A kind of evaporation device

Abstract

The application discloses an evaporation device, comprising a base, a rotating driving mechanism, an electromagnetic heating element and a plurality of crucible assemblies, the rotating driving mechanism and the electromagnetic heating element are arranged on the base, a plurality of the crucible assemblies are arranged around the driving end of the rotating driving mechanism, and one of the plurality of the crucible assemblies is arranged in the vertical direction with the electromagnetic heating element. The above scheme can solve the problem that in the related art, in the process of batch production of coating on the section of the battery piece, the coating material carried in the crucible is exhausted, so that relevant personnel need to frequently add, so that the evaporation furnace also needs to be frequently paused, thereby affecting the efficiency of batch production.

Description

Technical Field

[0001] This utility model relates to the technical field of battery cell passivation, and in particular to a vapor deposition apparatus. Background Technology

[0002] In the passivation process of half-cell or multi-cell solar cells, a passivation layer needs to be deposited on the cell facets first. Specifically, the cell is placed in a vapor deposition furnace, and the crucible in the furnace contains the coating material. Heating the crucible causes the coating material to evaporate, and the gaseous coating material adheres to the cell facets along a linear path to form the passivation layer. However, during the mass production of cell facet coating, the coating material in the crucible is eventually depleted, requiring frequent replenishment by personnel. This leads to frequent shutdowns of the vapor deposition furnace, thus affecting the efficiency of mass production. Utility Model Content

[0003] The purpose of this invention is to provide a vapor deposition apparatus for preparing full-screen components, so as to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: This application provides a vapor deposition apparatus, including a base, a rotary drive mechanism, an electromagnetic heating element, and multiple crucible assemblies. The rotary drive mechanism and the electromagnetic heating element are spaced apart on the base, and the multiple crucible assemblies are arranged around the drive end of the rotary drive mechanism. One of the multiple crucible assemblies is spaced apart from the electromagnetic heating element in the vertical direction.

[0005] Preferably, the crucible assembly includes a support member, a heat insulation member, and a crucible. One end of the support member is connected to the drive end of the rotary drive mechanism, the heat insulation member is disposed on the other end of the support member, and the crucible is disposed in the heat insulation cavity of the heat insulation member.

[0006] Preferably, the crucible assembly further includes a fastening ring, which is detachably connected to the insulation component and presses the crucible into the insulation cavity.

[0007] Preferably, the fastening ring is threadedly engaged with the insulation component.

[0008] Preferably, it also includes a cover plate, which is disposed on the plurality of crucible assemblies. The cover plate has a through hole, which is arranged opposite to the electromagnetic heating element in the vertical direction.

[0009] Preferably, the rotary drive mechanism includes a servo motor, a magnetohydrodynamic (MHD) sealing transmission component, and a support base. The drive end of the servo motor is connected to the input end of the MHD sealing transmission component, the MHD sealing transmission component is connected to the base, the output end of the MHD sealing transmission component is connected to the support base, and a plurality of crucible assemblies are arranged around the support base.

[0010] Preferably, the electromagnetic heating element includes a heating plate, a first electrical connector, and a second electrical connector, wherein the first electrical connector and the second electrical connector are respectively connected to two electrodes of the heating plate.

[0011] Preferably, the heating plate has a through hole along its own spiral direction, and the first electrical connector, the through hole and the second electrical connector are connected in sequence to form a cooling channel.

[0012] The technical solution adopted in this application can achieve the following beneficial effects:

[0013] In a vapor deposition apparatus disclosed in this application, a rotary drive mechanism and an electromagnetic heating element are spaced apart on a base, and a plurality of crucible assemblies are arranged around the drive end of the rotary drive mechanism, with one of the crucible assemblies spaced apart from the electromagnetic heating element in the vertical direction.

