Cooling device for quartz weight production

Abstract

The utility model provides a cooling device for quartz weight production belongs to fused quartz production equipment field, including cooling chamber, bearing mechanism, guide, cooling chamber is equipped with ventilation mechanism, bearing mechanism and guide sliding fit, are used for bearing quartz weight to move in cooling chamber, along the quartz weight movement direction in proper order of cold brew mechanism, fog cooling mechanism and water cooling mechanism, cold brew mechanism and water cooling mechanism are detachable respectively connected in the opposite side wall of cooling chamber, fog cooling mechanism fixedly connected in the top wall of cooling chamber and located between cold brew mechanism and water cooling mechanism, cold brew mechanism is used for to the quartz weight injection inert gas or dry air preliminary cooling, fog cooling mechanism is used for to the quartz weight injection atomization water drop high -efficient cooling, water cooling mechanism is used for to the quartz weight injection low temperature water depth cooling. Through cold brew, fog cooling, water cooling three stages in proper order synergistic cooling, improve the cooling efficiency, reduce the crack risk.

Description

Technical Field

[0001] This utility model relates to the field of fused silica production equipment, specifically a cooling device for the production of quartz ingots. Background Technology

[0002] Fused silica, as a core material for manufacturing high-end precision products such as semiconductor chips and optical lenses, requires high-temperature melting during its production process to form a quartz ingot at a high temperature. The quality of the cooling process of this intermediate product directly determines the internal stress distribution, surface smoothness, and long-term chemical stability of the final quartz ingot, and has a crucial impact on the performance and reliability of the product.

[0003] However, under current technological conditions, cooling quartz ingots still presents several significant drawbacks. Currently used single cooling methods often struggle to achieve a good balance between cooling efficiency and uniformity: pure gas quenching results in a relatively slow cooling rate, leading to prolonged production cycles and low efficiency; simultaneously, at high temperatures, quartz readily reacts with oxygen in the air, forming an oxide layer on the surface, affecting material purity. Conversely, pure water cooling, due to the large temperature difference between the cooling medium and the quartz ingot, easily causes an imbalance in heat conduction between the ingot's surface and interior, resulting in significant thermal stress concentration. This can lead to quality problems such as cracks and microstructural damage, posing considerable difficulties for subsequent precision machining processes like cutting and grinding, and reducing the yield rate. Utility Model Content

[0004] In order to overcome some of the problems mentioned in the background above, a cooling device for the production of quartz balls is provided.

[0005] The technical solution adopted by this utility model is as follows: A cooling device for the production of quartz ingots includes a cooling chamber, a supporting mechanism, and a guide rail. The cooling chamber is equipped with a ventilation mechanism. The supporting mechanism is slidably engaged with the guide rail to support the movement of the quartz ingot within the cooling chamber. A cold extraction mechanism, a mist cooling mechanism, and a water cooling mechanism are arranged sequentially along the movement direction of the quartz ingot. The cold extraction mechanism and the water cooling mechanism are detachably connected to the opposite side walls of the cooling chamber. The mist cooling mechanism is fixedly connected to the top wall of the cooling chamber and is located between the cold extraction mechanism and the water cooling mechanism. The cold extraction mechanism is used to spray inert gas or dry air onto the quartz ingot for initial cooling; the mist cooling mechanism is used to spray atomized water droplets onto the quartz ingot for efficient cooling; and the water cooling mechanism is used to spray low-temperature water onto the quartz ingot for deep cooling.

[0006] Furthermore, the supporting mechanism includes a supporting tray and at least two sets of pulleys, the pulleys being disposed at the bottom of the supporting tray and slidably connected to the guide rail.

[0007] Furthermore, multiple cold extraction mechanisms are provided, and the multiple cold extraction mechanisms are spaced apart along the moving direction of the quartz weight; The cold extraction mechanism includes a cold extraction tube and at least six cold extraction nozzles. One end of the cold extraction tube passes through the side wall of the cooling chamber and is connected to a gas supply source. The cold extraction nozzles are evenly spaced on the side of the cold extraction tube facing the quartz weight.

[0008] Furthermore, the gas supply source of the cold extraction mechanism can selectively introduce one or a mixture of two gases, namely nitrogen and argon.

