Photoresist dry cleaning machine applied to display panel

Abstract

The utility model relates to a kind of photoresist dry cleaning machine applied to display panel, including shell, air injection device and dust removal device. Cleaning chamber is formed in shell, air injection device is set at the top of cleaning chamber, air injection device is provided with for being communicated with gas source gas collection chamber. Through installation hole being provided on the bottom cavity wall of gas collection chamber, guide gas piece is rotatably arranged in installation hole, the outer wall of guide gas piece is attached with installation hole, guide gas groove is arranged on guide gas piece, the slot of guide gas groove is communicated with gas collection chamber, and the bottom of guide gas groove is spacedly provided with multiple air outlet holes. Dust removal device is selectively connected with the bottom of air injection device, and dust removal device carries out dust removal treatment to the bottom surface of air injection device. The equipment can prevent foreign matter from entering air outlet hole, ensure that air injection device uniformly sprays display panel, and has good cleaning effect;And the foreign matter on the bottom surface of air injection device can be regularly cleaned, to avoid foreign matter falling on display panel, improve the manufacturing yield of display panel.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a dry cleaning machine for photoresist used in display panels. Background Technology

[0002] In the display panel manufacturing process, a metal film layer is etched to form patterned circuits. After the etching process, a photoresist cleaning machine is used to remove the photoresist covering the metal film layer. Photoresist cleaning processes typically include dry cleaning and wet cleaning. Dry cleaning uses oxygen at high temperatures to ashing the photoresist with oxygen plasma, while wet cleaning uses a chemical cleaning solution composed of H2SO4 and H2O2 to remove the photoresist. (Related technologies refer to...) Figure 1 As shown, a dry cleaning machine includes a cleaning chamber 1' and an air jet device 2' and a conveying device 3' installed inside the cleaning chamber 1'. The air jet device 2' is located above the conveying device 3', which is used to transport a display panel 4' horizontally. The air jet device 2' sprays ozone onto the display panel 4'. The highly reactive oxygen atoms decompose the photoresist material into free particles, thereby generating volatile gases, which are then sucked away by the extraction device to achieve the cleaning treatment of the photoresist.

[0003] The existing technology has the following shortcomings: After ozone reacts with the photoresist, it produces powder. Over a long period of deposition, a large amount of powder adheres to the surface of the jetting device 2'. When the jetting device 2' is not in operation, the powder clogs the vents on it, thus affecting the jetting volume in the corresponding area of ​​the display panel 4', resulting in poor photoresist cleaning in that area. Furthermore, powder falling onto the display panel 4' can also affect subsequent processes. Utility Model Content

[0004] The purpose of this invention is to provide a dry cleaning machine for photoresist in display panels, which can prevent foreign objects from entering the air outlet, ensure that the air jet device sprays air evenly onto the display panel, and achieve good cleaning results; and can regularly clean foreign objects on the bottom surface of the air jet device to prevent foreign objects from falling onto the display panel and improve the manufacturing yield of the display panel.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A dry photoresist cleaning machine for display panels is provided, comprising a housing, an air jet device, and a dust removal device. A cleaning chamber is formed within the housing. The air jet device is disposed at the top of the cleaning chamber and has a gas collection chamber for communication with an air source. A mounting hole is provided through the bottom wall of the gas collection chamber. An air guide component is rotatably disposed within the mounting hole, with its outer wall fitting against the mounting hole. An air guide groove is provided on the air guide component, the groove opening communicating with the gas collection chamber. Multiple air outlets are spaced along the length of the groove bottom. By rotating the air guide component, the air outlets can be selectively connected to the cleaning chamber. The dust removal device is selectively connected to the bottom of the air jet device and is used to remove dust from the bottom surface of the air jet device.

[0007] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the air guide has a semi-circular cross-section, and a portion of the air guide extends to the outside of the jetting device.

[0008] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the bottom wall of the gas collection chamber is provided with a plurality of mounting holes spaced apart along a first direction, and each mounting hole is provided with a gas guide.

[0009] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the dust removal device includes a dust removal chamber and an air extraction assembly connected to the dust removal chamber. The dust removal chamber has a receiving cavity with a top opening. The bottom end of the jetting device is inserted into the receiving cavity through the opening at the top of the dust removal chamber. The air extraction assembly is used to extract air from the receiving cavity.

[0010] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the dust removal device further includes a brush assembly, which is rotatably disposed within the receiving cavity and is used to clean foreign objects from the bottom surface of the jet device.

