A single crystal silicon silicon rod edge lifting device

Abstract

The utility model provides a single crystal silicon silicon rod edge skin lifting device, and the purpose is to solve the prior art push rod and cylinder axis first easy to produce different shaft technical problem. The lifting device includes: base, push rod, activity is established in the base, driver, its output and one end of push rod are connected, the block is established in the other end of push rod, and its supporting surface structure is L type, universal joint, is established between the output of driver and the end of push rod. By adding universal joint between driver and push rod, the straightness of push rod and the coaxiality deviation of driver installation are effectively compensated. The requirement of mechanism to part machining precision and assembly method is greatly reduced, so that the system has good adaptive adjustment ability, eliminates the action jamming phenomenon caused by rigid interference, ensures the long-term continuous reliability of the jacking lifting action. At the same time, the flexible connection structure reduces the assembly difficulty, improves the tolerance to manufacturing and installation error, enhances the overall stability and service life of the mechanism.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon processing technology, and specifically to a monocrystalline silicon rod edge skin lifting device. Background Technology

[0002] In the production of monocrystalline silicon wafers, the edge treatment after the crystal ingot is squared is a crucial step. Current technology commonly uses a cylinder-driven push rod lifting mechanism to clamp and transfer the edge. However, this mechanism typically employs a rigid connection between the cylinder and the push rod. This design has significant drawbacks: it places extremely stringent requirements on the straightness of the push rod itself, the positional accuracy of the cylinder mounting holes, and the on-site assembly techniques.

[0003] In actual assembly and long-term operation, even minor machining errors or accumulated installation deviations can easily cause the push rod and cylinder axis to become misaligned, resulting in severe motion interference and lateral stress, ultimately leading to push rod jamming. This problem directly affects the continuous operation stability and production efficiency of the equipment, and is the primary technical bottleneck restricting the reliability of existing lifting mechanisms. Utility Model Content

[0004] To address the technical problem that existing push rods and cylinder shafts are prone to misalignment, leading to push rod jamming, this utility model provides a single-crystal silicon rod edge support device. By installing a universal joint between the driver and the push rod, the original rigid connection is improved into a flexible connection, thereby compensating for the coaxiality deviation between the push rod and the driver.

[0005] The technical solution of this utility model is:

[0006] A single-crystal silicon rod edge skin support device includes:

[0007] Base;

[0008] The push rod is movably mounted on the base.

[0009] A driver, the output of which is connected to one end of the push rod;

[0010] A support block is provided on the other end of the push rod, and its support surface structure is L-shaped.

[0011] A universal joint is located between the output end of the driver and the end of the push rod.

[0012] Optionally, the actuator is a cylinder.

[0013] Optionally, a sealing assembly is provided at the connection between the push rod and the support block.

[0014] Optionally, the sealing assembly includes a protective cover disposed on the support block and covering the connection between the push rod and the support block.

[0015] Optionally, the sealing assembly further includes a telescopic tube, which is sleeved on the push rod, with one end of the telescopic tube connected to the support block and the other end connected to the base.

[0016] Optionally, the telescopic tube is a corrugated tube.

[0017] Optionally, one end of the support block protrudes to one side to form an L-shaped support surface, and the protective cover is provided on the other side of the support block.

[0018] Optionally, sealing gaskets are provided between the two ends of the telescopic tube and the protective cover and the base, respectively.

[0019] Optionally, the base is provided with a slide rail, and the push rod is slidably disposed within the slide rail.

[0020] Optionally, the support block is provided with several weight-reduction zones.

[0021] Compared with the prior art, the beneficial effects of this utility model are:

[0022] By adding a universal joint between the actuator and the push rod, the straightness deviation between the push rod and the coaxiality deviation of the actuator installation is effectively compensated. This significantly reduces the requirements for component machining accuracy and assembly techniques, thereby giving the system excellent self-adjustment capabilities, eliminating motion jamming caused by rigid interference, and ensuring long-term continuous reliability of the lifting and jacking action. At the same time, this flexible connection structure reduces assembly difficulty, increases tolerance to manufacturing and installation errors, and enhances the overall stability and service life of the mechanism. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation

[0025] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0026] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0027] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0028] Example:

[0029] See Figure 1 This embodiment discloses a single-crystal silicon rod edge-supporting device, including a base 10, a push rod 20, a driver 30, a support block 40, and a universal joint 50. The base 10 connects the entire edge-supporting device to a single-crystal grinding machine. The push rod 20 is movably mounted on the base 10 and can reciprocate along its length. The driver 30 can be mounted on the single-crystal grinding machine or on the base 10. The output end of the driver 30 is connected to one end of the push rod 20, directly driving the push rod 20 to move on the base 10. The support block 40 is located on the other end of the push rod 20, and its support surface is L-shaped, used to support the silicon rod edge. The universal joint 50 is located between the output end of the driver 30 and the end of the push rod 20.

