Substrate lithium supplementing device

Abstract

The utility model relates to base material lithium supplementing technical field especially, and more particularly to a base material lithium supplementing device. The base material lithium supplementing device includes roll shaft, first protective part, evaporation source and flow guide assembly. Among them, the base material is wound on the roll shaft. The first protective part has a vacuum chamber and a coating mouth, the coating mouth is communicated with the vacuum chamber, and the coating mouth is arranged towards the base material. The evaporation source is arranged in the vacuum chamber, and the evaporation source is used for evaporating lithium metal. The flow guide assembly is connected with the inner wall of the vacuum chamber, and the flow guide assembly is used for recycling after liquefying the metallic lithium attached to the inner wall of the vacuum chamber. The base material lithium supplementing device can improve the comprehensive utilization rate of lithium source, and reduce the raw material procurement cost. At the same time, the opportunity of the metallic lithium contacting with air when breaking the vacuum cavity is reduced, the probability of the lithium metal oxidizing into low-value lithium oxide is reduced, the lithium source loss is further reduced, and the cost is saved.

Description

Technical Field

[0001] This utility model relates to the field of lithium replenishment technology for substrates, and in particular to a lithium replenishment device for substrates. Background Technology

[0002] With the rapid development of new energy vehicles and the energy storage industry, higher requirements have been placed on the energy density, cycle life, and cost of lithium-ion batteries. During the first charge and discharge process of a battery, the negative electrode consumes active lithium due to the formation of a solid electrolyte interphase (SEI) film, resulting in irreversible loss of battery capacity. To compensate for this loss, the industry generally adopts lithium replenishment technology to provide additional lithium to the negative electrode. Among these technologies, vacuum evaporation lithium plating is widely used because of its uniform coating, controllable thickness, and compatibility with existing substrate winding / stacking production lines.

[0003] Specifically, the basic principle of vacuum evaporation lithium plating is to heat and sublimate metallic lithium in a vacuum chamber, causing lithium atoms to deposit on the surface of the negative electrode substrate to form an ultra-thin metallic lithium layer, thereby replenishing the lithium loss in the first cycle and improving battery capacity and lifespan.

[0004] However, due to the uncontrollable movement of gaseous lithium atoms evaporated from the evaporation source, some lithium atoms cannot be deposited on the substrate surface. Instead, they adhere to the inner wall and liner of the lithium replenishment vacuum chamber and grow into a thin film of lithium atoms, leading to a significant reduction in lithium source utilization and waste of raw materials. Simultaneously, the lithium metal deposited on the inner wall and liner of the vacuum chamber undergoes oxidation upon contact with air during the vacuum release process. The resulting lithium oxides are difficult to recover and clean, further increasing production costs and reducing lithium source utilization.

[0005] Therefore, there is an urgent need to design a substrate lithium replenishment device to solve the above technical problems. Utility Model Content

[0006] The purpose of this invention is to provide a lithium replenishment device for a substrate, which can improve the utilization rate of lithium sources and save costs.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] This utility model provides a substrate lithium replenishment device, comprising:

[0009] A roller, on which a substrate is wound;

[0010] A first protective component has a vacuum chamber and a coating port, the coating port being connected to the vacuum chamber and facing the substrate.

[0011] A vapor deposition source is disposed within the vacuum chamber and is used to evaporate lithium metal.

[0012] A flow guiding assembly is connected to the inner wall of the vacuum chamber, and the flow guiding assembly is used to liquefy and recycle the metallic lithium adhering to the inner wall of the vacuum chamber.

[0013] As an optional technical solution for a substrate lithium replenishment device, the flow guiding component includes a first flow guiding section and a second flow guiding section that are arranged at relative angles;

[0014] The first flow guide and the second flow guide are disposed on the inner wall of at least one side of the vacuum chamber. One end of the first flow guide is disposed away from the vapor deposition source and the other end is disposed towards the vapor deposition source. One end of the second flow guide is disposed away from the vapor deposition source and the other end is disposed towards the vapor deposition source.

[0015] As an optional technical solution for a substrate lithium replenishment device, the end of the first flow guide facing the vapor deposition source and the end of the second flow guide on the same side of the inner wall of the vacuum chamber facing the vapor deposition source have a gap, and the gap is located above the vapor deposition source;

[0016] And / or, both the first flow guide and the second flow guide are provided with overflow holes, the overflow holes are located above the vapor deposition source, and both the first flow guide and the second flow guide are lithium-repellent.

