A coating device facilitating feeding

Abstract

The utility model discloses a kind of coating devices facilitating feeding, belong to coating equipment technical field, including coating bin, and the independent upper and lower chamber is divided in coating bin, two chamber room are equipped with coating assembly and target material structure, side surface is correspondingly set up feeding port and bin door;Bin door is connected with coating bin by push-pull component, edge is equipped with elastic sealing rubber strip, and fixed component of electromagnet drive is matched;Inboard fixed clamping assembly of bin door, it contains fixed plate, liftable fixed base and the clamping structure of buffer spring and elastic buffer plate, clamping assembly is slidably adapted by lug and chamber chute.This utility model adopts double-chamber parallel operation, clamping assembly enters and exits synchronously with bin door, realizes outside bin convenient feeding and discharging;Sealing and locking structure guarantee vacuum environment stability, clamping assembly can buffer and prevent damage and adapt multiple specifications base material, greatly improve production efficiency and versatility.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a coating device that facilitates material loading. Background Technology

[0002] Multi-arc ion plating technology is widely used for surface coating of substrates such as metals, glass, and ceramics due to its advantages such as strong film adhesion, good diffraction, and wide applicability of film materials. However, in the use of existing multi-arc ion plating equipment, there are still many problems that need to be solved: Firstly, loading and unloading operations are inconvenient. Existing coating equipment is mostly a single-chamber structure, requiring the substrate to be fed into and fixed through a narrow chamber door. This restricts operating space, and the fixing process must be completed inside the chamber, resulting in low efficiency. In some devices, the substrate fixing mechanism is separate from the chamber door, requiring individual adjustment of the fixing position after loading, further increasing operational complexity. Secondly, sealing performance and chamber door locking reliability are insufficient. The coating process requires a vacuum environment inside the chamber. Existing equipment often uses a single sealing strip structure for chamber door sealing, which is prone to gaps after long-term use, leading to a decrease in vacuum. Simultaneously, chamber door locking relies heavily on mechanical latches, resulting in low locking accuracy and cumbersome opening and closing processes, affecting production continuity. Thirdly, substrate fixing stability is poor and easily damaged. Existing clamping structures mostly use rigid clamping methods, lacking buffer design. For precision and easily deformable substrates, excessive clamping force can easily cause surface scratches or structural deformation. Furthermore, the height and position of the clamping mechanism are not adjustable, making it unsuitable for substrates of different thicknesses and sizes, resulting in poor versatility. Fourth, the coating efficiency is low. The single-chamber structure can only process one batch of substrates at a time. The coating chamber needs to stop working during the loading and unloading process, resulting in long equipment idle time and difficulty in improving production efficiency. Utility Model Content

[0003] The purpose of this utility model is to provide a coating device that facilitates material loading. Through a dual-chamber design, optimized chamber door drive and sealing structure, and adjustable buffer clamping components, it achieves convenient loading and unloading, reliable sealing, safe substrate fixation, and high production efficiency.

[0004] To achieve the above objectives, this utility model provides a coating device for easy material loading, including a coating chamber, the interior of which is divided into an independent upper chamber and a lower chamber, both of which are equipped with coating components; the side surfaces of the upper and lower chambers are respectively provided with loading ports for substrate entry and exit, each loading port is equipped with a door, and the door is connected to the corresponding side wall of the coating chamber by a push-pull assembly, which is used to drive the door to open and close horizontally; a clamping assembly for fixing the substrate is fixedly provided on the side surface of the door near the interior chamber of the coating chamber, and the bottom inner surfaces of the upper and lower chambers are respectively provided with sliding grooves, the clamping assembly slidingly adapting to the sliding grooves of the corresponding chambers.

[0005] Preferably, the push-pull assembly includes four identical pull rods, which are respectively located at the four corners of the side surface of the chamber door near the interior of the coating chamber, and the axis of the pull rods is perpendicular to the surface of the chamber door; one end of the pull rod is fixedly connected to the surface of the chamber door, and the other end passes through the corresponding connecting hole opened in the side wall of the coating chamber, and the pull rod slides in cooperation with the connecting hole, so as to guide and support the opening and closing of the chamber door.

