An Upper Lid shield blast / arc lancing protection device

Abstract

The utility model belongs to the Upper Lid shield sandblast / electric arc melting protection device in the field of semiconductor process technology. The Upper Lid shield (6) includes the department (1) and the department (2) to be shielded, the department (1) is arranged to the annular structure along the Upper Lid shield surface edge one round arrangement, the department (1) position sets up multiple product holes (3), the protection part (4) is annular structure, the protection part (4) sets up multiple protruding from the lower surface column (5). The Upper Lid shield sandblast / electric arc melting protection device of the utility model, simple structure, through the profiled structure reliable shielding protection product needs to protect the part, avoid appearing the problem of residual glue and gum printing, the skill requirement of low to operating personnel, it is suitable for mass production, can be used for sandblast technology or electric arc melting process shielding protection to product simultaneously, can be repeatedly used, reduces the cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and more specifically, it relates to an Upper Lidshield sandblasting / arc spraying protection device. Background Technology

[0002] Semiconductor manufacturing processes utilize technologies such as PVD, CVD, Etch, PHOTO, CMP, and diffusion. PVD, in particular, uses physical vapor deposition to deposit desired metals onto the surface of a silicon wafer via sputtering. This process employs various PVD equipment, with PC being a common type. During metal deposition, the goal is to deposit the metal only on the silicon wafer surface; therefore, the internal structure of the equipment needs to be masked. To maximize the adsorption of metal deposits, sandblasting and arc spraying processes are used to roughen the surface during the regeneration and cleaning process. Before sandblasting and arc spraying, specific areas need to be masked with masking tape to prevent sand and spray material from splashing onto the smooth surface. For masking and protecting sandblasted parts, the conventional practice is to use sandblasting tape to protect the areas that do not need to be sandblasted. However, for some irregularly shaped parts, it is inconvenient for employees to apply the tape. The tape is easily broken by the sand during sandblasting, causing contamination of the parts. Moreover, when the tape is removed, adhesive residue is easily left on the product surface, affecting the quality.

[0003] The prior art includes a technology entitled "An Inner Liner Protection Device for Arc Spraying Processing" with publication number "CN208485936U". This technology discloses an inner lining protection device for arc spraying processing, including a fan and a housing. A controller is located at the front end of the housing, and a material handling door is located below the controller. A slide rail is located at the top of the housing, and a slider is located below the slide rail. A power supply is located below the slider, and a fan is located at the front end of the power supply. An arc sprayer is located below the power supply, and a wire spool is located inside the arc sprayer. A wire feeding roller is located below the wire spool, and an air nozzle is located in the middle of the arc sprayer. A temperature sensor is located at the bottom of the arc sprayer, and a horn nozzle is located below the arc sprayer. A protective base plate is located at the bottom of the housing. The beneficial effects are as follows: the enclosure design transforms arc spraying into in-machine processing, preventing accidental injury to workers during operation; the protective base plate prevents damage to the enclosure from particle flow during arc spraying; and real-time monitoring of the device prevents accidents during operation. However, this technology does not address the technical issues and solutions of this application. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide an Upper Lid shield sandblasting / arc spraying protection device that addresses the shortcomings of the existing technology. This device has a simple structure, reliably shields and protects the parts of the product that need protection through a contoured structure, avoids the problem of residual adhesive and adhesive marks, requires low operator skills, is suitable for mass production, can be used for shielding and protecting products in sandblasting or arc spraying processes, can be reused, and reduces costs.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model is an Upper Lid shield sandblasting / arc spraying protection device. The Upper Lidshield6 includes a shielding part and a spraying part. The shielding part is configured as an annular structure arranged around the edge of the Upper Lid shield surface. Multiple product holes are provided at the shielding part position. The protective component is an annular structure and has multiple columns protruding from the lower surface.

[0007] In this invention, the Chinese name for Upper Lid Shield is Upper Cover Shielding Plate.

[0008] The Upper Lid shield has a disc structure, and the part of the Upper Lid shield to be coated is located in the middle of the part to be masked.

[0009] The diameter of the inner ring of the protective component is set to be equal to the diameter of the inner ring of the part to be shielded.

[0010] The outer diameter of the protective component is set to be equal to the diameter of the outer diameter of the part to be shielded.

[0011] The column has a convex shape, the product hole has a convex shape, and the number and position of the column and the product hole correspond.

[0012] The protective component has screw holes on some of its columns, and each screw hole is designed to accommodate a screw.

[0013] The protective component is a structure made of metal.

