A dual mode regulated planar target

Abstract

The utility model relates to vacuum coating technology field especially, is particularly related to a kind of flat target of double mode regulation, including flat target body and the side plate fixed on equipment, side plate is symmetrically equipped with sliding guide, two sliding guides are equipped with the sliding guide of the sliding member connected with flat target body, sliding member is connected with adjusting plate, adjusting plate is equipped with the pusher of the fixed link of side plate, adjusting plate is equipped with the manual drive module of the pusher that can manually rotate, and the automatic drive module of the pusher that can automatically rotate, further include extreme position system, extreme position system and automatic drive module electric connection. The utility model is through setting manual drive module and automatic drive module, user can select manual or automatic mode according to actual demand. Manual mode is suitable for fine adjustment or power-off emergency situation, and automatic mode is realized rapid, continuous regulation by motor drive, greatly improves the regulation efficiency, reduces artificial intervention time.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a planar target with dual-mode adjustment. Background Technology

[0002] The colors of existing decorative items are mainly gold and rose gold. Previously, the surface of these items was coated with a layer of titanium nitride using a vacuum deposition method to imitate the gold color. However, to further enhance the decorative effect, a layer of genuine gold or rose gold needs to be plated onto the titanium nitride surface. This makes the color more vibrant, while simultaneously improving the jewelry's abrasion and corrosion resistance, extending the lifespan of the coating, and allowing the jewelry surface to maintain its bright luster for a long time without the need for cleaning. Gold-doped coatings on decorative items are generally applied using magnetron sputtering, and pure gold targets are required. To facilitate target preparation, pure gold targets are usually manufactured in a planar target structure.

[0003] However, the planar target is a critical component in the sputtering coating process, and its position adjustment directly affects the coating uniformity and material utilization. In existing technologies, the adjustment of the planar target largely relies on purely manual methods, such as moving the target body by using a handwheel or handle to drive a screw mechanism. This manual adjustment method has the following drawbacks:

[0004] 1. Low adjustment efficiency: It relies entirely on manual operation. In situations where frequent or rapid adjustments are required (such as on large-scale production lines), manual adjustment is time-consuming and labor-intensive, which seriously affects production efficiency.

[0005] 2. Insufficient adjustment precision: Manual adjustment is easily affected by the operator's experience, making it difficult to achieve micron-level precise control. This results in unstable distance between the planar target and the substrate, poor coating uniformity, and consequently affects product quality.

[0006] 3. Resource waste: During the coating process, gold consumption is closely related to the position of the planar target. When the planar target is too far from the substrate, gold atoms scatter significantly, resulting in low utilization. Furthermore, existing manual adjustments cannot quickly and accurately position the planar target to the optimal location, leading to gold waste and increased costs.

[0007] Therefore, there is an urgent need in the field for a planar target system that can retain the flexibility of manual adjustment while achieving the efficiency and accuracy of automatic adjustment, in order to solve the above problems. Utility Model Content

[0008] The purpose of this invention is to provide a planar target system that retains the flexibility of manual adjustment while achieving the efficiency and accuracy of automatic adjustment, in order to solve the above-mentioned problems.

[0009] The technical solution adopted by this utility model is as follows: a planar target with dual-mode adjustment, comprising: a planar target body and a side plate fixed to the equipment. The side plate is symmetrically provided with sliding guides. Two sliding guides are slidably connected to sliding members connected to the planar target body. The sliding member at the end away from the planar target body is connected to an adjustment plate. The adjustment plate is provided with a pushing member fixed to the side plate. The adjustment plate is provided with a manual drive module that can manually rotate the pushing member and an automatic drive module that can automatically rotate the pushing member. In manual mode, the manual drive module is manually operated to drive the pushing member to rotate, so that the adjustment plate pushes the sliding member to slide along the sliding guides to adjust the position of the planar target body. In automatic mode, the automatic drive module drives the pushing member to rotate, so that the adjustment plate pushes the sliding member to slide along the sliding guides to adjust the position of the planar target body.

[0010] It also includes a limit positioning system, which is electrically connected to the automatic drive module. When the adjustment plate reaches the limit position, the automatic drive module automatically locks, causing the pusher to stop rotating.