[0009] Furthermore, the mist cooling mechanism includes a mist cooling shell, multiple water storage tanks, and multiple sets of atomizing nozzles. The mist cooling shell is fixed to the top wall of the cooling chamber. The multiple water storage tanks are sequentially arranged inside the mist cooling shell. A connecting pipe is provided at the top of each water storage tank. The other end of the connecting pipe is connected to an external water pump. The multiple sets of atomizing nozzles are arranged one-to-one with the multiple water storage tanks. The atomizing nozzles are evenly distributed at the lower end of each water storage tank and face the quartz weight. The atomizing nozzle is equipped with a flow control valve.

[0010] Furthermore, the water cooling mechanism includes a water cooling pipe and at least six water cooling nozzles. The structure of the water cooling pipe is consistent with that of the cold extraction pipe, and it is symmetrically arranged along the center line of the mist cooling mechanism. The water cooling nozzles are evenly spaced on the side of the water cooling pipe facing the quartz weight. One end of the water-cooling pipe is connected to an external water source.

[0011] Furthermore, the ventilation mechanism is located at the outlet end of the cooling chamber. The ventilation mechanism includes a drive motor and a fan. The fan is fixed to the inside of the cooling chamber, and the drive motor is connected to the fan in a transmission manner.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: The cooling process involves three stages: cold extraction, mist cooling, and water cooling. The cold extraction stage uses gentle gas cooling to achieve uniform heat transfer inside the quartz ingot and reduce the initial temperature difference. The mist cooling stage utilizes the efficient heat absorption characteristics of water droplet vaporization to increase the cooling speed. The water cooling stage achieves deep cooling, improves cooling efficiency, and reduces the risk of cracking. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of a cooling device for producing quartz ingots according to an embodiment of the present invention; Figure 2 This is a top view schematic diagram of a cooling device for producing quartz ingots according to an embodiment of the present invention; Figure 3 for Figure 2 Schematic diagram of the AA section along the middle.

[0014] In the picture: 1. Supporting mechanism; 11. Supporting tray; 12. Pulley; 2. Guide rail; 3. Cold extraction mechanism; 31. Cold extraction tube; 32. Cold extraction nozzle; 4. Atomizing mechanism; 41. Atomizing shell; 42. Connecting pipe; 43. Water storage tank; 44. Atomizing nozzle; 5. Water cooling mechanism; 51. Water cooling pipe; 52. Water cooling nozzle; 6. Ventilation mechanism; 61. Drive motor; 62. Fan; 7. Cooling chamber. Detailed Implementation

[0015] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0016] like Figures 1-3 As shown, in some embodiments, a cooling device for producing quartz ingots includes a cooling chamber 7, a supporting mechanism 1, and a guide rail 2. The device has a rectangular structure with the guide rail 2 at its bottom. The supporting mechanism 1 and the guide rail 2 are connected by a sliding fit, which allows the quartz ingot to move smoothly along the guide rail 2, achieving reciprocating motion within the cooling chamber 7.

[0017] Specifically, a cold extraction mechanism 3, a mist cooling mechanism 4, and a water cooling mechanism 5 are sequentially arranged along the moving direction of the quartz ingot. Specifically, the cold extraction mechanism 3 and the water cooling mechanism 5 are respectively installed on the inner walls of opposite sides of the cooling chamber 7 for easy maintenance and replacement; while the mist cooling mechanism 4 is fixedly installed on the top wall of the cooling chamber 7, positioned between the cold extraction mechanism 3 and the water cooling mechanism 5, forming a multi-stage gradient cooling design. This means that cooling is achieved through the sequential and coordinated cooling of the three stages: cold extraction, mist cooling, and water cooling. The cold extraction stage uses gentle gas cooling to achieve uniform heat transfer inside the quartz ingot, reducing the initial temperature difference; the mist cooling stage utilizes the efficient heat absorption characteristics of water droplet vaporization to increase the cooling speed; and the water cooling stage achieves deep cooling, improving cooling efficiency and reducing the risk of cracking.

[0018] Specifically, the main function of the cold extraction mechanism 3 is to spray inert gas or dry air onto the moving quartz ingot to achieve preliminary cooling and reduce thermal shock. The mist cooling mechanism 4 is used to uniformly spray atomized water droplets onto the surface of the quartz ingot, and the water mist evaporates to remove a large amount of heat, achieving efficient cooling. The water cooling mechanism 5 further sprays low-temperature cooling water onto the quartz ingot to complete the deep cooling process, ensuring that the quartz ingot reaches the required cooling endpoint temperature. The entire device significantly improves the uniformity and efficiency of cooling through the sequential coordination of these three cooling methods.