[0011] As a preferred embodiment of a dry photoresist cleaning machine for display panels, mounting grooves are provided on two opposing cavity walls of the receiving cavity, and sliders are provided in the mounting grooves. The sliders can slide along the length direction of the mounting grooves, and the two ends of the brush assembly are rotatably connected to the two sliders respectively.

[0012] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the receiving cavity is provided with at least two of the brush assemblies, and the at least two brush assemblies rotate in opposite directions.

[0013] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the dust removal device further includes a base plate and a drive unit disposed on the base plate. The output end of the drive unit is connected to the dust removal chamber, and the drive unit is used to drive the dust removal chamber to move up and down.

[0014] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the machine also includes a conveying device disposed within the cleaning chamber, located below the jetting device, and used to carry the display panel and the dust removal device.

[0015] As a preferred embodiment of a dry photoresist cleaning machine for display panels, the machine also includes an exhaust device connected to the cleaning chamber, which is used to evacuate air from the cleaning chamber.

[0016] The advantages of this utility model compared to the prior art are:

[0017] This invention relates to a dry photoresist cleaning machine for display panels. By incorporating a rotatable air guide within the jetting device, the air outlet can be connected to the cleaning chamber or concealed within a gas collection box. This concealment protects the air outlet when not in use, preventing blockages caused by foreign objects. The jetting device can evenly spray ozone onto all areas of the display panel, ensuring effective photoresist cleaning. Furthermore, by selectively connecting a dust removal device to the jetting device, the bottom surface of the jetting device can be periodically cleaned of foreign objects, preventing the risk of foreign objects falling onto the display panel. Attached Figure Description

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is a schematic diagram of a dry cleaning machine in the prior art.

[0020] Figure 2 This is a schematic diagram of the working state of the photoresist dry cleaning machine applied to the display panel according to an embodiment of the present invention.

[0021] Figure 3 This is a schematic diagram of the photoresist dry cleaning machine used in the maintenance state of a display panel according to an embodiment of the present invention.

[0022] Figure 4 This is a schematic diagram of the jet device according to an embodiment of the present invention.

[0023] Figure 5 This is a schematic diagram of the dust removal device from a first-view perspective according to an embodiment of the present utility model.

[0024] Figure 6 This is a schematic diagram of the dust collector box from a second perspective, representing an embodiment of the present invention.

[0025] Figure 7 This is a schematic diagram of the air guide component according to an embodiment of the present utility model.

[0026] Figure 1 middle:

[0027] 1′ Cleaning chamber; 2′ Jet jet device; 3′ Conveying device; 4′ Display panel.

[0028] Figures 2 to 7 middle:

[0029] 1. Housing; 10. Cleaning chamber; 11. First door; 12. Second door; 2. Jet device; 21. Air collection box; 210. Air collection chamber; 211. Mounting hole; 22. Air guide; 221. Air guide groove; 222. Air outlet; 23. Air supply pipe; 3. Dust removal device; 31. Dust removal box body; 311. Receiving cavity; 312. Mounting groove; 32. Brush assembly; 33. Slider; 34. Lead screw; 35. Air extraction assembly; 36. Base plate; 37. Drive component; 4. Conveying device; 5. Exhaust device; 6. Display panel. Detailed Implementation

[0030] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0031] The present invention will now be described in detail with reference to the accompanying drawings.

