A heat treatment apparatus

Abstract

The utility model relates to the technical field of heating treatment, specifically disclose a kind of heat treatment equipment, including by vacuum tube and the sealing element connected to the vacuum tube both ends one vacuum chamber, one sealing element is installed with the air inlet pipe being communicated with vacuum chamber, the outer periphery of the vacuum tube is equipped with heating assembly, and the heating assembly includes the lamp array of the outer periphery of vacuum tube;The outer periphery of the lamp array is successively equipped with reflecting screen and heat shield. Array lamp is used for radiation heating in the application, realizes the rapid heating of minute level even second level;While heating, the vacuum chamber is passed into the heat conduction gas with good heat conductivity, through the synergistic effect of radiation heating and gas conduction, sample is rapidly heated to target temperature and keeps high uniformity, and accurate heat treatment is completed.

Description

Technical Field

[0001] This utility model relates to the field of heating equipment technology, and in particular to a heat treatment device with high uniformity. Background Technology

[0002] Magnetic thin film production typically employs magnetron sputtering technology. This involves bombarding a soft magnetic material target with glow discharge in a high-vacuum chamber, causing atoms or molecules to sputter and deposit onto a substrate (such as a silicon wafer or glass). A thermomagnetic annealing process is then used to release the lattice distortion and thermal stress accumulated during sputtering, allowing the amorphous or microcrystalline thin film to grow into uniform grains and reducing hysteresis losses. Therefore, providing a uniform temperature (e.g., 500-800℃) during heat treatment is crucial for achieving its superior performance.

[0003] Currently, most heat treatment equipment uses resistance wire heating. However, due to the slow heating and cooling rate and high thermal inertia of resistance wire heating, the heating cycle is long and the energy consumption is high, which seriously restricts production efficiency.

[0004] In addition, after the traditional equipment has finished heat-treating the sample, it is placed in a vacuum chamber for natural cooling, which takes several hours for the temperature to drop to room temperature.

[0005] Therefore, there is an urgent need for a heat treatment device that can achieve rapid and uniform heating and rapid cooling. Utility Model Content

[0006] In view of the above-mentioned technical problems, the present invention aims to provide a rapid and highly uniform heat treatment device.

[0007] The technical solution of this utility model is as follows: A heat treatment device includes a vacuum chamber consisting of a vacuum tube and seals connected to both ends of the vacuum tube. An air inlet pipe communicating with the vacuum chamber is installed on one of the seals. A heating assembly is fitted around the outer periphery of the vacuum tube. The heating assembly includes an array of lamps fitted around the outer periphery of the vacuum tube. A reflector and a heat insulation cover are sequentially fitted around the outer periphery of the lamp array.

[0008] This application uses a circular lamp array for heating, replacing the existing resistance wire heating method. Since lamp heating heats the sample located inside the vacuum chamber through heat radiation, it has the advantage of a fast heating rate, which can reach the target temperature in minutes or even seconds; thus achieving the purpose of rapid heating.

[0009] Furthermore, to further improve heating uniformity, an inlet pipe connected to the vacuum chamber is installed on the sealing component. This allows for the introduction of a thermally conductive gas (such as helium) into the vacuum chamber during heating, thereby increasing the uniformity of sample heating. In essence, this application transforms a single radiative heat transfer mode into a composite heat transfer mode of "radiation as the primary method and gas conduction as a secondary method." The thermal conduction of the thermally conductive gas molecules effectively overcomes the inherent "shadowing effect" and spatial inhomogeneity of radiative heating, significantly improving the overall heating uniformity of samples, especially those with complex surface structures.

[0010] In a further embodiment, a cooling pipe is fitted around the outer periphery of the heating component. The cooling pipe includes an outer heat-conducting pipe and an inner heat-conducting pipe, and a circulating water pipe is provided between the outer heat-conducting pipe and the inner heat-conducting pipe.

[0011] This application includes a cooling pipe fitted around the outer periphery of the heating component to provide a specific temperature environment (e.g., 5℃-25℃) to prevent high temperatures from affecting the magnet; the aim is to achieve rapid heating and cooling during the heat treatment process, significantly shorten the process cycle, and improve production speed and energy efficiency.