[0030] The working principle of this embodiment is as follows: the driver 30 acts as a power source, driving the push rod 20 to reciprocate linearly under the guidance or support of the base 10 through the linear motion of its output shaft. The support block 40 at the end of the push rod 20 extends or retracts accordingly, lifting and lowering the silicon rod edge above or to the side. Specifically, the universal joint 50, as a key flexible connecting element, is integrated between the output end of the driver 30 and the push rod 20. This allows the push rod 20 to move within a certain angle and orientation range, thereby automatically compensating for alignment errors during mechanism movement.

[0031] By adding a universal joint 50 between the actuator 30 and the push rod 20, the straightness deviation between the push rod 20 and the coaxiality deviation of the actuator 30 during installation is effectively compensated. This significantly reduces the requirements for component machining accuracy and assembly techniques, giving the system excellent self-adjustment capabilities and eliminating phenomena such as motion jamming, accelerated wear, and even overload damage to the actuator 30 caused by rigid interference. This ensures the long-term continuous reliability of the lifting and jacking action and significantly reduces the failure rate caused by accuracy issues. Simultaneously, this flexible connection structure reduces assembly difficulty and reliance on skilled workers, shortens installation and commissioning time, increases tolerance to manufacturing and installation errors, enhances the overall stability and service life of the mechanism, and reduces maintenance costs in the long run.

[0032] Preferably, the actuator 30 in this embodiment is a cylinder.

[0033] As a common pneumatic actuator, the cylinder uses compressed air as its working medium and boasts advantages such as simple structure, low manufacturing cost, convenient maintenance, fast action speed, and strong adaptability. The pneumatic system itself has overload self-protection (compressibility), meaning it is not prone to rigid damage even when encountering unexpected resistance during lifting. Furthermore, the pneumatic system is clean and pollution-free, making it particularly suitable for use in production environments like those producing monocrystalline silicon where a certain level of cleanliness is required.

[0034] In one specific embodiment:

[0035] A sealing component 60 is provided at the connection between the push rod 20 and the support block 40. The sealing component 60 acts as a physical barrier, enclosing the connection area between the push rod 20 and the support block 40, effectively preventing impurities such as grinding dust and cutting fluid from entering the joint or threaded parts of the connection between the push rod 20 and the support block 40. This avoids problems such as inflexible movement, thread corrosion, or seizing caused by impurity accumulation, ensuring the reliability of power transmission between the support block 40 and the push rod 20, significantly extending the service life of this critical connection area, and reducing maintenance frequency.

[0036] In another specific embodiment:

[0037] The sealing assembly 60 includes a protective cover 61, which is mounted on the support block 40 and covers the connection between the push rod 20 and the support block 40. The protective cover 61 is typically a rigid or semi-rigid shell, fixedly installed on the back (non-supporting surface) of the support block 40 by bolts, snap-fits, or interference fits. It completely covers the connection structure between the end of the push rod 20 and the support block 40, forming a localized protective space that prevents most contaminants from falling directly onto the connection point from above and the sides.

[0038] In this application, the protective cover 61 constitutes the first line of active defense. It can directly withstand and block most of the particles and droplets splashing from the processing area, playing a crucial primary protective role. Its structure is simple, its installation is firm, its reliability is high, and it can effectively protect the cleanliness of the connection parts and prevent external foreign objects from interfering with and abrading the moving parts.

[0039] In another specific embodiment:

[0040] The sealing assembly 60 also includes a telescopic tube 62, which is sleeved on the push rod 20. The telescopic tube 62 is located inside the protective cover 61, and one end of the telescopic tube 62 is connected to the support block 40, while the other end is connected to the base 10.

[0041] When the push rod 20 reciprocates under the drive of the driver 30, the telescopic tube 62 is compressed or stretched accordingly, but its two ends always remain connected to the support block 40 and the base 10, thus continuously forming a closed channel throughout the entire stroke of the push rod 20, completely isolating the push rod 20 and its moving parts from the external environment.

[0042] By incorporating the telescopic tube 62, a complete and continuous dynamic sealing system is formed. The telescopic tube 62 works in conjunction with the protective cover 61, extending the protection range from the connection point to the entire movement path of the push rod 20. This completely prevents dust and liquids from contacting the push rod 20 and the sliding parts of the base 10, avoiding contaminants from entering the base 10. This greatly protects the movement accuracy of the push rod 20 and the cleanliness of the internal mechanisms of the base 10, fundamentally solving the problems of movement jamming and wear caused by contaminant intrusion.

[0043] Preferably, the telescopic tube 62 is a corrugated tube. The unique geometry of the corrugated tube gives it good axial extensibility, flexibility, and fatigue resistance. When the push rod 20 moves, the corrugated tube can easily undergo large-scale compression and expansion with the stroke of the push rod 20 without generating excessive internal stress or permanent deformation.

