A silicon wafer box taking and placing support

Abstract

The utility model discloses a kind of silicon wafer box taking and placing support, including support assembly, multiple supporting components are clamped in the support assembly, supporting component includes supporting plate, the top of supporting plate is fixedly connected with two guide rails, loading assembly is equipped between two guide rails, the loading assembly includes slide plate, slide plate is slidably inserted between two guide rails, the side of slide plate is fixedly connected with end plate, the top of slide plate is fixedly connected with connecting frame, sponge block is arranged in connecting frame, the bottom of sponge block is bonded with the top of slide plate, the top of sponge block is equipped with multiple placing grooves, the support assembly includes top plate, the bottom of top plate is fixedly connected with multiple vertical rods. The utility model places into placing groove by placing silicon wafer box into placing groove, so that silicon wafer box is neatly arranged and placed, then, by pulling end plate outward, so as to pull out slide plate, further make silicon wafer exposed, so as to facilitate the taking of silicon wafer box, convenient and fast.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer cassette loading and unloading technology, and in particular to a silicon wafer cassette loading and unloading bracket. Background Technology

[0002] During the processing of silicon wafers, they are temporarily stored in wafer cassettes to facilitate centralized transfer or subsequent processing. However, existing wafer cassettes are inconvenient to arrange neatly after loading silicon wafers, making it difficult for workers to pick up and put down the wafer cassettes, which affects the organization and application of the wafer cassettes after loading silicon wafers. Therefore, this application proposes a new implementation scheme that is different from the wafer cassette picking and putting method in the prior art. Utility Model Content

[0003] The purpose of this utility model is to solve the problem that existing silicon wafer boxes are inconvenient to arrange neatly and are difficult for staff to pick up and put down, and to propose a silicon wafer box picking and putting support.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A silicon wafer cassette loading and unloading bracket includes a support assembly, within which multiple support components are snapped together. Each support component includes a support plate, with two guide rails fixedly connected to the top of the support plate. A loading component is disposed between the two guide rails, and each loading component includes a sliding plate that slidably inserts between the two guide rails. An end plate is fixedly connected to one side of the sliding plate, and a connecting frame is fixedly connected to the top of the sliding plate. A sponge block is disposed within the connecting frame, with the bottom of the sponge block adhered to the top of the sliding plate. The top of the sponge block has multiple placement slots.

[0005] Furthermore, the support assembly includes a top plate, with multiple vertical rods fixedly connected to the bottom of the top plate, a support plate being inserted between the multiple vertical rods, and the bottom ends of the multiple vertical rods being fixedly connected to the same base plate.

[0006] Furthermore, the base plate is provided with multiple mounting holes.

[0007] Furthermore, the top of the support plate is fixedly connected to two vertical blocks, one of which has a limit screw threaded to one side, and the other has a fixing screw threaded to the other.

[0008] Furthermore, a rear plate is fixedly connected to one end between the two guide rails, and one side of the slide plate can contact the rear plate.

[0009] Furthermore, a fixing plate is fixedly connected to one end of the end plate, and two fixing holes are provided on one side of the fixing plate, with one end of the fixing screw inserted into the fixing hole.

[0010] Furthermore, a limiting plate is fixedly connected to the other end of one side of the end plate, and a limiting groove is provided on one side of the limiting plate, in which the limiting screw slides.

[0011] The beneficial effects of this utility model are as follows: 1. By placing the silicon wafer cassette into the placement slot, the silicon wafer cassette can be neatly arranged. Then, by pulling the end plate outward, the slide plate is pulled out, thereby exposing the silicon wafer, making it easy and quick to pick up the silicon wafer cassette.

