closed, and reopen the independent acid tank valve 11 and the pure water independent valve 10 of the target acid tank. Ensure that the pump outlet independent valve 9 is closed to block the original acid path. Then, start the pure water pump 7, observe the flow meter 14, and control the water flow. The pure water in the pure water tank 8 is pumped by the pure water pump 7 to the pure water pipeline 5, then enters the main pipeline 3 through the pure water independent valve 10, and finally flows into the target independent acid tank 13 through the auxiliary pipeline 4 to mix with the original acid. The stable delivery of the pure water pump 7, combined with the monitoring of the flow meter 12, allows for precise control of the pure water flow. The amount of pure water added is carefully controlled to avoid concentration deviations caused by excessive or insufficient pure water, thereby preventing incomplete pickling or excessive corrosion of the quartz glass tube and ensuring product quality. Once the amount of pure water added reaches the standard, the pure water pump 7, the independent pure water valve 10, and the independent acid tank valve 11 are turned off to complete the hydrofluoric acid concentration configuration. The entire acid preparation process is significantly shorter than the traditional manual acid preparation process. Furthermore, through the individual control of the independent acid tank valve 11, acid can be prepared for multiple independent acid tanks 13 simultaneously, significantly improving work efficiency. Workers only need to operate the valves and start / stop the pumps, greatly reducing labor intensity. New workers can become proficient in operation after a short period of training.

[0041] When the hydrofluoric acid solution in the independent acid tank 13 has completed the pickling process and the concentration has dropped to the lower limit of the process, the valve of the acid drain pipe 6 on the side of the acid tank is opened. The waste acid is transported to the waste acid treatment system in the plant area by gravity or auxiliary pump through the acid drain pipe 6, avoiding direct discharge of waste acid and pollution of the environment. After the waste acid is emptied, pure water can be injected into the acid tank for cleaning through the pure water pipe 5. The cleaning wastewater is also discharged through the acid drain pipe 6 to prepare for the next round of acid preparation. Throughout the process, the structures that come into contact with hydrofluoric acid, such as the replenishment tank 1, the main pipe 3, the auxiliary pipe 4, and the acid drain pipe 6, as well as the pump outlet independent valve 9, the pure water independent valve 10, and the acid tank independent valve 11, are all made of PP or PPH material that is resistant to hydrofluoric acid corrosion. The material effectively resists acid corrosion, significantly extending the overall service life of the equipment compared to traditional manual acid mixing equipment. Furthermore, the simple pipe and valve connection structure necessitates only routine maintenance, requiring only checks on seals and valve flexibility, thus reducing maintenance costs. Additionally, the number of independent acid tanks (13) can be flexibly increased or decreased via the independent acid tank valve (11). The pure water pipe (5) can be directly connected to the existing pure water system in the plant. The volumes of the replenishment tank (1) and pure water tank (8) can be customized according to production capacity requirements, making it suitable for quartz glass tube pickling production lines of different scales. The system boasts exceptional compatibility and scalability.

[0042] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An automatic acid-adding device for a vertical acid tank assembly used for hydrofluoric acid pickling of quartz glass tubes, comprising a replenishment tank (1), a pure water tank (8), and at least one independent acid tank (13) with a vertical structure, and further comprising a replenishment pump (2) and a pure water pump (7) whose inlet ends are respectively connected to pipelines of the replenishment tank (1) and the pure water tank (8), characterized in that, The equipment also includes an acid-adding pipeline system consisting of pipes and valves, the acid-adding pipeline system comprising: The main pipe (3) has a first end, a second end and an intermediate section located between the first end and the second end; The original acid supply branch includes a pipe connected to the outlet end of the replenishment pump (2), the end of which is connected to the first end of the main pipe (3) through a pump outlet independent valve (9); A pure water supply branch includes a pure water pipe (5), the inlet end of which is connected to the outlet end of the pure water pump (7), and the outlet end is connected to the middle section of the main pipe (3) through a pure water independent valve (10). A water meter (14) is provided on the outer periphery of the water pipe (5). And a distribution branch, which includes at least one secondary pipe (4), the inlet end of which is connected to the second end of the main pipe (3), the outlet end of which is connected to the upper feed port of the independent acid tank (13), and an independent acid tank valve (11) is installed in series on the secondary pipe (4).

2. The automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, A flow meter (12) is also installed on the middle section of the main pipe (3), and the flow meter (12) is installed between the connection point of the pure water independent valve (10) and the main pipe (3), and between the connection point of the auxiliary pipe (4) and the main pipe (3).

3. The automatic acid addition device for a vertical acid tank group used for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, The lower side wall of the independent acid tank (13) is also fixedly connected to an acid discharge pipe (6).

4. The automatic acid addition device for a vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes according to claim 3, characterized in that, An acid discharge valve is also installed in series on the acid discharge pipe (6).

5. The automatic acid addition device for a vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, The distribution branch includes multiple secondary pipes (4), each of which is connected to the corresponding independent acid tank (13) via an independent acid tank valve (11).

6. The automatic acid addition device for a vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, The replenishment tank (1), the replenishment pump (2), the main pipeline (3), the auxiliary pipeline (4), the pump outlet independent valve (9), the pure water independent valve (10), and the acid tank independent valve (11) are all made of materials resistant to hydrofluoric acid corrosion.

7. The automatic acid addition device for a vertical acid tank assembly for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, The replenishment tank (1) and the pure water tank (8) are placed horizontally on the ground.

8. The automatic acid addition device for a vertical acid tank group for hydrofluoric acid pickling of quartz glass tubes according to claim 1, characterized in that, The connection point between the pure water independent valve (10) in the pure water supply branch and the main pipeline (3) is located after the connection point between the pump outlet independent valve (9) in the original acid supply branch and the main pipeline (3).

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