[0019] Furthermore, in some embodiments, the supporting mechanism 1 mainly includes a supporting tray 11 and at least two sets of pulleys 12; wherein, the supporting tray 11 is used to stably place the high-temperature quartz ingot workpiece, and the pulleys 12 are symmetrically arranged at the bottom of the supporting tray 11. Through its sliding structural design, the entire supporting mechanism 1 can move smoothly along the guide rail 2, thereby realizing the precise positioning and efficient transfer of the quartz ingot during the cooling process.

[0020] The specific operating procedure is as follows: After the quartz weight is placed on the support tray 11, the support mechanism 1 is driven by an external drive to enter the cooling chamber 7 along the guide rail 2, passing sequentially through the working areas of the cold extraction mechanism 3, the mist cooling mechanism 4, and the water cooling mechanism 5. Each cooling mechanism starts in stages according to preset parameters. The cold extraction stage runs first, spraying dry air to achieve uniform initial cooling; then the mist cooling stage begins, where fine water mist covers the surface of the quartz weight, accelerating heat dissipation; finally, the water cooling stage completes deep cooling through a low-temperature water flow. The entire process is continuous and controllable. After cooling is completed, the support mechanism 1 returns to the starting position along the guide rail 2, facilitating the next round of operation.

[0021] This cooling process effectively avoids stress concentration in the quartz ingot caused by rapid heat dissipation through staged temperature control, significantly reducing the risk of product breakage. Simultaneously, the parameters of each cooling section can be dynamically adjusted according to the actual size and temperature of the quartz ingot, improving the system's adaptability and stability. The linear guiding design of guide rail 2, combined with pulley 12, ensures smooth operation and reduces the impact of vibration on cooling uniformity. The entire process is highly automated and can be integrated into continuous production lines to meet the needs of large-scale manufacturing.

[0022] Furthermore, in some embodiments, multiple cold extraction mechanisms 3 are provided, and these multiple cold extraction mechanisms 3 are arranged at uniform intervals along the moving direction of the quartz weight to form a continuous and stable cooling zone. Each cold extraction mechanism 3 independently controls the air pressure and airflow direction to ensure that a uniform cooling effect can be provided at different locations, avoiding excessive local temperature differences that could lead to uneven stress.

[0023] Each cold extraction unit 3 includes a cold extraction tube 31 and at least six cold extraction nozzles 32. One end of the cold extraction tube 31 passes through the side wall of the cooling chamber 7 and is connected to an external gas supply source, while the other end is sealed. The multiple cold extraction nozzles 32 are evenly distributed along their length on the side facing the quartz ingot, ensuring that the cooling medium can uniformly and efficiently cover the surface of the quartz ingot.

[0024] Furthermore, the gas supply source of the cold extraction mechanism 3 has a flexible configuration, which can selectively introduce any single gas from high-purity nitrogen or argon, or mix the two inert gases in a certain proportion, according to actual production needs and process requirements, so as to achieve more precise and diversified control of cooling effect.

[0025] Furthermore, in some embodiments, the mist cooling mechanism 4 includes a mist cooling housing 41, multiple water storage tanks 43, and multiple sets of atomizing nozzles 44. The mist cooling housing 41 is fixed to the top wall of the cooling chamber 7. The water storage tanks 43 are housed within the mist cooling housing 41, and multiple water storage tanks 43 are arranged sequentially. A connecting pipe 42 is provided at the top of each water storage tank 43, and the connecting pipe 42 is connected to an external water supply system to ensure a continuous water supply.

[0026] Each water storage tank 43 corresponds to a set of atomizing nozzles 44. The atomizing nozzles 44 are evenly installed on the bottom surface of the mist cooling shell 41, facing the upper surface of the quartz ingot, ensuring that the water mist is sprayed vertically and evenly covers the entire surface. The atomizing nozzles 44 adopt ultrasonic atomization technology, which can generate fine water mist with a particle size of 50-100 micrometers, improving cooling efficiency while avoiding uneven thermal stress on the surface of the quartz ingot caused by water flow impact.