[0017] As an optional technical solution for a substrate lithium replenishment device, the flow guiding assembly further includes a funnel and a flow guiding pipe. The funnel is located below the gap and / or the overflow hole. One end of the flow guiding pipe is connected to the funnel, and the other end of the flow guiding pipe extends into the vapor deposition source or the recovery device.

[0018] As an optional technical solution for a substrate lithium replenishment device, the first protective component further includes a liquefaction plate, a heat insulation plate, and a connector. One end of the connector is connected to the liquefaction plate, and the other end is connected to the heat insulation plate. The liquefaction plate surrounds the vacuum chamber and forms the inner wall of the vacuum chamber. The liquefaction plate is configured to liquefy the metallic lithium adhering to the inner wall of the vacuum chamber. The heat insulation plate forms the outer wall of the vacuum chamber and is configured to reduce the external heat radiation flux of the gaseous metallic lithium.

[0019] As an optional technical solution for a substrate lithium replenishment device, the first protective component further includes a fixing plate and a heating element. The heating element is disposed on the fixing plate, and the end of the heating element away from the fixing plate is connected to the liquefied plate. The end of the connector away from the heat insulation plate is connected to the fixing plate. The heating element is configured to heat the liquefied plate.

[0020] As an optional technical solution for a substrate lithium replenishment device, the first protective component further includes a liquid inlet and a liquid outlet, both of which are disposed on the heat insulation plate. The heat insulation plate is provided with a channel for coolant flow, and both the liquid inlet and the liquid outlet are connected to the channel.

[0021] As an optional technical solution for a substrate lithium replenishment device, the heating element is configured as a plurality of elements, and the plurality of heating elements are arranged at equal intervals along the circumference of the vacuum chamber.

[0022] As an optional technical solution for a substrate lithium replenishment device, the substrate lithium replenishment device further includes a second protective component. One end of the second protective component is connected to the first protective component through the coating port, and the other end of the second protective component is arc-shaped. The arc shape is adapted to the roller shaft, and there is a gap between the substrate and the second protective component on the roller shaft.

[0023] As an optional technical solution for a substrate lithium replenishment device, the substrate lithium replenishment device further includes an air curtain, which surrounds the periphery of the second protective member.

[0024] The beneficial effects of this utility model include at least the following:

[0025] This invention provides a substrate lithium replenishment device, which includes a roller, a first protective component, a vapor deposition source, and a flow guiding assembly. The roller is wound with a substrate. The first protective component has a vacuum chamber and a deposition port, the deposition port being connected to the vacuum chamber and facing the substrate. The vapor deposition source is disposed within the vacuum chamber and is used to evaporate lithium metal. The flow guiding assembly is connected to the inner wall of the vacuum chamber and is used to liquefy and recover the lithium metal adhering to the inner wall of the vacuum chamber.

[0026] The above describes how the flow guiding component allows liquid lithium metal adhering to the inner wall of the vacuum chamber to flow back to the evaporation source or recovery device under gravity. This reduces lithium metal loss caused by deposition in non-target areas. The returned liquid lithium is reintegrated into the evaporation source or recovery device, reheated and evaporated to participate in the lithium replenishment process, allowing previously wasted lithium to re-enter the evaporation cycle, significantly improving the overall utilization rate of lithium and reducing raw material procurement costs. Simultaneously, because the liquid lithium metal can flow back to the evaporation source or recovery device along the flow guiding component, it does not need to remain on the inner wall for an extended period, thus reducing the chance of contact with air when the vacuum chamber is opened. This lowers the probability of lithium metal oxidizing into low-value lithium oxides, further reducing lithium loss and preventing contamination of the vacuum chamber by lithium oxides. This also reduces the difficulty of subsequent cleaning and maintenance, improves production efficiency, and saves costs. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the lithium replenishment device for the substrate provided in this embodiment of the present invention;

[0029] Figure 2 yes Figure 1 A magnified view of a section at point A in the middle;

[0030] Figure 3 This is a cross-sectional view of the inner wall of the first protective component provided in this embodiment of the present invention.

