Organohafnium solution storage tank with anti-volatilization function

Abstract

The utility model relates to the field of organic hafnium solution storage, especially to organic hafnium solution storage tank with anti -volatile function possesses. A kind of organic hafnium solution storage tank with anti -volatile function, which has excellent sealing performance and can effectively prevent the volatilization of organic hafnium solution, also takes into account safety, comprises a tank body and a sealing structure installed at the top inlet of the tank body. The sealing structure includes a cover plate and other components. The cover plate is fixed to the top inlet of the tank body by a fixing structure and blocks the inlet. The cover plate is provided with a ring of sealing air bags around its circumference. A gas pump is embedded in the middle of the cover plate. By controlling the gas pump to inflate the sealing air bags through the air pipe, the cover plate and the inlet gap are blocked by the expansion of the sealing air bags, preventing the solution in the tank from volatilizing. When the cover plate covers the inlet, the sealing ring is compressed, forming a secondary seal between the cover plate and the inlet, further reducing volatilization.

Description

Technical Field

[0001] This utility model relates to the field of organic hafnium solution storage, and in particular to an organic hafnium solution storage tank with anti-volatilization function. Background Technology

[0002] In high-tech fields such as semiconductor manufacturing and advanced material synthesis, organic hafnium solutions, with their unique chemical properties and excellent process adaptability, have become an indispensable key raw material for core processes such as the preparation of high-performance thin films and key structural layers of semiconductor devices.

[0003] However, organic hafnium solutions are highly volatile, a characteristic that presents a series of pressing technical challenges during storage. On one hand, the continuous evaporation of organic hafnium solutions during storage directly leads to a decrease in the content of effective components and uncontrollable changes in concentration, causing the solution to deviate from the preset process parameters. When such a solution with inaccurate concentration is used in subsequent production, it not only increases the difficulty of process debugging and reduces production efficiency, but may also cause problems such as substandard product performance and excessive batch-to-batch quality differences, and in severe cases, even lead to the scrapping of the entire batch of product, resulting in huge economic losses. On the other hand, the continuous loss of volatile components leads to the unnecessary waste of raw materials. Especially since organic hafnium solutions are high-value-added specialty chemical raw materials, their waste significantly increases the company's production costs and weakens its competitive advantage in the market.

[0004] Therefore, there is an urgent need to develop an organic hafnium solution storage tank with excellent sealing performance, which can effectively prevent the volatilization of organic hafnium solution and ensure safety. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art, this utility model provides an organic hafnium solution storage tank with anti-volatilization function that has excellent sealing performance, can effectively prevent the volatilization of organic hafnium solution, and takes into account safety.

[0006] An organic hafnium solution storage tank with anti-volatilization function includes a tank body and a sealing structure installed at the top inlet of the tank body. The sealing structure includes a cover plate, a sealing air bladder, an air pump, an air pipe, and a fixing structure. The cover plate is fixed to the top inlet of the tank body by the fixing structure and blocks it. A sealing air bladder is arranged around the circumference of the cover plate. An air pump is embedded in the middle of the cover plate. The air outlet of the air pump is connected to the sealing air bladder through an air pipe.

[0007] As an improvement to the above scheme, a feed inlet is provided at the top of the tank, a cover plate is placed over the feed inlet, a discharge outlet is provided at the center of the bottom of the tank for discharging materials, and a ladder is provided on the side of the tank.

[0008] As an improvement to the above solution, the fixing structure includes fixing blocks symmetrically arranged at the bottom of the cover plate and an arc-shaped groove opened on the feed inlet. When the cover plate is inserted into the feed inlet, the fixing blocks pass through the arc-shaped groove.

[0009] As an improvement to the above solution, a sealing ring is also included. A sealing groove is concentrically opened at the top of the feed inlet, and a sealing ring is placed in the sealing groove. When the cover plate is placed on the feed inlet, the sealing ring is squeezed.

[0010] As an improvement to the above solution, it also includes a spring and a spring plate. A spring is fitted on the feed inlet, the bottom end of the spring is connected to the tank body, and the top end of the spring is connected to a spring plate. The spring plate is penetrated by the feed inlet. When the cover plate is fixed on the feed inlet, the fixing block presses on the spring plate, causing the spring to deform.

[0011] As an improvement to the above solution, it also includes an exhaust system, a handle, and a sensor. The exhaust system is provided on the cover plate, and the handle is symmetrically rotated on the cover plate. A sensor is provided on the cover plate along the rotation path of the handle, and the sensor is electrically connected to the exhaust system.

[0012] As an improvement to the above solution, the exhaust system includes a pressure relief line with an electronically controlled valve and a baffle plate installed inside the pressure relief line.

