Vacuum coating chamber structure

Abstract

The utility model discloses a vacuum coating chamber structure, include: chamber body and flange, the wall body of chamber body is equipped with the inner wall board and outer wall board of inside and outside interval arrangement, and the heat insulation cavity is formed between the inner wall board and outer wall board, and the inner wall board is equipped with a plurality of inner installation mouth, and the outer wall board is equipped with a plurality of outer installation mouth, and the inner installation mouth is set up with the outer installation mouth one to one opposition, the flange is welded between the inner installation mouth and the outer installation mouth of opposite setting respectively. The outer peripheral wall of flange is connected with the outer end of inner installation mouth through second weld joint, and the heat insulation cavity is isolated with coating vacuum chamber through first weld joint and second weld joint, plays double sealing effect, and second weld joint increases strength full -penetration isolation water function, prevents the corrosion of water to first weld joint, guarantees the welding quality and sealing property.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a vacuum coating chamber structure. Background Technology

[0002] A vacuum coating machine is a device that coats workpieces under high vacuum conditions. The vacuum coating chamber is the main area for coating processing. Generally, flanges are installed on the side walls of the vacuum coating chamber to connect different coating functional components, such as arc source components. Heaters are also installed in the vacuum coating chamber for heating, depending on the specific process. In practical use, existing vacuum coating chambers have the following problems: At high temperatures, the chamber walls undergo thermal deformation, resulting in significant heat loss and potential damage to external components; currently, flanges are fixed to the mounting openings on the chamber walls using welding, with a single weld seam connection between the flange and the mounting opening, resulting in poor strength and sealing. Utility Model Content The purpose of this utility model is to provide a vacuum coating chamber structure to solve one or more technical problems existing in the prior art, and at least provide a beneficial option or create conditions.

[0003] The technical solution adopted to solve the above-mentioned technical problems is as follows: This utility model provides a vacuum coating chamber structure, including: The chamber body has an inner wall panel and an outer wall panel that are spaced apart from each other. A heat insulation cavity is formed between the inner wall panel and the outer wall panel. The inner wall panel has multiple inner mounting ports, and the outer wall panel has multiple outer mounting ports. The inner mounting ports and the outer mounting ports are arranged opposite to each other. Multiple flanges are provided, and the flanges are respectively welded between the inner mounting port and the outer mounting port, which are arranged opposite to each other.

[0004] The beneficial effects of the vacuum coating chamber structure of this utility model are: During use, the arc source component is installed on multiple flanges. The heat insulation is achieved through the heat insulation cavity formed between the inner and outer wall panels. This prevents thermal deformation of the cavity wall and avoids excessively high arc source temperature, thus preventing high temperature from affecting external workers and reducing heat loss. In addition, the flanges are welded between the inner and outer mounting ports, which are arranged opposite to each other, to reinforce the connection between the inner and outer wall panels and improve the strength of the weld.

[0005] As a further improvement to the above technical solution, the outer peripheral wall of the flange is connected to the inner end of the inner mounting port by a first weld, the outer peripheral wall of the flange is connected to the outer end of the inner mounting port by a second weld, and the outer peripheral wall of the flange is connected to the outer end of the outer mounting port by a third weld.

[0006] As a further improvement to the above technical solution, the heat insulation cavity is filled with coolant.

[0007] As a further improvement to the above technical solution, the flange has multiple connection holes distributed at the end away from the inner mounting port.

[0008] As a further improvement to the above technical solution, multiple flanges are arranged at intervals along the axial direction of the chamber body.

[0009] As a further improvement to the above technical solution, the chamber body is provided with multiple rows of flanges spaced apart circumferentially, and each row of flanges is arranged at intervals along the axial direction of the chamber body.

[0010] As a further improvement to the above technical solution, the thickness of the inner wall panel is greater than the thickness of the outer wall panel.

[0011] As a further improvement to the above technical solution, the heat insulation cavity is provided with an inlet and an outlet for connecting to an external liquid supply pipeline.

[0012] As a further improvement to the above technical solution, the chamber body includes a hollow main cavity and two end plates respectively disposed at both ends of the main cavity. The wall of the main cavity includes an inner wall plate and an outer wall plate, so that the heat insulation cavity is arranged around the main cavity.

