Auxiliary device for producing quartz tube and quartz rod without stopping furnace

Abstract

The utility model relates to the technical field of fused silica production, disclose a kind of quartz tube and quartz rod auxiliary device of not stopping furnace production, including siphon generator, core rod, nitrogen pipeline, exhaust pipe, exhaust hole and control valve, siphon generator is equipped with the reduced diameter runner, core rod is equipped with vent, by control valve selectively obstructs exhaust hole or intercommunication exhaust pipe: obstructs exhaust hole, and provides positive pressure gas production quartz tube to vent;Intercommunication exhaust pipe, high-speed nitrogen gas flows through reduced diameter runner and produces negative pressure and extracts fused silica, and production quartz rod.The utility model solves the problem that the prior art switching production mode must stop furnace, and seamless conversion between two kinds of products can be realized by valve switching, which significantly improves production efficiency and energy utilization rate, and the device has high integration, and is simple and reliable to operate.

Description

Technical Field

[0001] This utility model relates to the technical field of quartz product production by continuous melting method, and in particular to an auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace. Background Technology

[0002] Quartz tubes and rods are essential basic materials in semiconductors, photovoltaics, chemicals, and other fields. Their production typically involves continuous drawing in a continuous melting furnace. In the traditional continuous melting process, the production of hollow quartz tubes and solid quartz rods depends on two different forming conditions.

[0003] Specifically, in the production of quartz tubes, forming gas needs to be continuously introduced into the center of the molten quartz glass through a hollow core rod. The gas pressure is used to form a stable gas cavity inside the melt, thereby maintaining its hollow structure during the drawing process.

[0004] However, when it is necessary to switch to producing solid quartz rods, the molding gas must be stopped, and it must be ensured that the molten quartz glass completely fills the corresponding central area of ​​the core rod to form a solid structure.

[0005] In existing technologies, switching between these two production modes is typically a complex and costly process. Production lines often need to be shut down, i.e., the furnace is stopped, to allow for mechanical replacement or major adjustments to the core rod system or gas supply unit. This shutdown not only causes severe production disruptions, but the cooling and reheating of the furnace consumes a significant amount of energy, greatly increasing production costs and reducing overall production efficiency.

[0006] Therefore, this utility model proposes an auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace, in order to overcome the shortcomings of the prior art. Utility Model Content

[0007] In view of the problems in the existing auxiliary devices for non-stop furnace production of quartz tubes and quartz rods, which require furnace shutdown for mechanical replacement or adjustment when switching between quartz tube and quartz rod production modes, resulting in production interruption, energy waste and complicated operation, this utility model aims to provide an auxiliary device for non-stop furnace production of quartz tubes and quartz rods with an improved structure that can effectively solve the above problems.

[0008] This utility model provides an auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace, comprising: a siphon generator; a core rod, the upper part of which is connected to the siphon generator, and a vent hole provided inside the core rod; a nitrogen pipe, the outlet end of which is connected to the siphon generator; an exhaust pipe, the inlet end of which is connected to the bottom of the siphon generator; and an exhaust port, which is provided in the siphon generator.

[0009] The siphon generator has an internal narrowing channel for creating a negative fluid pressure between the nitrogen pipe and the exhaust pipe. This narrowing channel is configured to guide the airflow from the nitrogen pipe to accelerate towards the exhaust pipe.

[0010] Furthermore, the device also includes a control valve configured to selectively block the passage of the exhaust port or switch to the passage connecting the exhaust pipe. By switching the two different flow paths through the control valve, the siphon generator can switch between positive pressure gas delivery function and negative pressure suction function.

[0011] Preferably, the auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace also includes a hydrogen pipeline. The outlet end of the hydrogen pipeline is connected to the siphon generator, and its outlet is located upstream of the vent hole. This structure allows hydrogen and nitrogen to be premixed before entering the vent hole.

