Fixing device, electric spindle device, roller shaft device and silicon rod slicing machine

Abstract

The application provides a fixing device, an electric spindle device, a roller shaft device and a silicon rod slicing machine, and relates to the technical field of slicing equipment. The fixing device comprises a rotating part, a shell assembly, a pull rod, an elastic assembly and a driving assembly; the rotating part is rotatably installed in the shell assembly; the first end of the rotating part can be inserted into a slot on the end of the roller shaft, and the first end of the rotating part and the slot are taper-fitted; the pull rod is arranged in the channel of the rotating part, and the first end of the pull rod is used for being threadedly connected with the roller shaft; the elastic assembly is abutted between the second end of the rotating part and the second end of the pull rod; when the driving assembly moves towards the elastic assembly, the elastic assembly is compressed and stores energy; when the driving assembly moves away from the elastic assembly, the elastic assembly releases energy. The fixing device uses the energy releasing process of the elastic assembly to pull the pull rod in the direction away from the roller shaft, so that the connecting force between the pull rod and the roller shaft is improved, and the taper fitting between the rotating part and the roller shaft effectively ensures the coaxiality between the roller shaft and the rotating part.

Description

Technical Field

[0001] This application relates to the field of slicing equipment technology, and in particular to a fixing device, an electric spindle device, a roller device, and a silicon rod slicing machine. Background Technology

[0002] A slicing machine is a machine used to slice silicon rods into silicon wafers. It typically includes a pair of parallel rollers and multiple cutting lines wound around the two rollers. The rollers rotate to move the cutting lines left and right. When the silicon rod is pressed down to the cutting lines, it can be cut.

[0003] To adapt to the ever-improving silicon wafer slicing process, the dicing lines in slicing machines are becoming increasingly finer. To accommodate these finer lines and prevent breakage due to vibration, existing slicing machines typically reduce the diameter of the rollers and the distance between them, thereby decreasing the width of the dicing line across the rollers. However, reducing the roller diameter and the distance between the rollers can lead to the dicing line easily cutting into the rollers and reduce the oscillation speed of the dicing line. To address these issues, patent CN107097362B discloses a wafer slicing machine that adds a pair of parallel auxiliary rollers between the two main rollers and limits the highest position of the auxiliary rollers to no less than the highest position of the main rollers. This allows the auxiliary rollers to support the dicing line, thereby reducing the width of the dicing line.

[0004] However, in patent CN107097362B, the end of the auxiliary roller is directly mounted on the bracket via a bearing sleeved on its outer side. This results in insufficient installation precision between the auxiliary roller and the bearing on the bracket, making it difficult to guarantee the coaxiality between the auxiliary roller shaft and the bearing. When the auxiliary roller is in a state of ultra-high-speed rotation, it is prone to significant centrifugal inertial force due to mass eccentricity. This centrifugal force increases nonlinearly with the square of the rotational speed. This not only causes severe forced vibration of the shaft system of the auxiliary roller, resulting in a sharp increase in amplitude, but also forms a periodic alternating load on the support structure (such as bearings and bearing seats) at the end of the auxiliary roller. This causes the support structure to fail prematurely due to fatigue accumulation, resulting in situations such as bearing raceway peeling, loosening or even breakage of bearing seat bolts. In severe cases, it may cause imbalance and instability of the auxiliary roller shaft system, causing the entire machine to malfunction. Utility Model Content

[0005] The purpose of this application is to provide a fixing device, an electric spindle device, a roller device, and a silicon rod slicing machine to alleviate the technical problems existing in the prior art where the end of the auxiliary roller in the slicing machine is directly sleeved inside the bearing on the bracket. This causes the coaxiality between the end of the auxiliary roller and the bearing to be difficult to guarantee due to insufficient installation accuracy. When the auxiliary roller is in a state of ultra-high speed rotation, the mass eccentricity will cause significant centrifugal inertial force, which will not only cause severe forced vibration of the shaft system of the auxiliary roller, but also cause premature failure of the support structure at the end of the auxiliary roller due to fatigue accumulation. In severe cases, it may cause the shaft system of the auxiliary roller to become unbalanced and unstable, resulting in the failure of the entire machine.

[0006] In a first aspect, this application provides a fixing device for fixing a roller on a silicon rod slicing machine, the roller having a diameter of 70-120 mm; The fixing device includes a rotating component, a housing assembly, a tie rod, an elastic component, and a drive assembly; The rotating component includes a first end and a second end. The rotating component is rotatably mounted in the housing assembly via a bearing. The rotating component has a hollow channel that extends from the first end to the second end of the rotating component, and the central axis of the channel coincides with the central axis of the rotating component. The first end of the rotating component extends out of the housing assembly and can be inserted into the slot on the end of the roller. The outer peripheral wall of the first end of the rotating component and the inner peripheral wall of the slot are both conical surfaces to make the rotating component and the slot taper-fitted. The pull rod includes a first end and a second end. The pull rod passes through the channel and both the first end and the second end of the pull rod extend out of the channel. The first end of the pull rod has an external thread on its body, which is used to connect with the roller thread. The elastic component abuts between the second end of the rotating part and the second end of the pull rod. The output end of the drive component is correspondingly set with the elastic component. When the drive component moves toward the elastic component, the elastic component compresses and stores energy. When the drive component moves away from the elastic component, the elastic component releases energy to provide a pulling force to the pull rod in the direction away from the roller shaft.