[0012] In a further embodiment, fixing ring one and fixing ring two are respectively connected to the openings at both ends of the external heat pipe and the internal heat pipe, and fixing ring one and fixing ring two form a heat-conducting cavity between the external heat pipe and the internal heat pipe; fixing ring one and fixing ring two are respectively connected to the sealing elements located at both ends of the vacuum tube.

[0013] Preferably, the circulating water pipe is spirally fixedly sleeved on the outer wall of the inner heat-conducting pipe. The inlet and outlet of the circulating water pipe are connected to the first fixing ring and the second fixing ring, respectively, and after passing through the first fixing ring and the second fixing ring, they are connected to the chiller to form a cooling water circulation.

[0014] In a further embodiment, the air inlet pipe includes a heat-conducting gas pipe connected to a heat-conducting gas tank and a cooling gas pipe connected to a purge gas tank; both the heat-conducting gas pipe and the cooling gas pipe are equipped with solenoid valves for controlling the entry or exit of gas.

[0015] In this application, the thermally conductive gas container stores a thermally conductive gas, such as helium; a thermally conductive gas with good thermal conductivity is introduced into the vacuum chamber to increase the uniformity of sample heating.

[0016] The purge gas container stores purge gas, such as nitrogen. After heat treatment, nitrogen at a certain pressure is introduced into the vacuum chamber to purge the sample, achieving rapid cooling; this further shortens the processing time and increases efficiency.

[0017] In a further embodiment, the lamp array is composed of multiple ring lamps arranged coaxially at equal intervals along the outer periphery of the vacuum tube, with the two ends of the lamp array being heat preservation areas and the middle being the working area.

[0018] In a further embodiment, the working area is provided with at least one set of ring lights, and the insulation area is provided with one set of ring lights; each set of ring lights consists of at least two ring lights; each set of ring lights is connected to a thermocouple for detecting temperature.

[0019] Preferably, the ring lamp includes an annular quartz tube with one end open, a sealing head is installed at the open end of the annular quartz tube, and an inlet / outlet connector is installed on the sealing head; a filament is arranged inside the annular quartz tube, and the end of the filament is connected to the inlet / outlet connector.

[0020] In a further embodiment, the heat insulation cover includes an outer heat insulation cover and an inner heat insulation cover.

[0021] This application employs an array of lamps for radiative heating, achieving rapid temperature rise within minutes or even seconds. Simultaneously, during heating, a highly thermally conductive gas (such as helium) is introduced into the vacuum chamber to increase the uniformity of sample heating. In other words, this application transforms a single radiative heat transfer mode into a composite heat transfer mode of "radiation as the primary method and gas conduction as a secondary method." The thermal conduction of the heat-conducting gas molecules effectively overcomes the inherent "shadowing effect" and spatial inhomogeneity of radiative heating, significantly improving the overall uniformity of heating of samples, especially those with complex surface structures.

[0022] This application, while cooling the sample with circulating water after heat treatment, also uses purge gas (nitrogen) to perform forced convection purging of the sample. By utilizing the forced convection of the gas, the heat transfer coefficient of the sample surface is greatly enhanced, reducing the cooling time of several hours required by traditional equipment that relies on natural radiation and conduction by several orders of magnitude. This significantly shortens the overall production time and greatly improves production efficiency and equipment utilization.

[0023] Therefore, the combination of "rapid heating + active rapid cooling" in this application significantly shortens the single process cycle and greatly improves equipment throughput and production efficiency.

[0024] The heating assembly in this application uses an internal reflector to efficiently reflect the heat radiated outward from the lamp tube back into the vacuum chamber, improving thermal energy utilization. The intermediate double-layer heat insulation cover, through high vacuum and multi-layer shielding, greatly suppresses the leakage of heat energy outward in the form of radiation and conduction.

