Mask metal strip punching device

Abstract

The utility model relates to a kind of mask metal strip stamping equipment, comprising: workbench, punching unit, straightening unit, walking unit, support unit, workbench is provided with several liftable support unit for supporting and placing metal strip, the both sides of workbench are provided with first positioning lock unit, second positioning lock unit for fixing metal strip, the long side direction of workbench is equipped with two parallel slide rails for realizing the linear motion of walking unit, punching unit, straightening unit are mechanically fixed on walking unit for realizing the synchronous linear motion with walking unit, straightening unit includes two upper and lower distribution and reverse rotation's press roll for flattening metal strip;Punching unit includes lower mould, upper die for realizing the punching operation of metal strip between press roll.The utility model is small, punching point positioning accurate, degree of automation is high, adaptability, good versatility, can adapt to multiple specifications metal strip, work efficiency is high.

Description

Technical Field

[0001] This utility model belongs to the technical field of mechanical processing and manufacturing equipment, and relates to a mask plate metal strip stamping equipment. Background Technology

[0002] In the field of mechanical manufacturing and processing equipment technology, the fabrication of large-size metal photomasks requires the use of metal strips. These strips are arranged in an interlaced pattern to form a grid pattern in the center of the large-size metal photomask. The metal strips used are thin metal sheets (strips) with a large aspect ratio, typically made of SUS304, SUS420, or Invar alloy. For example, a metal strip approximately 3m long typically has a width of only 7-90mm and a thickness of only 0.2-0.3mm. Multiple sets of circular bosses are often stamped onto the metal strips to prevent damage to the film layer on the glass substrate after vapor deposition. Due to the large span and small thickness of the metal strips, precise positioning and fixing during stamping are difficult, and warping deformation is easily caused. This leads to a significant decrease in the stamping accuracy and yield of the metal strips, resulting in low automation levels and low work efficiency, which can no longer meet production needs. Therefore, a new type of photomask metal strip stamping equipment is needed to solve these problems. Utility Model Content

[0003] The purpose of this invention is to provide a mask plate metal strip stamping equipment, which is used to position and tighten the metal strip during the stamping process, reduce warping deformation, has a high degree of automation, good adaptability, and meets the specific needs of users.

[0004] To achieve the above objectives, an embodiment of this utility model provides a mask metal strip stamping device, comprising: a worktable, a punching unit, a straightening unit, a traveling unit, and a support unit. The worktable is provided with several liftable support units for supporting and placing metal strips. A first positioning locking unit and a second positioning locking unit are provided on both sides of the worktable for fixing the metal strips. Two parallel slide rails are provided along the long side of the worktable to achieve linear movement of the traveling unit. The punching unit and the straightening unit are mechanically fixed to the traveling unit to achieve synchronous linear movement with the traveling unit. Two straightening units are located on the left and right sides of the punching unit. The straightening unit includes two vertically distributed and counter-rotating pressure rollers for flattening the metal strips. The punching unit includes a lower die and an upper die for punching the metal strips between the pressure rollers.

[0005] Furthermore, the punching unit also includes: a first motor, a servo press, a first vertical module, a second motor, and a first horizontal module. The lower drive of the servo press is connected to the upper die to realize the up-and-down movement of the upper die for punching the metal strip above the lower die. The servo press can move up and down along the first vertical module under the drive of the first motor, and the servo press can move back and forth horizontally along the first horizontal module under the drive of the second motor.

[0006] Furthermore, the straightening unit also includes: a third motor, a second vertical module, and a brake. One end of each of the two vertically distributed pressure rollers is provided with a drive gear. The brake is mechanically connected to one of the pressure rollers through the drive gear to control its rotation angle. The other pressure roller can move up and down along the second vertical module under the drive of the third motor to press the metal strip.

[0007] Furthermore, the straightening unit also includes: two guide rollers, which are disposed on one side of the pressure roller to limit the metal strip.

[0008] Furthermore, the walking unit includes: a fourth motor, a base plate, a rack, a walking gear, and a slider. The rack is mounted on the workbench and parallel to the slide rail. The base plate is mechanically connected to the slide rail via several sliders to enable the walking unit to move linearly along the slide rail. The fourth motor is mechanically fixed to the base plate. The walking gear is driven by the fourth motor and transmitted through the rack to drive the linear movement of the base plate.

[0009] Furthermore, the support unit 7 includes a support cylinder and a support roller. The support cylinder is mechanically fixed to the worktable, and the support roller is disposed above the support cylinder and connected to the support cylinder to realize the up and down movement of the support roller.