[0011] Furthermore, the sliding guide includes a sliding sleeve fixed to the side plate, with a linear bearing installed inside the sliding sleeve; a sealing ring is provided at the contact end between the sliding sleeve and the side plate, and an annular protrusion is provided inside the sliding sleeve. Multiple skeleton-type sealing rings are provided between the linear bearing and the annular protrusion, and the sliding member can slide through the linear bearing and the skeleton-type sealing rings in sequence.

[0012] Furthermore, the sliding component includes a bushing that slides with a linear bearing and a skeleton-type seal ring, and an inlet pipe communicating with the planar target body is installed inside the bushing; the adjusting plate is provided with a cantilever insulating sleeve covering the top of the inlet pipe, and the cantilever insulating sleeve has an inlet port; a water pipe connector is connected to the top of the inlet pipe, and an inlet / outlet water insulating sleeve is provided between the inlet pipe and the water pipe connector, which is fixed to the adjusting plate, and the inlet / outlet water insulating sleeve fixes the inlet pipe to the adjusting plate; the top of the bushing is fixedly connected to the adjusting plate, and the bottom is fixedly connected to the planar target body; an inlet / outlet water-receiving ring connected to the inlet pipe is provided inside the bushing at one end of the planar target body, and the inlet / outlet water-receiving ring is provided with an inlet sealing seat fixed on the planar target body, and the inlet pipe passes through the inlet / outlet water-receiving ring and the inlet sealing seat in sequence, extending into the planar target body.

[0013] Furthermore, the pushing component includes an adjusting screw fixed to the adjusting plate by a rotating fitting and a pushing sleeve fixed to the side plate. The center of the pushing sleeve has a threaded hole along the axial direction that is threaded to the adjusting screw. The adjusting screw is connected to the manual drive module and the automatic drive module respectively.

[0014] Furthermore, the manual drive module includes a handwheel located on top of the adjusting screw, the handwheel having a foldable handle.

[0015] Furthermore, the automatic drive module includes a horizontal mounting plate fixed to the rotating component, a driven gear mounted on the adjusting screw, and a self-locking motor mounted on the horizontal mounting plate. The output shaft of the self-locking motor is connected to a reducer, and the output shaft of the reducer is equipped with a driving gear that meshes with the driven gear.

[0016] Furthermore, the limit positioning system includes a switch mounting plate fixed to the side plate. The upper end of the switch mounting plate is provided with two adjustment slots spaced apart. The two adjustment slots are respectively provided with proximity switches for sensing the upward and downward positions of the adjustment plate and feeding back the signals to the automatic drive module.

[0017] Furthermore, the rotating component includes bearing seats symmetrically arranged on both sides of the adjusting plate, and a horizontal mounting plate is fixed to the bearing seats at the upper end.

[0018] The dual-mode adjustable planar target provided by this invention has the following beneficial effects:

[0019] 1. Dual-mode adjustment enhances efficiency and flexibility: By setting up manual and automatic drive modules, users can choose between manual or automatic modes according to their actual needs. Manual mode is suitable for fine adjustments or power outage emergencies, while automatic mode achieves rapid and continuous adjustment through motor drive, significantly improving adjustment efficiency and reducing manual intervention time.

[0020] 2. Improved adjustment precision and optimized coating quality: The automatic drive module employs a precision gear transmission and screw drive mechanism, combined with a sliding guide, to ensure the planar target moves smoothly and accurately along the guide path. This design achieves micron-level position control, improving the stability of the distance between the planar target and the substrate, thereby enhancing coating uniformity and product consistency.

[0021] 3. Reduced gold consumption and lower production costs: Through dual-mode adjustment and precise control, the planar target can quickly and accurately approach the substrate. The closer the planar target is to the substrate, the less gold atom scattering loss is, and the higher the gold utilization rate. Especially in automatic mode, combined with the limit positioning system, the planar target can be automatically adjusted to the optimal position, minimizing gold consumption during the coating process and saving precious metal materials.

