Automatic clamping device for purging of ultra-clean steel pipe

Abstract

The utility model relates to the technical field of semiconductor, especially relates to a kind of super-clean steel pipe line purging automatic clamping device, for the clamping of pipeline product, including bottom plate, clamping mechanism and blowing mechanism, the clamping mechanism and blowing mechanism are all installed on bottom plate, respectively for clamping and purging pipeline product.The utility model passes through cylinder and makes pipe fitting interface and the nonmetallic sleeve on air guide shaft tight contact, ensures that pipe fitting interface is not damaged.Through device, after artificial installation workpiece, other workpieces can be installed on other tooling, and blowing is carried out simultaneously, improve production efficiency and unit man efficiency, improve capacity.Steel pipe purging automation integration can be completed, labor intensity is reduced, efficiency is improved, and quality is stable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to an automatic clamping device for purging ultra-clean steel pipelines. Background Technology

[0002] Due to continuous advancements in science and technology, various fields in production and daily life have gradually achieved varying degrees of mechanization and intelligentization, and components, as crucial parts in equipment, have played a significant role. Currently, in the gas transmission sub-sector of the semiconductor industry, the packaging process for stainless steel pipes, a fundamental step in gas transmission, involves ultra-clean steel pipes in three main diameters: 1 / 4, 3 / 8, and 1 / 2. During packaging, the pipes require purging. Currently, this is done manually using an air gun to purge each pipe for 30 seconds to remove particles and ensure cleanliness before shipment. To automate the purging process and reduce manual labor, this automatic clamping device has been designed. Four such devices can be deployed in production. After manual installation, automatic purging is performed, allowing manual labor to handle the installation, disassembly, and purging of other workpieces, thus improving production efficiency. Therefore, the automatic clamping device for ultra-clean steel pipe purging has a broad market prospect. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model discloses an automatic clamping device for purging ultra-clean steel pipelines.

[0004] The specific technical solution is as follows: An automatic clamping device for purging ultra-clean steel pipelines is disclosed for clamping pipeline products. It includes a base plate, a clamping mechanism, and an air-blowing mechanism. Both the clamping mechanism and the air-blowing mechanism are mounted on the base plate and are used for clamping and purging the pipeline products, respectively. The clamping mechanism includes a cylinder and a clamping plate. One end of the clamping plate has an opening groove for radially positioning the pipeline product, and the other end is connected to the piston rod at the front end of the cylinder. The air-blowing mechanism includes a shaft clamp support and an air guide shaft. The shaft clamp support is mounted on the base plate, and the air guide shaft is positioned and installed thereon.

[0005] The opening groove is compatible with VCR connectors and piping products of three pipe diameters: 1 / 4, 3 / 8, or 1 / 2.

[0006] The top surface of the shaft clamp support is fixed with a fixed clamping block and also includes an adjusting clamping block. After the air guide shaft is installed on the top surface of the shaft clamp support, the adjusting clamping block is engaged with the fixed clamping block by adjusting bolts to lock the position of the air guide shaft.

[0007] The front end of the air guide shaft is fitted with a non-metallic component that contacts the pipeline product, and the end is fitted with a pipe connector that connects to a high-purity nitrogen gas source.

[0008] Compared with the prior art, the present invention has the following beneficial technical effects: (1) The pipe fitting interface is brought into close contact with the non-metallic component on the air guide shaft by the cylinder, ensuring that the pipe fitting interface is undamaged; (2) After the workpiece is manually installed by the device, other workpieces can be installed on other toolings, and air blowing can be performed at the same time, which improves production efficiency and unit labor efficiency and increases production capacity.

