A crystal bar coring fixing and positioning device

CN224897698UActive Publication Date: 2026-10-27QINGDAO LECO IND EQUIP CO LTD
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Patent Information

Application Number
CN202522558022.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-02
Publication Date
2026-10-27
Estimated Expiration
2035-12-02

AI Technical Summary

Technical Problem

[0007]本实用新型的目的在于:针对目前存在的问题

Benefits of technology

1.通过定位框,且定位框侧边固定块连接的液压杆驱动定位夹持板,可实现对晶棒的自适应夹紧,对称设置的固定块进一步提升了夹持力的均衡性,避免晶棒在取芯过程中出现晃动,电机输出轴通过限位套环与伸缩杆、调节插杆联动,能精准调节晶棒的垂直高度与水平位置,配合保护轴对输出轴的限位防护,有效减少机械运行偏差,确保取芯中心与晶棒晶格轴向高度吻合,显著提升取芯质量与硅片后续加工良率。

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Abstract

The utility model belongs to crystal bar coring technology field, concretely relates to a crystal bar coring fixed positioning device, including device main part, the side surface fixed connection of device main part has support rod, the upper surface fixed connection of support rod has the mounting panel, the upper surface of mounting panel is opened and is equipped with the installation opening, the utility model discloses through the positioning frame, and the hydraulic rod drive positioning clamping plate that positioning frame side fixed block connects can realize the self -adaptation of crystal bar and clamps tightly, and the balanced nature of clamping force is further promoted to the fixed block of symmetrical setting, avoids the crystal bar to appear the shaking in the coring process, and motor output shaft passes through the spacing sleeve ring and telescopic link, adjusting plug rod linkage, can accurate regulation crystal bar's vertical height and horizontal position, and the spacing protection of cooperation protection shaft to output shaft, effectively reduce mechanical operation deviation, ensure that the coring center and crystal bar crystal lattice axial height coincide, significantly improve the coring quality and silicon wafer subsequent processing yield.
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Description

Technical Field

[0001] This utility model belongs to the field of crystal rod core extraction technology, specifically relating to a crystal rod core extraction fixing and positioning device. Background Technology

[0002] Ingot core extraction is a crucial pre-process in semiconductor manufacturing. It mainly refers to the process of extracting the core part, the ingot, from a synthesized cylindrical ingot using specific equipment and techniques. This step directly determines the quality, purity, and performance of the subsequent silicon wafers and is a key bridge connecting ingot preparation and silicon wafer cutting.

[0003] A search revealed that Chinese Patent Publication No. CN220748201U discloses a "Drill Rig Coring Positioning Device," which includes a positioning mechanism and a propulsion mechanism. The positioning mechanism includes an upper positioning component, a guide column, and a lower positioning component. The upper end of the guide column is connected to the upper positioning component, and the lower end of the guide column is connected to the lower positioning component. The propulsion mechanism includes a sliding component, which includes a slider and a drill rig mounting frame. The slider can cooperate with the guide column and move linearly along the guide column. Compared with the prior art, this utility model changes the current situation of using a handheld drilling coring machine for coring (sampling), avoiding the problem that construction personnel need to hold the drill rig continuously during the coring process and it is difficult to ensure the coring direction of the drill rig when facing the impact force brought by the drill rig. This utility model uses a trapezoidal screw or a force spring (which is always in a compressed state) to push the slider to move the drill rig closer to the sampling part to assist in coring, reducing energy consumption and reducing the workload of construction personnel.

[0004] However, the following defects still exist: (1) Traditional crystal rod core fixing devices mostly use manual or single drive structure for clamping. The contact area between the clamping plate and the crystal rod is small and the clamping force is unevenly distributed, which can easily cause the crystal rod to shake and shift during the core removal process. In addition, the crystal rod position adjustment depends on manual operation or simple mechanical transmission. The adjustment accuracy of vertical height and horizontal position is low. There is no effective limit protection for the drive shaft. The mechanical operation deviation is large, and it is difficult to ensure that the core center and the crystal rod lattice axis are accurately matched, which will affect the core removal quality.

