A fall prevention mechanism
Patent Information
- Application Number
- CN202521472490.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-15
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2035-07-15
AI Technical Summary
[0003]然而,由于抓取机构仅抓取住晶圆盒的顶端,晶圆盒的其他部位处于悬空状态,因此,在提升、搬运、下降的过程中,晶圆盒极易出现晃动甚至摇摆的现象,晶圆盒存在掉落的风险,影响晶圆搬运效率
[0026]实际应用时,施力带动夹持构件转动,当所述夹持构件处于夹持状态,所述夹持构件支撑晶圆盒底部并防止晶圆盒掉落,所述限位件对晶圆盒的侧面进行限位,实现稳定支撑晶圆盒,并限制晶圆盒的移动,避免晶圆盒掉落,提升晶圆搬运效率;所述安装架设置有容置腔,所述夹持构件处于折叠状态时,所述夹持构件和限位件位于容置腔内,结构布置紧凑,便于隐藏防掉落机构,节省空间占用。
Smart Images

Figure CN224900153U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor handling equipment technology, and in particular to an anti-drop mechanism. Background Technology
[0002] In semiconductor manufacturing, wafer cassettes are typically transported using overhead crane systems. This method of using wafer cassettes to transport wafers efficiently enables the transfer, processing, and handling of wafers. In existing overhead crane operations, the wafer cassette is first moved along a track to a workstation. The crane's gripping mechanism then grasps the wafer cassette at that workstation (the gripping point is the protrusion at the top of the wafer cassette). The gripping mechanism then lifts the wafer cassette from that workstation. Next, the crane moves the wafer cassette along the track to the next workstation, where the gripping mechanism lowers and releases the wafer cassette to the next workstation. This completes the wafer cassette transport process.
[0003] However, since the gripping mechanism only grips the top of the wafer cassette, leaving the rest of the cassette suspended in the air, the wafer cassette is prone to shaking or even swaying during lifting, transporting, and lowering, posing a risk of falling and affecting wafer handling efficiency. Utility Model Content
[0004] This invention addresses the shortcomings of existing technologies by providing an anti-drop mechanism that stably supports the wafer cassette, restricts its movement, prevents it from falling, and improves wafer handling efficiency.
[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:
[0006] This utility model provides an anti-fall mechanism, including at least two symmetrically arranged mounting frames and a clamping assembly connected to the mounting frames; the clamping assembly includes a clamping member rotatably connected to the mounting frame, the clamping member is connected to a limiting member, and the clamping member has a clamping state and a folded state.
[0007] When the clamping member is in the clamping state, the clamping member supports the bottom of the wafer box and prevents the wafer box from falling, and the limiting member limits the side of the wafer box.
[0008] The mounting bracket is provided with a receiving cavity. When the clamping member is in a folded state, the clamping member and the limiting member are located in the receiving cavity.
[0009] The clamping member is connected to a detection plate, and the mounting bracket is equipped with a first detection switch and a second detection switch.
[0010] When the clamping component is in the clamping state, the detection piece corresponds to the first detection switch;
[0011] When the clamping component is in the folded state, the detection piece corresponds to the second detection switch.
[0012] The clamping component includes a linkage component, a driving component, and an anti-drop component. The linkage component is connected to the mounting frame, the anti-drop component is connected to the driving component, the limiting component is installed on the driving component, the linkage component is hinged to one end of the driving component, the linkage component is equipped with a sliding body, and the sliding body is slidably connected to the driving component. When a force is applied to drive the linkage component to rotate, the driving component swings so that the anti-drop component moves synchronously.
[0013] When the linkage component rotates to the clamping state, one end of the limiting component abuts against one side of the wafer cassette, and the anti-drop component is located on the outside of the wafer cassette and is used to prevent the wafer cassette from falling. The limiting component and the anti-drop component act on different sides of the wafer cassette.
[0014] When the linkage component rotates to the folded state, the anti-drop component, the limiting component, the driving component, and the linkage component are located in the accommodating cavity.
[0015] The linkage component includes a first connecting rod, a second connecting rod, and a first support rod and a second support rod that are parallel to each other. The first connecting rod and the second connecting rod are parallel to each other and are both hinged to the mounting frame. The two ends of the first connecting rod are respectively hinged to one end of the first support rod and the second support rod. The two ends of the second connecting rod are respectively hinged to the other end of the first support rod and the second support rod. One end of the driving member is hinged to the first connecting rod. The sliding body is mounted on the second connecting rod.