[0010] Furthermore, it also includes a horizontal drive module parallel to the long side of the worktable. The horizontal drive module is connected to the second positioning and locking unit to realize the linear movement of the second positioning and locking unit. The second positioning and locking unit includes: a second pressing cylinder, a second positioning cylinder, a second pressing block, and a second positioning block. The second positioning block is connected to the second positioning cylinder, and the second pressing block is connected to the second pressing cylinder to realize the up and down movement of the second pressing block and lock one end of the metal strip together with the second positioning block.

[0011] Furthermore, the first positioning and locking unit includes: a first pressing cylinder, a first positioning cylinder, a first pressing block, and a first positioning block. The first positioning block is connected to the first positioning cylinder, and the first pressing block is connected to the first pressing cylinder to realize the up and down movement of the first pressing block and lock the other end of the metal strip together with the first positioning block. The first pressing cylinder and the first positioning cylinder are both mechanically fixed on the worktable.

[0012] Furthermore, it also includes: limit blocks, a plurality of limit blocks are disposed at both ends of the worktable to limit the travel of the traveling unit.

[0013] Furthermore, it also includes at least one photoelectric sensor, which is disposed on the worktable for detecting the position of the walking unit.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The mask plate metal strip stamping equipment provided in this embodiment of the utility model is reasonably designed. By setting the straightening unit on both sides of the punching unit, the force concentrated towards the punching point on the metal strip when the punching unit punches the punching point is offset, reducing warping deformation. Several support units can cooperate with the positioning and locking units at both ends of the metal strip to fix the metal strip, ensuring the positioning accuracy of the punching point. This embodiment of the utility model has a high degree of automation, good adaptability and versatility, can adapt to metal strips of various specifications, operates reliably, improves work efficiency, and meets the specific needs of users. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only involve some embodiments of this utility model, and are not intended to limit this utility model.

[0017] Figure 1 A three-dimensional structural schematic diagram of the mask plate metal strip stamping equipment provided in this embodiment of the utility model;

[0018] Figure 2 for Figure 1 Enlarged view of part A in the middle;

[0019] Figure 3 for Figure 1 Enlarged view of part B in the middle section;

[0020] Figure 4 for Figure 1 Enlarged view of part C in the middle;

[0021] Figure 5Another three-dimensional structural schematic diagram of the mask plate metal strip stamping equipment provided in this embodiment of the utility model;

[0022] Figure 6 A top view of a mask metal strip stamping equipment provided in an embodiment of this utility model;

[0023] Figure 7 A front view of a mask metal strip stamping equipment provided in an embodiment of this utility model;

[0024] Figure 8 This is a three-dimensional structural diagram of the punching unit provided in an embodiment of the present utility model;

[0025] Figure 9 This is a three-dimensional structural diagram of the straightening unit provided in an embodiment of the present utility model;

[0026] Figure 10 This is a three-dimensional structural diagram of the walking unit provided in an embodiment of the present utility model.

[0027] In the picture:

[0028] 1. Worktable; 2. First positioning and locking unit; 201. First clamping cylinder; 202. First positioning cylinder; 203. First pressing block; 204. First positioning block; 3. Second positioning and locking unit; 301. Second clamping cylinder; 302. Second positioning cylinder; 303. Second pressing block; 304. Second positioning block; 4. Punching unit; 401. First motor; 402. Servo press; 403. First vertical module; 404. Second motor; 405. First horizontal module; 406. 407. Lower mold; 5. Upper mold; 6. Straightening unit; 501. Third motor; 502. Second vertical module; 503. Brake; 504. Pressure roller; 505. Thrust wheel; 506. Drive gear; 6. Walking unit; 601. Fourth motor; 602. Base plate; 603. Rack; 604. Walking gear; 605. Slider; 7. Support unit; 701. Support cylinder; 702. Support roller; 8. Horizontal drive module; 9. Slide rail; 10. Limit stop; 11. Photoelectric sensor. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0030] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. It should be noted that terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "front," and "rear," indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the present invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] The following is a detailed description of a mask metal strip stamping device provided by an embodiment of the present invention, with reference to the accompanying drawings.