[0014] During the use of the vapor deposition apparatus, multiple crucible assemblies can each carry coating material. One of the multiple crucible assemblies is vertically spaced from the electromagnetic heating element. After a high-frequency current is applied, a strong alternating magnetic field is formed around it. The crucible assembly and the coating material it carries are electromagnetically induced to generate closed eddy currents. Under the resistance of the crucible assembly and the coating material, the eddy currents convert electrical energy into heat energy, achieving rapid heating and thus achieving the vapor deposition effect. The rotary drive mechanism can drive multiple crucible assemblies to rotate so that, during the mass production of passivation layer vapor deposition on the cross-section of the battery cell, if the coating material in one of the multiple crucible assemblies is completely consumed, the rotary drive mechanism can drive the remaining multiple crucible assemblies to be vertically spaced from the electromagnetic heating element in sequence. This extends the duration of mass production, reduces the number of times coating material is added to the crucible assembly, and thus ensures the efficiency of mass production. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0016] Figure 1 A schematic diagram of the vapor deposition apparatus disclosed in the embodiments of this application;

[0017] Figure 2 This is a partial top view of the vapor deposition apparatus disclosed in the embodiments of this application;

[0018] Figure 3 This is a side view of the vapor deposition apparatus disclosed in the embodiments of this application;

[0019] Figure 4 This is a partial cross-sectional view of the vapor deposition apparatus disclosed in the embodiments of this application.

[0020] In the figure: 100, base; 200, rotary drive mechanism; 210, servo motor; 220, magnetic fluid sealing transmission component; 230, support base; 300, electromagnetic heating component; 310, electric heating plate; 320, first electrical connector; 330, second electrical connector; 400, crucible assembly; 410, bearing component; 420, heat insulation component; 430, crucible; 440, fastening ring; 500, cover plate. Detailed Implementation

[0021] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of this utility model. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0022] It should be noted that when a component is said to be "set on" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0024] like Figures 1 to 4 As shown, this application discloses a vapor deposition apparatus, which includes a base 100, a rotary drive mechanism 200, an electromagnetic heating element 300, and multiple crucible assemblies 400.

[0025] Specifically, the rotary drive mechanism 200 and the electromagnetic heating element 300 are spaced apart on the base 100, and a plurality of crucible assemblies 400 are arranged around the drive end of the rotary drive mechanism 200, with one of the plurality of crucible assemblies 400 and the electromagnetic heating element 300 spaced apart in the vertical direction.

[0026] During the use of the vapor deposition apparatus, multiple crucible assemblies 400 can each carry coating material. One of the multiple crucible assemblies 400 is vertically spaced from the electromagnetic heating element 300. After a high-frequency current is applied, a strong alternating magnetic field is formed around it. The crucible assembly 400 and the coating material it carries are electromagnetically induced to generate closed eddy currents. Under the resistance of the crucible assembly 400 and the coating material, the eddy currents convert electrical energy into heat energy, achieving rapid heating and thus achieving the vapor deposition effect. The rotary drive mechanism 200 can drive the multiple crucible assemblies 400 to rotate so that during the mass production of passivation layer vapor deposition on the cross-section of the battery cell, the coating material in one of the multiple crucible assemblies 400 is completely consumed. The rotary drive mechanism 200 can then drive the remaining multiple crucible assemblies 400 to be vertically spaced from the electromagnetic heating element 300 in sequence, thereby extending the duration of mass production, reducing the number of times coating material is added to the crucible assembly 400, and thus ensuring the efficiency of mass production.

[0027] In this embodiment of the application, the crucible assembly 400 may include a support member 410, a heat insulation member 420, and a crucible 430. Specifically, one end of the support member 410 is connected to the drive end of the rotary drive mechanism 200, the heat insulation member 420 is disposed on the other end of the support member 410, and the crucible 430 is disposed in the heat insulation cavity of the heat insulation member 420. The heat insulation member 420 helps to slow down the heat loss of the crucible 430 when it is heated under eddy current, and also helps the crucible 430 to heat up quickly and reach the temperature critical point that meets the evaporation of the coating material more quickly.

[0028] In a further technical solution, the crucible assembly 400 may also include a fastening ring 440, which is detachably connected to the insulation component 420. The fastening ring 440 presses the crucible 430 into the insulation cavity, thereby ensuring that the crucible 430 can be fixed relative to the insulation component 420. This also helps to prevent the coating material from impacting the crucible 430 and causing it to shift after being heated and boiling.

[0029] Of course, the fastening ring 440 and the insulation component 420 can be detachably connected by a snap-fit. In one alternative, the fastening ring 440 and the insulation component 420 are threaded together. The threaded locking method is simple and has a relatively long service life.

[0030] In this embodiment of the application, the vapor deposition apparatus may further include a cover plate 500. Specifically, the cover plate 500 covers a plurality of crucible assemblies 400. The cover plate 500 has through holes, which are arranged opposite to the electromagnetic heating element 300 in the vertical direction.