[0022] 4. Safe and reliable, preventing equipment damage: The limit positioning system monitors the position of the adjustment plate in real time. When the upper or lower limit is reached, the automatic drive module automatically locks and stops the rotation of the pusher, avoiding overshoot or mechanical collision, protecting the equipment safety and extending its service life. Attached Figure Description

[0023] Figure 1 This is a structural schematic diagram of the present invention from one perspective;

[0024] Figure 2This is a structural schematic diagram from another perspective of the present invention;

[0025] Figure 3 This is a schematic diagram showing the connection relationship between the sliding guide and the sliding component in this utility model;

[0026] Figure 4 for Figure 3 A sectional view;

[0027] Figure 5 This is a schematic diagram showing the connection relationship between the sliding component, sliding guide component, pushing component, adjusting plate, manual drive module and automatic drive module in this utility model. Detailed Implementation

[0028] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0029] like Figure 1 and Figure 2 As shown, this embodiment provides a dual-mode adjustable planar target, which includes a planar target body 1 and a side plate 2 fixed to the frame of a coating equipment by bolts. Sliding guides 3 are symmetrically arranged on the side plate 2, and a sliding member 4 is slidably mounted between the two sliding guides. The bottom of the sliding member 4 is fixedly connected to the planar target body 1 by bolts. An adjusting plate 5 is fixedly connected to the top of the sliding member 4 at the end furthest from the planar target body 1. A pushing member 6 is mounted on the adjusting plate 5, and the pushing member 6 is fixedly connected to the side plate 2. The adjusting plate 5 also has a manual drive module 7 for manually rotating the pushing member 6 and an automatic drive module 8 for automatically rotating the pushing member 6.

[0030] During normal production, automatic mode can be used for rapid and precise online adjustment, improving production efficiency. In case of equipment debugging, maintenance, or power outage, it can be switched to manual mode, ensuring redundancy and reliability of equipment adjustment, preventing production from completely halting due to the failure of a single drive mode. When the adjustment plate 5 moves to the preset upper and lower limit positions in automatic mode, the limit positioning system 9 immediately sends a signal to the automatic drive module 8, causing it to automatically lock and stop. This effectively prevents overshoot and collision of the mechanical structure, protects the expensive planar target and transmission mechanism, and extends the equipment's service life.

[0031] As a further optimization of this embodiment, the sliding guide 3 includes a sliding sleeve 31 fixed to the side plate 2 by bolts, and a linear bearing 32 is press-fitted inside the sliding sleeve 31. The use of the linear bearing 32 ensures that the sliding member 4 can slide smoothly with high precision and low resistance along an absolute straight line, laying a mechanical foundation for the precise position adjustment of the planar target.

[0032] To ensure long-term stable operation in the complex environment of the coating chamber (where dust and coolant vapor may be present), O-rings 33 are provided at the contact surfaces between the sliding sleeve 31 and the side plate 2. Simultaneously, an annular raised edge 34 is machined inside the sliding sleeve 31, and multiple skeleton-type seals 35 are filled in the space between the linear bearing 32 and the annular raised edge 34. The sliding member 4 slidably passes through the linear bearing 32 and these skeleton-type seals 35 in sequence. The combination of the O-rings 33 and the multiple skeleton-type seals 35 constitutes a multi-level sealing barrier, effectively isolating external contaminants from entering the sliding sleeve and preventing potential lubricant leakage, greatly improving the durability and reliability of the guiding system under harsh operating conditions.

[0033] like Figure 3 and Figure 4 As shown, in this embodiment, the sliding member 4 and the cooling system are integrated. The sliding member 4 includes a bushing 41 that slides with the linear bearing 32 and the skeleton-type sealing ring 35. A water inlet pipe 42 that communicates with the internal cooling channel of the planar target 1 is installed inside the bushing 41. By integrating the water inlet pipe 42 into the bushing 41, which is the sliding member, the cooling pipeline moves with the planar target, eliminating the need for long-distance connections using flexible hoses that are prone to aging and fatigue, thus improving reliability.

[0034] A cantilever insulating sleeve 51, covering the top of the water inlet pipe 42, is fixed on the adjusting plate 5. The cantilever insulating sleeve 51 has an inlet port 511. A water pipe connector 43 is connected to the top of the water inlet pipe 42. An inlet / outlet water insulating sleeve 44, fixed to the adjusting plate 5, is installed at the connection between the water inlet pipe 42 and the water pipe connector 43, reliably fixing the water inlet pipe 42 to the adjusting plate 5. The top of the bushing 41 is fixed to the adjusting plate 5, and the bottom is fixed to the planar target 1. The design of the cantilever insulating sleeve 51 and the inlet / outlet water insulating sleeve 44 effectively cuts off the conductive path formed by the metal water inlet pipe and coolant, preventing the risk of high-voltage discharge and ensuring electrical safety during the coating process.