[0016] The line connecting the hinge point of the first link and the second link to the mounting bracket is parallel to the first support rod and the second support rod. The first support rod is provided with a first support part and a second support part.
[0017] When the clamping component is in the clamping state, the first support part and the second support part support the bottom of the wafer cassette.
[0018] The first support portion is located at the top end of the connection between the first connecting rod and the first support rod, and the second support portion is located at the top end of the connection between the second connecting rod and the first support rod.
[0019] The first connecting rod includes a first front section and a first rear section connected to the first front section, the second connecting rod includes a second front section and a second rear section connected to the second front section, the angle at the connection between the first front section and the first rear section is an obtuse angle, one end of the driving member is hinged to the first rear section, and the sliding body is installed on the second front section.
[0020] The rotation center of the first connecting rod is located at the connection between the first front section and the first rear section, and the rotation center of the second connecting rod is located at the connection between the second front section and the second rear section. The rotation center of the first connecting rod is connected to a first rotating shaft, and the rotation center of the second connecting rod is connected to a second rotating shaft. Both the first rotating shaft and the second rotating shaft are rotatably connected to the mounting bracket.
[0021] The anti-fall component includes an anti-fall base plate and an anti-fall side plate perpendicularly connected to the anti-fall base plate, wherein the anti-fall base plate is installed on the drive component;
[0022] When the linkage component rotates to the clamping state, the anti-drop side plate is located on the outside of the wafer box and there is an movable gap between the anti-drop side plate and the wafer box.
[0023] The limiting component includes a limiting seat and a limiting body slidably connected to the limiting seat. When the linkage component rotates to the clamping state, it applies force to press the limiting body against one side of the wafer cassette.
[0024] The drive component is provided with a sliding groove, the sliding body is slidably connected to the sliding groove, the limiting component is located between the first link and the second link, and the sliding body and the limiting body are located on two opposite sides of the second link.
[0025] The beneficial effects of this utility model are:
[0026] In practical applications, force is applied to rotate the clamping component. When the clamping component is in the clamping state, it supports the bottom of the wafer cassette and prevents it from falling. The limiting component limits the side of the wafer cassette, achieving stable support and restricting its movement to prevent it from falling and improve wafer handling efficiency. The mounting bracket is provided with a receiving cavity. When the clamping component is in the folded state, the clamping component and the limiting component are located in the receiving cavity. The structure is compact, making it easy to hide the anti-fall mechanism and saving space. Attached Figure Description
[0027] Figure 1 This is a front view of the structure of the anti-fall mechanism.
[0028] Figure 2 This is a three-dimensional view of the clamping component in a clamping state.
[0029] Figure 3 This is a three-dimensional structural diagram of the clamping component.
[0030] Figure 4 This is a three-dimensional structural diagram of the linkage components.
[0031] Figure 5 This is a schematic diagram of the anti-drop component and the wafer box structure when the wafer box is positioned.
[0032] 1. Mounting bracket;
[0033] 2. Clamping component; 201. First rotating shaft; 202. Second rotating shaft;
[0034] 21. Linkage components;
[0035] 211, First connecting rod; 2111, First front section; 2112, First rear section;
[0036] 212, Second connecting rod; 2121, Second front section; 2122, Second rear section;
[0037] 213. First support rod; 2131. First support part; 2132. Second support part;
[0038] 214. The second support rod;
[0039] 22. Driven component; 221. Slide groove;
[0040] 23. Anti-falling parts; 231. Anti-falling bottom plate; 232. Anti-falling side plate;
[0041] 3. Limiting component; 31. Limiting seat; 32. Limiting body;
[0042] 41. Detection plate; 42. First detection switch; 43. Second detection switch;
[0043] 5. Sliding body. Detailed Implementation
[0044] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.