[0007] The rotating component in the fixing device provided in this application can be a shaft or a drive shaft for driving the roller shaft to rotate, etc. When using the fixing device provided in this application to connect and fix the roller shaft, firstly, the first end of the rotating component is aligned with the slot position on the end of the roller shaft, and the first end of the pull rod is aligned with the threaded hole position on the roller shaft. Then, the drive assembly is activated, causing the output end of the drive assembly to move towards the elastic component and compress the elastic component. It should be noted that during the compression and energy storage process of the elastic component, the pull rod remains stationary. Therefore, a gap gradually forms between the compressed elastic component and the second end of the pull rod, providing travel space for the threaded connection between the pull rod and the roller shaft. After the elastic component is compressed and energy stored, rotational power is applied to the second end of the pull rod to drive the pull rod to rotate, thereby causing the first end of the pull rod to be threadedly connected to the end of the roller shaft. After the threaded connection is completed, the output end of the drive component moves away from the elastic component. At this time, the elastic component releases energy and provides a pulling force to the tie rod in the direction away from the roller shaft, thereby tightening and fixing the roller shaft with the tie rod, effectively improving the connection force between the tie rod and the roller shaft. Combined with the tapered fit between the rotating part and the roller shaft, the coaxiality between the roller shaft and the rotating part is effectively guaranteed, preventing the rotating part from failing due to fatigue accumulation or causing the roller shaft system to become unbalanced and unstable during rotation.

[0008] In an optional embodiment, the second end of the pull rod has an annular abutment protrusion on its shaft; the elastic component abuts between the second end of the rotating member and the abutment protrusion.

[0009] The abutment protrusion not only increases the contact area between the elastic component and the pull rod, but also limits the elastic component, effectively improving the abutment stability between the elastic component and the pull rod.

[0010] In an optional embodiment, the second end of the lever extends outside the housing assembly and has a polygonal head located on the side of the abutment protrusion away from the elastic component, for use with an external tool to rotate the lever.

[0011] When using external tools such as wrenches to drive the pull rod to rotate so that the first end of the pull rod is threadedly connected to the end of the roller shaft, the polygonal head can provide a stable force application point for the external tools, making it easier for the external tools to drive the pull rod to rotate, thereby improving the ease of operation of the pull rod rotation process.

[0012] In an optional embodiment, the elastic component includes a first pressure plate, a second pressure plate, and a disc spring. The first pressure plate is disposed against the second end of the rotating member, the second pressure plate is disposed close to the abutment protrusion, and the disc spring abuts between the first pressure plate and the second pressure plate. When the drive assembly moves toward the second pressure plate, the second pressure plate moves toward the first pressure plate along the axial direction of the pull rod, so as to compress and store energy in the disc spring. When the drive assembly moves away from the second pressure plate, the disc spring releases energy, pushing the second pressure plate away from the first pressure plate along the axial direction of the pull rod, so as to provide a pulling force to the pull rod in a direction away from the roller shaft.

[0013] The first pressure plate is used to increase the contact area and contact stability between the disc spring and the rotating component. The second pressure plate is used to increase the contact area and contact stability between the disc spring and the contact protrusion. The cooperation between the first and second pressure plates can not only further improve the contact stability between the second end of the rotating component and the second end of the pull rod, but also effectively improve the stability of the disc spring during the extension and retraction process, thereby effectively improving the performance of the elastic component.

[0014] In an optional embodiment, the drive assembly includes a drive rod that is movable along the pull rod axis, the drive rod being tubular and disposed corresponding to the second pressure plate.

[0015] The drive rod can compress the disc spring via the second pressure plate when the drive assembly moves toward the elastic component, thus stabilizing and storing energy in the disc spring. Furthermore, when the drive rod is tubular, it can be sleeved around the outside of the second end of the pull rod. This improves the stability of the drive assembly's movement toward the elastic component while utilizing the internal space of the drive rod to make room for the second end of the pull rod, effectively optimizing the spatial layout of the drive assembly and the pull rod.

[0016] In an optional embodiment, the drive assembly further includes an end cap that covers the end opening of the drive rod away from the abutment protrusion.

[0017] The end cap is used to close the end opening of the drive rod away from the abutment protrusion to protect the second end of the pull rod. When it is necessary to rotate the second end of the pull rod, the end cap can be removed to reopen the end opening of the drive rod away from the abutment protrusion.

[0018] In an optional embodiment, the housing assembly includes a front cover, a middle tube, a rear cover, and a support cylinder; Both the front and rear covers are annular. The front and rear covers are fixed to the two ends of the middle tube respectively. The opening of the support cylinder is fixed to the side of the rear cover away from the middle tube. The front cover, the middle tube, the rear cover and the support cylinder are connected in sequence to form a rotation space. The rotating parts are rotatably installed in the rotation space. The drive assembly is mounted on the outer wall of the support cylinder, away from the rear end cover.