[0031] Figure Labels

[0032] 10. Roller shaft; 11. Substrate; 20. First protective component; 21. Vacuum chamber; 22. Coating port; 23. Liquefaction plate; 24. Heat insulation plate; 25. Connector; 26. Fixing plate; 27. Heating element; 28. Liquid inlet; 29. ​​Liquid outlet; 30. Evaporation source; 40. Flow guiding assembly; 41. First flow guiding section; 42. Second flow guiding section; 43. Overflow hole; 44. Funnel; 45. Flow guiding pipe; 50. Second protective component; 51. Spacing; 60. Air curtain. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0037] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0040] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0041] This embodiment provides a substrate lithium replenishment device that can improve the utilization rate of lithium sources and save costs.

[0042] like Figures 1-3As shown, the lithium replenishment device mainly includes a roller 10, a first protective component 20, a vapor deposition source 30, and a flow guiding assembly 40. A substrate 11 is wound around the roller 10. The first protective component 20 has a vacuum chamber 21 and a coating port 22, which communicates with the vacuum chamber 21 and faces the substrate 11. The vapor deposition source 30 is disposed inside the vacuum chamber 21 and is used to evaporate lithium metal. The flow guiding assembly 40 is connected to the inner wall of the vacuum chamber 21 and is used to liquefy and recover the lithium metal adhering to the inner wall of the vacuum chamber 21. Optionally, the bottom of the flow guiding assembly 40 is positioned above the vapor deposition source 30 or a recovery device (not shown in the figure) so that the liquid lithium metal adhering to the inner wall of the vacuum chamber 21 can flow along the flow guiding assembly 40 into the vapor deposition source 30 or the recovery device.

[0043] Based on the above design, in this embodiment, the flow guiding component 40 allows the liquid lithium metal adhering to the inner wall of the vacuum chamber 21 to flow back to the evaporation source 30 or the recovery device under the influence of gravity. This reduces the loss of lithium metal caused by deposition in non-target areas (inner wall, liner). The returned liquid lithium is reintegrated into the evaporation source 30 or the recovery device and is heated and evaporated again to participate in the lithium replenishment process. This allows the lithium source that would otherwise be wasted to participate in the evaporation cycle again, significantly improving the comprehensive utilization rate of the lithium source and reducing the cost of raw material procurement. At the same time, since the liquid lithium metal can flow back to the evaporation source 30 or the recovery device along the flow guiding component 40, it does not need to stay on the inner wall for a long time. This reduces the chance of contact with air when the vacuum chamber is opened, reducing the probability of lithium metal oxidizing into low-value lithium oxide, further reducing lithium source loss, and also avoiding contamination of the vacuum chamber 21 by lithium oxide, reducing the difficulty of subsequent cleaning and maintenance, improving production efficiency, and saving costs.

[0044] It is understood that the inner wall of the vacuum chamber 21 in this embodiment refers to the side wall of the vacuum chamber 21.

[0045] For example, the roller 10 is made of stainless steel, and a cooling channel is provided inside the roller 10 to circulate deionized water, thereby achieving the purpose of cooling the substrate 11 and preventing the substrate 11 from deforming due to excessively high vapor deposition temperature. The vapor deposition source 30 can be a crucible-type vapor deposition source, and the crucible material is boron nitride, which can heat the metallic lithium in the crucible to 600°C to achieve the evaporation of metallic lithium.

[0046] like Figures 1-2As shown, in this embodiment, the flow guiding assembly 40 includes a first flow guiding section 41 and a second flow guiding section 42 arranged at opposite angles. The first flow guiding section 41 and the second flow guiding section 42 are disposed on the inner wall of at least one side of the vacuum chamber 21. One end of the first flow guiding section 41 is disposed away from the vapor deposition source 30, and the other end is disposed towards the vapor deposition source 30. One end of the second flow guiding section 42 is disposed away from the vapor deposition source 30, and the other end is disposed towards the vapor deposition source 30. The first flow guiding section 41 and the second flow guiding section 42 are surface-treated to be lithium-repellent, so that liquefied lithium metal can flow on their surface for recycling.

[0047] Specifically, the vacuum chamber 21 has four sides, and each side has a flow guiding component 40 on its inner wall. The first flow guiding part 41 and the second flow guiding part 42 are fixed on the inner wall of the vacuum chamber 21. The liquid lithium metal adhering to the inner wall of the vacuum chamber 21 can flow back to the evaporation source 30 or the recovery device under the action of gravity through the flow guiding component 40.