[0014] The protective component is a structure made of stainless steel.

[0015] The height of the column is less than the thickness of the Upper Lid shield, and the product hole penetrates the Upper Lid shield.

[0016] The working principle and beneficial effects of this utility model are as follows:

[0017] The Upper Lid Shield Sandblasting / Arc Spraying Protection Device of this utility model is designed with protective components of corresponding sizes for Upper Lid Shield products of different sizes. Therefore, the inner diameter of the protective component is equal to the inner diameter of the part to be shielded, and the outer diameter of the protective component is equal to the outer diameter of the part to be shielded. Before sandblasting or arc spraying operations on the Upper Lid Shield, the protective component is connected to the Upper Lid Shield product. The protective component reliably fits against the part of the Upper Lid Shield to be shielded, reliably achieving shielding and ensuring that subsequent sandblasting or arc spraying will not affect the shielded part. This reliably protects the Upper Lid Shield. Furthermore, the connection and disassembly of the protective device are extremely convenient; the connection immediately establishes the correct positioning, requiring minimal operator skill and eliminating the problem of misalignment after connection. Moreover, the protective device is reusable, reducing costs. Attached Figure Description

[0018] The following is a brief explanation of the contents depicted in the accompanying drawings and the markings therein:

[0019] Figure 1 This is a schematic diagram of the Upper Lid shield described in this utility model;

[0020] Figure 2 This is a schematic diagram of the Upper Lid shield sandblasting / arc welding protection device described in this utility model;

[0021] Figure 3 This is a cross-sectional structural diagram of the part of the Upper Lid shield to be shielded, which is protected by the Upper Lid shield sandblasting / arc spraying protection device of this utility model.

[0022] The labels in the attached diagram are as follows: 1. Part to be masked; 2. Part to be coated; 3. Product hole; 4. Protective component; 5. Column; 6. Upper Lid shield; 7. Screw hole; 8. Screw. Detailed Implementation

[0023] The following description, with reference to the accompanying drawings, provides a more detailed explanation of the specific embodiments of this utility model, including the shape and structure of each component, the relative positions and connections between the parts, the functions and working principles of each part:

[0024] As attached Figure 1 - Appendix Figure 3 As shown, this utility model is an upper lid shield sandblasting / arc spraying protection device. The upper lid shield 6 includes a shielding part 1 and a spraying part 2. The shielding part 1 is configured as a ring structure arranged around the edge of the upper lid shield surface. Multiple product holes 3 are provided at the position of the shielding part 1. The protective component 4 is a ring structure with multiple columns 5 protruding from the lower surface. The above structure addresses the shortcomings of the prior art by proposing an improved technical solution. In the structural design, protective components of corresponding sizes are manufactured for upper lid shield products of different sizes. The diameter of the inner ring of the protective component 4 is equal to the diameter of the inner ring of the shielding part 1. The diameter of the outer ring of the protective component 4 is equal to the diameter of the outer ring of the shielding part 1. In this way, before sandblasting or arc welding of the upper lid shield, the protective component is connected to the upper lid shield. The protective component reliably fits the area of ​​the upper lid shield to be shielded, reliably achieving shielding and ensuring that subsequent sandblasting or arc welding will not affect the shielded area. It reliably protects the upper lid shield, and the connection and disassembly of the protective device to the upper lid shield are extremely convenient. Once connected, both are immediately positioned, requiring minimal operator skill and eliminating the problem of misalignment after connection. Furthermore, the protective device is reusable, reducing costs. The upper lid shield sandblasting / arc welding protection device described in this invention has a simple structure. Through its contoured structure, it reliably shields the parts of the product that need protection, avoiding residual adhesive and marks. It requires minimal operator skill, is suitable for mass production, and can be used simultaneously for sandblasting or arc welding processes. It is reusable, further reducing costs.

[0025] The Upper Lid shield has a disc structure, with the part to be coated (2) located in the middle of the part to be masked (1). In this structure, the part to be masked is located on the outer ring of the part to be coated. Therefore, corresponding to the shape of the Upper Lid shield, a protective component is provided. This protective component is a ring structure used to mask the part to be masked without obstructing or affecting the coating or arc spraying process. It is convenient to use and has good reliability.

[0026] The inner diameter of the protective component 4 is set to be equal to the inner diameter of the part to be shielded 1. The outer diameter of the protective component 4 is also set to be equal to the outer diameter of the part to be shielded 1. With this structure, after the protective component and the upper lid shield are connected via positioning holes and pins, the surface of the protective component reliably shields the area to be shielded, without affecting the area to be sprayed / arc-sprayed. No alignment is required during shielding; precise alignment is achieved immediately after the protective component and upper lid shield are connected.