[0033] Example:

[0034] Figure 1 This diagram illustrates a three-dimensional structure of a mask metal strip stamping device provided in an embodiment of the present invention. Figure 2 It shows Figure 1 Enlarged view of part A in the middle; Figure 3 It shows Figure 1 Enlarged view of part B in the middle section; Figure 4 It shows Figure 1 Enlarged view of part C in the middle; Figure 5 This invention provides a three-dimensional structural schematic diagram of a mask plate metal strip stamping device according to an embodiment of the present invention. Figure 6 A top view of the mask metal strip stamping equipment provided in an embodiment of the present invention is shown; Figure 7 This shows a front view of the mask metal strip stamping equipment provided in an embodiment of the present invention; Figure 8 A three-dimensional structural diagram of the punching unit provided in an embodiment of this utility model is shown; Figure 9 A three-dimensional structural diagram of the straightening unit provided in an embodiment of this utility model is shown; Figure 10 A three-dimensional structural diagram of the walking unit provided in an embodiment of this utility model is shown. Figures 1 to 10As shown in the figure, the present invention provides a photomask metal strip stamping equipment, the purpose of which is to achieve positioning and tensioning of metal strips during the stamping process, reduce warping deformation, and has a high degree of automation and good adaptability. The photomask metal strip stamping equipment provided in this embodiment includes: a worktable 1, a punching unit 4, a straightening unit 5, a traveling unit 6, and a support unit 7. The worktable 1 is provided with several liftable support units 7 for supporting and placing the metal strip. Several support units 7 are arranged in a row below the metal strip to support the metal strip and prevent it from sagging. The upper part of the support unit 7 is equipped with a support roller 701 to avoid scratching the metal strip. The worktable 1 is provided with a first positioning locking unit 2 and a second positioning locking unit 3 on both sides to fix the metal strip. The first positioning locking unit 2 and the second positioning locking unit 3 are respectively located at both ends of the metal strip and press the metal strip to maintain a certain tension, prevent the position of the metal strip from changing arbitrarily, avoid displacement of the metal strip during the punching process, and ensure the punching position. To ensure precision, the worktable 1 has two parallel slide rails 9 along its long side for linear motion of the traveling unit 6. The punching unit 4 and straightening unit 5 are mechanically fixed to the traveling unit 6 to achieve synchronized linear motion. The traveling unit 6 drives the punching unit 4 and straightening unit 5 to move linearly along the slide rails 9, facilitating continuous punching operations at multiple positions along the metal strip while maintaining necessary motion precision. The two straightening units 5 are located on the left and right sides of the punching unit 4. When the punching unit 4 is working, the straightening unit 5 applies a force away from the punching point to the metal strip on both sides of the punching point, thereby flattening the metal strip and counteracting the force concentrated towards the punching point when the punching unit 4 punches the metal strip. This reduces warping deformation around the punching point when the metal strip is punched. The straightening unit 5 includes two vertically distributed and counter-rotating pressure rollers 504 for flattening the metal strip. When the punching unit 4 punches the metal strip, the metal strip passes between the two pressure rollers 504, which clamp the metal strip. The punching unit 4 includes a lower die 406 and an upper die 407 for punching the metal strip between the pressure rollers 504. The upper die 407 moves up and down to punch the metal strip in the lower die 406. The center lines of the upper die 407 and the lower die 406 are on the same vertical line to ensure punching accuracy and avoid offset of the punching point.

[0035] In the mask metal strip stamping equipment provided in this embodiment of the utility model, the punching unit 4 further includes: a first motor 401, a servo press 402, a first vertical module 403, a second motor 404, and a first horizontal module 405. The servo press 402 is driven to connect to the upper die 407 to realize the up and down movement of the upper die 407 for punching the metal strip above the lower die 406. During punching, the lower die 406 is located below the metal strip, and the upper die 407 is located above the metal strip. Driven by the first motor 401, the servo press 402 can move up and down along the first vertical module 403, and simultaneously drive the upper die 407 to move up and down to facilitate punching the metal strip. The lower die 406 is fixed to the servo press 402 by a bending component, and moves up and down along the first vertical module 403 synchronously with the servo press 402 to adjust the height of the punching point. Driven by the second motor 404, the servo press 402 can move back and forth horizontally along the first horizontal module 405. The first horizontal module 405 is fixed on the walking unit 6. Using the first motor 401, the second motor 404, and the walking unit 6, the punching unit 4 can move in six directions: up, down, left, right, forward, and backward, which facilitates changing and adjusting the punching position on the metal strip.