[0019] When the housing assembly includes a front cover, a middle tube, a rear cover, and a support cylinder, it facilitates the assembly of rotating components, tie rods, elastic components, and other structures within the housing assembly, thereby improving the ease of assembly of the fixing device. Furthermore, the support cylinder can also support the drive assembly, enhancing the installation stability of the drive assembly.

[0020] Secondly, this application provides an electric spindle device, which includes a stator, a mover, and a fixing device according to any of the foregoing embodiments; The rotating component in the fixed device is an electric spindle. Both the stator and the mover are installed inside the housing assembly. The mover is sleeved on the outer circumference of the electric spindle and is fixedly connected to the electric spindle. The stator is sleeved on the outer circumference of the mover and is coaxially arranged with the mover. There is a gap between the stator and the mover.

[0021] When the roller is used as the drive shaft in a silicon rod slicing machine, the end of the roller needs to be connected to the electric spindle in the silicon rod slicing machine that can output rotational power. At this time, the rotating part in the fixed device is the electric spindle of the rotation drive device, and the stator and mover are used to cooperate with each other to realize the rotation of the rotating part in the housing assembly.

[0022] It should be noted that, since the electric spindle device provided in this application includes the aforementioned fixing device, the electric spindle device can also use the energy release process of the elastic component to pull the pull rod away from the roller shaft, thereby tightening and fixing the roller shaft with the pull rod, increasing the connection force between the pull rod and the roller shaft, and effectively ensuring the coaxiality between the roller shaft and the rotating component by combining the tapered fit between the rotating component and the roller shaft, preventing the rotating component from failing due to fatigue accumulation or causing the roller shaft system to become unbalanced and unstable during rotation.

[0023] Thirdly, this application provides a roller assembly, which includes a roller, a fixing device according to any of the foregoing embodiments, and an electric spindle assembly provided in this application; The diameter of the roller is 70-120 mm, and both ends of the roller are fixedly connected to the tie rod of the fixing device and the tie rod of the electric spindle device, respectively.

[0024] In the roller device provided in this application, both ends of the roller are fixedly connected by the fixing device and the electric spindle device provided in this application, respectively. While effectively ensuring the coaxial centering effect of both ends of the roller, the electric spindle device can provide power for the roller's self-rotation, meeting the requirement of self-driven rotation. If both ends of the roller are fixedly connected by fixing devices, when the roller is used in conjunction with a large roller (diameter greater than 120 mm) to form a four-roller configuration (two rollers and two large rollers combined, i.e., the two main rollers and two auxiliary rollers scheme in the patent cited in the background art), the roller can only passively drive the wire mesh through the rotation of the large roller, and the wire mesh will carry it to rotate. In high-speed rotation scenarios, the cutting of the roller by the wire mesh will seriously affect the service life of the roller. Furthermore, when the large roller stops rotating, the roller can only passively stop rotating slowly due to inertia. During this process, the friction between the wire mesh and the roller increases, and the cutting of the roller by the wire mesh becomes more severe. The roller device provided in this application can ensure the coaxial centering effect of both ends of the roller and also meet the requirements of high-speed rotation and rapid response to stop rotation in high-speed rotation scenarios.

[0025] Fourthly, this application provides a silicon rod slicing machine, which includes two first roller shaft devices and two second roller shaft devices. The diameter of the roller shaft of the first roller shaft device is larger than the diameter of the roller shaft of the second roller shaft device, and the second roller shaft device is the roller shaft device provided in this application. Two first roller shaft devices are arranged at intervals in the horizontal direction, and two second roller shaft devices are arranged at intervals in the horizontal direction and located between the two first roller shaft devices, and the roller shafts of the two second roller shaft devices are higher than the roller shafts of the two first roller shaft devices in the vertical direction.

[0026] The silicon rod slicing machine provided in this application, because its second roller shaft adopts the roller shaft device provided in this application, can effectively ensure the connection force and coaxiality between the roller shaft and the rotating parts, and can meet the ultra-high speed rotation of small diameter roller shafts. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the fixing device provided in the embodiments of this application; Figure 2 A cross-sectional view of the fixing device provided in the embodiments of this application; Figure 3 Another cross-sectional view of the fixing device provided in the embodiments of this application; Figure 4 for Figure 3 A magnified view of a portion of the image.

