A new evaporation boat

Abstract

The utility model relates to the technical field of evaporation coating, concretely relates to a novel evaporation boat, including evaporation boat body, be provided with the molten pool on the evaporation boat body, be provided with a plurality of liquid holding platform in the molten pool, a plurality of liquid holding platform follow the length direction of molten pool arrangement, and in the direction of the middle of molten pool to its both ends extension, the liquid holding platform gradually deepens. In the technical scheme provided by the utility model, through the gradually increasing depth of the liquid holding platform in the direction of the middle of molten pool to its both ends extension, make the molten liquid flow from the middle of the high place of molten pool to the end of the low place, increase effective evaporation area, on one hand avoid the molten liquid concentration to slow down the corrosion rate, increase the service life of evaporation boat, on the other hand can improve the working efficiency of evaporation.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating technology, and specifically to a novel evaporation boat. Background Technology

[0002] Evaporation coating refers to a method in which a metal or non-metal material is heated under high vacuum conditions, causing it to evaporate and condense onto the surface of the workpiece (metal, semiconductor, or insulator) to form a thin film.

[0003] Evaporation boats are used in evaporation coating, but the existing evaporation boats are often flat, and the melting point is in the middle during wire feeding, resulting in a more concentrated corrosion surface. This affects the service life of the evaporation boat and increases costs. Utility Model Content

[0004] The purpose of this invention is to solve the problem of concentrated corrosion on the surface of existing evaporation boats and to provide a new type of evaporation boat that improves the service life of the evaporation boat by modifying the surface structure.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows:

[0006] A novel evaporation boat includes an evaporation boat body, on which a molten pool is provided, and multiple liquid-holding platforms are provided in the molten pool. The multiple liquid-holding platforms are arranged sequentially along the length direction of the molten pool, and the liquid-holding platforms gradually become deeper in the direction extending from the middle of the molten pool to both ends.

[0007] Preferably, the number of liquid-holding platforms is set to an odd number, the liquid-holding platform in the middle of the molten pool is the first liquid-holding platform, and the other liquid-holding platforms are arranged on both sides of the first liquid-holding platform in a mirror image.

[0008] Preferably, the deepest liquid-containing platform is located at the end of the molten pool.

[0009] Preferably, the depth of the deepest liquid-containing platform is no more than one-fifth of the thickness of the evaporation boat body.

[0010] Preferably, the liquid-holding areas of the plurality of liquid-holding platforms are the same.

[0011] Preferably, the liquid-holding area of ​​the plurality of liquid-holding platforms decreases in the direction extending from the middle of the molten pool to both ends.

[0012] Preferably, the liquid-holding area of ​​the first liquid-holding platform is less than the sum of the liquid-holding areas of its two adjacent liquid-holding platforms.

[0013] Preferably, the liquid-containing area of ​​the molten pool is not less than four-fifths of the top surface area of ​​the evaporation boat body.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] In the technical solution provided by this utility model, by using a liquid-holding platform whose depth gradually increases in the direction extending from the middle of the molten pool to both ends, the molten liquid flows from the middle of the high part of the molten pool to the end of the low part, increasing the effective evaporation area. On the one hand, this avoids the concentration of molten liquid, thereby slowing down the corrosion rate and increasing the service life of the evaporation boat. On the other hand, it can improve the working efficiency of vapor deposition. Attached Figure Description

[0016] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts.

[0017] in:

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a cross-sectional schematic diagram of the present invention.

[0020] The diagram is labeled as follows: 1. Evaporation boat body; 2. Molten pool; 201. First liquid holding platform; 202. Second liquid holding platform; 203. Third liquid holding platform. Detailed Implementation

[0021] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative descriptions of the technical solution of this utility model and should not be considered as the entirety of this utility model or as limitations or restrictions on the technical solution of this utility model.

[0022] like Figure 1As shown in the figure, a specific embodiment of the novel evaporation boat provided by this utility model includes an evaporation boat body 1, on which a molten pool 2 is provided. The liquid-holding area of ​​the molten pool 2 is not less than four-fifths of the top surface area of ​​the evaporation boat body 1. This ensures the working efficiency of evaporation coating and the full utilization of the evaporation boat body 1. Multiple liquid-holding platforms are provided in the molten pool 2. The multiple liquid-holding platforms are arranged sequentially along the length of the molten pool 2. In the direction extending from the middle of the molten pool 2 to both ends, the liquid-holding platforms gradually become deeper. By the liquid-holding platforms with gradually increasing depth in the direction extending from the middle of the molten pool 2 to both ends, the molten liquid flows from the middle of the high point of the molten pool 2 to the lower end, increasing the effective evaporation area. This avoids the concentration of molten liquid, thereby slowing down the corrosion rate and increasing the service life of the evaporation boat. On the other hand, it can improve the working efficiency of evaporation coating.