[0044] In addition, the bellows has a large extension stroke, which can fully adapt to the working stroke of the push rod 20. Secondly, it has good fatigue resistance and can withstand long-term high-frequency reciprocating extension and contraction without easily breaking. Thirdly, the bellows is usually made of rubber, plastic or metal, which has good sealing properties and certain mechanical strength, and can effectively block dust and liquid. Finally, its compact structure and convenient installation make it an ideal choice for dynamic sealing applications.

[0045] In another specific embodiment:

[0046] One end of the support block 40 protrudes to one side, forming an L-shaped support surface, and the protective cover 61 is provided on the other side of the support block 40. The L-shaped support surface can support the edge skin from the bottom and limit it from the side to prevent the edge skin from slipping during the lifting process.

[0047] In another specific embodiment:

[0048] Sealing gaskets are provided at both ends of the telescopic tube 62 between the protective cover 61 and the base 10, respectively. By setting the sealing gaskets, when the connection is tightened by fasteners, the sealing gaskets undergo elastic deformation, filling the microscopic unevenness and assembly gap between the two connecting surfaces, forming a tight static seal.

[0049] By adding sealing gaskets, the sealing reliability at the connection points of the telescopic tube 62 is greatly enhanced. This prevents contaminants from entering the sealing system through gaps at the connection points, ensuring the integrity of the entire sealed cavity formed by the protective cover 61 and the telescopic tube 62.

[0050] In another specific embodiment:

[0051] The base 10 is equipped with a slide rail, within which the push rod 20 slides. The slide rail provides precise linear motion guidance for the push rod 20. This ensures that the push rod 20 does not experience radial movement or torsion during reciprocating motion, guaranteeing the accuracy of the movement trajectory and repeatability of the support block 40. This not only makes the lifting action smoother and more reliable but also reduces the additional bending moment on the universal joint 50 and the driver 30 caused by the wobbling of the push rod 20, protecting the drive components and extending the service life of the entire system.

[0052] In another specific embodiment:

[0053] The support block 40 has several weight-reduction zones. These zones are created by removing material from non-critical load-bearing areas of the support block 40, such as by machining grooves, through holes, or using a hollow design. This effectively reduces the weight of the support block 40 while maintaining its overall structural strength and rigidity.

[0054] By setting up a weight-reduction zone, the mass of the support block 40 and the entire moving part driven by the push rod 20 can be directly reduced, thus lowering the moment of inertia. This results in the drive 30 requiring less force to start and stop, moving more smoothly, responding faster, and helping to reduce energy consumption and impact. Secondly, for the pneumatic system, the reduction in moving mass means that higher acceleration and speed can be achieved under the same air pressure, improving the equipment's cycle time. Finally, it saves materials and reduces manufacturing costs.

[0055] The embodiments described above merely illustrate specific implementations of this utility model, and while the descriptions are detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A device for supporting the edge skin of a monocrystalline silicon rod, characterized in that, include: Base; The push rod is movably mounted on the base. A driver, the output of which is connected to one end of the push rod; A support block is provided on the other end of the push rod, and its support surface structure is L-shaped. A universal joint is located between the output end of the driver and the end of the push rod.

2. The single-crystal silicon rod edge-supporting device according to claim 1, characterized in that, The actuator is a cylinder.

3. The single-crystal silicon rod edge-supporting device according to claim 1, characterized in that, A sealing assembly is provided at the connection between the push rod and the support block.

4. The single-crystal silicon rod edge-supporting device according to claim 3, characterized in that, The sealing assembly includes a protective cover, which is disposed on the support block and covers the connection between the push rod and the support block.

5. The single-crystal silicon rod edge-supporting device according to claim 4, characterized in that, The sealing assembly also includes a telescopic tube, which is sleeved on the push rod, with one end of the telescopic tube connected to the support block and the other end connected to the base.

6. The single-crystal silicon rod edge-supporting device according to claim 5, characterized in that, The telescopic tube is a corrugated pipe.

7. The single-crystal silicon rod edge-supporting device according to claim 4, characterized in that, One end of the support block protrudes to one side to form an L-shaped support surface, and the protective cover is provided on the other side of the support block.

8. The single-crystal silicon rod edge-supporting device according to claim 5, characterized in that, Sealing gaskets are provided at both ends of the telescopic tube between the protective cover and the base, respectively.

9. The single-crystal silicon rod edge-supporting device according to claim 1, characterized in that, The base is provided with a slide rail, and the push rod is slidably disposed within the slide rail.

10. The single-crystal silicon rod edge-supporting device according to claim 1, characterized in that, The support block is provided with several weight-reduction zones.

Images