[0045] refer to Figures 1 to 5 As shown, this utility model provides an anti-drop mechanism, including at least two symmetrically arranged mounting frames 1 and a clamping assembly connected to the mounting frames 1; the clamping assembly includes a clamping member 2 rotatably connected to the mounting frame 1, the clamping member 2 being connected to a limiting member 3, and the clamping member 2 having a clamping state and a folded state; in practical application, force is applied to drive the clamping member 2 to rotate. When the clamping member 2 is in the clamping state, the clamping member 2 supports the bottom of the wafer cassette and prevents the wafer cassette from falling. The limiting member 3 limits the side of the wafer cassette, achieving stable support of the wafer cassette and restricting the movement of the wafer cassette, preventing the wafer cassette from falling and improving wafer handling efficiency; Reference Figure 1 , 2As shown, the mounting frame 1 is provided with a receiving cavity. When the clamping member 2 is in the folded state, the clamping member 2 and the limiting member 3 are located in the receiving cavity. The structure is compact, which makes it easy to hide the anti-fall mechanism and save space.
[0046] refer to Figure 3 As shown, in this embodiment, the clamping member 2 is connected to a detection piece 41, and the mounting bracket 1 is equipped with a first detection switch 42 and a second detection switch 43. When the clamping member 2 is in the clamping state, the detection piece 41 corresponds to the first detection switch 42; when the clamping member 2 is in the folded state, the detection piece 41 corresponds to the second detection switch 43. In practical applications, the first detection switch 42 and the second detection switch 43 are slot-type photoelectric switches, which facilitates accurate knowledge of whether the clamping member 2 is in the clamping state or the folded state.
[0047] refer to Figure 3 As shown, in this embodiment, the clamping member 2 includes a linkage component 21, a driving component 22, and an anti-drop component 23. The linkage component 21 is connected to the mounting bracket 1, the anti-drop component 23 is connected to the driving component 22, the limiting component 3 is installed on the driving component 22, one end of the linkage component 21 is hinged to the driving component 22, and a sliding body 5 is installed on the linkage component 21. The sliding body 5 is slidably connected to the driving component 22. When a force is applied to drive the linkage component 21 to rotate, the driving component 22 swings, so that the anti-drop component 23 moves synchronously. (Reference) Figure 2 , 3 As shown, in practical applications, force is applied to drive the linkage component 21 to rotate. When the linkage component 21 rotates to the clamping state, one end of the limiting member 3 abuts against one side of the wafer cassette, and the anti-drop member 23 is located on the outside of the wafer cassette and is used to prevent the wafer cassette from falling. The limiting member 3 and the anti-drop member 23 act on different sides of the wafer cassette to achieve circumferential restriction of the movement of the wafer cassette and stably position the two ends of the wafer cassette. Specifically, when the linkage component 21 rotates to the clamping state, there is a gap between the anti-drop member 23 and the wafer cassette. The direction of this gap is the wafer cassette transport direction, providing space for the wafer cassette to move, avoiding collision between the wafer cassette and the anti-drop member 23, and preventing the wafer cassette from falling. When the linkage component 21 rotates to the folded state, the anti-drop member 23, the limiting member 3, the driving member 22, and the linkage component 21 are located in the accommodating cavity, which facilitates the concealment of the anti-drop member 23, the limiting member 3, the driving member 22, and the linkage component 21, saving space.
[0048] refer to Figure 3 , 4As shown, in this embodiment, the linkage component 21 includes a first connecting rod 211, a second connecting rod 212, and a first support rod 213 and a second support rod 214 that are parallel to each other. The first connecting rod 211 and the second connecting rod 212 are parallel to each other and are both hinged to the mounting frame 1. The two ends of the first connecting rod 211 are respectively hinged to one end of the first support rod 213 and the second support rod 214. The two ends of the second connecting rod 212 are respectively hinged to the other end of the first support rod 213 and the second support rod 214. One end of the driving member 22 is hinged to the first connecting rod 211. The sliding body 5 is mounted on the second connecting rod 212.
[0049] refer to Figure 4 As shown, in practical applications, since the line connecting the hinge point of the first connecting rod 211 and the second connecting rod 212 with the mounting bracket 1 is parallel to the first support rod 213 and the second support rod 214, applying force drives the first connecting rod 211 to rotate, so that the first support rod 213 and the second support rod 214 move smoothly, which facilitates the precise positioning of the moving position of the first support rod 213. When the first connecting rod 211 rotates, it synchronously drives the second connecting rod 212 to rotate, and drives the driving member 22 to swing through the sliding body 5, which facilitates the synchronous movement of the anti-drop member 23, and facilitates the determination of the moving position of the anti-drop member 23. The first support rod 213 is provided with a first support part 2131 and a second support part 2132. When the clamping member 2 is in the clamping state, the first support part 2131 and the second support part 2132 support the bottom of the wafer box, thereby achieving stable support of the wafer box.
