A silicon wafer storage mechanism for a sorting machine

Abstract

The utility model relates to sorting machine is with silicon wafer storage mechanism, including translation mechanism, including parallelly arranged upper translation subassembly and lower translation subassembly, first material box is connected the upper translation subassembly, telescopic subassembly is connected the lower translation subassembly, second material box is connected telescopic subassembly, wherein, the moving direction of upper translation subassembly with lower translation subassembly is opposite, telescopic subassembly is perpendicular to the moving direction of lower translation subassembly, and sets up towards the upper translation subassembly. The utility model drives first material box and second material box to move alternately through upper translation subassembly and lower translation subassembly, ensures that always has material box to receive silicon wafer, promotes the storage efficiency of silicon wafer. Simultaneously through telescopic subassembly drive second material box to the position of first material box moves, makes first material box and second material box, receives the position of silicon wafer and the position of silicon wafer unloading same, is convenient for mechanical arm to receive silicon wafer, also is convenient for unloading the silicon wafer in material box and stores. Promote the storage efficiency of sorting machine is with silicon wafer storage mechanism.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production equipment technology, and in particular to a silicon wafer storage mechanism for a sorting machine. Background Technology

[0002] In automated silicon wafer production, the finished silicon wafers are transferred by a robotic arm into the material box of the receiving mechanism for easy storage.

[0003] To improve storage efficiency, the storage mechanism uses two trays that alternately move silicon wafers, reducing downtime. The two trays are driven by a translation mechanism, moving between two positions: receiving and unloading silicon wafers for storage. To avoid interference between the two trays, their movement paths differ, resulting in different wafer receiving and unloading positions. The robotic arm needs to switch positions when moving wafers between different trays, making the wafer storage process more complex and increasing the complexity of the robotic arm's structure.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a silicon wafer storage mechanism for a sorting machine, so that the storage position of the silicon wafers is always consistent.

[0006] The technical solution of this utility model is as follows: The silicon wafer storage mechanism for the sorting machine includes: The translation mechanism includes an upper translation component and a lower translation component arranged in parallel. The first material box is connected to the upper translation component; The telescopic component is connected to the lower translation component; The second material box is connected to the telescopic assembly; The upper translation component and the lower translation component move in opposite directions; the telescopic component is perpendicular to the moving direction of the lower translation component and is positioned towards the upper translation component.

[0007] A further technical solution is that the upper translation component includes an upper slide rail and an upper slider that is slidably connected to the upper slide rail; the first material box is connected to the upper slider.

[0008] A further technical solution is that the lower translation component includes a lower slide rail and a lower slider that is slidably connected to the lower slide rail; the telescopic component is connected to the lower slider.

[0009] A further technical solution is to provide a pulley and a synchronous belt that cooperates with the pulley; two parallel sections of the synchronous belt, one end of which is connected to the upper slider and the other end of which is connected to the lower slider.

[0010] A further technical solution is that the pulley is connected to a motor; the motor is a stepper motor.

[0011] A further technical solution is to include a connecting block; the connecting block is fixed on the mounting plane; the connecting block is rotatably connected to the pulley via a bearing and a rotating shaft.

[0012] A further technical solution is to provide a connecting seat; the connecting seat is connected to the lower translation component; the telescopic component is disposed on the connecting seat.

[0013] A further technical solution is that, along the telescopic direction of the telescopic component, a guide rod is provided on the connecting seat; and a slot is provided on the second material box for the guide rod to extend into.

[0014] A further technical solution is that the telescopic component is a cylinder; the cylinder body is connected to the lower translation component; and the telescopic end of the cylinder is connected to the second material box.

[0015] The beneficial technical effects of this utility model are as follows: (1) The silicon wafer collecting mechanism for the sorting machine in this utility model is provided with a first material box and a second material box, which are driven alternately by an upper translation component and a lower translation component, respectively. This ensures that there is always a material box available to collect silicon wafers, thereby improving the silicon wafer collecting efficiency. In addition, the second material box is also connected to a telescopic component. When the second material box moves to the position for receiving or unloading silicon wafers, it can be driven to move towards the position of the first material box through the telescopic component, so that the positions for receiving and unloading silicon wafers are the same for both the first and second material boxes. This facilitates the stacking of silicon wafers by the robotic arm and also makes it easier to remove the silicon wafers from the material box. This improves the utilization efficiency of the silicon wafer collecting mechanism for the sorting machine.

[0016] (2) Furthermore, the first and second material boxes are driven to move in opposite directions by pulleys and timing belts. The teeth of the pulleys and timing belts mesh, resulting in high transmission accuracy without slippage. The structure of the pulleys and timing belts also eliminates the need for complex auxiliary structures such as tensioners, making the structure simple and space-saving.