[0029] Icons: 1-Rotating component; 2-Housing assembly; 20-Front end cover; 21-Intermediate tube; 22-Rear end cover; 23-Supporting cylinder; 3-Pull rod; 30-Abutting protrusion; 4-Elastic component; 40-First pressure plate; 41-Second pressure plate; 42-Disc spring; 5-Drive assembly; 50-Drive rod; 51-End cover; 6-Encoder; 7-First cavity; 8-Second cavity. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0032] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] Example: This embodiment provides a fixing device for fixing the rollers on a silicon rod slicing machine. The diameter of the rollers is 70-120 mm. Figures 1-4As shown, the fixing device includes a rotating component 1, a housing assembly 2, a pull rod 3, an elastic component 4, and a drive assembly 5. The rotating component 1 includes a first end and a second end. The rotating component 1 is rotatably mounted in the housing assembly 2 via bearings. The rotating component 1 has a hollow channel extending from the first end to the second end, and the central axis of the channel coincides with the central axis of the rotating component 1. The first end of the rotating component 1 extends out of the housing assembly 2 and can be inserted into a slot on the end of the roller. The outer peripheral wall of the first end of the rotating component 1 and the inner peripheral wall of the slot are both conical, so that the taper between the rotating component 1 and the slot is such that... The connecting rod 3 includes a first end and a second end. The connecting rod 3 passes through the channel and both the first end and the second end of the connecting rod 3 extend out of the channel. The first end of the connecting rod 3 has an external thread on its shaft, which is used for threaded connection with the roller shaft. The elastic component 4 abuts between the second end of the rotating part 1 and the second end of the connecting rod 3. The output end of the drive component 5 is correspondingly set with the elastic component 4. When the drive component 5 moves toward the elastic component 4, the elastic component 4 compresses and stores energy. When the drive component 5 moves away from the elastic component 4, the elastic component 4 releases energy to provide a pulling force to the connecting rod 3 in the direction away from the roller shaft.

[0034] The fixing device provided in this embodiment is used to support and fix both ends of a small-diameter roller shaft with a diameter of 70-120 mm on a silicon rod slicing machine. The "tapered fit" described in this embodiment refers to the fit between inner and outer surfaces with a taper, where the taper is the ratio of the diameter of the base of the cone to the height of the cone body.

[0035] The rotating component 1 in the fixing device provided in this embodiment can be a shaft or a drive shaft for driving the roller shaft to rotate, etc. When using the fixing device provided in this embodiment to connect and fix the roller shaft, firstly, the first end of the rotating component 1 is aligned with the slot position on the end of the roller shaft, and the first end of the pull rod 3 is aligned with the threaded hole position on the roller shaft. Then, the drive assembly 5 is activated, so that the output end of the drive assembly 5 moves toward the elastic component 4 and compresses the elastic component 4. It should be noted that during the compression and energy storage process of the elastic component 4, the position of the pull rod 3 remains unchanged. Therefore, after compression, there is a gradual gap between the elastic component 4 and the second end of the pull rod 3, which provides travel space for the threaded connection process between the pull rod 3 and the roller shaft.

[0036] After the elastic component 4 is compressed and stores energy, rotational power is applied to the second end of the pull rod 3 to drive the pull rod 3 to rotate, thereby making the first end of the pull rod 3 threadedly connected to the end of the roller shaft. After the threaded connection is completed, the output end of the drive component 5 moves away from the elastic component 4. At this time, the elastic component 4 releases energy and provides a pulling force to the pull rod 3 in the direction away from the roller shaft, thereby making the pull rod 3 tighten and fix the roller shaft, effectively improving the connection force between the pull rod 3 and the roller shaft. Combined with the tapered fit between the rotating part 1 and the roller shaft, the coaxiality between the roller shaft and the rotating part 1 is effectively guaranteed, preventing the rotating part 1 from failing due to fatigue accumulation or causing the roller shaft system to become unbalanced and unstable during rotation.

[0037] It should be noted that since the pull rod 3 is set in the channel of the rotating part 1 and the central axis of the channel coincides with the central axis of the rotating part 1, the pull rod 3 and the rotating shaft are coaxially arranged. When the roller shaft is tightened by the pull rod 3, the tapered fit between the roller shaft and the rotating part 1 makes the rotating part 1 and the roller shaft coaxially positioned, thus improving the coaxiality of the rotating part 1 and the roller shaft.

[0038] It should also be noted that when both the first and second ends of the pull rod 3 extend outside the channel, if the length of the exposed rod body of the pull rod 3 outside the housing assembly 2 is too long, it will result in material waste and occupy a large space. If it is too short, it will not meet the installation requirements of the corresponding components outside the exposed rod body. Therefore, the length of the exposed rod body between the first end of the pull rod 3 and the housing assembly 2 and the length of the exposed rod body between the second end of the pull rod 3 and the housing assembly 2 should meet the installation requirements of the corresponding components around them.

[0039] Therefore, compared with the prior art, the fixing device provided in this embodiment can apply a pulling force to the threaded rod 3 and the roller shaft in a direction away from the roller shaft through the energy release process of the elastic component 4, thereby tightening the rod 3 and the roller shaft, effectively improving the connection force between the rod 3 and the roller shaft. Combined with the tapered fit between the end of the roller shaft and the slot at the first end of the rotating part 1, the coaxiality between the roller shaft and the rotating part 1 can be effectively improved, preventing the rotating part 1 from failing due to fatigue accumulation or causing the shaft system where the roller shaft is located from becoming unbalanced and unstable during the rotation of the roller shaft.

