A feeding machine

Abstract

The utility model discloses a kind of feeding machines, belong to electronic semiconductor technical field, including feeding machine main body, the feeding machine main body includes conveying frame, the bottom of conveying frame one end is equipped with support platform, the back of support platform one side is equipped with the mechanical hand of the convenient electronic semiconductor material grabbing of fixed frame installation, further include the abutment mechanism of installation in conveying frame one end, the abutment mechanism is used to limit the position of electronic semiconductor material that mechanical hand grabs, special mechanical hand at the support platform of conveying frame can realize electronic semiconductor material automation grabbing, replace artificial to avoid fatigue, improve efficiency and match high-speed processing equipment, abutment mechanism can accurately limit material position to guarantee positioning accuracy, while mechanical hand can reduce human pollution to maintain material cleanliness, guarantee terminal semiconductor device performance and yield.

Description

Technical Field

[0001] This utility model relates to the field of electronic semiconductor technology, specifically a feeding machine. Background Technology

[0002] In the field of electronic semiconductor manufacturing, wafers are the core processing substrate. Their processing precision and surface cleanliness directly determine the performance and yield of the final semiconductor devices. In the wafer processing flow, the transportation and loading of raw materials (including unprocessed wafer substrates, pre-processed wafers, and matching substrates) are key links connecting various processing steps (such as photolithography, etching, deposition, and inspection), and must meet the core requirements of "high-precision positioning, low-contamination contact, and efficient flow".

[0003] However, existing semiconductor production lines need to achieve multi-batch, continuous processing. Since manual loading requires handling, positioning, and calibration of each wafer, manual operation cannot meet the needs of high-speed continuous processing equipment. Furthermore, long-term repetitive mechanical actions can easily lead to operator fatigue, further reducing operational accuracy and efficiency, thus restricting the increase in production line capacity. Therefore, in order to solve the above-mentioned problems, an improved loading machine has been proposed. Utility Model Content

[0004] The purpose of this utility model is to provide a feeding machine in which a special robotic arm at the conveyor support platform can automatically grasp electronic semiconductor materials, replacing manual labor to avoid fatigue, improve efficiency and match high-speed processing equipment. The positioning mechanism can accurately limit the material position to ensure positioning accuracy. At the same time, the robotic arm can reduce human contamination to maintain the cleanliness of materials, ensuring the performance and yield of the final semiconductor devices, thereby solving the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a feeding machine, comprising a feeding machine body, the feeding machine body including a conveyor frame, a support platform installed at the bottom of one end of the conveyor frame, and a robotic arm for conveniently gripping electronic semiconductor materials installed on one side of the back of the support platform via a fixing frame; It also includes a positioning mechanism installed at one end of the conveyor, which is used to limit the position of the electronic semiconductor material grasped by the robot arm.

[0006] Preferably, the positioning mechanism includes a lifting assembly, a position adjustment assembly one, a position adjustment assembly two, and a position adjustment assembly three. The lifting assembly is installed on the top of the support platform, and the upper end of the lifting assembly is located between adjacent conveying rollers on the conveying frame. The position adjustment assembly one and the position adjustment assembly two are respectively distributed at both ends of the lifting assembly, and the position adjustment assembly three is distributed on the side of the lifting assembly.

[0007] Preferably, the lifting assembly includes a mounting base, one side of which is fixedly connected to the plane of the support platform. The plane of the support platform has a through hole, and a lifting cylinder is mounted on the other side of the mounting base. The lifting cylinder passes through the through hole and is located inside the support platform. The piston rod of the lifting cylinder is fixedly connected to a connecting rod, and support seats are fixedly connected at equal distances on the surface of the connecting rod. Each support seat is located between adjacent conveying rollers on the conveyor frame.

[0008] Preferably, the upper surface of the support base has equally spaced grooves, and the edges of each groove are rounded.

[0009] Preferably, the position adjustment assembly includes a support frame, the lower end of which is fixed to one end of a support platform, and an electric push rod is mounted on the top of the support frame. The piston end of the electric push rod is connected to a push plate.

[0010] Preferably, the position adjustment component two includes a support frame two, which is fixed on the conveyor frame. An electric push rod two is installed on the support frame two, and the piston end of the electric push rod two is connected to a push plate two that cooperates with the push plate one.

