Positioning jig compatible with different sizes of photomask

Abstract

The utility model discloses a kind of positioning fixture compatible with different size photomask, it is related to photomask technical field.The utility model includes base, first support component and second support component, the first support component and second support component are respectively arranged in base, the first support component is fixedly connected with base, the second support component is movably connected with base, for preventing the use of second support component to first support component Form interference.The utility model is respectively provided with first support component and second support component, first support component and second support component are respectively used to fix different size photomask, and second support component is movable, can avoid when first support component fixed photomask to second support component Form interference.

Description

Technical Field

[0001] This utility model relates to the field of photomask technology, specifically providing a positioning fixture compatible with photomasks of different sizes. Background Technology

[0002] To ensure the accuracy of the photomask, CD (Critical Dimension) measurement is required after photomask production. CD measurement refers to the measurement of the photomask's critical dimensions. Its core is to accurately measure the key geometric dimensions of the pattern on the photomask to ensure it meets design requirements and guarantees the accuracy of the photolithography process. During CD measurement, a specific positioning fixture is used to fix the photomask. First, the positioning fixture, which is compatible with the photomask's dimensions, is placed under a microscope. Then, the positioning fixture is leveled. After leveling, the photomask is placed on and fixed in the positioning fixture. Finally, the critical dimensions of the photomask can be measured using a microscope.

[0003] Different sizes of photomasks require different positioning fixtures, and different positioning fixtures can meet different measurement needs. When changing positioning fixtures, the fixtures are prone to collision with the worktable on which they are placed, resulting in wear and tear. The positioning fixtures need to be replaced frequently, and their service life is reduced rapidly. Utility Model Content

[0004] This invention provides a positioning fixture compatible with photomasks of different sizes, which solves the problem that the positioning fixture needs to be replaced when performing CD measurements on different photomasks, resulting in frequent collisions and wear between the positioning fixture and the worktable, and thus a rapid decrease in the service life of the positioning fixture.

[0005] The technical solution of this utility model is as follows:

[0006] A positioning fixture compatible with photomasks of different sizes includes a base, a first support component, and a second support component. The first and second support components are respectively disposed on the base. The first support component is fixedly connected to the base, while the second support component is movably connected to the base to prevent interference between the second and second support components. In this design, the first and second support components allow for the fixation of photomasks of different sizes by using the first support component to fix one type of photomask and the second support component to fix another. Different photomasks not only differ in length and width but also in thickness. Generally, larger photomasks have larger thicknesses. To avoid interference between the second support component used for smaller photomasks and the placement of larger photomasks, the second support component is movably disposed on the base. When not in use, the second support component can be moved to another position to avoid interference. The first and second support components can support and fix photomasks of different sizes, reducing the frequency of fixture replacement and minimizing wear.

[0007] When fixing a photomask with a positioning fixture, the photomask is typically supported and fixed from three positions. To address the structural complexity caused by the three movable support positions of the second support assembly, the second support assembly includes a second fixed support and a second movable support. The second movable support is movably mounted on the base, and the second fixed support is located outside the photomask position corresponding to the first support assembly. In this solution, a second fixed support can be provided outside the photomask range corresponding to the first support assembly, thereby reducing the number of second movable supports and lowering the structural complexity.

[0008] Preferably, the second movable support is rotatably connected to the base. When in use, the second movable support is in a supporting position; when not in use, it is in a stored position. The second movable support can rotate between the supporting and stored positions. In this design, the rotatable connection allows the rotatable connection structure of the second movable support to be located away from the first support assembly and its corresponding photomask, facilitating the installation of the second movable support.

[0009] To address the issue of the second support component obstructing the use and placement of the photomask, the base is provided with a receiving groove for accommodating the second movable support member. In this design, the receiving groove can be used for the second support member; when the second support member is located within the receiving groove, it will not occupy space on the side of the photomask and will not obstruct the removal and placement of the photomask.

[0010] To address the cumbersome manual operation of the second movable support component, the positioning fixture also includes a drive motor. This drive motor is connected to the second movable support component and is used to move the second movable support component. In this solution, driving the second movable support component with a drive motor improves its movement efficiency.

[0011] Preferably, the positioning fixture includes two second movable supports, each of which is provided with a second corner support.

[0012] Preferably, the first support component includes a first side support portion and two first corner support portions, wherein the first side support portion is used to support the side of the photomask, and the first corner support portion is used to support the corner of the photomask.