[0031] In the above structure, the cover plate 500 shields the remaining crucible assemblies 400 except for the crucible assembly 400 that is vertically opposite to the electromagnetic heating element 300. When the coating material boils and evaporates due to eddy current heating, the coating material carried in the other crucible assemblies 400 can only be splashed onto the cover plate 500, thereby protecting the coating material from contamination.

[0032] In this embodiment of the application, the rotary drive mechanism 200 may include a servo motor 210, a magnetic fluid sealing transmission component 220, and a support base 230. Specifically, the drive end of the servo motor 210 is connected to the input end of the magnetic fluid sealing transmission component 220, the magnetic fluid sealing transmission component 220 is connected to the base 100, the output end of the magnetic fluid sealing transmission component 220 is connected to the support base 230, and a plurality of crucible assemblies 400 are arranged around the support base 230.

[0033] In this embodiment, the electromagnetic heating element 300 includes a heating plate 310, a first electrical connector 320, and a second electrical connector 330. Specifically, the first electrical connector 320 and the second electrical connector 330 are respectively connected to the two electrodes of the heating plate 310.

[0034] In a further technical solution, the heating plate 310 has a through hole along its own spiral direction, and the first electrical connector 320, the through hole and the second electrical connector 330 are connected in sequence to form a cooling channel.

[0035] Because the heating plate 310 is supplied with a high-frequency current to form a strong alternating magnetic field, the crucible assembly 400 and the coating material it carries are subjected to electromagnetic induction to generate closed eddy currents. Under the action of its own resistance, electrical energy is converted into heat energy, achieving rapid heating. The heat emitted by the crucible assembly 400 will also heat the heating plate 310. Therefore, the cooling gas or coolant is circulated through the cooling channel, which is conducive to the rapid cooling of the heating plate 310 and ensures the stable output of the strong alternating magnetic field.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vapor deposition apparatus, characterized in that, The device includes a base (100), a rotary drive mechanism (200), an electromagnetic heating element (300), and a plurality of crucible assemblies (400). The rotary drive mechanism (200) and the electromagnetic heating element (300) are spaced apart on the base (100). The plurality of crucible assemblies (400) are arranged around the drive end of the rotary drive mechanism (200). One of the plurality of crucible assemblies (400) is spaced apart from the electromagnetic heating element (300) in the vertical direction.

2. The vapor deposition apparatus according to claim 1, characterized in that, The crucible assembly (400) includes a support member (410), a heat insulation member (420), and a crucible (430). One end of the support member (410) is connected to the drive end of the rotary drive mechanism (200). The heat insulation member (420) is disposed on the other end of the support member (410), and the crucible (430) is disposed in the heat insulation cavity of the heat insulation member (420).

3. The vapor deposition apparatus according to claim 2, characterized in that, The crucible assembly (400) further includes a fastening ring (440), which is detachably connected to the insulation component (420), and the fastening ring (440) presses the crucible (430) into the insulation cavity.

4. The vapor deposition apparatus according to claim 3, characterized in that, The fastening ring (440) is threadedly engaged with the insulation component (420).

5. The vapor deposition apparatus according to claim 1, characterized in that, It also includes a cover plate (500) which covers the plurality of crucible assemblies (400). The cover plate (500) has a through hole which is arranged opposite to the electromagnetic heating element (300) in the vertical direction.

6. The vapor deposition apparatus according to claim 1, characterized in that, The rotary drive mechanism (200) includes a servo motor (210), a magnetic fluid sealing transmission component (220), and a support base (230). The drive end of the servo motor (210) is connected to the input end of the magnetic fluid sealing transmission component (220). The magnetic fluid sealing transmission component (220) is connected to the base (100). The output end of the magnetic fluid sealing transmission component (220) is connected to the support base (230). A plurality of crucible assemblies (400) are arranged around the support base (230).

7. The vapor deposition apparatus according to claim 1, characterized in that, The electromagnetic heating element (300) includes a heating plate (310), a first electrical connector (320), and a second electrical connector (330), wherein the first electrical connector (320) and the second electrical connector (330) are respectively connected to two electrodes of the heating plate (310).

8. The vapor deposition apparatus according to claim 7, characterized in that, The heating plate (310) has a through hole along its own spiral direction, and the first electrical connector (320), the through hole and the second electrical connector (330) are connected in sequence to form a cooling channel.

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