[0005] (2) The installation and disassembly process of the core components of the existing device is complicated. The components will age faster due to high temperature, shorten the service life of the equipment, and the structure is prone to deformation after long-term use by users, affecting the reliability of the equipment operation.

[0006] Therefore, a crystal rod core extraction and positioning device is proposed. Utility Model Content

[0007] The purpose of this utility model is to address the existing problems.

[0008] To achieve the above-mentioned objectives, this utility model provides the following technical solution: The present invention is as follows: a crystal rod core extraction and fixing positioning device, comprising a device body, a support rod fixedly connected to the side surface of the device body, an mounting plate fixedly connected to the upper surface of the support rod, and an installation opening through the upper surface of the mounting plate.

[0009] The inner ring surface of the main body of the device is fitted with a protective shell, and a connecting block is fixedly connected to the inner ring surface of the protective shell. A motor is fixedly connected to one side of the connecting block. A limiting collar is fixedly sleeved on the top of the output shaft of the motor, and a telescopic rod is fixedly connected to the bottom surface of the limiting collar.

[0010] An adjusting rod is fixedly connected to the bottom surface of the telescopic rod, a fixed base plate is fixedly connected to the bottom surface of the adjusting rod, a positioning frame is fixedly connected to the bottom surface of the fixed base plate, a fixing block is fixedly connected to the side surface of the positioning frame, and a hydraulic rod is fixedly connected to one side of the fixing block.

[0011] As a preferred technical solution of this utility model, the inner ring surface of the device body is provided with a snap-fit ​​opening, and the size of the snap-fit ​​opening and the protective shell are matched. The snap-fit ​​opening can realize the quick alignment and assembly of the protective shell and the device body, avoid the radial displacement of the protective shell during the operation of the device, and facilitate the subsequent inspection and maintenance of core components such as motors inside the protective shell.

[0012] As a preferred technical solution of this utility model, the upper surface of the protective shell is provided with heat dissipation openings, and the number of heat dissipation openings is multiple. The multiple heat dissipation openings can form an efficient heat dissipation channel, which can promptly dissipate the heat generated by the motor during operation to the outside of the protective shell, prevent the motor from experiencing performance degradation or shortened service life due to long-term high-temperature operation, and ensure the stability of the device operation.

[0013] As a preferred technical solution of this utility model, the motor is connected to the protective shell through a connecting block, and the connecting block is symmetrically arranged with the vertical center line of the motor as the axis of symmetry. The symmetrical connecting block can make the motor bear the force evenly within the protective shell, avoid the motor from vibrating during operation due to installation eccentricity, thereby reducing the impact of vibration on the subsequent crystal rod positioning accuracy and improving the operating stability of the device.

[0014] As a preferred technical solution of this utility model, a positioning clamping plate is fixedly connected to the side surface of the hydraulic rod, and the positioning clamping plate is connected between the hydraulic rod and the fixing block. The positioning clamping plate increases the contact area between the hydraulic rod and the crystal rod, which can disperse the pressure when clamping the crystal rod and avoid damage to the surface of the crystal rod due to excessive local pressure. The extension and retraction of the hydraulic rod can realize adaptive clamping of crystal rods of different diameters, thereby improving the versatility of the device.

[0015] As a preferred technical solution of this utility model, the inner ring surface of the protective shell is limited and snapped with a protective shaft, and the size of the protective shaft and the output shaft of the motor are matched. The protective shaft can provide radial support and protection for the output shaft of the motor, preventing the output shaft from bending and deforming when driving subsequent components.

[0016] As a preferred technical solution of this utility model, the mounting plate is connected to the device body through a support rod, and the support rod is arranged around the device body as the center point. The arranged surrounding support rod can provide uniform support force to the mounting plate, enhance the structural stability of the connection between the mounting plate and the device body, avoid the deformation of the mounting plate due to uneven force during long-term use, and thus ensure the positioning accuracy of the overall device.