[0013] To address the issue of the inconvenience in arranging the second and first support components, the second support component includes a second fixed support portion, which, along with the first side support portion, is located on either side of the line connecting the two first corner support portions. In this design, by positioning the second fixed support portion of the second support component and the first side support portion of the first support component on either side of the line connecting the two first corner support portions, the second fixed support portion can support one side of the photomask without obstructing the operation of the first side support portion.

[0014] Because different sized photomasks have different thicknesses, and the height of their top surfaces varies after placement, requiring refocusing of the microscope and posing a complexity, the first and second support components are each equipped with a support surface for supporting the bottom of the photomask. The support surfaces of the first and second support components have a height difference, which is equal to the thickness difference of the corresponding photomask. This height difference ensures that the top surfaces of the placed photomasks are aligned. In this solution, by setting a height difference between the support surfaces of the first and second support components, the top surfaces of photomasks of different sizes can be aligned. When placing different photomasks, refocusing of the microscope is unnecessary, making the operation faster and simpler.

[0015] After the photomask is placed on the first or second support assembly, it needs to be further secured. However, mechanical clamping can lead to low operational efficiency. Therefore, both the first and second support assemblies are equipped with negative pressure holes. In this solution, the photomask is adsorbed through these negative pressure holes. Simply placing the photomask on the first or second support assembly eliminates the need for additional steps, thus improving the photomask's securing efficiency.

[0016] The beneficial effects of this utility model are:

[0017] This utility model is provided with a first support component and a second support component. The first support component and the second support component are used to fix photomasks of different sizes, and the second support component is movable, which can avoid interference with the second support component when the photomask is fixed by the first support component. Attached Figure Description

[0018] To more clearly illustrate the technical solution of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of Embodiment 1;

[0020] Figure 2 for Figure 1 Top view;

[0021] Figure 3 This is a top view of the second movable support member in the supported position in Embodiment 2;

[0022] Figure 4 This is a top view of the second movable support in the stowed position in Embodiment 2.

[0023] In the above figures, the corresponding reference numerals are as follows:

[0024] 1. Base; 4. Negative pressure hole; 5. Positioning hole; 6. Receiving groove; 7. Ventilation hole; 21. First side support; 22. First corner support; 31. Second fixed support; 32. Second movable support; 33. Second corner support; 34. Sliding hole. Detailed Implementation

[0025] The technical solution of this utility model will be clearly and completely described in conjunction with the accompanying drawings and through specific embodiments.

[0026] Example 1:

[0027] like Figure 1 As shown, this embodiment provides a positioning fixture compatible with photomasks of different sizes, applicable to photomasks with a rectangular shape in top view. It includes a base 1, a first support component and a second support component. The base 1 has a through hole or groove in the middle. The first support component and the second support component are disposed on the side wall or opening of the through hole or groove. When the photomask is placed on the first support component or the second support component, the photomask is located on the upper side of the through hole or groove.

[0028] The first support assembly includes a first side support 21 for constraining the side of the photomask. The first side support 21 is a block structure with a step. The first side support 21 is connected to the side of the through hole or slot, and the step is located on the side facing the center of the through hole. The step has a horizontal plane and a vertical plane. The horizontal plane of the step serves as a support surface that is in contact with the bottom surface of the photomask, supporting the photomask from the bottom, while the vertical plane of the step is in contact with the side of the photomask, constraining the position of the photomask from the horizontal direction.

[0029] The first support assembly also includes two first corner support portions 22, each being a triangular notch formed on the side of the through hole, with the top of the notch penetrating the base 1, allowing the corner of the photomask to be inserted from the top of the notch. The triangular notch has two vertical surfaces and one horizontal surface. The two vertical surfaces are respectively attached to the two sides of the corner of the photomask, used to constrain the position of the photomask in the horizontal direction, while the horizontal surface of the triangular notch is used to support the photomask from the bottom.

[0030] The two first corner support portions 22 are respectively used to connect with two adjacent corners of the photomask. That is, the two first corner support portions 22 will simultaneously form a horizontal constraint on the same side of the photomask, while the first side support portion 21 is used to form a constraint on the side of the photomask located on the opposite side.

[0031] Negative pressure holes 4 are respectively provided on the horizontal surfaces of the first side support 21 and the first corner support 22. The negative pressure holes 4 are vent holes 7 formed on the base 1. A connector is provided at the other end of the vent hole 7, which can be connected to a pipe, allowing connection to negative pressure equipment such as a vacuum pump. After the photomask is placed, the negative pressure holes 4 create negative pressure to achieve adsorption and fixation of the photomask. The connector and the vent hole 7 can be connected by threads.