[0040] The roller shaft can be supported and fixed by a fixing device at both ends. The fixing method of the roller shaft at both ends on the rotating part 1 of the two fixing devices is the same. The two fixing devices can provide high-strength support and fixation for the two ends of the roller shaft, thereby effectively reducing the centrifugal inertial force generated when the roller shaft is rotating at ultra-high speed and ensuring the normal operation of the roller shaft system.

[0041] like Figure 2 , Figure 3 and Figure 4As shown, the second end of the pull rod 3 has an annular abutment protrusion 30 on its shaft; the elastic component 4 abuts between the second end of the rotating member 1 and the abutment protrusion 30.

[0042] The abutment protrusion 30 not only increases the contact area between the elastic component 4 and the pull rod 3, but also limits the elastic component 4, effectively improving the abutment stability between the elastic component 4 and the pull rod 3.

[0043] In this embodiment, the second end of the pull rod 3 extends out of the housing assembly 2. The second end of the pull rod 3 is provided with a polygonal head, which is located on the side of the abutment protrusion 30 away from the elastic component 4, and is used to cooperate with an external tool to rotate the pull rod 3.

[0044] When using external tools such as wrenches to drive the pull rod 3 to rotate so that the first end of the pull rod 3 is threadedly connected to the end of the roller shaft, the polygonal head can provide a stable force application point for the external tools, making it easy for the external tools to drive the pull rod 3 to rotate, thereby improving the ease of operation of the pull rod 3 rotation process.

[0045] The polygonal head can be in the shape of a triangular prism, square prism, hexagonal prism, or octagonal prism. Correspondingly, "polygonal" can refer to triangle, square, hexagonal, or octagonal shapes. To facilitate the rotation of the pull rod 3, external tools can be correspondingly internal triangular wrenches, internal square wrenches, internal hexagonal wrenches, or internal octagonal wrenches.

[0046] like Figure 2 , Figure 3 and Figure 4 As shown, the elastic component 4 includes a first pressure plate 40, a second pressure plate 41, and a disc spring 42. The first pressure plate 40 is disposed against the second end of the rotating component 1, the second pressure plate 41 is disposed close to the abutment protrusion 30, and the disc spring 42 abuts between the first pressure plate 40 and the second pressure plate 41. When the drive component 5 moves toward the second pressure plate 41, the second pressure plate 41 moves toward the first pressure plate 40 along the axial direction of the pull rod 3, so that the disc spring 42 is compressed and stores energy. When the drive component 5 moves away from the second pressure plate 41, the disc spring 42 releases energy and pushes the second pressure plate 41 to move away from the first pressure plate 40 along the axial direction of the pull rod 3, so as to provide the pull rod 3 with a pulling force in the direction away from the roller shaft.

[0047] The first pressure plate 40 is used to increase the contact area and contact stability between the disc spring 42 and the rotating member 1. The second pressure plate 41 is used to increase the contact area and contact stability between the disc spring 42 and the contact protrusion 30. The cooperation between the first pressure plate 40 and the second pressure plate 41 can not only further improve the contact stability between the elastic component 4 at the second end of the rotating member 1 and the second end of the pull rod 3, but also effectively improve the stability of the disc spring 42 during the extension and retraction process, thereby effectively improving the performance of the elastic component 4.

[0048] The disc spring 42, also known as a disc spring, is a conical disc with a through hole in the center. To further improve the installation stability of the disc spring 42, it can be fitted onto the outside of the pull rod 3 through the through hole.

[0049] The number of disc springs 42 can be selected based on operational requirements and the parameters of the disc springs 42 themselves.

[0050] For example, multiple disc springs 42 can be used, connected in parallel or in series, or a combination of both. Parallel connection of disc springs 42 means that multiple disc springs 42 are distributed sequentially along their axial direction and protrude in the same direction, with the parallel disc springs stacked in the same direction. Series connection of disc springs 42 means that multiple disc springs 42 are distributed sequentially along their axial direction, with adjacent disc springs protruding in opposite directions, i.e., multiple disc springs 42 are arranged alternately in opposite directions. Parallel connection of disc springs 42 can increase their elastic force, while series connection of disc springs 42 can increase their elastic compression distance.

[0051] like Figure 2 , Figure 3 and Figure 4 As shown, the drive assembly 5 includes a drive rod 50 that can move along the axial direction of the pull rod 3. The drive rod 50 is tubular and is disposed corresponding to the second pressure plate 41.

[0052] When the drive assembly 5 moves toward the elastic component 4, the drive rod 50 can compress the disc spring 42 via the second pressure plate 41, thereby stabilizing and storing energy in the disc spring 42. Furthermore, when the drive rod 50 is tubular, it can be sleeved around the outside of the second end of the pull rod 3. This improves the driving stability of the drive assembly 5 on the elastic component 4 while utilizing the internal space of the drive rod 50 to make room for the second end of the pull rod 3, effectively optimizing the spatial layout of the drive assembly 5 and the pull rod 3.

[0053] In this embodiment, the drive assembly 5 may include a pneumatic, electric, or hydraulic telescopic actuator, and the drive rod 50 is fixed to the output end of the telescopic actuator.