[0036] In the mask metal strip stamping equipment provided in this embodiment of the utility model, the straightening unit 5 further includes: a third motor 501, a second vertical module 502, and a brake 503. Two vertically distributed pressure rollers 504 each have a drive gear 506 at one end. The rotation of one drive gear 506 drives the other drive gear 506 to rotate, synchronously causing the two pressure rollers 504 to rotate synchronously with their corresponding drive gears 506. The brake 503 is mechanically connected to one of the pressure rollers 504 (i.e., the pressure roller 504) via the drive gear 506. Figure 9 The lower pressure roller 504 is used to control its rotation angle. The metal strip is located between the upper and lower pressure rollers 504. The rotation angle of the pressure roller 504 is controlled by the brake 503, which can control the tension of the metal strip on both sides around the punching point and prevent warping deformation of the metal strip during punching. The other pressure roller 504 (that is... Figure 9The upper pressure roller (504) is driven by the third motor 501 to move up and down along the second vertical module 502 to press the metal strip. Since the metal strip is very thin, if the height of the metal strip changes slightly, it will be difficult to clamp the upper and lower surfaces of the metal strip if the height of the pressure roller 504 cannot be adjusted. By setting the second vertical module 502 and the third motor 501, the height of the pressure roller 504 is adjustable, allowing the pressure roller 504 to move more precisely to the height of the metal strip and clamp its surface. Preferably, the straightening unit 5 further includes: two guide rollers 505. Two guide rollers 505 are set on one side of the pressure roller 504 to limit the movement of the metal strip. The two guide rollers 505 are distributed on the left and right sides of the metal strip to limit its movement, preventing the metal strip from shifting during punching. Simultaneously, the rolling contact between the guide rollers 505 and the sides of the metal strip reduces friction and improves the moving effect.

[0037] In a mask metal strip stamping device provided in this embodiment of the utility model, the traveling unit 6 further includes: a fourth motor 601, a base plate 602, a rack 603, a traveling gear 604, and sliders 605. The rack 603 is mounted on the worktable 1 and parallel to the slide rail 9. The base plate 602 is mechanically connected to the slide rail 9 via several sliders 605 to enable the traveling unit 6 to move linearly along the slide rail 9, ensuring the motion accuracy and stability of the traveling unit 6, and also providing necessary support and sufficient load-bearing capacity. The fourth motor 601 is mechanically fixed to the base plate 602. The traveling gear 604 drives the fourth motor 601 and is connected to the rack 603 for transmission to drive the linear motion of the base plate 602. The fourth motor 601 drives the traveling gear 604 to rotate. The movement of the gear 604 on the rack 603 drives the base plate 602 and its components to move linearly synchronously, thereby further driving the punching unit 4 and the straightening unit 5 to move synchronously linearly along the slide rail 9.

[0038] In a mask metal strip stamping device provided in this embodiment of the invention, the support unit 7 further includes: a support cylinder 701 and a support roller 702. The support cylinder 701 is mechanically fixedly connected to the worktable 1. Several support units 7 are arranged side by side, preferably equidistant from each other. The support roller 702 is positioned above the support cylinder 701 and connected to it to enable vertical movement. The support roller 702 rises or falls under the synchronous action of multiple parallel support cylinders 701. When the support roller 702 rises, it contacts the lower surface of the metal strip, providing support. The surface of the support roller 702 is made of rubber, but other flexible materials can also be used. The rolling support roller 702 also reduces scratches on the metal strip and can adapt to the movement of the metal strip during the stamping process, ensuring the surface quality of the metal strip.

[0039] In a mask metal strip stamping device provided in this embodiment of the present invention, as a further design improvement, a horizontal drive module 8 parallel to the long side of the worktable 1 is also included. The horizontal drive module 8 is drivenly connected to the second positioning and locking unit 3 to realize the linear movement of the second positioning and locking unit 3 as a whole along the horizontal drive module 8. The second positioning and locking unit 3 includes: a second pressing cylinder 301, a second positioning cylinder 302, a second pressing block 303, and a second positioning block 304. The second positioning block 304 is connected to the second positioning cylinder 302, and the second pressing block 303 is connected to the second pressing cylinder 301 to realize the up and down movement of the second pressing block 303 and together with the second positioning block 304 to lock one end of the metal strip (which can be understood as...). Figure 6 (Right end of the metal strip). The second pressing cylinder 301 and the second positioning cylinder 302 work together. The second positioning cylinder 302 rises to apply an upward force to the metal strip, and the second pressing cylinder 301 falls to apply a downward force to the metal strip, thereby achieving the pressing of the metal strip by the second pressing block 303 and the second positioning block 304, thus fixing the metal strip. The second positioning locking unit 3 can move along the long side of the worktable 1 to accommodate the fixing of metal strips of different lengths. When the length of the metal strip changes, since several support units 7 are distributed equidistantly or unequally on the entire worktable 1, the second pressing block 303 of the second positioning locking unit 3 moves to the nearest support unit 7 side. When the support roller 701 rises under the action of the support cylinder 701 to abut the lower surface of the metal strip, the second pressing block 303 of the second positioning locking unit 3 and the second positioning block 304 of the second positioning cylinder 302 can clamp the metal strip to prevent the metal strip from shifting.