[0011] Preferably, the position adjustment component three includes a support frame three, which is fixed to the side of the upper surface of the support platform, and an electric slide is installed on the top of the support frame three. The piston end of the electric slide is connected to a push plate three.

[0012] Compared with the prior art, the beneficial effects of this utility model are: This utility model provides a feeding machine that automates the gripping of electronic semiconductor materials by installing a dedicated robotic arm on the conveyor support platform. This replaces manual handling of each wafer, effectively avoiding fatigue caused by long-term repetitive work and significantly improving feeding efficiency. It can meet the needs of high-speed continuous processing equipment. At the same time, the added positioning mechanism can precisely limit the position of the gripped material, ensuring material positioning accuracy and solving the problem of fluctuations in accuracy during manual operation. In addition, the robotic arm replaces manual contact with materials, reducing the impact of human contaminants on sensitive substrates such as wafers, helping to maintain the cleanliness of the material surface, and ensuring the performance and yield of the final semiconductor devices.

[0013] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention can be realized and obtained through the structures pointed out in the description and the accompanying drawings. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the positioning mechanism and robotic arm structure of this utility model; Figure 3 This is a rear view schematic diagram of the support platform structure of this utility model; Figure 4 This is a schematic diagram of the position adjustment component of this utility model; Figure 5 This is a schematic diagram of the second position adjustment component of this utility model; Figure 6 This is a schematic diagram of the three-dimensional structure of the position adjustment component of this utility model.

[0015] Numbered in the diagram: 1. Main body of the feeding machine; 101. Conveyor frame; 102. Support platform; 103. Robotic arm; 2. Alignment mechanism; 21. Lifting assembly; 211. Mounting base; 212. Through hole; 213. Lifting cylinder; 214. Connecting rod; 215. Support base; 216. Groove; 22. Position adjustment assembly one; 221. Support frame one; 222. Electric push rod one; 223. Push plate one; 23. Position adjustment assembly two; 231. Support frame two; 232. Electric push rod two; 233. Push plate two; 24. Position adjustment assembly three; 241. Support frame three; 242. Electric slide table; 243. Push plate three. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] This utility model provides, for example Figures 1-6 The feeding machine shown includes a feeding machine body 1. The feeding machine body 1 includes a core load-bearing structure with a conveyor frame 101. A support platform 102 at the bottom of one end of the conveyor frame 101 provides a stable mounting base for a robot arm 103. The robot arm 103 is fixed to one side of the back of the support platform 102 by a fixing frame. The gripping structure of the robot arm 103 is adapted to the shape characteristics of electronic semiconductor materials, and can realize the stable gripping of materials such as wafers and substrates. The positioning mechanism 2 is installed at the same end of the conveyor frame 101 and precisely corresponds to the working area of ​​the robot arm 103. During operation, the robot arm 103 first grabs electronic semiconductor materials from the material storage area and then moves the materials to the initial conveying position of the conveyor frame 101. At this time, the positioning mechanism 2 immediately starts to limit the position of the materials, thus replacing the traditional mode of manual handling and positioning. The automated operation of the robotic arm 103 can match the cycle time requirements of high-speed continuous processing equipment, avoiding accuracy fluctuations caused by human fatigue. The positioning mechanism 2 ensures the consistency of material loading position from the source, solving the problem of low efficiency of manual calibration. At the same time, the dedicated gripping structure of the robotic arm 103 can reduce material contact contamination, meeting the stringent cleanliness requirements of semiconductor processing.

[0018] The positioning mechanism 2 includes a lifting assembly 21, a first position adjustment assembly 22, a second position adjustment assembly 23, and a third position adjustment assembly 24. The lifting assembly 21 is installed on the top of the support platform 102, and its upper end is cleverly fitted between adjacent conveying rollers on the conveyor frame 101, which neither interferes with the normal operation of the conveying rollers nor fails to accurately receive materials. The first position adjustment assembly 22 and the second position adjustment assembly 23 are symmetrically distributed at both ends of the lifting assembly 21 to form a bidirectional centering adjustment structure. The third position adjustment assembly 24 is distributed on the side of the lifting assembly 21 to form a lateral limit. After the robotic arm 103 places the material on the lifting assembly 21, the lifting assembly 21 first lifts the material to the height above the conveying roller. Then, the position adjustment assembly 1 22 and its actuators approach the material synchronously from both ends to achieve centering and positioning of the material in the conveying direction. The position adjustment assembly 3 24 presses the material from the side to complete the lateral position limitation of the material. After positioning is completed, the lifting assembly 21 resets and places the material smoothly on the conveying roller. This changes the accuracy limitation of single-direction positioning, meets the core requirement of high-precision positioning of semiconductor materials, and the components are reasonably distributed to avoid motion interference, thus improving the stability of the mechanism operation.