[0012] Preferably, based on the above scheme, a hydrogen control valve is installed on the hydrogen pipeline, and a nitrogen control valve is installed on the nitrogen pipeline. The hydrogen control valve and the nitrogen control valve are used to control the on / off of the corresponding pipelines respectively, thereby achieving precise control of the mixed gas ratio.

[0013] Preferably, the auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace also includes a vacuum gauge. The vacuum gauge is installed on the siphon generator and its monitoring port is connected to the vent hole. The vacuum gauge is used to display the pressure value in the vent hole in real time, whether it is the positive pressure value when producing quartz tubes or the negative pressure value when producing quartz rods.

[0014] Preferably, as a specific pipeline layout, both the nitrogen pipeline and the hydrogen pipeline are connected to the side of the siphon generator by a fixed connection. This layout facilitates centralized access to external pipelines and subsequent installation and maintenance.

[0015] Preferably, for ease of centralized control, both the hydrogen control valve and the nitrogen control valve are installed on the upstream pipeline of the siphon generator, and the gas supply can be switched by operating the two valves remotely or locally.

[0016] Preferably, to ensure structural stability and flow path alignment, the lower end of the core rod is vertically fixed to the top outlet of the siphon generator. This vertical fixing method ensures smooth communication between the vent and the internal channel of the siphon generator.

[0017] Preferably, to maximize the negative pressure suction efficiency, the axis of the narrowed flow channel is coaxial with the axis of the exhaust pipe. This coaxial arrangement ensures that the high-speed nitrogen flow accelerated by the narrowed flow channel can directly rush into the exhaust pipe with minimal resistance, thereby generating the strongest negative pressure at the connection of the vent.

[0018] This utility model has the following beneficial effects: 1. This utility model solves the problem in the prior art that the production of quartz tubes and quartz rods requires furnace shutdown and equipment switching, resulting in production interruption and energy waste, by setting up a siphon generator, an exhaust pipe, an exhaust hole, and a control valve that can switch between the exhaust hole passage and the exhaust pipe passage. It achieves the technical effect of quickly and flexibly switching between the two production modes of hollow quartz tubes and solid quartz rods without stopping the continuous melting furnace, which significantly improves production efficiency.

[0019] 2. This utility model cleverly integrates the positive pressure gas delivery function and the negative pressure suction function into the same siphon generator, and uses a single control valve to switch functions. This solves the problems of complex structure and the need for multiple independent systems or mechanical modifications in traditional switching schemes, and achieves the technical effect of compact device structure, high integration, simple operation and easy automation control.

[0020] 3. This utility model solves the problem of unclear internal pressure state of the core rod and difficulty in guaranteeing molding quality under different production modes by setting a vacuum gauge connected to the vent hole of the core rod. It achieves the technical effect of real-time monitoring of the stability of the positive pressure chamber or the degree of negative pressure adsorption, ensuring the reliability of product quality and improving yield. Attached Figure Description

[0021] Figure 1 This is a three-dimensional schematic diagram of an auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace, as proposed in this utility model. Figure 2 This is a schematic diagram of the pressure reducing valve of an auxiliary device for non-stop furnace production of quartz tubes and quartz rods proposed in this utility model. Figure 3 This is a schematic diagram of the siphon generator, which is an auxiliary device for the non-stop production of quartz tubes and quartz rods according to this utility model.

[0022] Legend: 1. Siphon generator; 2. Vacuum gauge; 3. Vent; 4. Core rod; 5. Hydrogen pipeline; 6. Nitrogen pipeline; 7. Hydrogen control valve; 8. Nitrogen control valve; 9. Exhaust pipe; 10. Control valve; 11. Exhaust port. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model. Example

[0024] Please refer to Figures 1 to 3 This utility model provides an auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace. It aims to solve the problem in the prior art that when switching between the production of quartz tubes and quartz rods, it is usually necessary to stop the furnace to replace the core rod 4 or adjust the equipment, which leads to production interruption, energy waste and complicated operation.