[0054] like Figure 2 , Figure 3 and Figure 4 As shown, the drive assembly 5 also includes an end cap 51, which covers the end opening of the drive rod 50 away from the abutment protrusion 30.

[0055] The end cap 51 is used to close the end opening of the drive rod 50 away from the abutment protrusion 30 to protect the second end of the pull rod 3. When it is necessary to rotate the second end of the pull rod 3, the end cap 51 can be removed to reopen the end opening of the drive rod 50 away from the abutment protrusion 30.

[0056] like Figure 2and Figure 3 As shown, the housing assembly 2 includes a front cover 20, a middle tube 21, a rear cover 22, and a support cylinder 23; both the front cover 20 and the rear cover 22 are annular, and are respectively fixed to both ends of the middle tube 21. The opening of the support cylinder 23 is fixed to the side of the rear cover 22 away from the middle tube 21, and the front cover 20, the middle tube 21, the rear cover 22, and the support cylinder 23 are sequentially connected to form a rotation space, and the rotating component 1 is rotatably installed within the rotation space; as shown... Figure 4 As shown, the drive assembly 5 is mounted on the outer wall of the support cylinder 23 away from the rear end cover 22.

[0057] When the housing assembly 2 includes a front cover 20, a middle tube 21, a rear cover 22, and a support cylinder 23, it facilitates the assembly of structures such as the rotating component 1, the pull rod 3, and the elastic component 4 inside the housing assembly 2, thereby improving the ease of assembly of the fixing device. In addition, the support cylinder 23 can also support the drive assembly 5, improving the installation stability of the drive assembly 5.

[0058] This embodiment also provides an electric spindle device, which includes a stator, a mover, and the aforementioned fixing device; the rotating component 1 in the fixing device is the electric spindle, and the stator and the mover are both installed in the housing assembly 2. The mover is sleeved on the outer periphery of the electric spindle and fixedly connected to the electric spindle, and the stator is sleeved on the outer periphery of the mover and coaxially arranged with the mover. There is a gap between the stator and the mover.

[0059] When the roller is used as the drive shaft in the silicon rod slicing machine, the end of the roller needs to be connected to the electric spindle in the silicon rod slicing machine that can output rotational power. At this time, the rotating part 1 in the fixed device is the electric spindle of the rotation drive device, and the stator and mover are used to cooperate with each other to realize the rotation of the rotating part 1 in the housing assembly 2.

[0060] It should be noted that, since the electric spindle device provided in this embodiment includes the above-mentioned fixing device, the electric spindle device can also use the energy release process of the elastic component 4 to pull the pull rod 3 in a direction away from the roller shaft, thereby making the pull rod 3 tighten and fix the roller shaft, increasing the connection force between the pull rod 3 and the roller shaft, and effectively ensuring the coaxiality between the roller shaft and the rotating component 1 by combining the tapered fit between the rotating component 1 and the roller shaft, preventing the rotating component 1 from failing due to fatigue accumulation or causing the roller shaft system to become unbalanced and unstable during rotation.

[0061] When the end of the roller shaft is connected to the rotating component 1, as mentioned above, the end of the roller shaft and the first end of the rotating component 1 are tapered. Specifically, the end of the roller shaft is provided with a slot, and the outer peripheral wall of the first end of the rotating component 1 and the inner peripheral wall of the slot are both conical surfaces. Furthermore, the conical surface inside the slot slopes from one side of the slot opening to the bottom of the slot towards the direction close to the central axis of the roller shaft. Figure 3As shown, the conical surface of the outer peripheral wall of the first end of the rotating part 1 is inclined from the side near the roller shaft to the side away from the roller shaft in a direction away from the central axis of the rotating part 1.

[0062] Optionally, based on the conical surface fit between the roller shaft and the rotating part 1, a vertical end face can be provided at the end of the roller shaft. This end face fits with the vertical step surface on the rotating part 1 or the end face of the housing assembly 2 to further improve the coaxiality and rigidity between the roller shaft and the rotating part 1.

[0063] The electric spindle device provided in this embodiment also includes an encoder 6, such as Figures 2-4 As shown, encoder 6 is installed inside housing assembly 2 and fixedly connected to rotating component 1. Encoder 6 is used to detect the rotational speed of rotating component 1, thereby facilitating closed-loop speed control based on the real-time rotational speed of rotating component 1 to achieve precise rotational speed of rotating component 1.

[0064] In addition, a sealing ring may be provided between the housing assembly 2 and the rotating part 1 to form an annular sealed cavity between the housing assembly 2 and the rotating part 1. The stator and the mover are installed in the sealed cavity. The sealing ring is used to prevent external gas, liquid and other fluids from entering the sealed cavity.