[0019] The lifting assembly 21 includes a mounting base 211, which is fixedly connected to the support platform 102. One side of the mounting base 211 is fixedly connected to the plane of the support platform 102. The through hole 212 opened in the plane of the support platform 102 provides installation space for the lifting cylinder 213, so that the lifting cylinder 213 can be embedded into the support platform 102 after passing through the through hole 212. The embedded installation saves space and improves structural stability. The piston rod of the lifting cylinder 213 is connected to the connecting rod 214. The support seats 215, which are fixedly connected at equal intervals on the surface of the connecting rod 214, correspond one-to-one with the spacing of the adjacent conveying rollers on the conveyor frame 101, ensuring that each support seat 215 can be accurately positioned between the conveying rollers. During operation, after receiving the control signal, the lifting cylinder 213 drives the connecting rod 214 to rise and fall in the vertical direction. The connecting rod 214 simultaneously drives each support seat 215 to rise and fall. When the support seat 215 rises to the set height, the upper surface of the support seat 215 is higher than the surface of the conveying roller, thus achieving stable support for the material. After positioning, the support 215 descends with the piston rod, and the material naturally falls onto the conveyor rollers for subsequent conveying.

[0020] The upper surface of the support base 215 has equally spaced grooves 216, and the edges of each groove 216 are rounded. During operation, after the material is placed on the support base 215, the grooves 216 can radially limit the material and prevent the material from sliding in the horizontal direction. The rounded corner structure avoids scratching the material surface by sharp edges during the placement and removal of the material, and also reduces frictional damage between the material and the support base 215.

[0021] The position adjustment assembly 22 includes a support frame 221. The lower end of the support frame 221 is rigidly fixed to one end of the support platform 102, providing a stable installation base for the entire position adjustment assembly 22. The electric push rod 222 installed on the top of the support frame 221 serves as the actuating component. The push plate 223 connected to the piston end of the electric push rod 222 is made of flexible material to avoid hard collision with the material. When the material is lifted by the support seat 215, the electric push rod 222 receives the control signal, and the piston end drives the push plate 223 to move closer to the material in the horizontal direction until the push plate 223 is in contact with the side of the material. At this time, the electric push rod 222 maintains a certain thrust according to the preset parameters to provide a positioning reference for one end of the material. Through the external power supply and control system of the electric push rod, it can have the characteristics of high adjustment accuracy and controllable thrust. The stroke of the push plate 223 can be flexibly adjusted according to the semiconductor materials of different sizes to meet the positioning requirements of multiple specifications of materials. The design of the flexible push plate 223 ensures the positioning effect while avoiding damage to the material surface. At the same time, the fixed support frame 221 ensures that the components do not shake during the adjustment process, further improving the positioning accuracy.

[0022] Position adjustment component 23 and position adjustment component 1 22 form a symmetrical matching structure to achieve bidirectional centering of the material. Position adjustment component 23 is fixed on the conveyor frame 101 by support frame 231, forming a symmetrical positioning structure with position adjustment component 1 22 at one end of support platform 102. The electric push rod 232 installed on support frame 231 is of the same model as electric push rod 1 222. The push plate 233 connected to the piston end of electric push rod 232 has the same structure as push plate 1 223, ensuring balanced clamping force on the material. During operation, while the push plate 223 of the position adjustment component 1 22 is in contact with one end of the material, the electric push rod 232 of the position adjustment component 23 drives the push plate 233 to move towards the other end of the material synchronously. When both the push plate 1 223 and the push plate 233 are in contact with the material and reach the preset pressure, the electric push rod 1 222 and the electric push rod 222 stop moving, thus completing the centering and positioning of the material in that direction. By adjusting synchronously at both ends, the central axis of the material is precisely aligned with the central axis of the conveyor frame 101, avoiding positioning deviations that may be caused by unidirectional adjustment. The symmetrical structure ensures that the material is subjected to balanced forces, preventing deformation due to uneven forces. At the same time, the coordinated control of the electric push rod improves positioning efficiency and adapts to the high-speed operation requirements of the production line.