[0006] Preferably, the upper and lower surfaces of the bin door are each provided with a fixing component for locking the bin door. The fixing component includes an electromagnet vertically embedded inside the bin door near the edge. The output end of the electromagnet is connected to a fixing rod via a connecting rod. One end of the connecting rod is fixedly connected to the telescopic end of the electromagnet, and the other end slides through a limiting hole opened inside the fixing rod. A compression spring is covered on the outer periphery of the connecting rod. The two ends of the compression spring abut against the surface of the electromagnet and the inner wall of the fixing rod, respectively. The end of the fixing rod away from the electromagnet moves through the corresponding surface of the bin door. The upper and lower surfaces of the coating bin loading port are each vertically provided with fixing holes adapted to the fixing rod. When the bin door is closed, the fixing rod can be inserted into the corresponding fixing hole to lock the bin door.

[0007] Preferably, an elastic sealing strip is fixedly provided circumferentially along the outline of the feeding port on the edge of the side surface of the door near the inner chamber of the coating chamber; an annular sealing groove adapted to the elastic sealing strip is opened on the edge surface of the feeding port of the coating chamber, and when the door is closed, the elastic sealing strip is embedded in the annular sealing groove to achieve sealing of the feeding port.

[0008] Preferably, the clamping assembly includes a horizontally arranged fixing plate, one end of which is fixedly connected to the corresponding surface of the compartment door. A protrusion is integrally formed on the lower surface of the fixing plate, and the protrusion is slidably adapted to the sliding groove of the corresponding compartment. A fixing base for supporting the substrate is provided on the upper surface of the fixing plate. A telescopic motor is vertically embedded inside the fixing plate. The fixed end of the telescopic motor is fixedly connected to the inner wall of the fixing plate, and its output end passes through the upper surface of the fixing plate and is fixedly connected to the four corners of the lower surface of the fixing base. The telescopic motor is used to drive the fixing base to move up and down in the vertical direction. A placement groove for placing the substrate is opened on the upper surface of the fixing base, and a clamping structure for clamping the substrate is provided inside the placement groove.

[0009] Preferably, the clamping structure includes a first clamping plate and a second clamping plate symmetrically arranged on both sides inside the placement groove. Two sets of electric telescopic rods are also symmetrically fixed at both ends of the upper surface of the fixed base. The fixed end of each set of electric telescopic rods is fixedly connected to the upper surface of the fixed base, and its telescopic end passes through the corresponding inner sidewall of the placement groove and is fixedly connected to the outer sidewall of the first clamping plate or the second clamping plate. The inner sidewalls of the first clamping plate and the second clamping plate are connected to elastic buffer plates by several buffer springs. The buffer springs are used to buffer the clamping force.

[0010] Preferably, the arc anode and the coil in the coating assembly are both fixedly installed on the upper inner surface of the upper chamber and the lower chamber, and the coil is wrapped around the outer periphery of the arc anode; the arc anodes are spaced apart along the length of the chamber, and an arc cathode is fixedly installed between two adjacent arc anodes, and the axis of the arc cathode is parallel to the axis of the arc anode.

[0011] Preferably, a target body is fixedly provided on the inner side wall of the upper chamber and the lower chamber, and at the side position corresponding to the clamping assembly. A target electrode is fixedly connected to one side of each target body. The target electrode is electrically connected to the target body and is used to provide the current required for coating to the target body.

[0012] Preferably, a handle is fixedly provided on the side surface of the door away from the interior of the coating chamber, and a button is embedded on one side surface of the handle. The button is electrically connected to an electromagnet through a wire to control the electromagnet to turn on and off, thereby driving the fixed rod to extend or retract to unlock or lock the door.

[0013] Therefore, the present invention employs the above-mentioned coating device that facilitates material loading, and has the following technical effects: (1) The coating chamber of this application is divided into an independent upper chamber and a lower chamber. The two chambers can alternately carry out coating and loading / unloading operations. There is no need to wait for a single chamber to complete the entire process before starting the next batch, which greatly reduces the idle time of the equipment and increases the processing capacity per unit time.

[0014] (2) The clamping component of this application is fixedly connected to the door. The door and clamping component can be driven to move out of the compartment at the same time through the push-pull component. The operator can complete the picking and fixing of the substrate outside the compartment, and there is enough operating space. At the same time, the guiding and supporting role of the pull rod ensures the smooth opening and closing of the door and avoids the clamping component from shifting.