[0050] refer to Figure 2 , 3 As shown in Figure 4, in this embodiment, the first support part 2131 is disposed at the top end of the connection between the first connecting rod 211 and the first support rod 213, and the second support part 2132 is disposed at the top end of the connection between the second connecting rod 212 and the first support rod 213. The first support part 2131 and the second support part 2132 are disposed at the hinge points at both ends of the first support rod 213. The two ends of the first support rod 213 are directly used as the support points of the wafer box. The first support rod 213 is cleverly used as a composite load-bearing body, so that the support efficiency and structural stability form a synergistic gain. By utilizing the geometric and mechanical characteristics of the hinge points of the first support rod 213 with the first connecting rod 211 and the second connecting rod 212, a bidirectional load transfer path is constructed, which significantly improves the support reliability of the wafer box. This avoids the space occupation problem caused by adding additional independent support components, and ensures the compactness and maintainability of the overall layout of the equipment, achieving a dual improvement in structural space utilization efficiency and mechanical load-bearing performance.
[0051] refer to Figure 2 , 4As shown, in this embodiment, the first connecting rod 211 includes a first front section 2111 and a first rear section 2112 connected to the first front section 2111, the second connecting rod 212 includes a second front section 2121 and a second rear section 2122 connected to the second front section 2121, the angle at the connection between the first front section 2111 and the first rear section 2112 is an obtuse angle, one end of the driving member 22 is hinged to the first rear section 2112, and the sliding body 5 is installed on the second front section 2121.
[0052] refer to Figure 3 , 4 As shown, in practical applications, since the first link 211 and the second link 212 are parallel, the angle between the second front section 2121 and the second rear section 2122 on the second link 212 is also an obtuse angle. This obtuse angle allows the double-link system formed by the first link 211 and the second link 212 to rotate synchronously around their respective rotation centers by at least ninety degrees. It also provides the drive member 22 with the activity space between the first link 211 and the second link 212, creating the clearance space required for the drive member 22 to swing, eliminating the risk of interference between multiple kinematic pairs, and achieving precise rotation angle through geometric constraints. The precise matching improves transmission reliability. By connecting the rotation point of the drive component 22 to the first rear section 2112 and installing the slider 5 on the second front section 2121, the swing arm of the drive component 22 is extended under the premise that the rotation center and rotation angle of the first connecting rod 211 remain unchanged, which is equivalent to connecting the rotation point of the drive component 22 to the first front section 2111. This smoothly reduces the end stroke of the drive component 22, which facilitates shortening the range of motion of the limiting component 3. The structure is compact and meets the requirements of the linkage component 21, the drive component 22 and the anti-drop component 23 to switch between clamping and folding states in a narrow space.
[0053] refer to Figure 4 As shown, in this embodiment, the rotation center of the first connecting rod 211 is located at the connection between the first front section 2111 and the first rear section 2112, and the rotation center of the second connecting rod 212 is located at the connection between the second front section 2121 and the second rear section 2122. The rotation center of the first connecting rod 211 is connected to the first rotating shaft 201, and the rotation center of the second connecting rod 212 is connected to the second rotating shaft 202. Both the first rotating shaft 201 and the second rotating shaft 202 are rotatably connected to the mounting bracket 1. In practical applications, force is applied to drive the first rotating shaft 201 to rotate, or the first rotating shaft 201 is connected to an external drive unit, and the drive unit drives the first rotating shaft 201 to rotate, thereby driving the linkage component 21, the driving component 22, and the anti-drop component 23 to move through the rotation of the first rotating shaft 201. By setting the rotation center at the middle position of the first connecting rod 211 and the second connecting rod 212, the actual space occupied by the linkage component 21 is effectively utilized, and the rotation requirements of the first connecting rod 211 and the second connecting rod 212 are met without the need for additional space, thus saving space.