[0032] like Figures 2 to 4As shown, this utility model provides a dry photoresist cleaning machine for display panels (hereinafter referred to as the photoresist dry cleaning machine), used to clean the photoresist on the display panel 6. Before entering the photoresist dry cleaning machine, the display panel 6 is subjected to ultraviolet light irradiation and heat treatment in the previous process to decompose the photoresist material. Then, the display panel 6 is conveyed into the photoresist dry cleaning machine, and ozone is sprayed onto the display panel 6 to remove the photoresist. The photoresist dry cleaning machine includes a housing 1, a jetting device 2, and a dust removal device 3. The housing 1 forms a cleaning chamber 10, in which the display panel 6 is cleaned. The jetting device 2 is located at the top of the cleaning chamber 10 and is used to spray ozone onto the display panel 6. The jetting device 2 includes a gas collection box 21, a gas guide 22, a gas supply pipe 23, and a gas source (not shown in the figure). The gas source is used to store ozone, and the gas collection box 21 is connected to the gas source through the gas supply pipe 23. An ozone collection chamber 210 is formed inside the gas collection box 21. The gas collection chamber 210 is connected to a gas source so that the ozone output from the gas source is first delivered to the gas collection chamber 210 and then sprayed out from the gas collection chamber 210. An installation hole 211 is provided on the bottom wall of the gas collection chamber 210, penetrating the bottom wall of the gas collection chamber 210, allowing the gas collection chamber 210 to communicate with the outside of the gas collection box 21 through the installation hole 211. An air guide 22 is installed in the installation hole 211, and the outer wall of the air guide 22 fits against the installation hole 211. An air guide groove 221 is provided on the air guide 22, and the opening of the air guide groove 221 communicates with the gas collection chamber 210. Multiple air outlets 222 are spaced apart at intervals on the bottom of the air guide groove 221, and the multiple air outlets 222 are distributed at intervals along the length direction of the air guide 22. The air guide 22 is rotatably mounted within the mounting hole 211, allowing it to rotate around its own axis. Rotating the air guide 22 allows the air outlet 222 to communicate with the cleaning chamber 10, or to be concealed within the air collection box 21. The dust removal device 3 is used to remove dust from the bottom surface of the jetting device 2, removing powdery foreign matter. The dust removal device 3 is selectively connected to the bottom of the jetting device 2 to remove dust from its bottom surface. When the photoresist dry cleaning machine is in operation, the dust removal device 3 is separated from the jetting device 2, and the jetting device 2 sprays ozone onto the display panel 6 passing below. When the photoresist dry cleaning machine is in maintenance mode, the display panel 6 stops inputting ozone, and the jetting device 2 stops inputting ozone. The dust removal device 3 docks with the bottom of the jetting device 2 for dust removal.

[0033] Understandably, during the cleaning process of the display panel 6, ozone can oxidize the decomposed photoresist material on the display panel 6, ultimately producing volatile gases. The powdery foreign matter carried in these volatile gases will adhere to the bottom of the jet device 2. By rotating the air guide 22 within the mounting hole 211, during cleaning, the air outlet 222 on the air guide 22 can be aligned with the port of the mounting hole 211, allowing ozone in the gas collection chamber 210 to sequentially enter the cleaning chamber 10 through the air guide groove 221 and the air outlet 222. When maintaining the jet device 2, by rotating the air guide 22, the air outlet 222 can be offset from the port of the mounting hole 211, and the air outlet 222 is hidden within the gas collection box 21. Furthermore, the outer wall of the air guide 22 can seal the port of the mounting hole 211. When the dust removal device 3 performs dust removal on the jet device 2, it can prevent foreign matter from entering the air outlet 222 and causing blockage. Under the action of the dust removal device 3, foreign objects on the jet device 2 are cleaned, preventing them from falling onto the display panel 6. Furthermore, by rotating the air guide 22, the air outlet 222 can be hidden when not jetting, preventing foreign objects from adhering to it. When the air guide 22 rotates, foreign objects in the area surrounding the air outlet 222 are also scraped off at the port of the mounting hole 211.

[0034] Specifically, refer to Figure 4 and Figure 7 As shown, the cross-section of the air guide 22 is semi-circular, and the shape and size of the mounting hole 211 are matched with the air guide 22. The outer wall of the air guide 22 fits against the mounting hole 211 so that the ozone in the gas collection chamber 210 can only be ejected from the outlet 222. The wall thickness of the gas collection box 21 is smaller than the radius of the air guide 22 so that part of the air guide 22 can pass through the mounting hole 211 and extend to the outside of the jet device 2. In this embodiment, the gas collection box 21 has a cuboid structure, the width direction of the gas collection box 21 (X direction in the figure) is parallel to the conveying direction of the display panel 6, and the length direction of the air guide 22 is parallel to the length direction of the gas collection box 21 (Y direction in the figure). When the display panel 6 passes under the gas collection box 21, the ozone ejected by the air guide 22 can cover the entire length or width area of ​​the display panel 6. Multiple air guides 22 are provided, arranged sequentially along the length of the air collection box 21, so that the display panel 6 can be sprayed by each air guide 22 during the conveying process. Correspondingly, multiple mounting holes 211 are provided on the bottom cavity wall of the air collection chamber 210, which are spaced apart along the first direction (i.e., the length direction of the air collection box 21), and each mounting hole 211 corresponds to one of the multiple air guides 22. The spraying device 2 also includes a drive mechanism, which can be a motor or a gear mechanism, etc. The drive mechanism is mounted on the air collection box 21 and connected to the air guides 22 to drive the air guides 22 to rotate.