[0027] In addition, each group of atomizing nozzles 44 is equipped with a flow control valve, which can precisely adjust the water mist spray volume according to the cooling process requirements to achieve gradient cooling. The water storage tanks 43 are independent of each other, which facilitates the zoned control of the atomizing nozzles 44 in different areas and adapts to the differences in temperature distribution on the surface of the quartz ingot.

[0028] Furthermore, in some embodiments, the water-cooling mechanism 5 includes a water-cooling pipe 51 and at least six water-cooling nozzles 52. The structure of the water-cooling pipe 51 is identical to that of the cold extraction pipe 31, and both are symmetrically arranged along the centerline of the mist-cooling mechanism 4 at their installation positions. One end of the water-cooling pipe 51 penetrates the side wall of the cooling chamber 7 and connects to an external water circulation system, while the other end is sealed.

[0029] In addition, multiple water-cooled nozzles 52 are evenly distributed on the side of the water-cooling pipe 51 facing the quartz ingot, directly facing the surface of the quartz ingot, ensuring that the cooling water is sprayed evenly on the surface of the quartz ingot. The water-cooled nozzles 52 adopt a fan-shaped nozzle design with a spray angle of 60°-90°, effectively covering the cooling area and improving heat exchange efficiency. The external water circulation system is equipped with a temperature regulation device and a pressure control module, which can adjust the cooling water temperature and flow rate in real time according to process parameters to avoid material cracking caused by excessive temperature difference. The water cooling mechanism 5 and the mist cooling mechanism 4 work together to achieve multi-stage composite cooling of gas and liquid, further optimizing the uniformity and controllability of cooling.

[0030] Furthermore, in some embodiments, the ventilation mechanism 6 is located at the outlet end of the cooling chamber 7. The ventilation mechanism 6 mainly includes a drive motor 61 and a fan 62. The fan 62 is fixedly installed on the inner wall of the cooling chamber 7 and located near the outlet to facilitate the formation of a stable airflow channel. At the same time, the drive motor 61 is connected to the fan 62 through a transmission structure, thereby providing stable and reliable power support for the fan 62 and ensuring uniform and efficient ventilation.

[0031] The quartz ingot cooling process of this invention follows the principles of "gradient cooling, precise temperature control, and coordinated operation," and the specific workflow is as follows: Preparation phase: Setting parameters for each mechanism; Quartz weight insertion: The high-temperature quartz weight is placed stably in the support tray 11. Under the drive of the external equipment, the support mechanism 1 moves along the guide rail 2 into the cooling chamber 7. The support mechanism 1 carries the quartz weight and slowly moves it into the cooling chamber 7 along the guide rail 2. Cold extraction stage (initial cooling): When the carrier mechanism 1 moves the quartz ingot to the cold extraction mechanism 3, nitrogen gas is delivered through the cold extraction pipe 31 to each cold extraction nozzle 32, and evenly sprayed onto the surface of the quartz ingot. The nitrogen gas creates convective heat transfer on the surface of the quartz ingot, gently carrying away surface heat while simultaneously isolating it from air to prevent oxidation. During this stage, the temperature of the quartz ingot gradually decreases from 1000℃ to 600℃, with internal heat slowly conducted outwards. Temperature sensors monitor the temperature in real time. When the surface temperature of the quartz ingot drops to 600℃, the cold extraction stage automatically ends, and the process transitions to the mist cooling stage.

[0032] Mist Cooling Stage (High-Efficiency Cooling): After the cold extraction mechanism 3 stops working, the mist cooling mechanism 4 immediately starts. The water supply pump pressurizes the clean water in the water storage tank 43 to 0.6MPa and delivers it to the atomizing nozzle 44 through the connecting pipe 42, atomizing it into fine water droplets of 50-100μm. The water droplets rapidly vaporize upon impact with the quartz ingot surface (temperature 600℃), absorbing a large amount of heat and achieving high-efficiency cooling. During this stage, the temperature drops from 600℃ to 200℃. If the humidity sensor detects that the humidity in the mist cooling area exceeds 85% RH, the drive motor 61 automatically starts, driving the fan 62 to rotate, expelling water vapor and preventing condensation in the chamber from affecting the cooling effect.

[0033] Water cooling stage (deep cooling): When the temperature of the quartz ingot drops to 200℃, the mist cooling mechanism 4 stops working, and the water cooling mechanism 5 starts. Low-temperature water is sprayed onto the surface of the quartz ingot through the water cooling pipe 51 and the water cooling nozzle 52, achieving deep cooling through forced convection heat transfer. During this stage, the temperature drops from 200℃ to below 50℃.