[0015] (3) The elastic sealing strip on the edge of the chamber door of this application is precisely matched with the annular sealing groove of the coating chamber. After closing, it forms an effective seal to ensure the stability of the vacuum environment inside the chamber. The fixing component controls the extension and retraction of the fixing rod by electromagnet, and the chamber door can be quickly locked and unlocked with the button. The operation is simple and the locking accuracy is high. The compression spring can compensate for the installation error of the fixing rod and further improve the locking reliability.

[0016] (4) The clamping structure of this application drives the clamping plate to open and close via an electric telescopic rod, which can adapt to substrates of different widths; the combination design of the elastic buffer plate and the buffer spring can buffer the impact force during the clamping process and avoid the substrate scratches or deformation caused by rigid contact; the telescopic motor drives the fixed base to lift and lower, which can adjust the substrate height according to the substrate thickness and coating requirements, thereby enhancing the versatility of the device.

[0017] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of a coating device for easy material loading according to this utility model; Figure 2 This is a schematic diagram of the clamping component structure of a coating device for easy material loading according to this utility model; Figure 3 This is a side view of a clamping component of a coating device that facilitates material loading, according to this utility model. Figure 4 This is a top view of a clamping component of a coating device for easy material loading according to this utility model; Figure 5 This is a schematic diagram of the fixing component structure of a coating device for easy material feeding according to this utility model; Figure 6 This is a schematic diagram of the internal structure of a coating device that facilitates material loading, according to this utility model.

[0019] Figure Labels 1. Coating chamber; 11. Upper chamber; 12. Lower chamber; 13. Slide groove; 14. Fixing hole; 15. Annular sealing groove; 2. Chamber door; 21. Elastic sealing strip; 22. Handle; 23. Button; 3. Push-pull assembly; 31. Pull rod; 32. Connecting hole; 4. Fixing assembly; 41. Electromagnet; 42. Connecting rod; 43. Fixing rod; 44. Limiting hole; 45. Compression spring; 5. Clamping assembly; 51. Fixing plate 511. Protrusion; 52. Fixed base; 521. Placement groove; 53. Telescopic motor; 54. Clamping structure; 541. First clamping plate; 542. Second clamping plate; 543. Electric telescopic rod; 544. Buffer spring; 545. Elastic buffer plate; 6. Coating assembly; 61. Arc anode; 62. Arc cathode; 63. Coil; 7. Target body; 8. Target electrode; 9. Nitrogen pipe; 10. Vacuum pump inlet pipe. Detailed Implementation

[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings and embodiments.

[0021] Unless otherwise defined, the technical or scientific terms used in this utility model shall have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] like Figures 1 to 6 As shown, a coating device for easy loading includes a coating chamber 1, which is a rectangular sealed structure. Its interior is divided into an upper chamber 11 and a lower chamber 12 by a horizontal partition. The two chambers have identical dimensions and can each independently complete the coating operation. Rectangular loading ports are provided on the front surfaces of both the upper chamber 11 and the lower chamber 12.

[0023] Each feeding port is equipped with a door 2 that matches the size of the feeding port. The door 2 is made of metal sheet, and an elastic sealing strip 21 is bonded circumferentially to the edge of its surface near the chamber. The elastic sealing strip 21 is made of fluororubber and has good sealing performance and wear resistance. Correspondingly, an annular sealing groove 15 is opened on the edge surface of the feeding port of the coating chamber 1. When the door 2 is closed, the elastic sealing strip 21 is precisely embedded in the annular sealing groove 15 to achieve sealing of the feeding port.

[0024] The door 2 is connected to the side wall of the coating chamber 1 via a push-pull assembly 3. The push-pull assembly 3 includes four stainless steel pull rods 31, which are welded to the four corners of the surface of the door 2 closest to the chamber, and are perpendicular to the surface of the door 2. Four circular connecting holes 32 are provided on the side wall of the coating chamber 1 at corresponding positions. The end of the pull rod 31 away from the door 2 passes through the connecting hole 32, and the pull rod 31 is engaged with the connecting hole 32 by a sliding bearing, allowing the pull rod 31 to slide smoothly along the axis of the connecting hole 32, thereby driving the door 2 to open and close horizontally.