[0035] Specifically, refer to Figure 5 and Figure 6 As shown, the dust removal device 3 includes a dust removal housing 31 and an air extraction assembly 35. The dust removal housing 31 has a cuboid structure to facilitate docking between the dust removal device 3 and the air collection box 21. The dust removal housing 31 has a receiving cavity 311, and the top of the dust removal housing 31 has an opening for insertion into the bottom end of the jetting device 2. That is, the bottom end of the jetting device 2 is inserted into the receiving cavity 311 through the opening at the top of the dust removal housing 31. The air extraction assembly 35 is mounted on the dust removal housing 31 and includes an extraction pipe and an air pump mounted on the extraction pipe. The extraction pipe communicates with the receiving cavity 311 so that the air extraction assembly 35 can extract air from the receiving cavity 311. In the maintenance state, the open end of the dust removal housing 31 is inserted into the bottom end of the jetting device 2, so that the receiving cavity 311 is in a closed state. Then, the suction assembly 35 is used to evacuate the receiving cavity 311 to clean the foreign matter adhering to the bottom surface of the jet device 2.

[0036] To further improve the cleaning effect, the dust removal device 3 also includes a brush assembly 32. The brush assembly 32 is rotatably disposed within the receiving cavity 311 and abuts against the bottom surface of the jet device 2. By rotating, the brush assembly 32 cleans foreign objects from the bottom surface of the jet device 2. At least two brush assemblies 32 are disposed within the receiving cavity 311, and the rotation directions of the at least two brush assemblies 32 are opposite. It can be understood that by setting brush assemblies 32 with different rotation directions, it is more convenient for the brush assemblies 32 to wipe off foreign objects. In this embodiment, the brush assembly 32 can move along the width direction (X direction in the figure) of the dust removal box 31 so that the brush assembly 32 can contact various areas of the bottom surface of the jet device 2. Along the length direction (Y direction in the figure) of the dust removal box 31, mounting grooves 312 are provided on two opposite cavity walls of the receiving cavity 311, and the length of the mounting grooves 312 extends along the width direction of the dust removal box 31. A slider 33 is slidably disposed within the mounting groove 312, and the slider 33 can slide along the length direction of the mounting groove 312. A lead screw 34 is also disposed within the mounting groove 312, passing through the slider 33 and threadedly connected to it. One end of the lead screw 34 is connected to a motor, which drives the lead screw 34 to rotate, thereby driving the slider 33 to slide along the length direction of the mounting groove 312. Both ends of the brush assembly 32 are rotatably connected to two sliders 33 respectively. It can be understood that the motor, lead screw 34, and slider 33 constitute a conventional lead screw-slider drive mechanism to drive the brush assembly 32 to move, thereby enabling the brush assembly 32 to move to various areas of the bottom surface of the jet device 2. Correspondingly, the slider 33 is provided with a motor for driving the rotation of the brush assembly 32. In other embodiments, the lead screw-slider drive mechanism can be omitted, and multiple brush assemblies 32 can be directly disposed within the receiving cavity 311, allowing the brush assemblies 32 to cover the bottom surface of the jet device 2.

[0037] To facilitate docking and disengagement between the dust collection chamber 31 and the jetting device 2, the dust collection device 3 also includes a base plate 36 and a drive component 37. The drive component 37 is a linear drive mechanism such as a cylinder or linear motor. The drive component 37 is mounted on the base plate 36, and its output end is connected to the dust collection chamber 31 to drive its lifting and lowering movement. When the dust collection chamber 31 rises, its open end can engage with the bottom end of the jetting device 2; when the dust collection chamber 31 descends, it separates from the jetting device 2.

[0038] Specifically, refer to Figure 2 and Figure 3 As shown, the photoresist dry cleaning machine also includes a conveying device 4 and an exhaust device 5. The conveying device 4 is located inside the cleaning chamber 10, below the jetting device 2. The conveying device 4 carries the display panel 6 and the dust removal device 3. The conveying device 4 includes multiple roller assemblies spaced apart along the length of the housing 1 (X direction in the diagram). The housing 1 has a first door 11 and a second door 12 at its two ends along its length, respectively. The display panel 6 enters the cleaning chamber 10 through the first door 11. After cleaning, the display panel 6 is then fed into the next process through the second door 12. The exhaust device 5 is located on the housing 1 and communicates with the cleaning chamber 10. The exhaust device 5 is used to evacuate air from the cleaning chamber 10. The exhaust device 5 includes an air pump and an exhaust pipe, with the air pump connected to the housing 1 via the exhaust pipe. During the cleaning process, the volatile gases generated from the reaction of ozone and photoresist are discharged from the cleaning chamber 10 through the exhaust device 5.