[0032] like Figure 2 As shown, the through hole is a hexagonal hole, which is a combination of a rectangle and a trapezoid. The longer side of the parallel side of the trapezoid is the same length as one side of the rectangle, and the longer side of the parallel side of the trapezoid coincides with the corresponding side of the rectangle, thus forming the hexagonal hole of this application. From a top view, the base 1 is a rectangular plate with a hole in the center. The four sides of the hexagonal hole are parallel to the four sides of the base 1, and two sides of the hexagonal hole are inclined relative to any side of the base 1. Two first corner supports 22 are provided on the inclined sides of the hexagonal hole. This arrangement allows for a gap between the photomask and at least three sides of the hexagonal hole after the photomask is fixed. When placing or removing the photomask, a tool can be inserted into the gap between the photomask and the side of the hole, and then the tool can be extended to the underside of the photomask to remove the photomask, facilitating the placement and removal of the photomask.

[0033] The second support assembly includes a fixedly mounted second fixed support portion 31, located on one side between the two inclined sides of the hexagonal hole. The structure of the second fixed support portion 31 is similar in shape to the first side support portion 21, both being adjustable block structures. The second fixed support portion 31 connects to the side of the through hole, with a step located near the center of the through hole. The step has a horizontal surface and a vertical surface. The horizontal surface serves as a support surface for contacting and supporting the bottom surface of the photomask, while the vertical surface fits against the side of the photomask to constrain its position horizontally. When the first support assembly holds the photomask, the second fixed support portion 31 is located on one side of the photomask, not below it, thus avoiding interference with the placement of the photomask.

[0034] The second support assembly also includes two movable second support members 32. The second movable support members 32 are located on the sides of the two inclined sides respectively. The second movable support member 32 is a long, block-shaped structure. One end of the second movable support member 32 is rotatably connected to the base 1, and a second corner support 33 is provided at the corner of the other end of the second movable support member 32. A receiving groove 6 is provided on the side of the through hole. The second movable support member 32 can rotate into the receiving groove 6. At this time, the second movable support member 32 is in a retracted position. When the second movable support member 32 rotates into the receiving groove 6, it will not obstruct the tool for picking up or placing the photomask; that is, the second movable support member 32 will not be located in the gap between the photomask and the side of the through hole. A rotating shaft is provided at one end of the second movable support member 32, and the base 1 is provided with a positioning hole 5 that matches the rotating shaft. The rotating shaft and the positioning hole 5 are rotatably connected. The second corner support 33 includes two vertical surfaces and one horizontal surface. The two vertical surfaces are perpendicular to each other and are used to abut against the two sides of the photomask at the corner. The horizontal surface acts as a support surface to support the photomask from the bottom. The second corner support 33 is located at the end of the second movable support 32 away from the pivot axis. The second movable support 32 can rotate towards the center of the through hole. When the end of the second movable support 32 with the second corner support 33 rotates to the center of the through hole, and one vertical surface of the second corner support 33 is parallel to the vertical surface of the step of the second fixed support 31, the second movable support 32 is in the support position. At this time, when the photomask is placed on the second support assembly, the two vertical surfaces of the second corner support 33 will abut against the sides of the photomask.

[0035] The second fixed support part 31 and the second corner support part 33 are both provided with negative pressure holes 4. The negative pressure holes 4 are connected to the ventilation holes 7 constructed inside the base 1, and the photomask can be fixed by negative pressure adsorption.

[0036] As an optional implementation, a drive motor can be installed on the base 1. The drive motor can be a stepper motor or a servo motor, which facilitates precise control of the rotation angle of the drive motor, thereby precisely controlling the rotation angle of the second movable support 32, so that the second corner support 33 of the second movable support 32 can rotate to the accurate position. The drive motor is fixedly connected to the base 1, and the output shaft of the drive motor is connected to the rotating shaft of the second movable support 32. The connection between the output shaft and the rotating shaft can be achieved by key connection, interference fit, or adhesive bonding.

[0037] The drive electrode is equipped with a controller, which can be a microcontroller or a PLC, to control the rotation of the drive motor so that the second movable support 32 can rotate between the support position and the storage position.