[0025] Cooling pipes are installed on the outside of the heating components, and the residual heat is actively removed through circulating water pipes and double-layer heat-conducting layers as the final thermal barrier, ensuring that the magnetic field generating components are always in a safe low-temperature working environment, thus solving the problem of compatibility between high-temperature and strong magnetic field environments.

[0026] In this application, the lamp array employs independent temperature control in separate working and insulation zones, ensuring temperature uniformity within the vacuum chamber. The heat treatment equipment utilizes a thermal management architecture of "reflector + double-layer heat insulation cover + circulating water cooling," making it particularly suitable for the production and post-heat treatment of magnetic thin films. This effectively isolates the thermal impact of high temperatures on the core magnetic field generating components (especially superconducting magnets), improving thermal energy utilization and ensuring stable magnet operation and equipment lifespan.

[0027] Therefore, this utility model achieves rapid and uniform heating through lamp tubes and heat-conducting gas, achieves efficient thermal energy management through reflective screens and double-layer heat insulation covers, and achieves active and rapid cooling through circulating water pipes, double-layer heat-conducting pipes, and gas purging. It collaboratively solves the industry problem of balancing uniformity, efficiency, and reliability in the heat treatment of magnetic thin films. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the cooling pipe structure in this utility model; Figure 3 This is a schematic diagram of the assembly of the vacuum tube and heating component in this utility model; Figure 4 for Figure 3 A schematic diagram of the cross-sectional structure; Figure 5 This is a schematic diagram of the lamp array structure in this utility model; Figure 6 This is a schematic diagram of the partitioning of the lamp array in this utility model; Figure 7 This is a schematic diagram of the ring lamp in this utility model.

[0029] In the picture: 1-Seal; 2-Inlet pipe, 21-Heat conduction pipe, 22-Cooling pipe; 3-Cooling pipe, 31-External heat conduction pipe, 32-Internal heat conduction pipe, 33-Water inlet, 34-Water outlet, 35-Fixing ring one, 36-Fixing ring two, 37-Circulating water pipe; 4-Vacuum tube; 5-Heating component, 51-Outer heat insulation cover, 52-Lamp array, 521-Ring lamp, 522-Ring quartz tube, 523-Sealing head, 524-Inlet / outlet connector, 525-Filament; 53-Reflector, 54-Inner heat insulation cover. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Referring to 1-7, this embodiment provides a heat treatment device, including a vacuum chamber consisting of a vacuum tube 4 and sealing members 1 connected to both ends of the vacuum tube 4. An air inlet pipe 2 communicating with the vacuum chamber is installed on one of the sealing members 1. A heating assembly 5 is sleeved on the outer periphery of the vacuum tube 4. The heating assembly 5 includes a lamp array 52 sleeved on the outer periphery of the vacuum tube 4. A reflector 53 and a heat insulation cover are sequentially sleeved on the outer periphery of the lamp array 52.

[0032] The heat treatment equipment of this application is applicable to heating production, especially to the production and post-heat treatment of magnetic thin films. Specifically, the heat treatment equipment in this embodiment is applied to the magnetic thin film preparation process. The seals 1 at both ends of the vacuum tube 4 are respectively sealed and connected to the sample transfer component and the vacuum pump. Furthermore, a magnetic field generator is also externally mounted. Since these are not the focus of this application, they will not be described in detail here.

[0033] In this application, the heating component uses a lamp array for heating. Since lamp heating heats the sample located inside the vacuum chamber through heat radiation, it has the advantage of a fast heating rate, which can reach the target temperature in minutes or even seconds; thus achieving the purpose of rapid heating.

[0034] Furthermore, to further improve heating uniformity, an inlet pipe connected to the vacuum chamber is installed on the sealing component. This allows for the introduction of a thermally conductive gas (such as helium) into the vacuum chamber during heating, thereby increasing the uniformity of sample heating. In essence, this application transforms a single radiative heat transfer mode into a composite heat transfer mode of "radiation as the primary method and gas conduction as a secondary method." The thermal conduction of the thermally conductive gas molecules effectively overcomes the inherent "shadowing effect" and spatial inhomogeneity of radiative heating, significantly improving the overall heating uniformity of samples, especially those with complex surface structures.