[0023] Position adjustment component 3 24 serves as a lateral positioning mechanism, forming a three-dimensional positioning system with position adjustment component 1 22 and position adjustment component 2 23. Position adjustment component 3 24 includes support frame 3 241, which is fixed to the side of the upper plane of support platform 102. An electric slide 242 is installed on the top of support frame 3 241, and a push plate 3 243 is connected to the piston end of electric slide 242.

[0024] During operation, after the position adjustment components 1 22 and 23 complete the alignment of the two ends of the material, the electric slide 242 of the position adjustment component 3 24 drives the push plate 3 243 to laterally press the material from the side, thus finally limiting the lateral position of the material and forming an all-round positioning with alignment of both ends and lateral limit. Lateral limiting fills the precision gap in bidirectional centering and positioning, completely fixing the spatial position of the material on the conveyor frame 101, and thoroughly solving the problem of material deviation that may occur during the transfer process. The coordinated operation of position adjustment component 3 24 with position adjustment component 1 22 and position adjustment component 2 23 enables the positioning accuracy to meet the standards of semiconductor processing, ensuring the precise docking of subsequent gripping or conveying processes by robot arm 103, and further improving the processing yield and efficiency of the entire production line.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A feeding machine, characterized in that: The machine includes a main body (1) of a feeding machine, which includes a conveyor frame (101). A support platform (102) is installed at the bottom of one end of the conveyor frame (101). A robotic arm (103) for grabbing electronic semiconductor materials is installed on one side of the back of the support platform (102) through a fixing frame. It also includes a positioning mechanism (2) installed at one end of the conveyor (101), the positioning mechanism (2) being used to define the position of the electronic semiconductor material grasped by the robot (103).

2. The feeding machine according to claim 1, characterized in that: The positioning mechanism (2) includes a lifting assembly (21), a position adjustment assembly one (22), a position adjustment assembly two (23), and a position adjustment assembly three (24). The lifting assembly (21) is installed on the top of the support platform (102), and the upper end of the lifting assembly (21) is located between adjacent conveying rollers on the conveyor frame (101). The position adjustment assembly one (22) and the position adjustment assembly two (23) are respectively distributed at both ends of the lifting assembly (21), and the position adjustment assembly three (24) is distributed on the side of the lifting assembly (21).

3. The feeding machine according to claim 2, characterized in that: The lifting assembly (21) includes a mounting base (211), one side of which is fixedly connected to the plane of the support platform (102). The plane of the support platform (102) has a through hole (212). A lifting cylinder (213) is installed on the other side of the mounting base (211). The lifting cylinder (213) passes through the through hole (212) and is located inside the support platform (102). The piston rod of the lifting cylinder (213) is fixedly connected to a connecting rod (214). Support seats (215) are fixedly connected at equal distances on the surface of the connecting rod (214). Each support seat (215) is located between adjacent conveying rollers on the conveyor frame (101).

4. A feeding machine according to claim 3, characterized in that: The upper surface of the support base (215) is provided with grooves (216) at equal intervals, and the edges of each groove (216) are rounded.

5. A feeding machine according to claim 4, characterized in that: The position adjustment component 1 (22) includes a support frame 1 (221), the lower end of which is fixed to one end of the support platform (102), and an electric push rod 1 (222) is installed on the top of the support frame 1 (221). The piston end of the electric push rod 1 (222) is connected to a push plate 1 (223).

6. A feeding machine according to claim 5, characterized in that: The position adjustment component two (23) includes a support frame two (231), which is fixed on the conveyor frame (101). An electric push rod two (232) is installed on the support frame two (231), and the piston end of the electric push rod two (232) is connected to a push plate two (233) that works in conjunction with the push plate one (223).

7. A feeding machine according to claim 6, characterized in that: The position adjustment component three (24) includes a support frame three (241), which is fixed to the side of the upper plane of the support platform (102). An electric slide (242) is installed on the top of the support frame three (241), and a push plate three (243) is connected to the piston end of the electric slide (242).

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