[0048] In some optional embodiments, the flow guiding assembly 40 includes a first flow guiding section 41 and a second flow guiding section 42, both inclined upwards towards the vapor deposition source 30. One end of the first flow guiding section 41 is connected to the inner wall of the vacuum chamber 21, and the other end is positioned upwards towards the vapor deposition source 30. Similarly, one end of the second flow guiding section 42 is connected to the inner wall of the vacuum chamber 21, and the other end is positioned upwards towards the vapor deposition source 30. This expands the collection range for liquid lithium metal, allowing more escaped lithium metal to be effectively collected and returned to the vapor deposition source 30, further improving lithium recovery efficiency.

[0049] For example, in the frustum-shaped vacuum chamber 21, the first guide section 41 is connected to the left inner wall and the second guide section 42 is connected to the right inner wall. The tilt angle of both is set to 30°-45°, which can collect liquid lithium metal from the left inner wall and the right inner wall respectively.

[0050] For example, both the first guide section 41 and the second guide section 42 are made of stainless steel and are welded to the inner wall of the vacuum chamber 21 by argon arc welding.

[0051] In some optional embodiments, the end of the first guide portion 41 facing above the vapor deposition source 30 has a gap (not shown in the figure) with the end of the second guide portion 42 on the same side of the inner wall of the vacuum chamber 21 facing above the vapor deposition source 30, and the gap is located above the vapor deposition source 30. Figure 2 As shown, in this embodiment, both the first guide portion 41 and the second guide portion 42 are provided with overflow holes 43, which are located above the vapor deposition source 30. In other words, the guide assembly 40 may have only a gap, or only an overflow hole 43, or both a gap and an overflow hole 43.

[0052] By providing a gap between the first guide section 41 and the second guide section 42, with the gap located above the vapor deposition source 30, or by providing an overflow hole 43 on the first guide section 41 and the second guide section 42, with the overflow hole 43 located above the vapor deposition source 30, it is possible to ensure that the liquid lithium metal on the first guide section 41 and the second guide section 42 can quickly drip into the vapor deposition source 30 or the recovery device through the gap or the overflow hole 43, thereby reducing the risk of overflow or dripping into areas other than the vapor deposition source 30 due to accumulation, and further improving the guiding efficiency.

[0053] For example, the gap is disposed between the bottom of the first guide portion 41 and the second guide portion 42, the gap width is 5mm-10mm, and the center of the gap coincides with the central axis of the vapor deposition source 30. Both the first guide portion 41 and the second guide portion 42 can be provided with 2-5 overflow holes 43, the overflow holes 43 are circular and the diameter is 3mm-5mm.

[0054] like Figures 1-2 As shown, the flow guiding assembly 40 also includes a funnel 44 and a flow guiding tube 45. The funnel 44 is located below the gap and / or overflow hole 43. One end of the flow guiding tube 45 is connected to the funnel 44, and the other end of the flow guiding tube 45 extends into the vapor deposition source 30 or the recovery device. This allows for the complete collection of liquid lithium dripping from the gap or overflow hole 43, preventing liquid lithium from splashing or deflecting during the dripping process and dripping into other areas outside the vapor deposition source 30 or the recovery device, further reducing the loss of metallic lithium. The flow guiding tube 45 extends directly into the vapor deposition source 30 or the recovery device, allowing for precise introduction of the liquid lithium collected by the funnel 44 into the vapor deposition source 30 or the recovery device. This prevents the liquid metallic lithium from contacting impurities on the inner wall of the vacuum chamber 21 during the dripping process, improving the quality of the substrate 11 after lithium replenishment and preventing impurities from affecting battery performance.

[0055] Optionally, the funnel 44 and the guide tube 45 are threaded and detachable, and can be disassembled and cleaned separately when cleaning is required. Both the funnel 44 and the guide tube 45 are made of stainless steel.