[0035] To increase the efficiency of heat utilization of the lamps, a reflective screen is installed outside the lamp array to reflect heat into the vacuum chamber, thereby increasing the sample's utilization of heat.

[0036] To further reduce heat leakage, a heat shield is installed outside the reflector screen; in this embodiment, the heat shield includes an outer heat shield 51 and an inner heat shield 54, which greatly reduces the impact of heat on the external magnet. A cooling pipe is also installed outside the heat shield to maintain a low temperature environment inside the magnet.

[0037] The reflector efficiently reflects the heat radiated outward from the lamp back into the vacuum chamber, improving thermal energy utilization. The double-layer heat shield in the middle, through high vacuum and multi-layer shielding, greatly suppresses the leakage of heat energy outward in the form of radiation and conduction.

[0038] Specifically, in this embodiment, a reflector 53 is provided outside the lamp array 52 to reflect the heat generated by the lamp array 52 through the vacuum tube 4 into the vacuum chamber, thereby increasing the heating efficiency and heat utilization efficiency; there is a certain gap between the reflector 53 and the lamp array 52.

[0039] Two heat insulation covers are installed on the outside of the reflector 53 to further increase heat dissipation. The inner heat insulation cover 54 is located between the reflector 53 and the outer heat insulation cover 51, with a small gap between them.

[0040] The reflector 53, the inner heat shield 54, and the outer heat shield 51 are all hollow cylindrical in shape. The vacuum tube 4 is placed coaxially with the reflector 53, the inner heat shield 54, and the outer heat shield 51; the vacuum tube 4 is placed coaxially with the outer heat conduction pipe 31 and the inner heat conduction pipe 32, and all have a fixed gap.

[0041] In another embodiment, a cooling pipe 3 is sleeved on the outer periphery of the heating component 5. The cooling pipe 3 includes an outer heat-conducting pipe 31 and an inner heat-conducting pipe 32, and a circulating water pipe 37 is provided between the outer heat-conducting pipe 31 and the inner heat-conducting pipe 32.

[0042] This application includes a cooling pipe fitted around the outer periphery of the heating component to provide a specific temperature environment (e.g., 5℃-25℃) to prevent high temperatures from affecting the magnet; the aim is to achieve rapid heating and cooling during the heat treatment process, significantly shorten the process cycle, and improve production speed and energy efficiency.

[0043] In this embodiment, the outermost cooling pipe in the heat treatment equipment acts as the final thermal barrier, actively carrying away residual heat to ensure that the magnetic field generating component is always in a safe low-temperature working environment, thus solving the problem of compatibility between high-temperature and strong magnetic field environments.

[0044] Specific examples Figure 2As shown, fixing ring 1 35 and fixing ring 2 36 are respectively connected to the openings at both ends of the external heat pipe 31 and the internal heat pipe 32. That is, fixing ring 1 35 and fixing ring 2 36 connect the openings at both ends of the external heat pipe 31 and the internal heat pipe 32 and form a heat conduction cavity. Fixing ring 1 35 and fixing ring 36 are respectively connected to the sealing member 1 at both ends of the vacuum tube 4, realizing the connection and fixation of the cooling tube 3 and the vacuum tube 4.

[0045] The external heat pipe 31 and the internal heat pipe 32 are both cylindrical and are coaxially mounted with the fixing ring 35 and the fixing ring 36.

[0046] Another implementation, for example Figure 2 As shown, the circulating water pipe 37 is spirally fixedly sleeved on the outer wall of the inner heat-conducting pipe 32, that is, located in the heat-conducting cavity between the outer heat-conducting pipe 31 and the inner heat-conducting pipe 32. The inlet 33 of the circulating water pipe 37 is connected to the first fixing ring 35, and the outlet 34 is connected to the second fixing ring 36. After passing through the first fixing ring 35 and the second fixing ring 36 respectively, it is connected to the chiller to form a cooling water circulation.