[0039] In this embodiment, the working principle of the photoresist dry cleaning machine is as follows: During cleaning, the display panel 6 enters the cleaning chamber 10 through the first door 11, and the conveying device 4 transports the display panel 6 to the second door 12. The jetting device 2 sprays ozone downwards through the air guide 22. When the display panel 6 passes under the jetting device 2, the ozone reacts with the photoresist to clean it. The gas after the ozone reacts with the photoresist is discharged through the exhaust device 5. During maintenance, the jetting device 2 stops spraying, the air guide 22 rotates, and the vent 222 is hidden inside the gas collection box 21. The dust removal device 3 is placed on the conveying device 4, and the dust removal device 3 moves to below the jetting device 2. The driving component 37 drives the dust removal box 31 to rise and connects it to the jetting device 2. The suction assembly 35 evacuates the receiving chamber 311. At the same time, the brush assembly 32 rotates and slides along the length of the mounting groove 312, brushing off foreign objects. This is to remove foreign objects from the bottom surface of the jet device 2.

[0040] The beneficial effects of this embodiment are as follows: By providing a rotatable air guide 22 in the jet device 2, the rotation of the air guide 22 allows the air outlet 222 to communicate with the cleaning chamber 10 or be hidden in the air collection box 21, thus protecting the air outlet 222 when not jetting and preventing foreign objects from entering and causing blockage. The jet device 2 can evenly spray ozone into all areas of the display panel 6, ensuring effective cleaning of the photoresist. Furthermore, by selectively docking the dust removal device 3 with the jet device 2, the bottom surface of the jet device 2 can be periodically cleaned of foreign objects, avoiding the risk of foreign objects falling onto the display panel 6.

[0041] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A dry cleaning machine for photoresist used in display panels, characterized in that, The device includes a housing, an air jetting device, and a dust removal device. A cleaning chamber is formed within the housing. The air jetting device is located at the top of the cleaning chamber and has an air collection chamber for communication with an air source. A mounting hole is provided through the bottom wall of the air collection chamber. An air guide is rotatably disposed within the mounting hole, with its outer wall fitting against the mounting hole. An air guide groove is provided on the air guide, the groove's opening communicating with the air collection chamber. Multiple air outlets are spaced along the length of the groove's bottom. Rotating the air guide allows selective communication between the air outlets and the cleaning chamber. The dust removal device is selectively connected to the bottom of the air jetting device and is used to remove dust from the bottom surface of the air jetting device.

2. The dry photoresist cleaning machine for display panels according to claim 1, characterized in that, The cross-section of the air guide is semi-circular, and part of the air guide extends to the outside of the jet device.

3. The dry photoresist cleaning machine for display panels according to claim 1, characterized in that, The bottom wall of the gas collecting chamber is provided with a plurality of mounting holes spaced apart along the first direction, and each mounting hole is provided with a gas guide.

4. The dry photoresist cleaning machine for display panels according to claim 1, characterized in that, The dust removal device includes a dust removal box and an air extraction assembly connected to the dust removal box. The dust removal box has a receiving cavity with a top opening. The bottom end of the jet device is inserted into the receiving cavity through the opening at the top of the dust removal box. The air extraction assembly is used to extract air from the receiving cavity.

5. The dry photoresist cleaning machine for display panels according to claim 4, characterized in that, The dust removal device also includes a brush assembly, which is rotatably disposed within the receiving cavity and is used to clean foreign objects from the bottom surface of the jet device.

6. The dry photoresist cleaning machine for display panels according to claim 5, characterized in that, The two opposite walls of the receiving cavity are provided with mounting grooves, and a slider is provided in the mounting groove. The slider can slide along the length direction of the mounting groove, and the two ends of the brush assembly are respectively rotatably connected to the two sliders.

7. The dry photoresist cleaning machine for display panels according to claim 5, characterized in that, The cavity contains at least two brush assemblies, and the at least two brush assemblies rotate in opposite directions.

8. The dry photoresist cleaning machine for display panels according to claim 4, characterized in that, The dust removal device also includes a base plate and a drive unit disposed on the base plate. The output end of the drive unit is connected to the dust removal box, and the drive unit is used to drive the dust removal box to move up and down.

9. The dry photoresist cleaning machine for display panels according to any one of claims 1 to 8, characterized in that, It also includes a conveying device disposed in the cleaning chamber, located below the jet device, and the conveying device is used to carry the display panel and the dust removal device.

10. The dry photoresist cleaning machine for display panels according to any one of claims 1 to 8, characterized in that, It also includes an exhaust device, which is connected to the cleaning chamber and is used to evacuate the cleaning chamber.

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