[0054] refer to Figure 2 , 3 As shown in Figure 4, in this embodiment, the anti-drop component 23 includes an anti-drop base plate 231 and an anti-drop side plate 232 perpendicularly connected to the anti-drop base plate 231. The anti-drop base plate 231 is mounted on the driving component 22. In actual application, when the linkage component 21 rotates to the clamping state, the anti-drop side plate 232 is located outside the wafer cassette, and there is an movable gap between the anti-drop side plate 232 and the wafer cassette. The conveying direction of the wafer cassette corresponds to the setting direction of the movable gap. Specifically, refer to... Figure 5 As shown, the set movable gap, with a distance of H along the conveying direction (the conveying direction corresponds to direction A), provides the wafer box with movement space along the conveying direction, providing clearance space for the wafer box to stop and transport, avoiding direct collision with the limiting side plate 232 when the wafer box stops or moves along the conveying direction, ensuring stable conveying of the wafer box. In addition, the movable gap limits the swaying distance of the wafer box along the conveying direction to a reasonable range, preventing the wafer box from swaying too much and falling off.
[0055] refer to Figure 3 , 4 As shown, in this embodiment, the limiting member 3 includes a limiting seat 31 and a limiting body 32 slidably connected to the limiting seat 31. When the linkage member 21 rotates to the clamping state, it applies force to press the limiting body 32 against one side of the wafer cassette. In practical applications, the limiting seat 31 is equipped with a linear module, which can be an electric cylinder, hydraulic cylinder, or pneumatic cylinder. The output end of the linear module is connected to the limiting body 32. When the linkage member 21 rotates to the clamping state, the linear module drives the limiting body 32 to extend, so that the limiting body 32 presses against one side of the wafer cassette, thereby limiting the wafer cassette. Specifically, the linkage members 21 on both sides of the wafer cassette move simultaneously, thereby limiting both sides of the wafer cassette, which facilitates accurate positioning of both sides of the wafer cassette.
[0056] refer to Figure 4 As shown, in this embodiment, the driving member 22 is provided with a sliding groove 221, the sliding body 5 is slidably connected to the sliding groove 221, the limiting member 3 is located between the first connecting rod 211 and the second connecting rod 212, and the sliding body 5 and the limiting body 32 are located on two opposite sides of the second connecting rod 212; in actual application, applying force drives the linkage component 21 to rotate, so that one end of the driving member 22 rotates synchronously with the linkage component 21, and the other end of the driving member 22 slides in the sliding groove 221 through the sliding body 5, causing the driving member 22 to swing, thereby driving the anti-drop component 23 to move accordingly; Reference Figure 2 , 4As shown, when the linkage component 21 switches from the folded state to the clamping state, the distance between the limiting body 32 and the second link 212 gradually shortens until the sliding body 5 and the limiting body 32 are located on opposite sides of the second link 212, so that the range of motion of the sliding body 5 and the range of motion of the limiting body 32 are independent of each other. The second link 212 accurately divides the activity space of the limiting body 32 and the sliding body 5, eliminating the risk of interference between multiple kinematic pairs.
[0057] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.
Claims
1. A fall prevention mechanism, characterized in that, It includes at least two symmetrically arranged mounting brackets (1) and a clamping assembly connected to the mounting brackets (1); the clamping assembly includes a clamping member (2) rotatably connected to the mounting brackets (1), the clamping member (2) is connected to a limiting member (3), and the clamping member (2) has a clamping state and a folded state; When the clamping member (2) is in the clamping state, the clamping member (2) supports the bottom of the wafer box and prevents the wafer box from falling, and the limiting member (3) limits the side of the wafer box; The mounting bracket (1) is provided with a receiving cavity. When the clamping member (2) is in a folded state, the clamping member (2) and the limiting member (3) are located in the receiving cavity.
2. The anti-fall mechanism according to claim 1, characterized in that, The clamping member (2) is connected to a detection piece (41), and the mounting bracket (1) is equipped with a first detection switch (42) and a second detection switch (43). When the clamping member (2) is in the clamping state, the detection piece (41) corresponds to the first detection switch (42); When the clamping member (2) is in a folded state, the detection piece (41) corresponds to the second detection switch (43).