[0025] Fixing components 4 are embedded in both ends of the upper and lower surfaces of the storage door 2. Each fixing component 4 includes an electromagnet 41, a connecting rod 42, a fixing rod 43, and a compression spring 45. The electromagnet 41 is vertically embedded in the mounting cavity near the edge inside the storage door 2, and its telescopic end is welded to one end of the connecting rod 42. The other end of the connecting rod 42 slides through a limiting hole 44 inside the fixing rod 43. The length of the limiting hole 44 is slightly greater than the telescopic stroke of the connecting rod 42 to avoid interference. The compression spring 45 is sleeved on the outer periphery of the connecting rod 42, with one end abutting against the end face of the electromagnet 41 and the other end abutting against the inner wall of the fixing rod 43. The end of the fixing rod 43 away from the electromagnet 41 passes through the corresponding surface of the door 2, and the end is hemispherical; the upper and lower surfaces of the loading port of the coating chamber 1 are vertically provided with fixing holes 14, the diameter of the fixing holes 14 is adapted to the outer diameter of the fixing rod 43, and when the door 2 is closed, the fixing rod 43 can be inserted into the fixing holes 14 to achieve locking.

[0026] A U-shaped handle 22 is welded to the surface of the door 2 away from the compartment. A button 23 is embedded in one side of the handle 22. The button 23 is electrically connected to an electromagnet 41 via a wire, which is hidden in a wiring groove inside the door 2 to avoid interference. When the button 23 is pressed, the electromagnet 41 is energized, generating a magnetic force that pulls the connecting rod 42 to retract, thereby causing the fixing rod 43 to move inward into the door 2, disengaging from the fixing hole 14, thus unlocking the door 2. When the button 23 is released, the electromagnet 41 is de-energized, the compression spring 45 returns to its original position, and the fixing rod 43 extends and inserts into the fixing hole 14, thus locking the door 2.

[0027] A clamping assembly 5 is welded to the surface of the door 2 near the compartment. The clamping assembly 5 includes a fixing plate 51, a fixing base 52, a telescopic motor 53, and a clamping structure 54. The fixing plate 51 is a horizontally arranged metal plate, one end of which is welded to the surface of the door 2. A strip-shaped protrusion 511 is integrally formed on the lower surface, and the cross-section of the protrusion 511 is trapezoidal. Correspondingly, the bottom inner surfaces of the upper compartment 11 and the lower compartment 12 are provided with sliding grooves 13 that are adapted to the protrusions 511. The length direction of the sliding grooves 13 is parallel to the axis of the pull rod 31. The protrusions 511 are embedded in the sliding grooves 13 and slide to ensure that the clamping assembly 5 moves synchronously and smoothly with the door 2.

[0028] The fixed base 52 is located above the fixed plate 51, and its lower surface is fixedly connected to the output end of the telescopic motor 53 at its four corners by bolts. The telescopic motor 53 is vertically embedded in the mounting hole inside the fixed plate 51, and its fixed end is fixed to the inner wall of the mounting hole by bolts. The telescopic motor 53 can drive the fixed base 52 to rise and fall vertically, with a lifting stroke of 0-5cm to accommodate substrates of different thicknesses. A rectangular placement groove 521 is formed on the upper surface of the fixed base 52. The size of the placement groove 521 is designed according to the specifications of commonly used substrates, and a clamping structure 54 is provided inside it.

[0029] The clamping structure 54 includes a first clamping plate 541, a second clamping plate 542, an electric telescopic rod 543, a buffer spring 544, and an elastic buffer plate 545. The first clamping plate 541 and the second clamping plate 542 are symmetrically arranged on both sides of the placement groove 521, and are both rectangular metal plates. Two sets of electric telescopic rods 543 are symmetrically welded to both ends of the upper surface of the fixing base 52. The telescopic ends of the electric telescopic rods 543 penetrate the inner wall of the placement groove 521 and are welded and fixed to the outer wall of either the first clamping plate 541 or the second clamping plate 542. The electric telescopic rods 543 can drive the first clamping plate 541 and the second clamping plate 542 to move in opposite directions, thereby clamping and releasing the substrate. Several buffer springs 544 are bonded to the inner walls of both the first clamping plate 541 and the second clamping plate 542. An elastic buffer plate 545 is bonded to the other end of each buffer spring 544. The elastic buffer plate 545 is made of silicone and has an anti-slip texture on its surface to enhance friction with the substrate and prevent clamping damage.