[0012] 2. By inserting one end of the fixing screw into the fixing hole, the position of the slide plate is locked to prevent the silicon wafer box from tipping over during storage or transportation. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of a silicon wafer cassette loading and unloading bracket proposed in this utility model; Figure 2 This is a three-dimensional structural diagram of a silicon wafer cassette loading and unloading bracket proposed in this utility model. Figure 3 This is a three-dimensional structural diagram of the first part of the loading assembly of a silicon wafer cassette loading and unloading bracket proposed in this utility model; Figure 4 This is a three-dimensional structural diagram of the second part of the loading assembly of a silicon wafer cassette loading and unloading bracket proposed in this utility model; Figure 5 This is a three-dimensional structural diagram of a silicon wafer cassette loading and unloading bracket proposed in this utility model. Figure 6 This is a side view of the cross-sectional structure of a silicon wafer cassette loading and unloading bracket proposed in this utility model.

[0014] In the diagram: 1. Support assembly; 101. Top plate; 102. Vertical rod; 103. Base plate; 104. Mounting hole; 2. Support assembly; 201. Support plate; 202. Guide rail; 203. Vertical block; 204. Limiting screw; 205. Fixing screw; 206. Rear plate; 3. Loading assembly; 301. Slide plate; 302. End plate; 303. Connecting frame; 304. Sponge block; 305. Placement slot; 306. Fixing plate; 307. Fixing hole; 308. Limiting plate; 309. Limiting groove. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0016] Reference Figures 1-6A silicon wafer cassette loading and unloading bracket includes a support assembly 1, within which multiple support components 2 are snapped together. Each support component 2 includes a support plate 201. Two guide rails 202 are integrally formed on the top of the support plate 201. A loading assembly 3 is disposed between the two guide rails 202. The loading assembly 3 includes a sliding plate 301, which is slidably inserted between the two guide rails 202. An end plate 302 is integrally formed on one side of the sliding plate 301. To provide a force application point for the push-pull operation, the top of the slide plate 301 is integrally formed with a connecting frame 303. A sponge block 304 is placed inside the connecting frame 303. The bottom of the sponge block 304 is bonded to the top of the slide plate 301. The soft material of the sponge block 304 avoids scratching the silicon wafer surface. At the same time, it clamps the silicon wafer through elastic deformation to prevent the silicon wafer from shaking. The top of the sponge block 304 is provided with multiple placement slots 305. Pulling the end plate 302 outward will pull out the slide plate 301, thereby exposing the silicon wafer so that it can be taken out of the placement slots 305, which is convenient and quick.

[0017] The support assembly 1 includes a top plate 101, and a plurality of vertical rods 102 are integrally formed on the bottom of the top plate 101. The locking block of the support plate 201 is locked in the locking groove of the vertical rod 102. The bottom ends of the plurality of vertical rods 102 are integrally formed with the same bottom plate 103. The support plate 201 is locked between the plurality of vertical rods 102 by the locking block and the locking groove, thereby quickly installing the loading assembly 3 into the support assembly 1.

[0018] The base plate 103 is provided with multiple mounting holes 104, and the base plate 103 is firmly fixed to the mounting surface by bolts through the mounting holes 104.

[0019] The top of the support plate 201 has two vertical blocks 203 integrally formed. One of the vertical blocks 203 has a limit screw 204 threadedly connected to one side, and the other vertical block 203 has a fixing screw 205 threadedly connected to it.

[0020] A back plate 206 is integrally formed at one end between the two guide rails 202. One side of the slide plate 301 can contact the back plate 206. When the slide plate 301 is fully pushed in, it contacts the back plate 206, limiting the maximum push stroke of the slide plate 301, avoiding collision between the silicon wafer box and the inside of the bracket, and providing a positioning reference for the slide plate 301.

[0021] One end of the end plate 302 has an integrally formed fixing plate 306. The fixing plate 306 has two fixing holes 307 on one side. One end of the fixing screw 205 is inserted into the fixing hole 307 to lock the position of the slide plate 301 and prevent the slide plate 301 from sliding and causing the silicon wafer box to tip over during silicon wafer storage or transportation.

[0022] One end of the end plate 302 is integrally formed with a limiting plate 308. A limiting groove 309 is provided on one side of the limiting plate 308. The limiting screw 204 slides in the limiting groove 309, thereby limiting the sliding range of the slide plate 301, preventing the slide plate 301 from being pulled out or pushed in excessively, and protecting the silicon wafer box from collision.