[0047] In this embodiment, an external heat pipe 31 and an internal heat pipe 32 are provided to facilitate the removal of more heat through the circulating water pipe 37. The circulating water pipe 37 is connected to a chiller to provide cooling water at a constant temperature. The cooling water enters through the inlet 33, flows out through the outlet 34 after passing through the circulating water pipe 37, and then enters the chiller to achieve water circulation.

[0048] In a further embodiment, the air inlet pipe 2 includes a heat-conducting gas pipe 21 connected to a heat-conducting gas tank, and a cooling gas pipe 22 connected to a purge gas tank; both the heat-conducting gas pipe 21 and the cooling gas pipe 22 are equipped with solenoid valves to control the entry or exit of gas. That is, according to production needs, the heat-conducting gas pipe 21 or the cooling gas pipe 22 can be opened for heat conduction or purging and cooling.

[0049] In this application, the thermally conductive gas container stores a thermally conductive gas, such as helium; a thermally conductive gas with good thermal conductivity is introduced into the vacuum chamber to increase the uniformity of sample heating.

[0050] The purge gas tank stores purge gas, such as nitrogen. After heat treatment, nitrogen at a certain pressure is introduced into the vacuum chamber to purge the sample, achieving rapid cooling. This utilizes forced convection of the gas to greatly enhance the heat transfer coefficient of the sample surface, reducing the cooling time of traditional equipment, which relies on natural radiation and conduction and requires several orders of magnitude, by several hours. This significantly shortens the overall production time and greatly improves production efficiency and equipment utilization.

[0051] Specific examples Figure 3 , 5As shown, the lamp array 52 is composed of multiple ring lamps 521 arranged coaxially at equal intervals along the outer periphery of the vacuum tube 4. Both ends of the lamp array 52 are heat-insulating areas, and the middle is the working area. Figure 6 As shown, the insulation zone is one unit, that is, one at each end, for a total of two; the working area is divided into three units.

[0052] The working area is equipped with at least one set of ring-shaped lamps; in this embodiment, the working area has three sets of ring-shaped lamps, and the insulation area has one set of ring-shaped lamps. Each set of ring-shaped lamps consists of at least two ring-shaped lamps 521. Each set of ring-shaped lamps is connected to a thermocouple for temperature detection. That is, each unit can independently control the temperature, ensuring heating uniformity from the source.

[0053] In this embodiment, the length of the working area must completely cover multiple samples. The samples are wafers coated with a magnetic thin film, and the number of wafers can be 1-25, with any diameter not exceeding 300mm. The lamps in the working area are used to provide the temperature required for post-heat treatment, while the heat preservation area is used to further maintain the process temperature, prevent the edge temperature from dropping, and make the temperature more uniform. Since heat dissipation is worse closer to the center, it may cause heat accumulation in the center area, exceeding the target temperature. Therefore, multiple sets of lamps can be set in the working area; it has been verified that setting at least three sets of lamps in the working area is more suitable, such as... Figure 6 As shown, there are three working area light groups: working area light group one, working area light group two, and working area light group three. Working area light group two is located between working area light group one and working area light group three. Each group of lamps is equipped with a temperature control thermocouple to detect the temperature of each group of lamps and feed it back to the control component for control. When the temperature of each area exceeds or falls below the target temperature, the control component adjusts in real time by reducing or increasing the heating power to ensure temperature uniformity.

[0054] like Figure 7 As shown, the ring lamp 521 includes a ring-shaped quartz tube 522 with one end open. A sealing head 523 is installed at the open end of the ring-shaped quartz tube 522, and an inlet / outlet connector 524 is installed on the sealing head 523. A filament 525 is arranged inside the inner cavity of the ring-shaped quartz tube 522, and the end of the filament 525 is connected to the inlet / outlet connector 524.

[0055] In this embodiment, the filaments 525 can be arranged in pairs, that is, they enter and exit together at the sealing head 523. This arrangement can cancel the interference of the magnetic field generated by the current.