[0023] The number of liquid-holding platforms is set to an odd number. The liquid-holding platform in the middle of the molten pool 2 is the first liquid-holding platform 201. The other liquid-holding platforms are mirrored on both sides of the first liquid-holding platform 201. The first liquid-holding platform 201 serves as the initial platform for liquid holding. The solution gradually flows from the shallowest first liquid-holding platform 201 into the deeper liquid-holding platforms. The deepest liquid-holding platform is located at the end of the molten pool 2. The liquid-holding platforms fill the entire molten pool 2 to ensure full utilization of the molten pool 2. The depth of the deepest liquid-holding platform is no more than one-fifth of the thickness of the evaporation boat body 1 to avoid the evaporation boat body 1 being corroded and penetrated due to excessive depth of the liquid-holding platform.

[0024] like Figure 2 As shown, there are five liquid-holding platforms. The second liquid-holding platform 202 is set on both sides of the first liquid-holding platform 201. The third liquid-holding platform 203 is set on the side of the second liquid-holding platform 202 away from the first liquid-holding platform 201.

[0025] Example 1

[0026] The liquid-containing areas of the first liquid-containing platform 201, the second liquid-containing platform 202, and the third liquid-containing platform 203 are equal.

[0027] The molten liquid flows evenly from the first liquid-holding platform 201 in the molten pool 2 to the second liquid-holding platforms 202 on both sides, and then to the third liquid-holding platform 203, so that the etched surface is evenly distributed on the entire boat surface, improving the service life of the evaporation boat and reducing the phenomenon of uneven heat distribution.

[0028] Example 2

[0029] The liquid holding areas of the first liquid holding platform 201, the second liquid holding platform 202, and the third liquid holding platform 203 decrease in that order. The liquid holding area of ​​the first liquid holding platform 201 is less than the sum of the liquid holding areas of its two adjacent second liquid holding platforms 202, so as to avoid the liquid holding area of ​​the first liquid holding platform 201 being too large, which would make it difficult for the molten liquid to flow to the second liquid holding platform 202.

[0030] The molten liquid flows evenly from the first liquid-containing platform 201 in the molten pool 2 to the second liquid-containing platforms 202 on both sides, and then to the third liquid-containing platform 203, so that the etched surface is evenly distributed on the entire boat surface. At the same time, the gradual change of the liquid-containing area allows the molten liquid to flow into more and farther liquid-containing platforms, thereby maximizing the effective evaporation area.

[0031] The technical scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.

Claims

1. A novel evaporation boat, characterized in that: It includes an evaporation boat body (1), on which a molten pool (2) is provided. Multiple liquid-holding platforms are provided in the molten pool (2). The multiple liquid-holding platforms are arranged sequentially along the length direction of the molten pool (2), and the liquid-holding platforms gradually become deeper in the direction extending from the middle of the molten pool (2) to both ends.

2. The novel evaporation boat according to claim 1, characterized in that: The number of liquid-holding platforms is set to an odd number. The liquid-holding platform in the middle of the molten pool (2) is the first liquid-holding platform (201), and the other liquid-holding platforms are mirror images of the first liquid-holding platform (201) on both sides.

3. The novel evaporation boat according to claim 1, characterized in that: The deepest liquid-containing platform is located at the end of the molten pool (2).

4. The novel evaporation boat according to claim 1, characterized in that: The depth of the deepest liquid-containing platform is no more than one-fifth of the thickness of the evaporation boat body (1).

5. The novel evaporation boat according to claim 1, characterized in that: The liquid-containing platforms described herein have the same liquid-containing area.

6. The novel evaporation boat according to claim 2, characterized in that: The liquid-holding area of ​​the plurality of liquid-holding platforms decreases in the direction extending from the middle of the molten pool (2) to both ends.

7. The novel evaporation boat according to claim 6, characterized in that: The liquid-holding area of ​​the first liquid-holding platform (201) is less than the sum of the liquid-holding areas of its two adjacent liquid-holding platforms.

8. The novel evaporation boat according to claim 1, characterized in that: The liquid-containing area of ​​the molten pool (2) is not less than four-fifths of the top surface area of ​​the evaporation boat body (1).

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