[0009] In summary, the automatic clamping device for ultra-clean pipeline purging of this utility model can achieve automated integration of steel pipe purging, reduce the labor intensity of manual labor, improve efficiency, and stabilize quality. Attached Figure Description

[0010] Figure 1 This is a three-dimensional structural diagram of the automatic clamping device of this utility model; Figure 2 This is a top view of the automatic clamping device of this utility model; In the diagram, 1 is the base plate; 2 is the piping product; 3 is the non-metallic kit; 4 is the shaft clamp support; 41 is the fixing clamp; 42 is the adjusting clamp; 43 is the adjusting bolt; 5 is the air guide shaft; 6 is the pipe joint; 7 is the cylinder; 71 is the piston rod; 8 is the clamping plate; and 81 is the opening slot. Detailed Implementation

[0011] The present invention will be further described below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the accompanying drawings.

[0012] Figure 1 This is a three-dimensional structural diagram of the automatic clamping device of this utility model. Figure 2 The figure shows a top view of the automatic clamping device of this utility model: This utility model relates to an automatic clamping device for purging ultra-clean steel pipelines, used for clamping pipeline product 2. It includes a base plate 1, a clamping mechanism, and an air blowing mechanism. The clamping mechanism and the air blowing mechanism are both installed on the base plate 1 and are used for clamping and purging pipeline product 2, respectively.

[0013] The clamping mechanism includes a cylinder 7 and a clamping plate 8. One end of the clamping plate 8 has an opening groove 81 for radial positioning of the pipeline product 2, and the other end is connected to the piston rod 71 at the front end of the cylinder 7. The opening groove 81 is compatible with VCR connector pipeline products 2 of 1 / 4, 3 / 8, or 1 / 2 pipe diameters.

[0014] The purging mechanism includes a shaft clamp support 4 and a guide shaft 5. The shaft clamp support 4 is mounted on the base plate 1, positioning the guide shaft 5. A fixing block 41 is fixed to the top surface of the shaft clamp support 4, and an adjusting block 42 is also included. After the guide shaft 5 is mounted on the top surface of the shaft clamp support 4, the adjusting block 42 is engaged with the fixing block 41 by adjusting bolts 43 to lock the position of the guide shaft 5. A non-metallic component 3 is installed at the front end of the guide shaft 5 to contact the pipeline product 2, preventing scratches on the pipeline product 2. A pipe connector 6 is installed at the end, connecting to a high-purity nitrogen gas source for purging.

[0015] When in use, first place the pipeline product 2 in the open slot 81 at one end of the clamping plate 8, then start the cylinder 7, and drive the clamping plate 8 to retract through the piston rod 71, so that the pipeline product 2 comes into contact with the non-metallic kit 3, and finally turn on the nitrogen gas source to purge the pipeline product 2.

Claims

1. An automatic clamping device for purging ultra-clean steel pipelines, used for clamping pipeline products (2), characterized in that: The device includes a base plate (1), a clamping mechanism, and an air blowing mechanism. The clamping mechanism and the air blowing mechanism are both installed on the base plate (1) and are used to clamp and blow the pipeline product (2), respectively. The clamping mechanism includes a cylinder (7) and a clamping plate (8). One end of the clamping plate (8) has an opening groove (81) for radially positioning the pipeline product (2), and the other end is connected to the piston rod (71) at the front end of the cylinder (7). The air blowing mechanism includes a shaft clamp support (4) and an air guide shaft (5). The shaft clamp support (4) is installed on the base plate (1) and the air guide shaft (5) is positioned and installed.

2. The automatic clamping device for purging ultra-clean steel pipelines according to claim 1, characterized in that: The top surface of the shaft clamp support (4) is fixed with a fixed clamping block (41) and also includes an adjusting clamping block (42). After the air guide shaft (5) is installed on the top surface of the shaft clamp support (4), the adjusting clamping block (42) is engaged with the fixed clamping block (41) by adjusting bolts (43) to lock the position of the air guide shaft (5).

3. The automatic clamping device for purging ultra-clean steel pipelines according to claim 1, characterized in that: The front end of the air guide shaft (5) is fitted with a non-metallic component (3) which contacts the pipeline product (2), and the end is fitted with a pipe connector (6) which connects to a high-purity nitrogen gas source.

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