[0056] The working process of this heat treatment equipment is as follows: After the sample to be heated is placed in the vacuum chamber consisting of the vacuum tube 4 and the seals connected to both ends of the vacuum tube 4, the vacuum chamber is evacuated, and according to process requirements, helium gas with good thermal conductivity is introduced through the heat-conducting gas pipe 21 to enhance the uniformity of heat conduction. Then, the heating assembly 5 is turned on, and each ring lamp 521 in the lamp array 52 is turned on to heat the sample. Through the synergistic effect of radiation heating and gas conduction, the sample is rapidly heated to the target temperature and maintained with high uniformity, thus completing the precise heat treatment.

[0057] After processing, heating element 5 and heat conduction pipe 21 are both shut off, and nitrogen gas is introduced through cooling pipe 22 to force convection purging of the sample; simultaneously, the chiller is turned on, and cooling water enters circulating water pipe 37 for cooling, thus achieving rapid cooling of the sample. Finally, the sample is output after cooling to a safe temperature.

[0058] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A heat treatment apparatus, comprising a vacuum chamber consisting of a vacuum tube (4) and sealing elements (1) connected to both ends of the vacuum tube (4), characterized in that: One of the seals (1) is equipped with an air inlet pipe (2) that communicates with the vacuum chamber. A heating assembly (5) is fitted around the outer periphery of the vacuum tube (4). The heating assembly (5) includes a lamp array (52) fitted around the outer periphery of the vacuum tube (4). A reflector (53) and a heat insulation cover are fitted around the outer periphery of the lamp array (52) in sequence.

2. The heat treatment equipment according to claim 1, characterized in that: The heating component (5) is fitted with a cooling pipe (3) on its outer periphery. The cooling pipe (3) includes an outer heat-conducting pipe (31) and an inner heat-conducting pipe (32). A circulating water pipe (37) is provided between the outer heat-conducting pipe (31) and the inner heat-conducting pipe (32).

3. The heat treatment equipment according to claim 2, characterized in that: A fixing ring one (35) and a fixing ring two (36) are respectively connected to the openings at both ends of the external heat pipe (31) and the internal heat pipe (32). The fixing ring one (35) and the fixing ring two (36) form a heat-conducting cavity between the external heat pipe (31) and the internal heat pipe (32). The fixing ring one (35) and the fixing ring two (36) are respectively connected to the sealing elements (1) at both ends of the vacuum tube (4).

4. The heat treatment equipment according to claim 3, characterized in that: The circulating water pipe (37) is spirally fixed on the outer wall of the inner heat-conducting pipe (32). The inlet (33) and outlet (34) of the circulating water pipe (37) are connected to the first fixed ring (35) and the second fixed ring (36) respectively, and after passing through the first fixed ring (35) and the second fixed ring (36) respectively, they are connected to the chiller to form a cooling water circulation.

5. The heat treatment equipment according to claim 1, characterized in that: The intake pipe (2) includes a heat-conducting pipe (21) connected to a heat-conducting gas tank and a cooling pipe (22) connected to a purge gas tank.

6. The heat treatment equipment according to claim 1, characterized in that: The lamp array (52) is composed of multiple ring lamps (521) arranged coaxially at equal intervals along the outer periphery of the vacuum tube (4). The two ends of the lamp array (52) are heat preservation areas, and the middle is the working area.

7. The heat treatment equipment according to claim 6, characterized in that: The working area is provided with at least one set of ring lights, and the insulation area is provided with one set of ring lights; each set of ring lights consists of at least two ring lights (521); each set of ring lights is connected to a thermocouple for detecting temperature.

8. The heat treatment equipment according to claim 6, characterized in that: The ring lamp (521) includes a ring-shaped quartz tube (522) with one end open. A sealing head (523) is installed at the open end of the ring-shaped quartz tube (522), and an inlet / outlet connector (524) is installed on the sealing head (523). A filament (525) is arranged inside the inner cavity of the ring-shaped quartz tube (522), and the end of the filament (525) is connected to the inlet / outlet connector (524).

9. The heat treatment equipment according to claim 1, characterized in that: The heat insulation cover includes an outer heat insulation cover (51) and an inner heat insulation cover (54).

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