[0065] Furthermore, when the housing assembly 2 includes a front cover 20, a middle tube 21, a rear cover 22, and a support cylinder 23, such as Figure 2 and Figure 3 As shown, an annular first cavity 7 and an annular second cavity 8 can be provided between the inner peripheral wall of the front cover 20 and the outer peripheral wall of the rotating member 1. The first cavity 7 and the second cavity 8 are distributed sequentially along the axial direction of the rotating member 1, and the first cavity 7 is located on the side of the second cavity 8 away from the intermediate tube 21. The rotating member 1 has multiple protrusions on the inner and outer peripheral walls of the first cavity 7, which are distributed sequentially along the axial direction of the rotating member 1. The side of the protrusion closest to the intermediate tube 21 is an inclined surface, and this inclined surface is formed by the side of the outer peripheral wall of the rotating member 1. The side away from the outer peripheral wall of the rotating part 1 is inclined in the direction away from the intermediate tube 21; the protruding side away from the intermediate tube 21 is a blocking surface, which is a vertical surface perpendicular to the axis of rotation or an inclined surface, and the inclined surface is inclined from the side located on the outer peripheral wall of the rotating part 1 to the side away from the outer peripheral wall of the rotating part 1 in the direction away from the intermediate tube 21; the interior of the second cavity 8 is provided with multiple bends so that the flow resistance of the second cavity 8 to the fluid in the housing assembly 2 is greater than the flow resistance of the second cavity 8 to the external fluid.

[0066] To make the flow resistance of the second cavity 8 to the fluid inside the housing assembly 2 greater than the flow resistance of the second cavity 8 to the external fluid, this can be achieved by adjusting the height of the bend relative to the axis of the rotating part 1 and the width variation of the second cavity 8 at the bend. Since the structure of the second cavity 8 with greater flow resistance to the internal fluid than to the external fluid is existing technology, the specific setting position of each bend and the specific width variation of the second cavity 8 will not be described here.

[0067] The protrusions in the first cavity 7 and the multiple bends in the second cavity 8 not only prevent external fluid from entering the sealed cavity, but also do not hinder the discharge of fluid leaking from the sealed cavity to the outside.

[0068] Furthermore, since the convex inclined surface slopes away from the outer peripheral wall of the rotating component 1 towards the side away from the outer peripheral wall of the rotating component 1, it can guide the outward flow of fluid within the sealed cavity, allowing the fluid within the sealed cavity to be discharged to the outside in a timely manner. Moreover, because the bends inside the second cavity 8 make the flow resistance of the second cavity 8 to the fluid within the housing assembly 2 greater than the flow resistance of the second cavity 8 to the external fluid, the bends inside the second cavity 8 will not generate excessive resistance to the fluid within the sealed cavity, allowing the fluid within the sealed cavity to flow to the outside.

[0069] When the raised blocking surface is vertical or inclined, it can effectively block the fluid flowing from the outside into the sealed cavity. In addition, since the bends inside the second cavity 8 make the flow resistance of the second cavity 8 to the fluid inside the housing assembly 2 greater than the flow resistance of the second cavity 8 to the external fluid, the bends inside the second cavity 8 can further block the external fluid and prevent the external fluid from flowing into the sealed cavity.

[0070] Based on this, this embodiment can gradually weaken the fluid flowing from the outside into the sealed cavity through the protrusion and the bend of the second cavity 8, thereby effectively preventing external liquids, gases and other fluids from entering the sealed cavity.

[0071] This embodiment also provides a roller device, which includes a roller, the aforementioned fixing device, and the electric spindle device provided in this embodiment; the diameter of the roller is 70-120 mm, and both ends of the roller are fixedly connected to the pull rod 3 of the fixing device and the pull rod 3 of the electric spindle device, respectively.

[0072] In the roller device provided in this embodiment, the two ends of the roller are fixedly connected by the fixing device and the electric spindle device provided in this embodiment, respectively. Under the premise of effectively ensuring the coaxial centering effect of the two ends of the roller, the electric spindle device can provide power for the self-rotation of the roller and meet the needs of the self-driven rotation of the roller. If both ends of the roller are fixedly connected by the fixing device, when the roller is used in combination with the large roller (diameter greater than 120 mm) to form a four-roller system (two rollers and two large rollers are used in combination, i.e., the two main rollers and two auxiliary rollers scheme in the patent cited in the background art), the roller can only passively drive the wire mesh by the rotation of the large roller, and the wire mesh drives the rotation. In the high-speed rotation scenario, the cutting of the roller by the wire mesh will seriously affect the service life of the roller. Moreover, when the large roller stops rotating, the roller can only passively stop rotating slowly by inertia. During this process, the friction between the wire mesh and the roller increases, and the cutting of the roller by the wire mesh is more serious. The roller device provided in this embodiment can ensure the coaxial centering effect of both ends of the roller and meet the requirements of high-speed rotation and rapid response to stop rotation in high-speed rotation scenarios.

[0073] This embodiment also provides a silicon rod slicing machine, which includes two first roller shaft devices and two second roller shaft devices. The diameter of the roller shaft of the first roller shaft device is larger than the diameter of the roller shaft of the second roller shaft device. The second roller shaft device is the roller shaft device provided in this embodiment. The two first roller shaft devices are arranged at intervals in the horizontal direction, and the two second roller shaft devices are arranged at intervals in the horizontal direction and located between the two first roller shaft devices. The roller shafts of the two second roller shaft devices are higher than the roller shafts of the two first roller shaft devices in the vertical direction.