[0017] As a preferred technical solution of this utility model, the hydraulic rod is connected between a fixing block and a fixing base plate, and the fixing block is symmetrically arranged with the vertical center line of the hydraulic rod as the axis of symmetry. The symmetrical fixing block can strengthen the connection between the hydraulic rod and the fixing base plate, making the hydraulic rod more stable when it is telescopically clamping the crystal rod, avoiding the hydraulic rod from shaking due to insecure installation, and ensuring the stability of the positioning clamping plate in clamping the crystal rod.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. The positioning frame, with the hydraulic rod connected to the side fixing block of the positioning frame driving the positioning clamping plate, enables adaptive clamping of the crystal rod. The symmetrically arranged fixing blocks further improve the balance of clamping force, preventing the crystal rod from shaking during the core extraction process. The motor output shaft is linked with the telescopic rod and adjusting rod through the limiting collar, which can accurately adjust the vertical height and horizontal position of the crystal rod. Combined with the protection shaft to limit and protect the output shaft, it effectively reduces mechanical operation deviation, ensures that the core extraction center matches the axial height of the crystal rod lattice, and significantly improves the core extraction quality and the yield of subsequent silicon wafer processing.

[0019] 2. The protective shell, which is quickly locked in place via a snap-fit ​​opening on the inner ring of the main body, facilitates easy installation and disassembly, allowing for convenient maintenance of internal core components such as the motor. Multiple heat dissipation openings on the protective shell effectively dissipate heat generated during motor operation, preventing component aging due to high temperatures and extending equipment lifespan. The support rod, centered on the main body, surrounds the mounting plate, ensuring the mounting plate's load-bearing stability and providing a solid support foundation for the entire device. This reduces the risk of structural deformation during long-term use and improves the reliability of equipment operation. Attached Figure Description

[0020] Figure 1 A schematic diagram of the overall structure of the crystal rod core extraction and positioning device provided by this utility model; Figure 2 A top view of the crystal rod core extraction and positioning device provided by this utility model; Figure 3 A bottom view of the crystal rod core extraction and positioning device provided by this utility model; Figure 4 A side sectional view of the crystal rod core extraction and positioning device provided by this utility model. Figure 5 The crystal rod core fixing and positioning device provided by this utility model Figure 4 Enlarged view of the structure at point A in the middle.

[0021] The attached diagram lists the components represented by each number as follows: 1. Main body of the device; 2. Support rod; 3. Mounting plate; 4. Mounting opening; 5. Protective shell; 6. Snap-fit ​​opening; 7. Connecting block; 8. Heat dissipation opening; 9. Motor; 10. Limiting collar; 11. Telescopic rod; 12. Adjusting rod; 13. Fixed base plate; 14. Positioning frame; 15. Hydraulic rod; 16. Positioning clamping plate; 17. Fixing block; 18. Protective shaft. Detailed Implementation

[0022] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0023] Please see Figure 1-5 The present invention provides a technical solution: a crystal rod core extraction and fixing positioning device, including a device body 1, a support rod 2 fixedly connected to the side surface of the device body 1, an mounting plate 3 fixedly connected to the upper surface of the support rod 2, an installation opening 4 through the upper surface of the mounting plate 3, and a protective shell 5 limited and snapped onto the inner ring surface of the device body 1.

[0024] In this embodiment, the inner surface of the main body 1 of the device is provided with a snap-fit ​​opening 6, and the snap-fit ​​opening 6 and the protective shell 5 are matched in size. The snap-fit ​​opening 6 can realize the quick alignment and assembly of the protective shell 5 and the main body 1 of the device, avoid the radial displacement of the protective shell 5 during the operation of the device, and is easy to disassemble, which facilitates the subsequent inspection and maintenance of core components such as the motor 9 inside the protective shell 5. The upper surface of the protective shell 5 is provided with heat dissipation openings 8, and there are multiple heat dissipation openings 8. The multiple heat dissipation openings 8 can form an efficient heat dissipation channel, which can promptly dissipate the heat generated by the motor 9 during operation to the outside of the protective shell 5, prevent the motor 9 from degrading in performance or shortening its service life due to long-term high temperature operation, and ensure the stability of the device operation.