[0013] As a further improvement to the above technical solution, the main cavity is vertically arranged, and the bottom of the cavity body is provided with multiple support feet, the height of which is adjustable.

[0014] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a front cross-sectional view of an embodiment of the vacuum coating chamber structure provided by this utility model; Figure 2 yes Figure 1 A magnified view of part A in the middle; Figure 3This is a schematic diagram of an embodiment of the vacuum coating chamber structure provided by this utility model; Icon labels: Chamber body 100; inner wall panel 110; inner mounting port 111; outer wall panel 120; outer mounting port 121; heat insulation cavity 130; main cavity 140; end plate 150; support leg 160; Flange 200; Connection hole 210; First weld seam 300; Second weld 400; The third weld is 500. Detailed Implementation

[0016] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0017] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0018] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0019] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0020] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of this utility model, not all embodiments.

[0021] At high temperatures, the walls of existing vacuum coating chambers undergo thermal deformation, resulting in significant heat loss and potential damage to external components. Current technologies typically use welding to fix the flange 200 to the mounting opening in the chamber wall, with a single weld seam connection between the flange 200 and the mounting opening, leading to poor stability and sealing. Therefore, this invention proposes a new vacuum coating chamber structure to address these problems.

[0022] Reference Figures 1-3 The vacuum coating chamber structure of this utility model is illustrated in the following embodiments: like Figure 1 and Figure 3 As shown, the vacuum coating chamber structure of this embodiment includes: a chamber body 100 and a flange 200.

[0023] The chamber body 100 has an inner wall panel 110 and an outer wall panel 120 spaced apart. A heat insulation cavity 130 is formed between the outer surface of the inner wall panel 110 and the inner surface of the outer wall panel 120. In some other embodiments, the heat insulation cavity 130 may be a vacuum chamber, or it may be filled with heat insulation material to achieve the function of heat insulation. In this embodiment, the heat insulation cavity 130 is filled with coolant, which insulates the wall of the chamber body 100 and prevents the inner wall panel 110 from thermally deforming.

[0024] like Figure 2 As shown, the inner wall panel 110 of this embodiment is provided with a plurality of inner mounting ports 111, and the outer wall panel 120 is provided with a plurality of outer mounting ports 121, with the inner mounting ports 111 and the outer mounting ports 121 arranged one-to-one opposite each other.

[0025] The number of flanges 200 corresponds one-to-one with the number of inner mounting ports 111 or outer mounting ports 121. Multiple flanges 200 are welded to the inner mounting ports 111 and outer mounting ports 121 that are arranged opposite to each other. It can be understood that the multiple flanges 200 serve as connecting parts between the inner wall plate 110 and the outer wall plate 120, and play a role in reinforcing the connection between the inner wall plate 110 and the outer wall plate 120, improving the strength of the weld, and thus improving the structural strength of the wall of the chamber body 100.

[0026] In use, the arc source component is installed on multiple flanges 200, and heat insulation is achieved through the heat insulation cavity 130 formed between the inner wall plate 110 and the outer wall plate 120. This prevents thermal deformation of the wall of the cavity body 100, avoids excessively high temperature of the arc source and avoids high temperature affecting external workers, and reduces heat loss.

[0027] Because the insulation cavity 130 is filled with coolant, the coolant can corrode the welds fixing the flange 200, thus affecting the sealing and firmness of the flange 200 installation. Figure 2As shown, in this embodiment, the outer peripheral wall of the flange 200 is connected to the inner end of the inner mounting port 111 by a first weld 300, and the outer peripheral wall of the flange 200 is connected to the outer end of the inner mounting port 111 by a second weld 400. The first weld 300 and the second weld 400 isolate the heat insulation cavity 130 from the coating vacuum chamber, achieving a double sealing effect. At the same time, it also improves the firmness of the connection between the flange 200 and the inner wall plate 110. The second weld 400 increases the strength and fully isolates water, preventing water from corroding the first weld 300 and ensuring welding quality and sealing performance.

[0028] Meanwhile, the outer peripheral wall of flange 200 is connected to the outer end of outer mounting port 121 by a third weld 500. During installation, flange 200 is pre-welded into inner mounting port 111, then outer wall plate 120 is laid, and then the outer peripheral wall of flange 200 is welded to the outer end of outer mounting port 121 from the outside.