[0023] The working principle of this embodiment is as follows: When in use, first, the support component 1 is placed in the preset installation position. Then, the base plate 103 is firmly fixed to the installation surface with bolts through the installation hole 104. Next, the support plate 201 is clamped between multiple vertical rods 102 by the snap-fit ​​of the snap-fit ​​block and the snap-fit ​​slot. The spacing between adjacent support plates 201 can be adjusted according to the usage requirements. Then, pull the end plate 302 outward to move the slide plate 301 outward along the guide rail 202 until the limit screw 204 slides to its limit position in the limit groove 309. At this time, the slide plate 301 stops stably. Then, place the silicon wafer box into the placement groove 305. The size of the placement groove 305 is precisely matched with the silicon wafer. After the silicon wafer is placed, push the end plate 302 to move the slide plate 301 inward along the guide rail 202 until one side of the slide plate 301 contacts the rear plate 206, completing the reset of the loading assembly 3. Then, tighten the fixing screw 205 so that one end is inserted into the fixing hole 307, thereby fixing the slide plate 301 and preventing the slide plate 301 from sliding out during storage or transportation. When it is necessary to remove the silicon wafer, loosen the fixing screw 205 so that one end is disengaged from the fixing hole 307, and then pull the end plate 302 outward to pull out the slide plate 301, thereby exposing the silicon wafer. Then, remove the silicon wafer from the placement slot 305. After removing the wafer, push the slide plate 301 back in to reset, and then tighten the fixing screw 205 to lock the slide plate 301.

[0024] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A silicon wafer cassette loading and unloading bracket, comprising a support assembly (1), characterized in that, The support component (1) has multiple support components (2) snapped into it. The support component (2) includes a support plate (201). The top of the support plate (201) is fixedly connected to two guide rails (202). A loading component (3) is provided between the two guide rails (202). The loading component (3) includes a slide plate (301). The slide plate (301) is slidably inserted between the two guide rails (202). An end plate (302) is fixedly connected to one side of the slide plate (301). A connecting frame (303) is fixedly connected to the top of the slide plate (301). A sponge block (304) is set inside the connecting frame (303). The bottom of the sponge block (304) is bonded to the top of the slide plate (301). The top of the sponge block (304) is provided with multiple placement slots (305).

2. The silicon wafer cassette loading and unloading bracket according to claim 1, characterized in that, The support assembly (1) includes a top plate (101), a plurality of vertical rods (102) are fixedly connected to the bottom of the top plate (101), a support plate (201) is sandwiched between the plurality of vertical rods (102), and the bottom ends of the plurality of vertical rods (102) are fixedly connected to the same base plate (103).

3. A silicon wafer cassette loading and unloading bracket according to claim 2, characterized in that, The base plate (103) is provided with a plurality of mounting holes (104).

4. A silicon wafer cassette loading and unloading bracket according to claim 1, characterized in that, The top of the support plate (201) is fixedly connected to two vertical blocks (203), one of which is threaded with a limit screw (204) on one side, and the other is threaded with a fixing screw (205).

5. A silicon wafer cassette loading and unloading bracket according to claim 1, characterized in that, A rear plate (206) is fixedly connected to one end between the two guide rails (202), and one side of the slide plate (301) can contact the rear plate (206).

6. A silicon wafer cassette loading and unloading bracket according to claim 1, characterized in that, One end of the end plate (302) is fixedly connected to a fixing plate (306), and two fixing holes (307) are provided on one side of the fixing plate (306). One end of the fixing screw (205) is inserted into the fixing hole (307).

7. A silicon wafer cassette loading and unloading bracket according to claim 1, characterized in that, One end of the end plate (302) is fixedly connected to a limiting plate (308), and a limiting groove (309) is provided on one side of the limiting plate (308), and the limiting screw (204) slides in the limiting groove (309).

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