[0025] like Figure 1 and Figure 3 As shown, the auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace includes a siphon generator 1, the lower end of a core rod 4 is vertically fixed to the top outlet of the siphon generator 1, the upper part of the core rod 4 is connected to the siphon generator 1, a vent hole 3 is provided inside the core rod 4, the outlet end of the nitrogen pipe 6 is connected to the siphon generator 1, the inlet end of the exhaust pipe 9 is connected to the bottom of the siphon generator 1, an exhaust port 11 is provided in the siphon generator 1, and a narrowing flow channel is provided inside the siphon generator 1 to form a fluid negative pressure between the nitrogen pipe 6 and the exhaust pipe 9, and the axis of the narrowing flow channel is coaxial with the axis of the exhaust pipe 9. The device also includes a control valve 10, which is configured to selectively block the passage of the exhaust port 11 or switch to the passage connected to the exhaust pipe 9.

[0026] To ensure stable operation and monitoring of the two production modes mentioned above, the auxiliary device for producing quartz tubes and rods without shutting down the furnace also includes a hydrogen pipeline 5, a hydrogen control valve 7, a nitrogen control valve 8, and a vacuum gauge 2.

[0027] Please refer to the following carefully. Figure 1 , Figure 2 and Figure 3 The following is a detailed explanation of the fit between these structures: The device also includes a hydrogen pipeline 5, the outlet of which is connected to the siphon generator 1 and its outlet is located upstream of the vent 3. A hydrogen control valve 7 is installed on the hydrogen pipeline 5, and a nitrogen control valve 8 is installed on the nitrogen pipeline 6. Both the hydrogen control valve 7 and the nitrogen control valve 8 are installed on the upstream pipeline of the siphon generator 1. The hydrogen control valve 7 is used to control the opening and closing of the hydrogen pipeline 5, and the nitrogen control valve 8 is used to control the opening and closing of the nitrogen pipeline 6. When producing quartz tubes, the hydrogen control valve 7 and the nitrogen control valve 8 open together, so that hydrogen and nitrogen can be mixed and enter the vent 3.

[0028] Meanwhile, the device also includes a vacuum gauge 2, which is installed on the siphon generator 1 and has its monitoring port connected to the vent 3. The vacuum gauge 2 is used to monitor the pressure state inside the vent 3 in real time. In the production of quartz tube mode, the vacuum gauge 2 is used to monitor the positive pressure of the gas inside to ensure the stability of the gas chamber. In the production of quartz rod mode, the vacuum gauge 2 is used to monitor the negative pressure value inside to judge the adsorption effect.

[0029] As a preferred structure in this embodiment, both the nitrogen pipeline 6 and the hydrogen pipeline 5 are connected to the side of the siphon generator 1 by a fixed connection. This layout facilitates the installation and maintenance of the pipelines.

[0030] Based on the above embodiments, the present invention may further include the following preferred technical solutions: As a preferred embodiment, to ensure a smooth transition of gas or fused silica between the siphon generator 1 and the core rod 4, please refer to... Figure 1 The lower end of the core rod 4 is vertically fixed to the top outlet of the siphon generator 1. This vertical and fixed connection method ensures the precise alignment of the vent 3 with the internal channel of the siphon generator 1. As another preferred embodiment, to maximize the fluid negative pressure effect and ensure smooth exhaust, please refer to... Figure 3 The axis of the narrowed flow channel inside the siphon generator 1 is coaxial with the axis of the exhaust pipe 9. This coaxial layout allows the airflow entering from the nitrogen pipe 6 to rush into the exhaust pipe 9 at high speed with minimal resistance after acceleration, thereby generating the strongest negative pressure at the connection point of the core rod 4.