[0029] Compared to the traditional single-weld structure, this utility model uses a first weld 300, a second weld 400, and a third weld 500 to improve the firmness and sealing of the flange 200 installation.

[0030] In this embodiment, the flange 200 has multiple connection holes 210 at the end away from the inner mounting port 111. The connection holes 210 are used for mounting and fixing the arc source component.

[0031] In this embodiment, multiple flanges 200 are arranged at intervals along the axial direction of the chamber body 100.

[0032] Furthermore, in this embodiment, the chamber body 100 is provided with multiple rows of flanges 200 spaced apart circumferentially, and each row of flanges 200 is arranged at intervals along the axial direction of the chamber body 100.

[0033] Furthermore, since the pressure borne by the inner wall panel 110 is greater than that of the outer wall panel 120, and the thickness of the inner wall panel 110 is greater than that of the outer wall panel 120, the load-bearing capacity of the chamber body 100 is improved.

[0034] In some other embodiments, the heat insulation cavity 130 is provided with an inlet and an outlet for connecting to an external liquid supply pipe. The coolant enters the heat insulation cavity 130 from the inlet for heat exchange, and then flows out from the outlet to exchange heat with an external heat exchanger to achieve cyclic heat dissipation.

[0035] In this embodiment, the chamber body 100 includes a hollow main cavity 140 and two end plates 150 respectively disposed at both ends of the main cavity 140. The wall of the main cavity 140 includes an inner wall plate 110 and an outer wall plate 120, so that the heat insulation cavity 130 is arranged around the main cavity 140 to improve the heat insulation effect of the chamber body 100.

[0036] In this embodiment, the main cavity 140 is vertically arranged, and the bottom of the cavity body 100 is provided with multiple support feet 160, the height of which is adjustable.

[0037] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0038] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A vacuum coating chamber structure, characterized in that, include: The chamber body (100) has an inner wall panel (110) and an outer wall panel (120) spaced apart from each other. A heat insulation cavity (130) is formed between the inner wall panel (110) and the outer wall panel (120). The inner wall panel (110) has a plurality of inner mounting ports (111), and the outer wall panel (120) has a plurality of outer mounting ports (121). The inner mounting ports (111) and the outer mounting ports (121) are arranged opposite to each other. Multiple flanges (200) are provided, and the flanges (200) are respectively welded between the inner mounting port (111) and the outer mounting port (121) which are arranged opposite to each other.

2. The vacuum coating chamber structure according to claim 1, characterized in that: The outer peripheral wall of the flange (200) is connected to the inner end of the inner mounting port (111) by a first weld (300), the outer peripheral wall of the flange (200) is connected to the outer end of the inner mounting port (111) by a second weld (400), and the outer peripheral wall of the flange (200) is connected to the outer end of the outer mounting port (121) by a third weld (500).

3. The vacuum coating chamber structure according to claim 1, characterized in that: The heat insulation cavity (130) is filled with coolant.

4. The vacuum coating chamber structure according to claim 1, characterized in that: The flange (200) has a plurality of connection holes (210) distributed at the end away from the inner mounting port (111).

5. The vacuum coating chamber structure according to claim 1, characterized in that: The plurality of flanges (200) are arranged at intervals along the axial direction of the chamber body (100).

6. The vacuum coating chamber structure according to claim 1, characterized in that: The chamber body (100) is provided with multiple rows of flanges (200) spaced apart circumferentially, and each row of flanges (200) is arranged at intervals along the axial direction of the chamber body (100).

7. The vacuum coating chamber structure according to claim 1, characterized in that: The thickness of the inner wall panel (110) is greater than the thickness of the outer wall panel (120).

8. The vacuum coating chamber structure according to claim 1, characterized in that: The heat insulation cavity (130) is provided with an inlet and an outlet for connection to an external liquid supply pipeline.

9. The vacuum coating chamber structure according to claim 1, characterized in that: The chamber body (100) includes a hollow main cavity (140) and two end plates (150) respectively disposed at both ends of the main cavity (140). The walls of the main cavity (140) include the inner wall plate (110) and the outer wall plate (120) so that the heat insulation cavity (130) is arranged around the main cavity (140).

10. The vacuum coating chamber structure according to claim 9, characterized in that: The main cavity (140) is vertically arranged, and the bottom of the cavity body (100) is provided with multiple support feet (160), the height of which is adjustable.

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