An automated loading and unloading apparatus
Patent Information
- Application Number
- CN202522649329.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-15
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2035-12-15
AI Technical Summary
1、设备布局分散,占用洁净室空间大,不利于生产线紧凑布置;
1、高度集成,节约空间,通过在主机内部集成上层高温传输线与下层保温回流线,并将上料机、下料机作为标准模块与主机一体化设计,显著减少了设备占地面积,解决了传统开环系统布局分散、占用洁净室空间大的问题;
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Figure CN224900179U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of automated production equipment technology, specifically to an automated loading and unloading device. Background Technology
[0002] In the production processes of the broader semiconductor industry, including semiconductors, photovoltaics, display panels, semiconductor lighting, sensors, and power devices, automated conveyor lines and loading / unloading systems are crucial links connecting various process equipment. For example, in high-temperature processes such as diffusion, passivation coating, and sintering, continuous transfer of silicon wafers between sealed pipes and cavities is achieved through conveyor belts and loading / unloading mechanisms.
[0003] Most common material handling systems currently employ an open-loop design, where a full material box enters from one end of the equipment, is processed, and exits from the other end, while an empty material box needs to be returned to the inlet using an external return device or manual handling. This model has the following significant drawbacks: 1. The equipment layout is scattered, occupies a large amount of cleanroom space, and is not conducive to the compact layout of the production line; 2. Low material turnover efficiency; the empty material box return process can easily become a bottleneck in production cycle. 3. The system is complex to coordinate, requiring multiple independent control systems to work together, resulting in a high failure rate and high maintenance costs.
[0004] Therefore, we propose an automated loading and unloading device to solve the problems mentioned above. Utility Model Content
[0005] The purpose of this invention is to provide an automated loading and unloading device to solve the problems mentioned in the background art.
[0006] To achieve the above objectives, this utility model provides the following technical solution: an automated loading and unloading device, comprising: a base, on which a dual-axis material box conveyor and a three-axis material box robot are mounted, the dual-axis material box conveyor and the three-axis material box robot being located at both ends of the base; The dual-axis box conveyor drives the box body to move along the X and Z axes, and the three-axis box manipulator drives the box body to move along the X, Y and Z axes; The three-axis material box robot includes a support frame, a first X-axis linear module, a first Y-axis linear module, a first Z-axis linear module, and a gripper mechanism; The gripper mechanism includes two symmetrical fixing plates, with a hook integrally connected to the opposite side of the two fixing plates, and two symmetrical limiting grooves opened at the upper end of the hook; Two sets of convex shafts are symmetrically installed on both sides of the material box body, and the convex shafts are inserted into the limiting groove.
[0007] Preferably, the support frame is fixedly installed on the upper surface of the base, and a first X-axis linear module is fixedly installed on the upper end of the support frame. The first X-axis linear module is driven and connected to a first Y-axis linear module, and the first Y-axis linear module is driven and connected to a first Z-axis linear module. The movable end of the first Z-axis linear module is fixedly connected to a fixed bracket.
[0008] Preferably, a lifting gripper mechanism is fixed on the fixed bracket, and the gripper mechanism holds the main body of the material box.
[0009] Preferably, the dual-axis box conveyor includes a second Z-axis linear module, an X-axis conveying structure, a stand, and a second Y-axis linear module.
[0010] Preferably, the second Y-axis linear module is fixedly installed on the upper surface of the base, the second Y-axis linear module is driven and connected to the upright, the second Z-axis linear module is fixedly installed on the side of the upright, and the second Z-axis linear module is driven and connected to the X-axis transmission structure.
[0011] Preferably, the X-axis transmission structure includes a Z-axis sliding seat, which is fixedly installed with the sliding end of the second Z-axis linear module, and a support platform is fixedly installed on the Z-axis sliding seat.
[0012] Preferably, a plurality of rotating shafts are rotatably installed inside the support platform, a transmission wheel is sleeved on the rotating shaft, a sprocket assembly is installed at the end of the rotating shaft, and a transmission chain is connected between the sprocket assemblies. The rotating shaft at the end is connected to a servo motor, and the servo motor is fixedly installed on the side of the support platform.
[0013] Compared with the prior art, the beneficial effects of this utility model are: 1. High integration and space saving: By integrating the upper high-temperature transmission line and the lower insulated return line inside the main unit, and designing the feeder and unfeeder as standard modules integrated with the main unit, the equipment footprint is significantly reduced, solving the problems of scattered layout and large space occupation of traditional open-loop systems. 2. Fully automatic closed-loop circulation improves production efficiency, realizing the synchronous automated flow of "full material in, empty material out" and "empty material in, full material out", eliminating the breakpoints in the traditional system where empty material boxes need to be returned externally or manually handled, and greatly improving the production cycle and material flow efficiency of the entire line. 3. The system is simplified, reducing maintenance costs. The integrated closed-loop design reduces the complexity of multi-system coordination and control, lowers equipment failure rate and maintenance costs, and improves system reliability and stability. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the structure of the three-axis material box robot in this utility model; Figure 3 This is a schematic diagram showing the cooperation between the gripper mechanism, the fixed bracket, and the material box in this utility model; Figure 4 This is a schematic diagram of the gripper mechanism in this utility model; Figure 5 This is a schematic diagram of the material box structure in this utility model; Figure 6 This is a schematic diagram of the dual-axis material box robot in this utility model; Figure 7 In this utility model Figure 6 Enlarged view of point A.