[0056] like Figure 1 and Figure 3 As shown, the first protective component 20 in this embodiment also includes a liquefaction plate 23, a heat insulation plate 24, and a connector 25. One end of the connector 25 is connected to the liquefaction plate 23, and the other end is connected to the heat insulation plate 24. The liquefaction plate 23 surrounds a vacuum chamber 21 and forms the inner wall of the vacuum chamber 21. The liquefaction plate 23 is configured to liquefy the metallic lithium adhering to the inner wall of the vacuum chamber 21. The heat insulation plate 24 forms the outer wall of the vacuum chamber 21 and is configured to reduce the external heat radiation flux of gaseous metallic lithium.

[0057] The liquefaction plate 23 is designed to specifically liquefy gaseous lithium atoms adhering to its surface. Compared to the natural cooling liquefaction of the vacuum chamber 21, the liquefaction plate 23, through temperature control (e.g., heating to 182℃-400℃ to saturate the gaseous lithium before liquefaction), accelerates the liquefaction process, reduces the diffusion time of gaseous lithium inside the chamber, and allows lithium atoms to be converted into liquid lithium more quickly, entering the flow circulation and improving flow efficiency. The liquefaction plate 23, through temperature control, can also liquefy the solid metallic lithium originally adhering to the inner surface of the vacuum chamber 21 and allow it to enter the flow circulation. The heat insulation plate 24, serving as the outer wall of the vacuum chamber 21, effectively prevents the heat radiation generated by the liquefaction plate 23 and the evaporation source 30 from diffusing outwards, reducing heat loss within the vacuum chamber 21 and lowering energy consumption. Furthermore, the liquefaction plate 23 is also surface-treated to be lithium-repellent, allowing the liquefied metallic lithium to flow on its surface for recycling.

[0058] Furthermore, the first protective component 20 also includes a fixing plate 26 and a heating element 27. The heating element 27 is disposed on the fixing plate 26. One end of the heating element 27 away from the fixing plate 26 is connected to the liquefaction plate 23. The other end of the connector 25 away from the heat insulation plate 24 is connected to the fixing plate 26. The heating element 27 is configured to heat the liquefaction plate 23.

[0059] Multiple heating elements 27 are provided, and the multiple heating elements 27 are arranged at equal intervals along the circumference of the vacuum chamber 21. This can make the circumferential temperature distribution of the liquefaction plate 23 uniform, avoid the failure of lithium metal to liquefy in a certain area of ​​the circumference of the liquefaction plate 23 due to insufficient local heating, and ensure that the liquefaction plate 23 can achieve efficient lithium liquefaction throughout the entire area, further improving the lithium recovery rate.

[0060] For example, taking a frustum-shaped vacuum chamber 21 as an example, four sets of heating elements 27 can be provided, and the four sets of heating elements 27 are arranged at 90° intervals along the circumference.

[0061] The heating element 27 can adjust the temperature of the liquefaction plate 23 in real time according to the evaporation conditions, such as the power of the evaporation source 30 and the amount of lithium atoms evaporated, to avoid incomplete liquefaction of metallic lithium due to excessively low temperature or re-vaporization of liquid lithium due to excessively high temperature, thus ensuring a stable and efficient liquefaction process and further improving the lithium recovery rate.

[0062] For example, the liquefaction plate 23 is made of a metal with excellent thermal conductivity, such as a copper alloy, and the surface temperature is stabilized at 182°C-400°C by the heating element 27 (this temperature range allows the metallic lithium to liquefy quickly and prevents the liquid lithium from re-vaporizing). The heat insulation plate 24 is made of a high-temperature resistant heat insulation material, such as alumina ceramic, which can effectively block heat radiation.

[0063] For example, the heating element 27 uses an electric heating wire, such as a nickel-chromium alloy electric heating wire, and monitors the temperature of the liquefaction plate 23 in real time through a temperature sensor and is linked with the controller. When the temperature is below 182°C, the heating power is automatically increased, and when the temperature is above 400°C, the heating power is automatically reduced to ensure that the temperature is stable between 182°C and 400°C. The fixing plate 26 uses a high-temperature resistant metal plate, such as stainless steel.

[0064] Optionally, the connector 25 is configured as a bolt, with one end of the connector 25 connected to the heat insulation plate 24 and the other end connected to the fixing plate 26.