[0035] Inside the bushing 41 near one end of the planar target 1, there is also an inlet water inlet ring 45 connected to the water inlet pipe 42. A water inlet sealing seat 46, fixed to the planar target 1, is mounted on the inlet water inlet ring 45. The water inlet pipe 42 passes through the inlet water inlet ring 45 and the water inlet sealing seat 46 in sequence, ultimately extending into the cooling channel inside the planar target 1. The structure of the inlet water inlet ring 45 and the water inlet sealing seat 46 ensures that the coolant can be efficiently and leak-free introduced into the planar target, achieving uniform cooling of the target material. This is crucial for maintaining a stable sputtering process and preventing the target material from overheating and melting.

[0036] like Figure 5 As shown, in this embodiment, the pushing component 6 includes an adjusting screw 62 fixed to the adjusting plate 5 via a rotating fitting 61, and a pushing sleeve 63 fixed to the side plate 2 via bolts. The center of the pushing sleeve 63 has a threaded hole along the axial direction that engages with the adjusting screw 62. The upper end of the adjusting screw 62 is connected to both the manual drive module 7 and the automatic drive module 8. By driving the adjusting screw 62 to rotate, the threaded pushing sleeve 63 (which remains stationary) can be precisely controlled to drive the entire adjusting plate 5 and the sliding component 4 to move linearly, achieving micron-level precise control of the position of the planar target 1. Furthermore, the ordinary screw and nut mechanism has a certain self-locking capability, which helps maintain the position of the planar target when power is off, increasing the system's safety.

[0037] Among them, the rotating component 61 includes bearing seats 611 symmetrically installed on the upper and lower sides of the adjusting plate 5; the two bearing seats 611 provide stable rotational support for the adjusting screw 62, limit its radial runout, and ensure the thread engagement accuracy between the adjusting screw 62 and the push sleeve 63, thereby ensuring the smoothness and position control accuracy of the entire transmission system.

[0038] In this embodiment, the manual drive module 7 includes a handwheel 71 fixedly mounted on the top of the adjusting screw 62. A foldable handle 72 is hinged to the handwheel 71. The handwheel 71 and handle 72 provide an ergonomic manual operation method that is labor-saving and convenient. The foldable handle 72 can be retracted in automatic mode or when not in use, reducing the external profile of the device, avoiding interference with surrounding components, and improving the space utilization of the device.

[0039] In this embodiment, the automatic drive module 8 includes a horizontal mounting plate 81 fixed to the upper bearing seat 611, a driven gear 82 fixed to the adjusting screw 62, and a self-locking motor 83 mounted on the horizontal mounting plate 81. The output shaft of the self-locking motor 83 is connected to a reducer 84, and a drive gear 85 meshing with the driven gear 82 is mounted on the output shaft of the reducer 84. When power is cut off, the self-locking motor 83 automatically locks its shaft, preventing the planar target from shifting due to gravity or vibration, ensuring absolute positional stability. Furthermore, the reducer 84 can increase the output torque, allowing the motor to easily drive the load. Simultaneously, by changing the motor speed or coordinating the gear ratio, the adjustment speed of the planar target can be flexibly controlled. The meshing of the drive gear 85 and driven gear 82 results in a compact gear transmission structure with high transmission efficiency, reliably transmitting the power of the self-locking motor 83 to the adjusting screw 62.

[0040] In this embodiment, the limit positioning system 9 is used to limit the vertical movement range of the adjusting plate 5. The limit positioning system 9 includes a switch mounting plate 91 fixed to the side plate 2 by bolts. Two elongated adjusting slots 92 are spaced apart at the upper end of the switch mounting plate 91. A proximity switch 93 is installed on each of these two adjusting slots 92 to sense the upper and lower limit positions of the adjusting plate 5. Both proximity switches 93 are electrically connected to the self-locking motor 83 in the automatic drive module 8. The adjusting slots 92 can flexibly adjust the installation positions of the two proximity switches 93 as needed, thereby precisely setting the vertical movement range of the planar target 1, providing greater adaptability. The proximity switches 93 use non-contact sensing, have no mechanical wear, a long lifespan, and a fast response speed, instantly feeding back signals to the control system to achieve fast and reliable limit protection.