[0030] Both the upper chamber 11 and the lower chamber 12 are equipped with a coating assembly 6, which includes an arc anode 61, an arc cathode 62, and a coil 63. The arc anode 61 is a columnar structure, which is welded to the upper inner surface of the chamber at intervals along the length of the chamber. An arc cathode 62 is welded between two adjacent arc anodes 61, and the axis of the arc cathode 62 is parallel to the axis of the arc anode 61. The coil 63 is a ring structure, which surrounds the outer circumference of the arc anode 61 and is fixed to the upper inner surface of the chamber by a bracket. When the coil 63 is energized, it can generate a magnetic field to constrain the trajectory of the plasma.

[0031] On the inner walls of chamber 11 and lower chamber 12, and located to the side of clamping assembly 5, target bodies 7 are fixed with bolts. Target bodies 7 are plate-shaped structures with target electrodes 8 welded to one side. Target electrodes 8 are connected to an external power source via wires to provide the current required for coating. Furthermore, the coating chamber 1 is connected to a nitrogen pipe 9 and a vacuum pump inlet pipe 10. The vacuum pump inlet pipe 10 is connected to an external vacuum pump to evacuate the chamber to a vacuum state, while the nitrogen pipe 9 supplies nitrogen gas into the chamber to ensure the smooth operation of the coating process.

[0032] Working principle: Loading operation: Press button 23 on one of the compartment doors 2, the electromagnet 41 is energized, the fixing rod 43 retracts and disengages from the fixing hole 14, and the compartment door 2 is unlocked; pull the compartment door 2 by the handle 22, and under the guidance of the pull rod 31, the compartment door 2 and the clamping assembly 5 move out of the compartment at the same time, and the protrusion 511 on the lower surface of the fixing plate 51 slides along the slide groove 13; place the substrate to be coated in the placement groove 521 of the fixing base 52, start the electric telescopic rod 543, drive the first clamping plate 541 and the second clamping plate 542 to move towards each other, the elastic buffer plate 545 fits against the surface of the substrate and the buffer spring 544 buffers the clamping force to complete the substrate fixation; according to the substrate thickness and coating requirements, start the telescopic motor 53 and adjust the height of the fixing base 52 to the appropriate position.

[0033] Door closing and locking: Push the door 2 to move the clamping assembly 5 along with the substrate into the chamber until the door 2 is in contact with the side wall of the coating chamber 1; release the button 23, the electromagnet 41 is de-energized, the compression spring 45 is reset, push the fixing rod 43 to insert into the fixing hole 14, the door 2 is locked, and at the same time the elastic sealing strip 21 is embedded in the annular sealing groove 15 to achieve a seal.

[0034] Coating operation: The chamber is evacuated to a vacuum state through the vacuum pump inlet pipe, and an appropriate amount of nitrogen is introduced into the chamber through the nitrogen pipe; the coating component 6 is started, the arc anode 61 and the arc cathode 62 discharge to generate plasma, and the coil 63 is energized to generate a magnetic field to confine the plasma; the target electrode 8 is energized, the target body 7 evaporates to generate particles, and the particles combine with the plasma and are deposited on the surface of the substrate to complete the coating.

[0035] Material unloading operation: After coating is completed, repeat the unlocking steps during loading, pull the chamber door 2 to move the clamping component 5 out of the chamber, start the electric telescopic rod 543 to release the substrate, and remove the coated substrate; during this process, another chamber can carry out coating operation simultaneously to achieve parallel production.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solution of this utility model, and these modifications or equivalent substitutions cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of this utility model.

Claims

1. A coating apparatus for easy material loading, characterized in that: The device includes a coating chamber, which is internally divided into an upper chamber and a lower chamber. Both the upper and lower chambers are equipped with coating components. Each side surface of the upper and lower chambers has a corresponding loading port for substrate entry and exit. Each loading port is equipped with a door, which is connected to the corresponding side wall of the coating chamber via a push-pull assembly. The push-pull assembly drives the door to open and close horizontally. A clamping assembly for securing the substrate is fixed to the side surface of the door closest to the interior chamber of the coating chamber. The bottom inner surfaces of both the upper and lower chambers have sliding grooves, and the clamping assembly slides into these grooves.