[0040] In the mask metal strip stamping equipment provided in this embodiment of the utility model, similarly, the first positioning and locking unit 2 includes: a first pressing cylinder 201, a first positioning cylinder 202, a first pressing block 203, and a first positioning block 204. The first positioning block 204 is connected to the first positioning cylinder 202, and the first pressing block 203 is connected to the first pressing cylinder 201 to realize the up and down movement of the first pressing block 203 and together with the first positioning block 204 to lock the other end of the metal strip (which can be understood as...). Figure 6 At the left end of the metal strip, the first clamping cylinder 201 and the first positioning cylinder 202 work together. The first positioning cylinder 202 rises to apply an upward force to the metal strip, while the first clamping cylinder 201 descends to apply a downward force to the metal strip. This achieves the clamping of the metal strip by the first pressing block 203 and the first positioning block 204, thereby fixing the metal strip. Here, both the first clamping cylinder 201 and the first positioning cylinder 202 are mechanically fixed on the worktable 1 to achieve the fixation of the cylinders.

[0041] In a mask metal strip stamping device provided in this embodiment of the utility model, as a further design improvement, it also includes: limiting blocks 10. Several limiting blocks 10 are arranged at both ends of the worktable 1 to limit the stroke of the traveling unit 6 and prevent the punching unit 4 and the straightening unit 5 from moving out of the working area. In this embodiment of the utility model, two limiting blocks 10 are respectively arranged on both sides of the traveling unit 6. Here, there is no specific limitation on the number of limiting blocks 10, as long as it can meet the user's needs.

[0042] In a mask metal strip stamping device provided in this embodiment of the utility model, as a further design improvement, it also includes at least one photoelectric sensor 11. The photoelectric sensor 11 is set on the worktable 1 to realize the position detection of the walking unit 6, so as to judge and correct the moving distance and position of the walking unit 6 in a timely manner, and further ensure the positioning accuracy of the punching point; preferably, the photoelectric sensor 11 is set between two slide rails 9 to facilitate the position detection of the walking unit 6.

[0043] It is worth noting that after punching is completed, the raised support roller 702 will descend under the drive of the support cylinder 701. The punching unit 4 and the straightening unit 5 move to the next punching point to straighten and punch the metal strip at the next punching point. At this time, the support roller 702 of the next punching point rises, and several support rollers 702 will descend to avoid collisions according to the moving position of the walking unit 6, so as to avoid motion interference and collisions, and improve safety and reliability.

[0044] Compared with the prior art, the mask plate metal strip stamping equipment provided in this utility model embodiment is reasonably designed. By setting the straightening unit 5 on both sides of the punching unit 4, the force concentrated towards the punching point when the punching unit 4 punches the metal strip is offset, reducing warping deformation. Several support units 7 can cooperate with the positioning and locking units at both ends of the metal strip to fix the metal strip, ensuring the positioning accuracy of the punching point. This utility model embodiment has a high degree of automation, good adaptability and versatility, can adapt to metal strips of various specifications, operates reliably, improves work efficiency, and meets the specific needs of users.

[0045] The following points need to be explained:

[0046] (1) Unless otherwise defined, the same reference numerals in the embodiments of this utility model and the accompanying drawings have the same meaning.

[0047] (2) The accompanying drawings of this utility model embodiment only involve the structure involved in this utility model embodiment. Other structures can refer to the general design.

[0048] (3) For clarity, some structures in the drawings used to describe embodiments of the present invention may be enlarged or reduced, that is, these drawings are not drawn to actual scale.

[0049] (4) Where there is no conflict, the embodiments of this utility model and the features in the embodiments can be combined with each other to obtain new embodiments.