[0013] This invention has the following advantages: By controlling the air pump to inflate the sealing airbag through the air pipe, the sealing airbag expands and blocks the gap between the cover plate and the feed inlet, preventing the solution in the tank from evaporating; when the cover plate is placed on the feed inlet, it squeezes the sealing ring, forming a secondary seal between the cover plate and the feed inlet, further reducing evaporation; when removing the cover plate, turning the handle upwards causes the sensor to detect the signal of removing the cover plate when the handle passes the sensor, controlling the pressure relief pipeline to open and depressurize the tank, preventing safety accidents caused by excessive pressure inside the tank. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0015] Figure 2 This is a three-dimensional structural diagram of the tank body of this utility model.

[0016] Figure 3 This is a cross-sectional view of the present invention.

[0017] Figure 4 This is a three-dimensional structural diagram of the sealing structure of this utility model.

[0018] Figure 5 This is an exploded view of the sealing structure of this utility model.

[0019] Figure 6 This is a diagram showing the internal structure of the exhaust system of this utility model.

[0020] In the attached diagrams: 1: Tank body, 1a: Inlet, 1b: Arc-shaped groove, 1c: Sealing groove, 1d: Outlet, 1e: Ladder, 2: Sealing structure, 21: Cover plate, 22: Sealing airbag, 23: Air pump, 24: Air pipe, 25: Fixing block, 26: Sealing ring, 27: Spring, 28: Spring plate, 29: Exhaust system, 291: Pressure relief pipeline, 292: Barrier plate, 31: Handle, 32: Sensor. Detailed Implementation

[0021] References to embodiments herein mean that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] Example: An organic hafnium solution storage tank with anti-volatilization function, please refer to... Figures 1-5 The system includes a tank 1 and a sealing structure 2 installed at the top inlet of the tank 1. The tank 1 has a double-layer structure to effectively insulate against heat and prevent the solution inside the tank from evaporating due to excessively high external temperatures. The top of the tank 1 has an inlet 1a, and the bottom center of the tank 1 has an outlet 1d for discharging. A ladder 1e is provided on the side of the tank 1. The sealing structure 2 includes a cover plate 21, a sealing airbag 22, an air pump 23, an air pipe 24, and a fixing structure. The cover plate 21 is fixed to and blocks the top inlet 1a of the tank 1 by the fixing structure. A sealing airbag 22 is arranged around the circumference of the cover plate 21, positioned between the cover plate 21 and the top inlet 1a of the tank 1. An air pump 23 is embedded in the middle of the cover plate 21. The air outlet of pump 23 is connected to the sealing airbag 22 via an air pipe 24. The expansion degree of the sealing airbag 22 is controlled by controlling the air pump 23. The fixing structure includes fixing blocks 25 symmetrically arranged at the bottom of cover plate 21 and an arc-shaped groove 1b opened on the feed inlet 1a. The counterclockwise end of the arc-shaped groove 1b is a circular hole structure, and the diameter of the rest is smaller than the diameter of the circular hole. When cover plate 21 is inserted into feed inlet 1a, fixing block 25 passes through arc-shaped groove 1b. The bottom width of fixing block 25 is greater than its upper width. The bottom width of fixing block 25 is smaller than the diameter of the circular hole, but larger than the diameter of the rest of arc-shaped groove 1b except for the circular hole structure. The upper width of fixing block 25 is smaller than the diameter of the rest of arc-shaped groove 1b except for the circular hole structure.

[0023] In use: The storage solution is added into the tank 1 through the inlet 1a. After the storage solution is added, the cover plate 21 is inserted into the inlet 1a from top to bottom. When inserting, the bottom end of the fixing block 25 is aligned with the round hole structure of the arc groove 1b. Then, the cover plate 21 and its device are rotated clockwise until the fixing block 25 is rotated to the end of the arc groove 1b. Then, the air pump 23 is controlled to inflate the sealing airbag 22 through the air pipe 24, so that the sealing airbag 22 expands and blocks the gap between the cover plate 21 and the inlet 1a to prevent the solution in the tank 1 from evaporating. When it is necessary to remove the cover plate 21, the gas in the sealing airbag 22 is released by the air pump 23. Then, the cover plate 21 is reversed to the other end and lifted upward.

[0024] Please refer to Figure 2 , Figure 4 and Figure 5 It also includes a sealing ring 26. A sealing groove 1c is concentrically opened on the top of the feed inlet 1a. The sealing ring 26 is placed in the sealing groove 1c. When the cover plate 21 is placed on the feed inlet 1a, it squeezes the sealing ring 26, so that a secondary seal is formed between the cover plate 21 and the feed inlet 1a, further reducing volatilization.