[0015] In the diagram: 1. Base; 2. Three-axis material box robot; 21. Support frame; 22. First X-axis linear module; 23. First Y-axis linear module; 24. First Z-axis linear module; 25. Gripper mechanism; 251. Fixing plate; 252. Hook; 2521. Limiting groove; 26. Fixed bracket; 5. Dual-axis material box conveyor; 51. Second Z-axis linear module; 52. X-axis conveying structure; 521. Support platform; 522. Transmission chain; 523. Sprocket assembly; 524. Servo motor; 525. Conveyor wheel; 526. Rotary shaft; 527. Z-axis sliding seat; 53. Stand; 54. Second Y-axis linear module; 6. Material box body; 61. Protruding shaft. Detailed Implementation
[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0017] Please see Figure 1-7 This utility model provides a technical solution: an automated loading and unloading device, including: a base 1, on which a dual-axis material box conveyor 5 and a three-axis material box robot 2 are installed, the dual-axis material box conveyor 5 and the three-axis material box robot 2 are located at both ends of the base 1, so that the base 1 has reserved space for movement; The dual-axis box conveyor 5 drives the box body 6 to move along the X and Z axes, and the three-axis box manipulator 2 drives the box body 6 to move along the X, Y and Z axes; When loading, the empty box body 6 enters the dual-axis box conveyor 5 at position one. The three-axis box robot 2 grabs the empty box body 6 at position one and places it on the empty box conveyor line for output. It also grabs the full box body 6 from the full conveyor line and places it on the dual-axis box conveyor 5 at position one. The dual-axis box conveyor 5 lifts the full box body 6 at position one along the Z-axis to position two and sends it into the processing equipment. When the material is unloaded, the dual-axis material box conveyor 5 receives the full material box body 6 at position two, descends to position one, and the three-axis material box robot 2 grabs the full material box body 6 and sends it to the full material box conveyor line for output. The three-axis material box robot 2 grabs the empty material box body 6 from the empty material conveyor line and places it at position one of the dual-axis material box conveyor 5, and sends it to the processing equipment.
[0018] The three-axis material box robot 2 includes a support frame 21, a first X-axis linear module 22, a first Y-axis linear module 23, a first Z-axis linear module 24, and a gripper mechanism 25; The support frame 21 is fixedly installed on the upper surface of the base 1. The first X-axis linear module 22 is fixedly installed on the upper end of the support frame 21. The first X-axis linear module 22 is driven to connect to the first Y-axis linear module 23. The first Y-axis linear module 23 is driven to connect to the first Z-axis linear module 24. The moving end of the first Z-axis linear module 24 is fixedly connected to the fixed bracket 26. The fixed bracket 26 is fixed with the hoisting gripper mechanism 25, which holds the material box body 6. The gripper mechanism 25 is driven by the first X-axis linear module 22, the first Y-axis linear module 23 and the first Z-axis linear module 24 to clamp the material box body 6 and move it along the X, Y and Z axes, and travel back and forth between the empty material box transport line, the full material box transport line and the position of the dual-axis material box transfer machine 5.
[0019] The gripper mechanism 25 includes two symmetrical fixing plates 251. The opposite sides of the two fixing plates 251 are integrally connected to hooks 252. Two symmetrical limiting grooves 2521 are opened at the upper end of the hooks 252. Two sets of convex shafts 61 are symmetrically installed on both sides of the material box body 6, and the convex shafts 61 are inserted into the limiting grooves 2521; The gripper mechanism 25 moves along the side to both sides of the material box body 6 and lifts it a certain distance so that the limiting groove 2521 hooks the convex shaft 61, thereby driving the material box body 6 to move.
[0020] The dual-axis box conveyor 5 includes a second Z-axis linear module 51, an X-axis conveying structure 52, a stand 53, and a second Y-axis linear module 54. The second Y-axis linear module 54 is fixedly installed on the upper surface of the base 1. The second Y-axis linear module 54 is driven and connected to the upright 53. The second Z-axis linear module 51 is fixedly installed on the side of the upright 53. The second Z-axis linear module 51 is driven and connected to the X-axis transmission structure 52. The X-axis transmission structure 52 is located at the lower end of the second Z-axis linear module 51 as position one, and the X-axis transmission structure 52 is located at the upper end of the second Z-axis linear module 51 as position two. The second Y-axis linear module 54 drives the second Z-axis linear module 51 to move along the Y-axis, and the second Z-axis linear module 51 drives the X-axis conveying structure 52 to move along the Z-axis, moving back and forth between position one and position two. The X-axis conveying structure 52 docks with the inlet and outlet ports of the process equipment.