[0027] The column 5 and the product hole 3 are both convex in shape, and their numbers and positions correspond. This structure, where the shape and size of the column correspond to the product hole, facilitates reliable assembly, and after assembly, the protective device reliably positions the product.

[0028] The protective component 4 has screw holes 7 on some of its uprights 5, each screw hole 7 designed to accommodate a screw 8. When the Upper Lid shield 6 undergoes spraying or arc welding, the part of the Upper Lid shield 6 to be sprayed is positioned at the top, while the protective component is located on the upper surface of the Upper Lid shield 6. Therefore, separation between the protective component and the Upper Lid shield 6 is generally not an issue. To further ensure a reliable connection between the Upper Lid shield 6 and the protective component, screw holes and screws are provided. After the Upper Lid shield 6 and the protective component are connected, the screws are then tightened, reliably achieving positioning.

[0029] The protective component 4 is a structure made of metal. Because the protective component 4 is made of metal, it can be cleaned and reused after use, increasing its lifespan.

[0030] The material of the protective component 4 is preferably stainless steel.

[0031] The height of the column 5 is less than the thickness of the upper lid shield 6, and the product hole 3 penetrates the upper lid shield 6. With this structure, when the upper lid shield 6 is connected to the protective component, the column 5 is located inside the product hole 3 and will not protrude outside the product.

[0032] The Upper Lid Shield Sandblasting / Arc Spraying Protection Device of this utility model is designed with protective components of corresponding sizes for Upper Lid Shield products of different sizes. Therefore, the inner diameter of the protective component is equal to the inner diameter of the part to be shielded, and the outer diameter of the protective component is equal to the outer diameter of the part to be shielded. Before sandblasting or arc spraying operations on the Upper Lid Shield, the protective component is connected to the Upper Lid Shield product. The protective component reliably fits against the part of the Upper Lid Shield to be shielded, reliably achieving shielding and ensuring that subsequent sandblasting or arc spraying will not affect the shielded part. This reliably protects the Upper Lid Shield. Furthermore, the connection and disassembly of the protective device are extremely convenient; the connection immediately establishes the correct positioning, requiring minimal operator skill and eliminating the problem of misalignment after connection. Moreover, the protective device is reusable, reducing costs.

[0033] The present invention has been described above with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any improvements made using the inventive concept and technical solution of the present invention, or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. An upper lid shield protection device for sandblasting / arc welding, characterized in that: The Upper Lidshield (6) includes a shielding part (1) and a spraying part (2). The shielding part (1) is configured as an annular structure arranged around the edge of the Upper Lid shield surface. Multiple product holes (3) are provided at the shielding part (1). The protective component (4) is an annular structure. Multiple columns (5) protruding from the lower surface are provided in the protective component (4). The protective component (4) has screw holes (7) on some of the columns (5), and each screw hole (7) is designed to accommodate a screw (8).

2. The Upper Lid Shield sandblasting / arc welding protection device according to claim 1, characterized in that: The Upper Lid shield is a disc structure, and the part to be sprayed (2) of the Upper Lid shield is located in the middle of the part to be shielded (1).

3. The Upper Lid Shield Sandblasting / Arc Spraying Protection Device according to claim 1 or 2, characterized in that: The inner diameter of the protective component (4) is set to be equal to the inner diameter of the part to be shielded (1).

4. The Upper Lid Shield Sandblasting / Arc Spraying Protection Device according to claim 3, characterized in that: The outer ring of the protective component (4) is set to have a diameter equal to that of the outer ring of the part to be shielded (1).

5. The Upper Lid shield sandblasting / arc welding protection device according to claim 1 or 2, characterized in that: The column (5) is a convex-shaped structure, the product hole (3) is a convex-shaped structure, and the number and position of the column (5) and the product hole (3) correspond.

6. The Upper Lid Shield Sandblasting / Arc Spraying Protection Device according to claim 1 or 2, characterized in that: The protective component (4) is a structure made of metal.

7. The Upper Lid Shield Sandblasting / Arc Spraying Protection Device according to claim 6, characterized in that: The protective component (4) is made of stainless steel.

8. The Upper Lid Shield Sandblasting / Arc Spraying Protection Device according to claim 1 or 2, characterized in that: The height of the column (5) is smaller than the thickness of the upper lid shield (6), and the product hole (3) penetrates the upper lid shield (6).

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