[0025] Please refer to Figure 3 and Figure 4 It also includes a spring 27 and a spring plate 28. The spring 27 is fitted on the feed inlet 1a. The bottom end of the spring 27 is connected to the tank body 1. The top end of the spring 27 is connected to the spring plate 28. The spring plate 28 is penetrated by the feed inlet 1a. When the cover plate 21 is fixed on the feed inlet 1a, the fixing block 25 presses on the spring plate 28, causing the spring 27 to deform. When the cover plate 21 is disassembled, when the fixing block 25 rotates to the circular hole structure of the arc groove 1b, the spring 27 returns to its original position and pushes upward, causing the spring plate 28 to move upward and apply a pushing force to assist in the disassembly of the cover plate 21.

[0026] Please refer to Figures 4-6 It also includes an exhaust system 29, a handle 31, and a sensor 32. The exhaust system 29 is provided on the cover plate 21, and the handle 31 is symmetrically rotated on the cover plate 21. The sensor 32 is provided on the cover plate 21 along the rotation path of the handle 31, and the sensor 32 is electrically connected to the exhaust system 29. The exhaust system 29 includes a pressure relief pipe 291 with an electrically controlled valve and a baffle plate 292 installed in the pressure relief pipe 291. When the cover plate 21 is removed, the handle 31 is rotated upward. When the handle 31 passes the sensor 32, the sensor 32 detects the signal of removing the cover plate 21 and controls the pressure relief pipe 291 to open, so as to relieve the pressure of the tank 1 and prevent safety accidents caused by excessive pressure in the tank 1. The baffle plate 292 can filter the discharged gas to prevent the solution from evaporating.

[0027] It should be understood that the above description is for illustrative purposes only and is not intended to limit the present invention. Those skilled in the art will understand that variations of the present invention will be included within the scope of the claims herein.

Claims

1. An organic hafnium solution storage tank with anti-volatilization function, comprising a tank body (1) and a sealing structure (2) installed at the top inlet of the tank body (1), characterized in that: The sealing structure (2) includes a cover plate (21), a sealing airbag (22), an air pump (23), an air pipe (24), and a fixing structure. The cover plate (21) is fixed to the top inlet of the tank (1) by the fixing structure and blocks it. A sealing airbag (22) is arranged around the cover plate (21). An air pump (23) is embedded in the middle of the cover plate (21). The air outlet of the air pump (23) is connected to the sealing airbag (22) through the air pipe (24).

2. The organic hafnium solution storage tank with anti-volatilization function according to claim 1, characterized in that: The tank (1) has a feed inlet (1a) at the top, a cover plate (21) on top of the feed inlet (1a), a discharge outlet (1d) for discharging material at the center of the bottom of the tank (1), and a ladder (1e) on the side of the tank (1).

3. The organic hafnium solution storage tank with anti-volatilization function according to claim 2, characterized in that: The fixing structure includes a fixing block (25) symmetrically arranged at the bottom of the cover plate (21) and an arc groove (1b) opened on the feed inlet (1a). When the cover plate (21) is inserted into the feed inlet (1a), the fixing block (25) passes through the arc groove (1b).

4. The organic hafnium solution storage tank with anti-volatilization function according to claim 3, characterized in that: It also includes a sealing ring (26), and a sealing groove (1c) is concentrically opened on the top of the feed inlet (1a). The sealing ring (26) is placed in the sealing groove (1c). When the cover plate (21) is placed on the feed inlet (1a), the sealing ring (26) is squeezed.

5. The organic hafnium solution storage tank with anti-volatilization function according to claim 4, characterized in that: It also includes a spring (27) and a spring plate (28). The spring (27) is fitted on the feed inlet (1a). The bottom end of the spring (27) is connected to the tank body (1). The top end of the spring (27) is connected to the spring plate (28). The spring plate (28) is penetrated by the feed inlet (1a). When the cover plate (21) is fixed on the feed inlet (1a), the fixing block (25) presses on the spring plate (28), causing the spring (27) to deform.

6. The organic hafnium solution storage tank with anti-volatilization function according to claim 5, characterized in that: It also includes an exhaust system (29), a handle (31) and a sensor (32). The exhaust system (29) is provided on the cover plate (21). The handle (31) is symmetrically rotated on the cover plate (21). The sensor (32) is provided on the cover plate (21) along the rotation path of the handle (31). The sensor (32) is electrically connected to the exhaust system (29).

7. The organic hafnium solution storage tank with anti-volatilization function according to claim 6, characterized in that: The exhaust system (29) includes a pressure relief line (291) with an electronically controlled valve and a baffle plate (292) installed in the pressure relief line (291).

Images