[0031] The working principle of this auxiliary device for non-stop furnace production of quartz tubes and quartz rods is as follows: During the quartz tube production stage, the control valve 10 is operated to block the passage of the exhaust port 11. At this time, the control valve 10 keeps the exhaust pipe 9 closed, while the hydrogen control valve 7 and nitrogen control valve 8 are opened. Hydrogen is transported to the siphon generator 1 through the hydrogen pipeline 5 and nitrogen through the nitrogen pipeline 6 for mixing. Since the exhaust port 11 is blocked and the exhaust pipe 9 is not open, the only passage for the mixed gas is to enter the vent hole 3 of the core rod 4 upwards. The mixed gas flows upwards along the vent hole 3 and finally overflows from the top of the core rod 4, forming a stable gas cavity between the glass melt and the outer wall of the core rod 4 in the continuous melting furnace, supporting the formation of the hollow structure of the quartz tube. During this process, the vacuum gauge 2 monitors the gas pressure in the vent hole 3 in real time to ensure the stability of the gas cavity.

[0032] When switching to the quartz rod production stage, the hydrogen control valve 7 is closed to cut off the gas supply to the hydrogen pipeline 5, leaving only the nitrogen control valve 8 open. At the same time, the control valve 10 is switched to the passage connecting to the exhaust pipe 9. At this time, the exhaust port 11 is in a non-working state due to the switch of the passage by the control valve 10. High-pressure nitrogen enters the siphon generator 1 through the nitrogen pipeline 6 and the nitrogen control valve 8, and is accelerated in the narrowed flow channel inside the siphon generator 1 before being discharged at high speed through the exhaust pipe 9. When the high-speed nitrogen flows through the siphon generator 1, it utilizes the principle of fluid negative pressure to form a negative pressure in the passage connecting the siphon generator 1 and the vent 3 of the core rod 4. The vacuum gauge 2 displays the negative pressure value in real time to judge the adsorption effect. Under the action of negative pressure, the molten quartz in the continuous melting furnace is sucked upward into the vent 3 of the core rod 4, gradually filling the entire vent 3 and forming a seal. At this time, the core rod 4 cannot be vented due to the blockage of the vent 3. When the glass liquid enters the forming device, there is no air cavity support, and a solid quartz rod is naturally formed.

[0033] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace, comprising: Siphon generator (1); Core rod (4), the upper part of which is connected to the siphon generator (1), and the core rod (4) is provided with a vent hole (3). Nitrogen pipeline (6), the outlet end of which is connected to the siphon generator (1); Exhaust pipe (9), the inlet end of which is connected to the bottom of the siphon generator (1); An exhaust port (11) is provided in the siphon generator (1). The device is characterized in that the siphon generator (1) is provided with a narrowed flow channel for forming a fluid negative pressure between the nitrogen pipe (6) and the exhaust pipe (9), and the device also includes a control valve (10) configured to selectively block the passage of the exhaust port (11) or switch to the passage connecting the exhaust pipe (9).

2. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 1, characterized in that, The device also includes a hydrogen pipeline (5), the outlet of which is connected to the siphon generator (1) and its outlet is located upstream of the vent (3).

3. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 2, characterized in that, A hydrogen control valve (7) is provided on the hydrogen pipeline (5), and a nitrogen control valve (8) is provided on the nitrogen pipeline (6).

4. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 1, characterized in that, The device also includes a vacuum gauge (2), which is mounted on the siphon generator (1) and has its monitoring port connected to the vent (3).

5. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 2, characterized in that, The nitrogen pipe (6) and the hydrogen pipe (5) are both connected to the side of the siphon generator (1) by a fixed connection.

6. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 3, characterized in that, The hydrogen control valve (7) and the nitrogen control valve (8) are both installed on the upstream pipeline of the siphon generator (1).

7. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 1, characterized in that, The lower end of the core rod (4) is vertically fixed to the top outlet of the siphon generator (1).

8. The auxiliary device for producing quartz tubes and quartz rods without shutting down the furnace according to claim 1, characterized in that, The axis of the reduced-diameter flow channel is coaxial with the axis of the exhaust pipe (9).

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