[0021] The X-axis transmission structure 52 includes a Z-axis sliding seat 527, which is fixedly installed on the sliding end of the second Z-axis linear module 51. A support platform 521 is fixedly installed on the Z-axis sliding seat 527. Several rotating shafts 526 are rotatably installed inside the support platform 521. Transmission wheels 525 are sleeved on the rotating shafts 526. A sprocket assembly 523 is installed at the end of the rotating shaft 526. A transmission chain 522 is connected between the sprocket assemblies 523. The rotating shaft 526 at the end is connected to a servo motor 524, which is fixedly installed on the side of the support platform 521. The servo motor 524 drives one of the rotating shafts 526 to rotate, which in turn drives the other rotating shafts 526 to rotate synchronously through the transmission chain 522 and the sprocket combination 523, ultimately causing multiple conveyor wheels 525 to rotate, thereby moving the material box body 6 along the X-axis and receiving or outputting the material box body 6 into or out of the processing equipment.
[0022] Working principle: During the feeding process, the empty material box body 6 enters the dual-axis material box conveyor 5 at a certain position. The three-axis material box robot 2 grabs the empty material box body 6 at a certain position and places it on the empty material box conveyor line for output. The three-axis material box robot 2 grabs the full material box body 6 from the full material conveyor line and places it on the two-axis material box transfer machine 5 at a certain position; The dual-axis material box conveyor 5 lifts the full material box body 6 to position two through the second Z-axis linear module 51 and sends it into the upper high-temperature transmission line of the processing equipment.
[0023] During the unloading process, the dual-axis material box conveyor 5 receives the full material box body 6 that has completed the process at position two, and descends to position one through the second Z-axis linear module 51; The three-axis material box robot 2 grabs the full material box body 6 and places it on the full material box conveyor line for output; The three-axis material box robot 2 grabs the empty material box body 6 from the empty material conveyor line and places it at a position on the two-axis material box transfer machine 5. The dual-shaft material box conveyor 5 lowers the empty material box body 6 and transfers it to the lower layer of the main unit's insulated return line, realizing the automatic return of the empty material box.
[0024] The contents not described in detail in this specification are existing technologies known to those skilled in the art.
[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. An automated loading and unloading device, comprising: The base (1) is characterized in that: a dual-axis box transfer machine (5) and a three-axis box manipulator (2) are provided on the base (1), and the dual-axis box transfer machine (5) and the three-axis box manipulator (2) are located at both ends of the base (1); The dual-axis box transfer machine (5) drives the box body (6) to move along the X and Z axes, and the three-axis box manipulator (2) drives the box body (6) to move along the X, Y and Z axes; The three-axis box manipulator (2) includes a support frame (21), a first X-axis linear module (22), a first Y-axis linear module (23), a first Z-axis linear module (24), and a gripper mechanism (25). The gripper mechanism (25) includes two symmetrical fixing plates (251), and the opposite sides of the two fixing plates (251) are integrally connected to hooks (252). Two symmetrical limiting grooves (2521) are opened at the upper end of the hooks (252). Two sets of convex shafts (61) are symmetrically installed on both sides of the main body (6) of the material box, and the convex shafts (61) are inserted into the limiting groove (2521).
2. The automated loading and unloading equipment according to claim 1, characterized in that, The support frame (21) is fixedly installed on the upper surface of the base (1). The first X-axis linear module (22) is fixedly installed on the upper end of the support frame (21). The first X-axis linear module (22) is driven to connect to the first Y-axis linear module (23). The first Y-axis linear module (23) is driven to connect to the first Z-axis linear module (24). The moving end of the first Z-axis linear module (24) is fixedly connected to the fixed bracket (26).
3. The automated loading and unloading equipment according to claim 2, characterized in that, The fixed bracket (26) is fixed with a hoisting gripper mechanism (25), which holds the main body of the material box (6).
4. The automated loading and unloading equipment according to claim 1, characterized in that, The dual-axis box conveyor (5) includes a second Z-axis linear module (51), an X-axis conveying structure (52), a stand (53), and a second Y-axis linear module (54).
5. An automated loading and unloading device according to claim 4, characterized in that, The second Y-axis linear module (54) is fixedly installed on the upper surface of the base (1). The second Y-axis linear module (54) is driven and connected to the upright (53). The second Z-axis linear module (51) is fixedly installed on the side of the upright (53). The second Z-axis linear module (51) is driven and connected to the X-axis transmission structure (52).
6. An automated loading and unloading device according to claim 5, characterized in that, The X-axis transmission structure (52) includes a Z-axis sliding seat (527), which is fixedly installed on the sliding end of the second Z-axis linear module (51), and a support platform (521) is fixedly installed on the Z-axis sliding seat (527).
7. An automated loading and unloading device according to claim 6, characterized in that, Several rotating shafts (526) are rotatably installed inside the support platform (521). A transmission wheel (525) is sleeved on the rotating shaft (526). A sprocket assembly (523) is installed at the end of the rotating shaft (526). A transmission chain (522) is connected between the sprocket assemblies (523). The rotating shaft (526) at the end is connected to a servo motor (524). The servo motor (524) is fixedly installed on the side of the support platform (521).