3. The anti-fall mechanism according to claim 1, characterized in that, The clamping component (2) includes a linkage component (21), a driving component (22), and an anti-drop component (23). The linkage component (21) is connected to the mounting bracket (1), the anti-drop component (23) is connected to the driving component (22), the limiting component (3) is installed on the driving component (22), the linkage component (21) is hinged to one end of the driving component (22), the linkage component (21) is equipped with a sliding body (5), the sliding body (5) is slidably connected to the driving component (22), when the linkage component (21) is rotated by force, the driving component (22) swings, so that the anti-drop component (23) moves synchronously; When the linkage component (21) rotates to the clamping state, one end of the limiting component (3) abuts against one side of the wafer box, and the anti-drop component (23) is located on the outside of the wafer box and is used to prevent the wafer box from falling. The limiting component (3) and the anti-drop component (23) act on different sides of the wafer box. When the linkage component (21) is rotated to the folded state, the anti-drop component (23), the limiting component (3), the driving component (22) and the linkage component (21) are located in the accommodating cavity.
4. The anti-fall mechanism according to claim 3, characterized in that, The linkage component (21) includes a first connecting rod (211), a second connecting rod (212), and a first support rod (213) and a second support rod (214) that are parallel to each other. The first connecting rod (211) and the second connecting rod (212) are parallel to each other and are both hinged to the mounting frame (1). The two ends of the first connecting rod (211) are respectively hinged to one end of the first support rod (213) and the second support rod (214). The two ends of the second connecting rod (212) are respectively hinged to the other end of the first support rod (213) and the second support rod (214). One end of the driving member (22) is hinged to the first connecting rod (211). The sliding body (5) is installed on the second connecting rod (212). The line connecting the hinge point of the first link (211) and the second link (212) with the mounting bracket (1) is parallel to the first support rod (213) and the second support rod (214). The first support rod (213) is provided with a first support part (2131) and a second support part (2132). When the clamping member (2) is in the clamping state, the first support part (2131) and the second support part (2132) support the bottom of the wafer box.
5. The anti-fall mechanism according to claim 4, characterized in that, The first support part (2131) is located at the top end of the connection between the first connecting rod (211) and the first support rod (213), and the second support part (2132) is located at the top end of the connection between the second connecting rod (212) and the first support rod (213).
6. The anti-fall mechanism according to claim 4, characterized in that, The first link (211) includes a first front section (2111) and a first rear section (2112) connected to the first front section (2111). The second link (212) includes a second front section (2121) and a second rear section (2122) connected to the second front section (2121). The angle at the connection between the first front section (2111) and the first rear section (2112) is an obtuse angle. One end of the driving member (22) is hinged to the first rear section (2112). The sliding body (5) is installed on the second front section (2121).
7. The anti-fall mechanism according to claim 6, characterized in that, The rotation center of the first connecting rod (211) is located at the connection between the first front section (2111) and the first rear section (2112), and the rotation center of the second connecting rod (212) is located at the connection between the second front section (2121) and the second rear section (2122). The rotation center of the first connecting rod (211) is connected to the first rotating shaft (201), and the rotation center of the second connecting rod (212) is connected to the second rotating shaft (202). Both the first rotating shaft (201) and the second rotating shaft (202) are rotatably connected to the mounting bracket (1).
8. The anti-fall mechanism according to claim 3, characterized in that, The anti-fall component (23) includes an anti-fall base plate (231) and an anti-fall side plate (232) perpendicularly connected to the anti-fall base plate (231). The anti-fall base plate (231) is installed on the drive component (22). When the linkage component (21) rotates to the clamping state, the anti-drop side plate (232) is located on the outside of the wafer box and there is an movable gap between the anti-drop side plate (232) and the wafer box.
9. The anti-fall mechanism according to claim 3, characterized in that, The limiting component (3) includes a limiting seat (31) and a limiting body (32) slidably connected to the limiting seat (31). When the linkage component (21) rotates to the clamping state, it applies force to press the limiting body (32) against one side of the wafer cassette.
10. The anti-fall mechanism according to claim 4, characterized in that, The drive member (22) is provided with a slide groove (221), the sliding body (5) is slidably connected to the slide groove (221), the limiting member (3) is located between the first link (211) and the second link (212), and the sliding body (5) and the limiting member (32) are located on two opposite sides of the second link (212).