[0050] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A photomask metal strip stamping equipment, characterized in that, include: The workbench (1), punching unit (4), straightening unit (5), walking unit (6), and support unit (7) are provided. The workbench (1) is provided with several liftable support units (7) for supporting and placing metal strips. The workbench (1) is provided with a first positioning locking unit (2) and a second positioning locking unit (3) on both sides for fixing the metal strips. The workbench (1) is provided with two parallel slide rails (9) on the long side for realizing the linear movement of the walking unit (6). The punching unit (4) and the straightening unit (5) are mechanically fixed on the walking unit (6) for realizing synchronous linear movement with the walking unit (6). The two straightening units (5) are provided on the left and right sides of the punching unit (4). The straightening unit (5) includes two vertically distributed and counter-rotating pressure rollers (504) for flattening the metal strips. The punching unit (4) includes a lower die (406) and an upper die (407) for punching the metal strips between the pressure rollers (504).

2. The photomask metal strip stamping equipment according to claim 1, characterized in that, The punching unit (4) further includes: a first motor (401), a servo press (402), a first vertical module (403), a second motor (404), and a first horizontal module (405). The servo press (402) is driven by the upper die (407) to realize the up-and-down movement of the upper die (407) for punching the metal strip above the lower die (406). The servo press (402) can move up and down along the first vertical module (403) under the drive of the first motor (401), and the servo press (402) can move back and forth horizontally along the first horizontal module (405) under the drive of the second motor (404).

3. The photomask metal strip stamping equipment according to claim 2, characterized in that, The straightening unit (5) further includes: a third motor (501), a second vertical module (502), and a brake (503). One end of each of the two vertically distributed pressure rollers (504) is provided with a drive gear (506). The brake (503) is mechanically connected to one of the pressure rollers (504) through the drive gear (506) to control its rotation angle. The other pressure roller (504) can move up and down along the second vertical module (502) under the drive of the third motor (501) to press the metal strip.

4. The photomask metal strip stamping equipment according to claim 3, characterized in that, The straightening unit (5) further includes: two guide wheels (505), which are arranged on one side of the pressure roller (504) to limit the metal strip.

5. The photomask metal strip stamping equipment according to claim 4, characterized in that, The walking unit (6) includes: a fourth motor (601), a base plate (602), a rack (603), a walking gear (604), and a slider (605). The rack (603) is set on the workbench (1) and parallel to the slide rail (9). The base plate (602) is mechanically connected to the slide rail (9) through several sliders (605) to realize the linear movement of the walking unit (6) along the slide rail (9). The fourth motor (601) is mechanically fixed on the base plate (602). The walking gear (604) drives the fourth motor (601) and is connected to the rack (603) for transmission to drive the linear movement of the base plate (602).

6. The photomask metal strip stamping equipment according to any one of claims 1-5, characterized in that, The support unit (7) includes a support cylinder (701) and a support roller (702). The support cylinder (701) is mechanically fixed to the worktable (1). The support roller (702) is located above the support cylinder (701) and connected to the support cylinder (701) to realize the up and down movement of the support roller (702).

7. The photomask metal strip stamping equipment according to claim 6, characterized in that, It also includes a horizontal drive module (8) parallel to the long side of the worktable (1), the horizontal drive module (8) being driven to the second positioning locking unit (3) to realize the linear motion of the second positioning locking unit (3); The second positioning and locking unit (3) includes: a second pressing cylinder (301), a second positioning cylinder (302), a second pressing block (303), and a second positioning block (304). The second positioning block (304) is connected to the second positioning cylinder (302), and the second pressing block (303) is connected to the second pressing cylinder (301) to realize the up and down movement of the second pressing block (303) and lock one end of the metal strip together with the second positioning block (304).

8. The photomask metal strip stamping equipment according to claim 6, characterized in that, The first positioning and locking unit (2) includes: a first pressing cylinder (201), a first positioning cylinder (202), a first pressing block (203), and a first positioning block (204). The first positioning block (204) is connected to the first positioning cylinder (202), and the first pressing block (203) is connected to the first pressing cylinder (201) to realize the up and down movement of the first pressing block (203) and lock the other end of the metal strip together with the first positioning block (204). The first pressing cylinder (201) and the first positioning cylinder (202) are both mechanically fixed on the worktable (1).

9. The photomask metal strip stamping equipment according to claim 1, characterized in that, Also includes: Limiting blocks (10): Several limiting blocks (10) are set at both ends of the workbench (1) to limit the travel of the walking unit (6).

10. The photomask metal strip stamping equipment according to claim 1, characterized in that, Also includes: At least one photoelectric sensor (11) is provided on the workbench (1) for position detection of the walking unit (6).

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