2. The coating apparatus for easy material loading according to claim 1, characterized in that: The push-pull assembly includes four identical pull rods, which are respectively located at the four corners of the surface of the chamber door near the inside of the coating chamber, and the axis of the pull rods is perpendicular to the surface of the chamber door. One end of each pull rod is fixedly connected to the surface of the chamber door, and the other end passes through a corresponding connection hole opened in the side wall of the coating chamber. The pull rod and the connection hole are slidably engaged, which is used to guide and support the opening and closing of the chamber door.

3. The coating apparatus for easy material loading according to claim 1, characterized in that: The upper and lower surfaces of the bin door are each equipped with a fixing component for locking the bin door. The fixing component includes an electromagnet vertically embedded inside the bin door near the edge. The output end of the electromagnet is connected to a fixing rod via a connecting rod. One end of the connecting rod is fixedly connected to the telescopic end of the electromagnet, and the other end slides through a limiting hole opened inside the fixing rod. A compression spring is wrapped around the outer periphery of the connecting rod, and the two ends of the compression spring abut against the surface of the electromagnet and the inner wall of the fixing rod, respectively. The end of the fixing rod away from the electromagnet moves through the corresponding surface of the bin door. The upper and lower surfaces of the coating bin loading port are vertically provided with fixing holes adapted to the fixing rod. When the bin door is closed, the fixing rod can be inserted into the corresponding fixing hole to lock the bin door.

4. The coating apparatus for easy material loading according to claim 1, characterized in that: An elastic sealing strip is fixedly provided circumferentially along the outline of the feeding port on the edge of the side surface of the door near the inner chamber of the coating chamber; an annular sealing groove adapted to the elastic sealing strip is opened on the edge surface of the feeding port of the coating chamber. When the door is closed, the elastic sealing strip is embedded in the annular sealing groove to achieve the sealing of the feeding port.

5. The coating apparatus for easy material loading according to claim 1, characterized in that: The clamping assembly includes a horizontally arranged fixing plate, one end of which is fixedly connected to the corresponding surface of the compartment door. A protrusion is integrally formed on the lower surface of the fixing plate, and the protrusion is slidably adapted to the sliding groove of the corresponding compartment. The upper surface of the fixing plate is provided with a fixing base for supporting the substrate. A telescopic motor is vertically embedded inside the fixing plate. The fixed end of the telescopic motor is fixedly connected to the inner wall of the fixing plate, and its output end passes through the upper surface of the fixing plate and is fixedly connected to the four corners of the lower surface of the fixing base. The telescopic motor is used to drive the fixing base to move up and down in the vertical direction. The upper surface of the fixing base is provided with a placement groove for placing the substrate, and the inside of the placement groove is provided with a clamping structure for clamping the substrate.

6. The coating apparatus for easy material loading according to claim 5, characterized in that: The clamping structure includes a first clamping plate and a second clamping plate symmetrically arranged on both sides inside the placement groove. Two sets of electric telescopic rods are also symmetrically fixed at both ends of the upper surface of the fixed base. The fixed end of each set of electric telescopic rods is fixedly connected to the upper surface of the fixed base, and its telescopic end passes through the corresponding inner side wall of the placement groove and is fixedly connected to the outer side wall of the first clamping plate or the second clamping plate. The inner side walls of the first clamping plate and the second clamping plate are connected to elastic buffer plates by several buffer springs. The buffer springs are used to buffer the clamping force.

7. A coating apparatus for easy material loading according to claim 1, characterized in that: The arc anode and coil in the coating assembly are both fixedly installed on the upper inner surface of the upper chamber and the lower chamber, and the coil is wrapped around the outer periphery of the arc anode; the arc anodes are spaced apart along the length of the chamber, and an arc cathode is fixedly installed between two adjacent arc anodes, and the axis of the arc cathode is parallel to the axis of the arc anode.

8. A coating apparatus for easy material loading according to claim 1, characterized in that: On the inner sidewalls of the upper and lower chambers, and at the side positions corresponding to the clamping components, target bodies are fixedly provided. Each target body has a target electrode fixedly connected to one side. The target electrode is electrically connected to the target body and is used to provide the current required for coating to the target body.

9. A coating apparatus for easy material loading according to claim 3, characterized in that: A handle is fixedly provided on the side surface of the door away from the interior of the coating chamber. A button is embedded on one side surface of the handle. The button is electrically connected to an electromagnet via a wire and is used to control the electromagnet to turn on and off, thereby driving the fixed rod to extend or retract to unlock or lock the door.

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