[0038] It should be noted that there is a height difference between the support surfaces of the first and second support components relative to the top surface of the base 1. This height difference is the same as the thickness difference of the corresponding photomasks. For example, the first support component holds a 6" photomask with dimensions of 152mm × 152mm and a thickness of 6.35mm; the second support component holds a 5" photomask with dimensions of 127mm × 127mm and a thickness of 2.29mm. The thickness difference between the two sizes of photomasks is 4.06mm. Therefore, the height difference between the support surfaces of the first and second support components is 4.06mm. Using the bottom or top surface of the base 1 as a reference, the support surface of the second support component is higher than that of the first support component. In this case, when the 6" photomask is placed on the first support component and the 5" photomask is placed on the second support component, the top surfaces of the two photomasks are flush, meaning they are at the same height. This eliminates the need to adjust the microscope's focal length when placing photomasks of different sizes, reducing operational complexity.

[0039] Example 2:

[0040] This second embodiment provides a positioning fixture compatible with photomasks of different sizes. Unlike the first embodiment, the second movable support 32 is installed in a different way in this second embodiment.

[0041] like Figure 3 As shown, the second movable support 32 can be slidably connected to the base 1. For example, a sliding hole 34 is provided on the side of the through hole, and the second movable support 32 is slidably disposed in the sliding hole 34. The second corner support 33 is disposed at one end of the second movable support 32 near the center of the through hole. When needed, the second movable support 32 can be pulled out from the sliding hole 34; when not needed, the second movable support 32 can be inserted into the sliding hole 34. The second movable support 32 is a long rectangular block, while the sliding hole 34 is a square hole, giving the second movable support 32 only the freedom to slide along the axial direction.

[0042] like Figure 4 As shown, in this second embodiment, there needs to be sufficient length between the side of the through hole and the outer side of the base 1; otherwise, the sliding hole 34 would need to be a through hole penetrating the side of the base 1, and during use, one end of the second movable support 32 would slide outside the base 1. Therefore, this second embodiment has greater requirements for the length and width dimensions of the base 1, and the more preferred implementation is the first embodiment.

Claims

1. A positioning fixture compatible with photomasks of different sizes, characterized in that, It includes a base (1), a first support component, and a second support component, wherein the first support component and the second support component are respectively disposed on the base (1). The first support component is fixedly connected to the base (1). The second support component is movably connected to the base (1) to prevent the use of the first support component from being interfered with by the second support component.

2. The positioning fixture compatible with photomasks of different sizes according to claim 1, characterized in that, The second support assembly includes a second fixed support part (31) and a second movable support member (32). The second movable support member (32) is movably disposed on the base (1), and the second fixed support part (31) is located outside the photomask position corresponding to the first support assembly.

3. A positioning fixture compatible with photomasks of different sizes according to claim 2, characterized in that, The second movable support (32) is rotatably connected to the base (1). When in use, the second movable support (32) is in the supporting position. When not in use, the second movable support (32) is in the storage position. The second movable support (32) rotates between the supporting position and the storage position.

4. A positioning fixture compatible with photomasks of different sizes according to claim 3, characterized in that, The base (1) is provided with a receiving groove (6) for accommodating the second movable support (32).

5. A positioning fixture compatible with photomasks of different sizes according to claim 2, characterized in that, It also includes a drive motor, which is connected to the second movable support (32) for driving the second movable support (32) to move.

6. A positioning fixture compatible with photomasks of different sizes according to claim 2, characterized in that, It includes two second movable support members (32), and the second movable support members (32) are provided with second corner support parts (33).

7. A positioning fixture compatible with photomasks of different sizes according to claim 1, characterized in that, The first support component includes a first side support (21) and two first corner support (22). The first side support (21) is used to support the side of the photomask, and the first corner support (22) is used to support the corner of the photomask.

8. A positioning fixture compatible with photomasks of different sizes according to claim 7, characterized in that, The second support component includes a second fixed support part (31), which and the first side support part (21) are located on both sides of the line connecting the two first corner support parts (22).

9. A positioning fixture compatible with photomasks of different sizes according to claim 1, characterized in that, The first support component and the second support component are respectively provided with support surfaces for supporting the bottom surface of the photomask. The support surfaces of the first support component and the second support component have a height difference, which is the same as the thickness difference of the corresponding photomask. The height difference makes the top surface of the photomask flush after placement.

10. A positioning fixture compatible with photomasks of different sizes according to claim 1, characterized in that, The first support component and the second support component are respectively provided with negative pressure holes (4).

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