[0065] Understandably, the liquefaction plate 23 is preheated to 182℃-400℃ by an electric heating wire before vapor deposition and this temperature is maintained in real time during the vapor deposition process. If the temperature is below 182℃, gaseous lithium will directly solidify into solid lithium, causing solid lithium to adhere to the inner wall and become unable to flow and be recycled; if the temperature is above 400℃, it exceeds the saturation temperature of gaseous lithium, and the gaseous lithium cannot be liquefied and will still diffuse in gaseous form, making recycling impossible; therefore, setting the temperature of the liquefaction plate 23 in the range of 182℃-400℃ is precisely between the melting point of lithium (180.5℃) and the evaporation threshold (400℃), which can ensure the liquefaction of gaseous lithium and prevent liquid lithium from re-vaporizing or solidifying, providing a stable temperature basis for the liquefaction of metallic lithium.

[0066] In some optional embodiments, the side of the liquefied plate 23 facing the vacuum chamber 21, as well as the first guide portion 41 and the second guide portion 42, are coated with a lithium-repellent layer. The lithium-repellent layer can be a mixture of aluminum nitride and yttrium oxide, or it can be formed by spraying a mixture of aluminum nitride and lithium fluoride. The above coating material has excellent lithium-repellent properties, which can significantly reduce the adhesion between liquid lithium and the inner wall, allowing the liquid lithium to flow rapidly along the inner wall to the first guide portion 41 and the second guide portion 42 under its own gravity and surface tension.

[0067] like Figure 3 As shown, the first protective component 20 also includes a liquid inlet 28 and a liquid outlet 29. Both the liquid inlet 28 and the liquid outlet 29 are provided on the heat insulation plate 24. The heat insulation plate 24 is provided with a channel for the flow of coolant, and both the liquid inlet 28 and the liquid outlet 29 are connected to the channel.

[0068] For example, the coolant can be deionized water or heat transfer oil. The channels within the heat insulation plate 24 carry away the heat absorbed by the heat insulation plate 24 through the circulating coolant, preventing the temperature of the heat insulation plate 24 from rising due to long-term absorption of heat radiation.

[0069] In some optional embodiments, the channels within the heat insulation plate 24 adopt a spiral structure, and the spiral channels are arranged along the inner wall of the heat insulation plate 24. The coolant flows in from the inlet 28, absorbs heat through the spiral channels, and then flows out from the outlet 29.

[0070] like Figure 1 As shown, the substrate lithium replenishment device also includes a second protective member 50. One end of the second protective member 50 is connected to the first protective member 20 through the coating port 22, and the other end of the second protective member 50 is arc-shaped and adapted to the roller 10. There is a gap 51 between the substrate 11 on the roller 10 and the second protective member 50.

[0071] Specifically, one end of the second protective component 50 is connected to the coating port 22 of the first protective component 20, and the other end is connected to the arc-shaped adapter roller 10. This can prevent the lithium atoms evaporated by the vapor deposition source 30 from diffusing to the non-substrate 11 area, so that the lithium atoms are concentrated on the surface of the substrate 11 for deposition, reducing the problem of insufficient or excessive local lithium replenishment on the substrate 11 due to uneven lithium atom diffusion, and improving the uniformity of lithium replenishment; at the same time, it can also reduce the waste of lithium atoms and further improve the utilization rate of lithium source.

[0072] Maintaining a reasonable distance 51, such as 1mm-3mm, between the second protective component 50 and the substrate 11 can prevent the substrate 11 from directly contacting the second protective component 50 during the rotation of the roller 10, thereby reducing the risk of scratches on the substrate 11.

[0073] For example, the second protective component 50 is made of high-temperature resistant plastic material, such as polytetrafluoroethylene, and the arc radius matches the radius of the roller 10. For example, when the radius of the roller 10 is 50mm, the arc radius is 51mm-53mm.

[0074] In some alternative embodiments, the substrate lithium replenishment device further includes an air curtain 60 surrounding the second protective member 50.

[0075] Specifically, the air curtain 60 is arranged around the second protective component 50. The air curtain 60 can continuously spray inert gases, such as argon and nitrogen, to form a gas barrier that can prevent lithium atoms evaporated from the vapor deposition source 30 from diffusing out of the gaps in the coating port 22. This keeps the lithium atoms completely confined within the lithium replenishment area, maximizing the proportion of lithium atoms deposited on the substrate 11 or recovered by the flow guiding component 40, further improving the utilization rate of the lithium source and saving costs.