[0041] In summary, this utility model adopts a dual-mode adjustment design, successfully integrating manual and automatic adjustment into one, making the adjustment of the planar target more flexible and convenient. Manual or automatic adjustment modes can be selected according to actual needs. It not only significantly improves the efficiency and accuracy of planar target position adjustment, but also enhances the automation level, safety, and reliability of the equipment through limit positioning, optimized sealing and insulation design. It achieves the core objective of significantly reducing gold target material consumption by precisely controlling the target distance while ensuring coating quality.

[0042] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A planar target with dual-mode adjustment, comprising: A planar target and a side plate fixed to the equipment are characterized in that the side plate is symmetrically provided with sliding guides, and two sliding guides are slidably connected to sliding members connected to the planar target. An adjusting plate is connected to the sliding member at the end furthest from the planar target. The adjusting plate is provided with a pushing member fixed to the side plate. The adjusting plate is provided with a manual drive module that allows manual rotation of the pushing member and an automatic drive module that allows automatic rotation of the pushing member. In manual mode, the pushing member is rotated by manual operation of the manual drive module, causing the adjusting plate to push the sliding member along the sliding guides to adjust the position of the planar target. In automatic mode, the pushing member is rotated by the automatic drive module, causing the adjusting plate to push the sliding member along the sliding guides to adjust the position of the planar target. It also includes a limit positioning system, which is electrically connected to the automatic drive module. When the adjustment plate reaches the limit position, the automatic drive module automatically locks, causing the pusher to stop rotating.

2. The dual-mode adjustable planar target according to claim 1, characterized in that, The sliding guide includes a sliding sleeve fixed to the side plate, with a linear bearing installed inside the sliding sleeve; a sealing ring is provided at the contact end between the sliding sleeve and the side plate, and an annular convex edge is provided inside the sliding sleeve. Multiple skeleton-type sealing rings are provided between the linear bearing and the annular convex edge, and the sliding member can slide through the linear bearing and the skeleton-type sealing rings in sequence.

3. The dual-mode adjustable planar target according to claim 2, characterized in that, The sliding component includes a bushing that slides with a linear bearing and a skeleton-type seal ring. A water inlet pipe communicating with a planar target body is installed inside the bushing. An adjusting plate has a cantilever insulating sleeve covering the top of the water inlet pipe, and the cantilever insulating sleeve has an inlet port. A water pipe connector is connected to the top of the water inlet pipe. An inlet / outlet water insulating sleeve is fixed to the adjusting plate between the water inlet pipe and the water pipe connector, and the water inlet / outlet water insulating sleeve fixes the water inlet pipe to the adjusting plate. The top of the bushing is fixedly connected to the adjusting plate, and the bottom is fixedly connected to the planar target body. An inlet / outlet water-draining ring connected to the water inlet pipe is installed inside the bushing at one end of the planar target body. The inlet / outlet water-draining ring has an inlet sealing seat fixed to the planar target body. The water inlet pipe passes through the inlet / outlet water-draining ring and the inlet sealing seat in sequence and extends into the planar target body.

4. The dual-mode adjustable planar target according to claim 1, characterized in that, The pusher includes an adjusting screw fixed to the adjusting plate by a rotating fitting and a pusher sleeve fixed to the side plate. The center of the pusher sleeve has a threaded hole along the axial direction that is threaded to the adjusting screw. The adjusting screw is connected to the manual drive module and the automatic drive module respectively.

5. The dual-mode adjustable planar target according to claim 4, characterized in that, The manual drive module includes a handwheel located on top of the adjusting screw, and the handwheel has a foldable handle.

6. The dual-mode adjustable planar target according to claim 4, characterized in that, The automatic drive module includes a horizontal mounting plate fixed to the rotating accessory, a driven gear on the adjusting screw, and a self-locking motor on the horizontal mounting plate. The output shaft of the self-locking motor is connected to a reducer, and the output shaft of the reducer is provided with a driving gear that meshes with the driven gear.

7. The dual-mode adjustable planar target according to claim 1, characterized in that, The extreme positioning system includes a switch mounting plate fixed to the side plate. The upper end of the switch mounting plate is provided with two adjustment slots spaced apart. The two adjustment slots are respectively provided with proximity switches for sensing the upward and downward positions of the adjustment plate and feeding back the signals to the automatic drive module.

8. The dual-mode adjustable planar target according to claim 6, characterized in that, The rotating components include bearing seats symmetrically arranged on both sides of the adjusting plate, and a horizontal mounting plate fixed to the bearing seats at the upper end.

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