[0025] like Figure 1-5As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, a connecting block 7 is fixedly connected to the inner ring surface of the protective shell 5, a motor 9 is fixedly connected to one side of the connecting block 7, a limiting collar 10 is fixedly sleeved on the top of the output shaft of the motor 9, a telescopic rod 11 is fixedly connected to the bottom surface of the limiting collar 10, an adjusting rod 12 is fixedly connected to the bottom surface of the telescopic rod 11, and a fixed base plate 13 is fixedly connected to the bottom surface of the adjusting rod 12.

[0026] In this embodiment, the motor 9 is connected to the protective shell 5 via the connecting block 7, and the connecting block 7 is symmetrically arranged with the vertical center line of the motor 9 as the axis of symmetry. The symmetrical connecting block 7 can make the motor 9 bear the force evenly within the protective shell 5, avoiding vibration caused by the motor 9 being installed eccentrically during operation, thereby reducing the impact of vibration on the subsequent crystal rod positioning accuracy and improving the operational stability of the device. The side surface of the hydraulic rod 15 is fixedly connected to the positioning clamping plate 16, and the positioning clamping plate 16 is connected to the hydraulic rod 15 and the fixing block 17. The positioning clamping plate 16 increases the contact area between the hydraulic rod 15 and the crystal rod, which can disperse the pressure when clamping the crystal rod and avoid damage to the crystal rod surface due to excessive local pressure. The extension and retraction of the hydraulic rod 15 realizes adaptive clamping of crystal rods of different diameters, improving the versatility of the device.

[0027] like Figure 1-5 As shown, based on Embodiment 1, this utility model provides a technical solution: preferably, a positioning frame 14 is fixedly connected to the bottom surface of the fixed base plate 13, a fixing block 17 is fixedly connected to the side surface of the positioning frame 14, and a hydraulic rod 15 is fixedly connected to one side of the fixing block 17.

[0028] In this embodiment, a protective shaft 18 is fixedly engaged on the inner ring surface of the protective shell 5, and the protective shaft 18 and the output shaft of the motor 9 are matched in size. The protective shaft 18 can provide radial support and protection for the output shaft of the motor 9, preventing the output shaft from bending and deforming when driving subsequent components. The mounting plate 3 is connected to the device body 1 through the support rod 2, and the support rod 2 is arranged around the device body 1 as the center point. The surrounding support rod 2 can provide uniform support force for the mounting plate 3, enhance the structural stability of the connection between the mounting plate 3 and the device body 1, and avoid deformation of the mounting plate 3 due to uneven force during long-term use, thereby ensuring the positioning accuracy of the overall device.