[0017] (3) Furthermore, a guide rod is provided on the connecting seat to cooperate with the second material box, thereby improving the stability of the second material box during the lifting process and reducing vibration to avoid damage to the silicon wafer caused by vibration. Attached Figure Description

[0018] Figure 1 A three-dimensional structural schematic diagram of a silicon wafer storage mechanism for a sorting machine according to an embodiment of the present disclosure is shown.

[0019] Figure 2 A partially enlarged view of a silicon wafer storage mechanism for a sorting machine according to an embodiment of the present disclosure is shown at point A.

[0020] Marked in the attached diagram: 1. Synchronous belt; 11. Pulley; 2. Upper translation assembly; 21. Upper slide rail; 22. Upper slider; 3. Lower translation assembly; 31. Lower slide rail; 32. Lower slider; 4. First material box; 5. Second material box; 51. Telescopic assembly; 52. Connecting seat; 53. Guide rod; 6. Connecting block. Detailed Implementation

[0021] To make the objectives, features, and advantages of this utility model more apparent and understandable, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the content disclosed herein. They are not intended to limit the implementation conditions of this utility model and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0022] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0023] Figure 1 A three-dimensional structural schematic diagram of a silicon wafer storage mechanism for a sorting machine according to an embodiment of the present disclosure is shown. Figure 2 A partially enlarged view at point A is shown of a silicon wafer receiving mechanism for a sorting machine according to an embodiment of this disclosure. Please refer to... Figure 1 and Figure 2The silicon wafer receiving mechanism for the sorting machine includes a translation mechanism, comprising an upper translation component 2 and a lower translation component 3 arranged in parallel. A first material box 4 is connected to the upper translation component 2. A telescopic component 51 is connected to the lower translation component 3. A second material box 5 is connected to the telescopic component 51. The upper translation component 2 and the lower translation component 3 move in opposite directions. The upper translation component 2 and the lower translation component 3 drive the first material box 4 and the second material box 5 to move alternately, ensuring that there is always a material box available to receive silicon wafers, thus improving the wafer receiving efficiency. The telescopic component 51 is perpendicular to the moving direction of the lower translation component 3 and is positioned towards the upper translation component 2. When the second material box 5 moves to the position for receiving or unloading silicon wafers, it can be driven by the telescopic component 51 to move towards the position of the first material box 4, so that the positions for receiving and unloading silicon wafers are the same for both the first and second material boxes 4 and 5. This facilitates the stacking of silicon wafers by the robotic arm and the removal of silicon wafers from the material boxes, improving the overall efficiency of the silicon wafer receiving mechanism for the sorting machine.

[0024] Please refer to Figure 1 and Figure 2 The upper translation component 2 includes an upper slide rail 21 and an upper slider 22 slidably connected to the upper slide rail 21. The first material box 4 is connected to the upper slider 22. The lower translation component 3 includes a lower slide rail 31 and a lower slider 32 slidably connected to the lower slide rail 31. The telescopic component 51 is connected to the lower slider 32. The upper slide rail 21 and the lower slide rail 31 serve as guides, ensuring that the first material box 4 and the second material box 5 move along a preset path to a preset position to receive or unload silicon wafers.

[0025] Preferably, a pulley 11 and a synchronous belt 1 that meshes with the pulley 11 are also provided. Two parallel sections of the synchronous belt 1 are connected at one end to an upper slider 22 and at the other end to a lower slider 32, driving the first material box 4 and the second material box 5 to move in opposite directions. The teeth of the pulley 11 and the synchronous belt 1 mesh, resulting in slippage and high transmission accuracy. The structure of the pulley 11 and the synchronous belt 1 also eliminates the need for complex auxiliary structures such as tensioners, simplifying the structure and saving space. Specifically, two pulleys 11 are provided, and the synchronous belt 1 is fitted onto the two pulleys 11 and rotates around them. One pulley 11 is connected to a motor as the driving pulley, and the other pulley 11 is not connected to a motor as the driven pulley. This avoids both pulleys 11 rotating actively, preventing asynchrony between the two pulleys 11 and causing overload, slippage, or damage to the synchronous belt 1. A clamping block (not shown in the figure) is provided on the synchronous belt 1. The clamping block includes two opposing clamping plates (not shown in the figure). The synchronous belt 1 passes through the gap between the two clamping plates. The two clamping plates are fastened together with bolts. The timing belt 1 is connected to the upper slider 22 and the lower slider 32 via clamping bolts.

[0026] In some embodiments, the upper slide rail 21 and the lower slide rail 31 are arranged horizontally, and the telescopic component 51 is also arranged horizontally to drive the second material box 5 to move laterally.

[0027] Please refer to Figure 1 and Figure 2 It is also equipped with a connecting seat 52. The connecting seat 52 connects to the lower translation component 3. The telescopic component 51 is set on the connecting seat 52. The telescopic component 51 is connected to the lower translation component 3 through the connecting seat 52, which facilitates the downward translation of the telescopic component 51 and avoids interference between the upper end of the telescopic component 51 and the first material box 4.

