A micro-hole processing tool for the semiconductor industry

Abstract

The utility model discloses a semiconductor industry micro -hole processing tool, including the drill handle and the drill bit, the drill bit sets up in the drill handle end, the drill bit is equipped with the drill tip far from the drill handle one end, the drill tip is M type, the drill bit outer periphery is equipped with two cutting edges, is equipped with the chip groove between two cutting edges, the chip groove is variable helix shape, the cutting edge includes the periphery and the blade zone, the periphery is located the both sides of the drill bit towards the drill tip one end, the blade zone is located the both sides of the drill bit towards the drill handle one end, the semiconductor industry micro -hole processing tool of the utility model adopts the chip groove of variable helix shape, can form the roll cutting in time when cutting, and the aluminium chip is discharged rapidly through, and the chip removal is smooth, and cooperate M shape drill tip, has improved the sharpness of drill tip, has restrained the export burr.

Description

Technical Field

[0001] This utility model relates to drilling technology, specifically a tool for machining micro-holes in the semiconductor industry. Background Technology

[0002] The rapid development of the semiconductor industry has posed unprecedented challenges to precision manufacturing tools. The development of micro-carbide drilling tools has emerged precisely to meet the needs of chip manufacturing, packaging and testing for micron-level or even nanon-level precision machining. However, conventional micro-alloy drills produce poor hole wall quality, burrs at the hole opening, and difficulty in chip removal when drilling N-type non-ferrous metal materials, resulting in poor drilling accuracy and hole wall surface quality. Therefore, there is an urgent need to develop a micro-hole alloy drill bit. Utility Model Content

[0003] To address the shortcomings of the existing technology, this utility model provides a micro-hole machining tool for the semiconductor industry, which features smooth chip removal, high drilling accuracy, and good hole wall surface quality.

[0004] To achieve the above technical objectives, the present invention adopts the following technical solution: a micro-hole machining tool for the semiconductor industry, comprising a drill shank and a drill bit, wherein the drill bit is disposed at the end of the drill shank, and a drill tip is provided at the end of the drill bit away from the drill shank, the drill tip being M-shaped, and two cutting edges are provided on the outer periphery of the drill bit, with a chip removal groove provided between the two cutting edges, the chip removal groove being a variable helical shape, the cutting edge comprising a peripheral edge and a cutting edge band, the peripheral edge being located on both sides of the end of the drill bit facing the drill tip, and the cutting edge band being located on both sides of the end of the drill bit facing the drill shank.

[0005] Preferably, the helix angle of the chip removal groove towards the drill tip is 22 degrees, and the helix angle of the chip removal groove relative to the drill tip is 15 degrees.

[0006] Preferably, the center apex angle of the drill tip is 90 degrees, and the included angle between the two sidewalls of the drill tip is 170 degrees.

[0007] Preferably, the width of the cutting edge is 2% of the drill bit diameter.

[0008] Preferably, the core diameter of the drill bit gradually increases from the drill tip to the drill shank.

[0009] Preferably, the drill bit is tapered at the tip end.

[0010] In summary, this utility model achieves the following technical effects: This utility model relates to a micro-hole machining tool for the semiconductor industry. It adopts a variable spiral chip groove, which can form a curl in time during cutting to quickly discharge aluminum chips. The chip discharge is smooth, and the combination with the M-shaped drill tip improves the sharpness of the drill tip and suppresses exit burrs. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of the semiconductor industry micro-hole machining tool of this utility model; Figure 2 This is a schematic diagram of the drill bit structure of the semiconductor industry micro-hole machining tool of this utility model; Figure 3 This is a schematic diagram of the drill bit structure of the semiconductor industry micro-hole machining tool of this utility model; The following are the markings on the attached diagrams in the instruction manual: 1. Drill shank; 2. Chip groove; 3. Drill tip; 4. Chisel edge; 5. Circumferential edge; 6. Cutting edge. Detailed Implementation

[0012] The present invention will be further described in detail below with reference to the accompanying drawings.

[0013] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

[0014] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0015] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0016] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0017] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0018] Example 1: like Figure 1-3 As shown, a micro-hole machining tool for the semiconductor industry includes a drill shank 1 and a drill bit. The drill bit is disposed at the end of the drill shank 1. The drill bit has a drill tip 3 at the end away from the drill shank 1. The drill tip 3 is M-shaped. The outer periphery of the drill bit has two cutting edges. A chip removal groove 2 is provided between the two cutting edges. The chip removal groove 2 is a variable spiral shape. The cutting edge includes a peripheral edge 5 and a cutting edge 6. The peripheral edge 5 is located on both sides of the end of the drill bit facing the drill tip 3. The cutting edge 6 is located on both sides of the end of the drill bit facing the drill shank 1.

[0019] The semiconductor industry micro-hole machining tool of this embodiment adopts a variable spiral chip groove 2, which can form a curl in time during cutting and quickly discharge aluminum chips. The chip discharge is smooth, and the M-shaped drill tip 3 is combined with it to improve the sharpness of the drill tip 3 and suppress exit burrs.

[0020] The helix angle of the chip removal groove 2 towards the drill tip 3 is 22 degrees, and the helix angle of the chip removal groove 2 relative to the drill tip 3 is 15 degrees.

[0021] The center apex angle of the drill tip 3 is 90 degrees, which provides good centering and penetration. The included angle between the two sidewalls of the drill tip 3 is 170 degrees, thus forming an M-shaped sharp drill tip 3, which improves the sharpness of the drill tip 3 and suppresses the generation of exit burrs.

[0022] The width of the cutting edge 6 is 2% of the drill bit diameter; the narrowing design of the cutting edge 6 effectively reduces friction and cutting force, and significantly reduces the radial force on the hole wall, thereby improving the surface quality of the hole wall and controlling the formation of exit burrs.

[0023] The core diameter of the drill bit gradually increases from the drill tip 3 to the drill shank 1; this setting can ensure that the front section has a large enough chip space and the rear section has high rigidity, which can ensure smooth chip removal and a certain high rigidity requirement.

[0024] The drill bit is cone-shaped at the end facing the drill tip 3.

[0025] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall fall within the scope of the technical solution of the present utility model.

Claims

1. A micro-hole machining tool for the semiconductor industry, characterized in that, The drill bit includes a drill shank and a drill bit. The drill bit is located at the end of the drill shank. The drill bit has a drill tip at the end away from the drill shank. The drill tip is M-shaped. The drill bit has two cutting edges on its outer periphery. A chip removal groove is provided between the two cutting edges. The chip removal groove is a variable helical shape. The cutting edges include peripheral edges and cutting edges. The peripheral edges are located on both sides of the end of the drill bit facing the drill tip. The cutting edges are located on both sides of the end of the drill bit facing the drill shank.

2. The semiconductor industry micro-hole machining tool according to claim 1, characterized in that, The helix angle of the chip removal groove towards the drill tip is 22 degrees, and the helix angle of the chip removal groove relative to the drill tip is 15 degrees.

3. A micro-hole machining tool for the semiconductor industry according to claim 1, characterized in that, The center apex angle of the drill tip is 90 degrees, and the included angle between the two sidewalls of the drill tip is 170 degrees.

4. A micro-hole machining tool for the semiconductor industry according to claim 1, characterized in that, The width of the cutting edge is 2% of the drill bit diameter.

5. A micro-hole machining tool for the semiconductor industry according to claim 1, characterized in that, The core diameter of the drill bit gradually increases from the drill tip to the drill shank.

6. A micro-hole machining tool for the semiconductor industry according to claim 1, characterized in that, The drill bit is cone-shaped at the tip.

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