[0076] Optionally, the second protective component 50 and the first protective component 20 can be integrally formed or welded together.

[0077] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

[0078] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A lithium replenishment device for substrates, characterized in that, include: A roller (10) on which a substrate (11) is wound. The first protective component (20) has a vacuum chamber (21) and a coating port (22), the coating port (22) is connected to the vacuum chamber (21), and the coating port (22) is disposed facing the substrate (11); A vapor deposition source (30) is disposed in the vacuum chamber (21) and is used to evaporate lithium metal; A flow guiding component (40) is connected to the inner wall of the vacuum chamber (21). The flow guiding component (40) is used to liquefy and recycle the lithium metal adhering to the inner wall of the vacuum chamber (21).

2. The substrate lithium replenishment device according to claim 1, characterized in that, The flow guiding component (40) includes a first flow guiding part (41) and a second flow guiding part (42) that are arranged at opposite inclinations. The first flow guide (41) and the second flow guide (42) are disposed on the inner wall of at least one side of the vacuum chamber (21). One end of the first flow guide (41) is disposed away from the vapor deposition source (30), and the other end is disposed towards the vapor deposition source (30). One end of the second flow guide (42) is disposed away from the vapor deposition source (30), and the other end is disposed towards the vapor deposition source (30).

3. The substrate lithium replenishment device according to claim 2, characterized in that, The first guide section (41) has a gap at one end facing the vapor deposition source (30) and the second guide section (42) on the same side of the inner wall of the vacuum chamber (21) facing the vapor deposition source (30), and the gap is located above the vapor deposition source (30); And / or, both the first flow guide (41) and the second flow guide (42) are provided with overflow holes (43), the overflow holes (43) are located above the vapor deposition source (30), and both the first flow guide (41) and the second flow guide (42) are lithium-repellent.

4. The substrate lithium replenishment device according to claim 3, characterized in that, The flow guiding assembly (40) also includes a funnel (44) and a flow guiding pipe (45), the funnel (44) being located below the gap and / or the overflow hole (43), one end of the flow guiding pipe (45) being connected to the funnel (44), and the other end of the flow guiding pipe (45) extending into the vapor deposition source (30) or the recovery device.

5. The substrate lithium replenishment device according to claim 1, characterized in that, The first protective component (20) further includes a liquefaction plate (23), a heat insulation plate (24), and a connector (25). One end of the connector (25) is connected to the liquefaction plate (23), and the other end is connected to the heat insulation plate (24). The liquefaction plate (23) surrounds the vacuum chamber (21) and forms the inner wall of the vacuum chamber (21). The liquefaction plate (23) is configured to liquefy the metallic lithium adhering to the inner wall of the vacuum chamber (21). The heat insulation plate (24) forms the outer wall of the vacuum chamber (21) and is configured to reduce the external heat radiation flux of the gaseous metallic lithium.

6. The substrate lithium replenishment device according to claim 5, characterized in that, The first protective component (20) further includes a fixing plate (26) and a heating element (27). The heating element (27) is disposed on the fixing plate (26). One end of the heating element (27) away from the fixing plate (26) is connected to the liquefaction plate (23). One end of the connector (25) away from the heat insulation plate (24) is connected to the fixing plate (26). The heating element (27) is configured to heat the liquefaction plate (23).

7. The substrate lithium replenishment device according to claim 5, characterized in that, The first protective component (20) also includes an inlet (28) and an outlet (29). The inlet (28) and the outlet (29) are both located on the heat insulation plate (24). The heat insulation plate (24) has a channel for coolant flow, and the inlet (28) and the outlet (29) are both connected to the channel.

8. The substrate lithium replenishment device according to claim 6, characterized in that, The heating element (27) is configured as a plurality of elements, and the plurality of heating elements (27) are arranged at equal intervals along the circumference of the vacuum chamber (21).

9. The substrate lithium replenishment device according to claim 1, characterized in that, The substrate lithium replenishment device also includes a second protective component (50), one end of which is connected to the first protective component (20) through the coating port (22), and the other end of which is arc-shaped and adapted to the roller (10). There is a gap (51) between the substrate (11) on the roller (10) and the second protective component (50).

10. The substrate lithium replenishment device according to claim 9, characterized in that, The substrate lithium replenishment device also includes an air curtain (60) which surrounds the periphery of the second protective member (50).

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