[0028] Preferably, a guide rod 53 is provided on the connecting seat 52 along the telescopic direction of the telescopic assembly 51. A slot (not shown in the figure) is provided on the second material box 5 for the guide rod 53 to extend into. This improves the stability of the second material box 5 during the lifting process and reduces vibration to avoid damage to the silicon wafer caused by vibration.

[0029] Please refer to Figure 1 and Figure 2 The telescopic component 51 is a cylinder. The cylinder body is connected to the lower translation component 3. The telescopic end of the cylinder is connected to the second material box 5, driving the second material box 5 to move up and down.

[0030] Preferably, the pulley 11 is connected to a motor. The motor is a stepper motor. The stepper motor is directly controlled to rotate forward and backward via pulse signals. In actual operation, rapid switching can be achieved by adjusting the pulse signals through the controller. The structure is simple and the response is fast.

[0031] More preferably, a connecting block 6 is also provided. The connecting block 6 is fixed to the mounting plane. The connecting block 6 is rotatably connected to the pulley 11 via a bearing and a rotating shaft to rotatably fix the pulley 11 to the mounting plane. The connecting block 6 can be fixed to the mounting plane by bolts. The mounting plane can be the housing of the silicon wafer processing equipment.

[0032] The specific workflow of this utility model is as follows: First, the receiving mechanism collects silicon wafers via the first material box 4. Once the first material box 4 is full, the motor drives the pulley 11 to rotate, which in turn drives the synchronous belt 1 to move cyclically. The upper slider 22 is driven by the synchronous belt 1 to move along the upper slide rail 21 away from the receiving position, thereby driving the first material box 4 to move away from the silicon wafer receiving position until the first material box 4 reaches the position for removing the silicon wafers. At this point, the silicon wafers in the first material box 4 can be removed and stored. During this process, the synchronous belt 1 drives the lower slider 32 to move along the lower slide rail 31 towards the silicon wafer receiving position. Simultaneously, as the first material box 4 moves to the silicon wafer removal position, the second material box 5 moves below the silicon wafer receiving position. The telescopic component 51 is activated, pushing the second material box 5 up to the height of the first material box 4, allowing the second material box 5 to enter the silicon wafer receiving position. After the second material box 5 is full, the motor is activated to output torque in the opposite direction, moving the first material box 4 to the silicon wafer receiving position and the second material box 5 to the silicon wafer removal and storage position.

[0033] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0034] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A silicon wafer storage mechanism for a sorting machine, characterized in that, The silicon wafer storage mechanism for the sorting machine includes: The translation mechanism includes an upper translation component and a lower translation component arranged in parallel. The first material box is connected to the upper translation component; The telescopic component is connected to the lower translation component; The second material box is connected to the telescopic assembly; The upper translation component and the lower translation component move in opposite directions; the telescopic component is perpendicular to the moving direction of the lower translation component and is positioned towards the upper translation component.

2. The silicon wafer storage mechanism for a sorting machine as described in claim 1, characterized in that: The upper translation component includes an upper slide rail and an upper slider that is slidably connected to the upper slide rail; the first material box is connected to the upper slider.

3. The silicon wafer storage mechanism for a sorting machine as described in claim 2, characterized in that: The downward translation component includes a lower slide rail and a lower slider that is slidably connected to the lower slide rail; the telescopic component is connected to the lower slider.

4. The silicon wafer storage mechanism for a sorting machine as described in claim 3, characterized in that: It is also provided with a pulley and a timing belt that cooperates with the pulley; two parallel sections of the timing belt, one end of which is connected to the upper slider and the other end of which is connected to the lower slider.

5. The silicon wafer storage mechanism for a sorting machine as described in claim 4, characterized in that: The pulley is connected to a motor; the motor is a stepper motor.

6. The silicon wafer storage mechanism for a sorting machine as described in claim 5, characterized in that: A connecting block is also provided; the connecting block is fixed on the mounting plane; the connecting block is rotatably connected to the pulley through bearings and a rotating shaft.

7. The silicon wafer storage mechanism for a sorting machine as described in claim 1, characterized in that: It is also provided with a connecting seat; the connecting seat is connected to the lower translation component; the telescopic component is disposed on the connecting seat.

8. The silicon wafer storage mechanism for a sorting machine as described in claim 7, characterized in that: Along the telescopic direction of the telescopic assembly, a guide rod is provided on the connecting seat; a slot is provided on the second material box for the guide rod to extend into.

9. The silicon wafer storage mechanism for a sorting machine as described in claim 1, characterized in that: The telescopic component is a cylinder; the cylinder body is connected to the lower translation component; the telescopic end of the cylinder is connected to the second material box.

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