[0074] The silicon rod slicing machine provided in this embodiment, because its second roller shaft adopts the roller shaft device provided in this embodiment, can effectively ensure the connection force and coaxiality between the roller shaft and the rotating part 1, and can meet the ultra-high speed rotation of small diameter roller shafts.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A fixing device, characterized in that, The fixing device is used to fix the roller on the silicon rod slicing machine, and the diameter of the roller is 70-120 mm; The fixing device includes a rotating component, a housing assembly, a tie rod, an elastic component, and a drive assembly; The rotating component includes a first end and a second end. The rotating component is rotatably mounted in the housing assembly via a bearing. The rotating component has a hollow channel that extends from the first end to the second end, and the central axis of the channel coincides with the central axis of the rotating component. The first end of the rotating component extends out of the housing assembly and can be inserted into the slot on the end of the roller shaft. The outer peripheral wall of the first end of the rotating component and the inner peripheral wall of the slot are both conical surfaces to make the rotating component and the slot taper-fitted. The pull rod includes a first end and a second end. The pull rod passes through the channel and both the first end and the second end of the pull rod extend out of the channel. The first end of the pull rod has an external thread on its shaft, which is used to connect with the roller shaft. The elastic component abuts between the second end of the rotating member and the second end of the pull rod. The output end of the drive component is correspondingly arranged with the elastic component. When the drive component moves toward the elastic component, the elastic component compresses and stores energy. When the drive component moves away from the elastic component, the elastic component releases energy to provide a pulling force to the pull rod in a direction away from the roller shaft.

2. The fixing device according to claim 1, characterized in that, The second end of the pull rod has an annular abutment protrusion on its shaft; the elastic component abuts between the second end of the rotating member and the abutment protrusion.

3. The fixing device according to claim 2, characterized in that, The second end of the pull rod extends outside the housing assembly. The second end of the pull rod is provided with a polygonal head, which is located on the side of the abutment protrusion away from the elastic component, and is used to cooperate with an external tool to rotate the pull rod.

4. The fixing device according to claim 2, characterized in that, The elastic component includes a first pressure plate, a second pressure plate, and a disc spring. The first pressure plate is disposed against the second end of the rotating member, the second pressure plate is disposed near the abutting protrusion, and the disc spring abuts between the first pressure plate and the second pressure plate. When the drive assembly moves toward the second pressure plate, the second pressure plate moves toward the first pressure plate along the axial direction of the pull rod, so as to compress and store energy in the disc spring. When the drive assembly moves away from the second pressure plate, the disc spring releases energy, pushing the second pressure plate away from the first pressure plate along the axial direction of the pull rod, so as to provide a pulling force to the pull rod in a direction away from the roller shaft.

5. The fixing device according to claim 4, characterized in that, The drive assembly includes a drive rod that is movable along the axial direction of the pull rod, the drive rod being tubular and disposed corresponding to the second pressure plate.

6. The fixing device according to claim 5, characterized in that, The drive assembly also includes an end cap that covers the end opening of the drive rod away from the abutment protrusion.

7. The fixing device according to any one of claims 1-6, characterized in that, The housing assembly includes a front cover, a middle tube, a rear cover, and a support cylinder; Both the front end cap and the rear end cap are annular. The front end cap and the rear end cap are respectively fixed to both ends of the intermediate tube. The opening of the support cylinder is fixed to the side of the rear end cap away from the intermediate tube. The front end cap, the intermediate tube, the rear end cap and the support cylinder are connected in sequence to form a rotation space. The rotating component is rotatably installed in the rotation space. The drive assembly is mounted on the outer wall of the support cylinder away from the rear end cover.

8. An electric spindle device, characterized in that, The electric spindle device includes a stator, a mover, and a fixing device as described in any one of claims 1-7; The rotating component in the fixed device is an electric spindle. The stator and the mover are both installed inside the housing assembly. The mover is sleeved on the outer periphery of the electric spindle and fixedly connected to the electric spindle. The stator is sleeved on the outer periphery of the mover and coaxially arranged with the mover. There is a gap between the stator and the mover.

9. A roller assembly, characterized in that, The roller assembly includes a roller, a fixing device as described in any one of claims 1-7, and an electric spindle assembly as described in claim 8; The diameter of the roller is 70-120 mm, and both ends of the roller are fixedly connected to the tie rod of the fixing device and the tie rod of the electric spindle device, respectively.

10. A silicon rod slicing machine, characterized in that, The silicon rod slicing machine includes two first roller shaft devices and two second roller shaft devices. The diameter of the roller shaft of the first roller shaft device is larger than the diameter of the roller shaft of the second roller shaft device. The second roller shaft device is the roller shaft device as described in claim 9. Two first roller assemblies are arranged horizontally at intervals, and two second roller assemblies are arranged horizontally at intervals and located between the two first roller assemblies, with the rollers of the two second roller assemblies being higher than the rollers of the two first roller assemblies in the vertical direction.

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