[0034] Cooling Completion and Removal: When the surface temperature of the quartz ingot drops below 50°C and remains stable for 5 minutes, cooling is considered complete. The water cooling and ventilation mechanisms stop working, and the chamber door opens automatically. The carrying mechanism 1 carries the cooled quartz ingot along the guide rail 2 out of the cooling chamber 7, and the quartz ingot is then transferred to the next process using hoisting equipment. This completes one cooling cycle for the quartz ingot.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A cooling device for producing quartz ingots, comprising a cooling chamber (7), a supporting mechanism (1), and a guide rail (2), wherein the cooling chamber (7) is equipped with a ventilation mechanism (6), and the supporting mechanism (1) is slidably engaged with the guide rail (2) for supporting the movement of the quartz ingot within the cooling chamber (7), characterized in that, The cold extraction mechanism (3), the mist cooling mechanism (4) and the water cooling mechanism (5) are arranged sequentially along the direction of movement of the quartz weight. The cold extraction mechanism (3) and the water cooling mechanism (5) are respectively detachably connected to the opposite side walls of the cooling chamber (7). The mist cooling mechanism (4) is fixedly connected to the top wall of the cooling chamber (7) and located between the cold extraction mechanism (3) and the water cooling mechanism (5). The cold extraction mechanism (3) is used to spray inert gas or dry air onto the quartz ingot for primary cooling, the mist cooling mechanism (4) is used to spray atomized water droplets onto the quartz ingot for secondary cooling, and the water cooling mechanism (5) is used to spray low-temperature water onto the quartz ingot for tertiary cooling.

2. The cooling device for producing quartz ingots according to claim 1, characterized in that, The carrying mechanism (1) includes a carrying tray (11) and at least two sets of pulleys (12). The pulleys (12) are located at the bottom of the carrying tray (11) and are slidably connected to the guide rail (2).

3. The cooling device for producing quartz ingots according to claim 1, characterized in that, The cold extraction mechanism (3) is provided in multiple ways, and the multiple cold extraction mechanisms (3) are arranged at intervals along the moving direction of the quartz weight; The cold extraction mechanism (3) includes a cold extraction tube (31) and at least six cold extraction nozzles (32). One end of the cold extraction tube (31) passes through the side wall of the cooling chamber (7) and is connected to a gas supply source. The cold extraction nozzles (32) are evenly spaced on the side of the cold extraction tube (31) facing the quartz weight.

4. The cooling device for producing quartz ingots according to claim 3, characterized in that, The gas supply source for the cold extraction unit (3) includes one or a mixture of two gases, namely nitrogen and argon.

5. The cooling device for producing quartz ingots according to claim 3, characterized in that, The mist cooling mechanism (4) includes a mist cooling shell (41), multiple water storage tanks (43) and multiple sets of atomizing nozzles (44). The mist cooling shell (41) is fixed to the top wall of the cooling chamber (7). Multiple water storage tanks (43) are arranged sequentially inside the mist cooling shell (41). A connecting pipe (42) is provided at the top of the water storage tank (43). The other end of the connecting pipe (42) is connected to an external water pump. Multiple sets of atomizing nozzles (44) are arranged one-to-one with multiple water storage tanks (43). The atomizing nozzles (44) are evenly distributed at the lower end of the water storage tank (43) and face the quartz weight. The atomizing nozzle (44) is equipped with a flow control valve.

6. The cooling device for producing quartz ingots according to claim 3, characterized in that, The water cooling mechanism (5) includes a water cooling pipe (51) and at least six water cooling nozzles (52). The structure of the water cooling pipe (51) is consistent with that of the cold extraction pipe (31) and is symmetrically arranged along the center line of the mist cooling mechanism (4). The water cooling nozzles (52) are evenly spaced on the side of the water cooling pipe (51) facing the quartz ball. One end of the water-cooled pipe (51) is connected to an external water source.

7. The cooling device for producing quartz ingots according to claim 1, characterized in that, The ventilation mechanism (6) is located at the outlet end of the cooling chamber (7). The ventilation mechanism (6) includes a drive motor (61) and a fan (62). The fan (62) is fixed to the inside of the cooling chamber (7). The drive motor (61) is connected to the fan (62) in a transmission manner.

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