[0029] Working principle: When the user uses the device, the device is bolted to the worktable of the crystal rod core extraction equipment through the through-hole 4 on the mounting plate 3. At this time, the support rod 2 surrounds the device body 1 as the center point to ensure the connection stability between the mounting plate 3 and the device body 1, and completes the overall installation and positioning of the device. The motor 9 with the connecting block 7 is placed into the protective shell 5, and the motor 9 and the protective shell 5 are fixedly connected by the symmetrically arranged connecting blocks 7. Then, the protective shaft 18 is limited and snapped onto the inner ring of the protective shell 5 so that it matches the size of the output shaft of the motor 9. Finally, the protective shell 5 is aligned with the snap-fit ​​opening 6 on the inner ring of the device body 1 to complete the limited snap-fit ​​assembly of the protective shell 5 and the device body 1. After the equipment is started, the output shaft of the motor 9 drives the top fixed sleeve of the limiting collar 10 to rotate. The limiting collar 10 drives the telescopic rod 11 connected to the bottom to adjust its length. The telescopic rod 11 drives the lower adjusting rod 12 to move synchronously, thereby lowering the fixed base plate 13 and positioning frame 14 connected to the bottom of the adjusting rod 12 to a suitable height for inserting the crystal rod. The crystal rod to be cored is placed in the positioning frame 14, and the hydraulic rod 15 connected to the side fixing block 17 of the positioning frame 14 is extended and retracted. Since the fixing block 17 is symmetrically arranged with respect to the vertical center line of the hydraulic rod 15, the hydraulic rod 15 drives the positioning clamping plate 16 fixedly connected to the side to move towards the crystal rod until the positioning clamping plate 16 is tightly attached to the surface of the crystal rod, so as to achieve balanced and stable clamping of the crystal rod. According to the core extraction requirements, the position of the insertion rod 12 is finely adjusted by the rotation of the output shaft of the motor 9 and the extension and retraction of the telescopic rod 11, so that the crystal rod in the positioning frame 14 is aligned with the cutting center of the core extraction equipment. During operation, the multiple heat dissipation openings 8 on the protective shell 5 timely dissipate the heat generated by the motor 9, and the protective shaft 18 protects the output shaft of the motor 9 to avoid interference from cutting debris and ensure the stable operation of the core extraction process.

[0030] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.

Claims

1. A crystal rod core extraction and positioning device, comprising a device body (1), characterized in that: A support rod (2) is fixedly connected to the side surface of the main body (1) of the device, and a mounting plate (3) is fixedly connected to the upper surface of the support rod (2). An installation opening (4) is provided through the upper surface of the mounting plate (3). The inner ring surface of the main body (1) of the device is limited and snapped with a protective shell (5), and the inner ring surface of the protective shell (5) is fixedly connected with a connecting block (7). A motor (9) is fixedly connected to one side of the connecting block (7), and a limiting collar (10) is fixedly sleeved on the top of the output shaft of the motor (9). The bottom surface of the limiting collar (10) is fixedly connected to a telescopic rod (11), the bottom surface of the telescopic rod (11) is fixedly connected to an adjusting rod (12), the bottom surface of the adjusting rod (12) is fixedly connected to a fixed base plate (13), the bottom surface of the fixed base plate (13) is fixedly connected to a positioning frame (14), the side surface of the positioning frame (14) is fixedly connected to a fixing block (17), and one side of the fixing block (17) is fixedly connected to a hydraulic rod (15).

2. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The inner surface of the main body (1) of the device is provided with a snap-fit ​​opening (6), and the size of the snap-fit ​​opening (6) and the protective shell (5) are matched.

3. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The upper surface of the protective shell (5) is provided with heat dissipation openings (8), and there are multiple heat dissipation openings (8).

4. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The motor (9) is connected to the protective shell (5) via a connecting block (7), and the connecting block (7) is symmetrically arranged with the vertical center line of the motor (9) as the axis of symmetry.

5. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The side surface of the hydraulic rod (15) is fixedly connected to a positioning clamping plate (16), and the positioning clamping plate (16) is connected between the hydraulic rod (15) and the fixing block (17).

6. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The inner ring surface of the protective shell (5) is fitted with a protective shaft (18), and the protective shaft (18) and the output shaft of the motor (9) are matched in size.

7. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The mounting plate (3) is connected to the device body (1) via a support rod (2), and the support rod (2) is arranged around the device body (1) as the center point.

8. The crystal rod core extraction and positioning device according to claim 1, characterized in that, The hydraulic rod (15) is connected to the fixed block (17) and the fixed base plate (13), and the fixed block (17) is symmetrically arranged with the vertical center line of the hydraulic rod (15) as the axis of symmetry.

Citation Information

Patent Citations

  • Coring positioning device of drilling machine

    CN220748201U