A rotary substrate holding device for dual-sided electrode synchronous sputtering

Abstract

The utility model provides a kind of double-sided electrode synchronous sputtering's rotary substrate clamping device, including base, the top of base is fixedly installed with installation cylinder, the inside of installation cylinder is provided with installation cylinder, the inside of installation cylinder is provided with two clamping mechanisms, the upper side and lower side of the inside of installation cylinder are fixedly installed with fourth mounting rod, the side of two fourth mounting rods relatively close is fixedly installed with electrode, clamping mechanism includes two first mounting rods fixedly installed in the inside of installation cylinder. The base is set to install the installation cylinder, the installation cylinder is set to install fourth mounting rod, electrode and clamping mechanism, the electrode is set to ionize target material and then realize that target material is adsorbed to the surface of substrate realizes coating, clamping mechanism is set to be used to extrude and fix substrate, avoid the influence of traditional fixed two electrodes on the coating of substrate, can drive substrate rotation simultaneously to realize comprehensive ionization.

Description

Technical Field

[0001] This utility model relates to the field of perovskite solar cell technology, specifically to a rotary substrate clamping device for simultaneous sputtering of double-sided electrodes. Background Technology

[0002] Perovskite solar cells are solar cells that use perovskite-type organometal halide semiconductors as light-absorbing materials. They belong to the third generation of solar cells and are also known as new concept solar cells.

[0003] Perovskite solar cells often require substrate coating during production, necessitating the use of coating equipment. This equipment employs double-sided electrodes for simultaneous sputtering coating, such as the double-sided synchronous magnetron sputtering coating equipment disclosed in patent number CN218089770U. While this solves the problem of large footprint and wasted space in single-process modules, it also requires heat treatment of non-processed surfaces during coating, leading to energy waste and issues with the film quality on non-processed surfaces.

[0004] However, in actual operation, since there are only two electrodes, the fixing device can affect the sputtering coating process when fixing the electrodes, thus affecting the product quality and failing to meet the actual usage requirements. Utility Model Content

[0005] The present invention aims to solve the problems mentioned in the background art by providing a rotary substrate clamping device for synchronous sputtering of double-sided electrodes.

[0006] The specific technical solution is as follows: A rotary substrate clamping device for synchronous sputtering of double-sided electrodes includes a base, a mounting cylinder fixedly mounted on the top of the base, a mounting cylinder inside the mounting cylinder, two clamping mechanisms on the inner side of the mounting cylinder, and a fourth mounting rod fixedly mounted on the upper and lower sides of the inner side of the mounting cylinder, with electrodes fixedly mounted on the side of the two fourth mounting rods that are relatively close to each other. The clamping mechanism includes two first mounting rods fixedly installed inside the mounting cylinder and two second mounting rods inserted inside the first mounting rods. A third mounting rod is fixedly installed on the relatively close side of each of the two second mounting rods, and a pressing block is fixedly installed on one side of each of the two third mounting rods.

[0007] As a preferred embodiment of this utility model, the first mounting rod has a storage groove inside, and the second mounting rod extends through the storage groove to the inner side of the first mounting rod.

[0008] As a preferred embodiment of this utility model, a spring is fixedly installed on one side of the second mounting rod and inside the storage groove, and one side of the spring is fixedly connected to the inner cavity of the storage groove.

[0009] As a preferred embodiment of this utility model, a limiting groove is provided inside the first mounting rod and at the top and bottom of the storage groove. A limiting block is slidably connected inside the limiting groove, and one side of the limiting block is fixedly connected to the second mounting rod.

[0010] As a preferred embodiment of this utility model, a plurality of rollers are fixedly installed at the bottom of the mounting cylinder, and the bottom of the rollers contacts the inner side of the mounting cylinder.

[0011] As a preferred embodiment of this utility model, an installation plate is fixedly installed on the outer side of the installation cylinder, and a drive motor is fixedly installed on the bottom of the installation plate. The output end of the drive motor passes through the installation plate and extends to the top of the installation cylinder.

[0012] In a preferred embodiment of this utility model, a drive gear is fixedly installed at the output end of the drive motor, and a gear plate is fixedly installed at the top of the mounting cylinder, the gear plate meshing with the drive gear.

[0013] This utility model has the following beneficial effects: 1. The rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided by this utility model has a base for mounting a mounting cylinder, which is used to mount a fourth mounting rod, electrodes and clamping mechanism. The electrodes are used to ionize the target material to achieve film deposition by adsorbing the target material onto the surface of the substrate. The clamping mechanism is used to squeeze and fix the substrate, avoiding the influence of traditional fixing on the film deposition of the substrate by the two electrodes, and can drive the substrate to rotate to achieve comprehensive ionization.

[0014] 2. The rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided by this utility model is provided with a first mounting rod, a second mounting rod, a pressing block and a third mounting rod for pressing and fixing the substrate to be coated. Since the pressing block and the third mounting rod are located on both sides of the substrate, it is convenient to coat the top and bottom surfaces of the substrate in the future. Attached Figure Description

[0015] Figure 1 A schematic diagram of the structure of the rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided in an embodiment of this utility model; Figure 2 A schematic diagram of the mounting cylinder structure of the rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided in an embodiment of this utility model; Figure 3A schematic diagram of the mounting cylinder structure of the rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided in an embodiment of this utility model; Figure 4 A schematic diagram of the mounting cylinder interface structure of the rotary substrate clamping device for synchronous sputtering of double-sided electrodes provided in an embodiment of this utility model; Figure 5 for Figure 4 Enlarged structural diagram at point A in the middle view; Figure 6 for Figure 4 Enlarged structural diagram at point B in the middle view.

[0016] In the attached diagram: 1. Base; 2. Mounting cylinder; 3. Clamping mechanism; 301. First mounting rod; 302. Second mounting rod; 303. Storage groove; 304. Spring; 305. Limiting block; 306. Limiting groove; 307. Extrusion block; 308. Third mounting rod; 4. Drive motor; 5. Mounting plate; 6. Drive gear; 7. Fourth mounting rod; 8. Electrode; 9. Gear plate; 10. Roller; 11. Mounting cylinder. Detailed Implementation

[0017] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0018] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0019] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0020] In the description of this utility model, unless otherwise explicitly specified and limited, the term "connection" or similar designation indicating the connection relationship between components should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] Example The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes provided in this embodiment, such as Figures 1-6 As shown, the device includes a base 1, a mounting cylinder 2 fixedly mounted on the top of the base 1, a mounting cylinder 11 inside the mounting cylinder 2, two clamping mechanisms 3 on the inner side of the mounting cylinder 11, and a fourth mounting rod 7 fixedly mounted on the upper and lower sides of the inner side of the mounting cylinder 2. An electrode 8 is fixedly mounted on the side of the two fourth mounting rods 7 that are relatively close to each other. The base 1 is used to mount the mounting cylinder 2, and the mounting cylinder 2 is used to mount the fourth mounting rods 7, the electrode 8 and the clamping mechanisms 3. The electrode 8 is used to ionize the target material, thereby adsorbing the target material onto the surface of the substrate to achieve film deposition. The clamping mechanism 3 is used to squeeze and fix the substrate, avoiding the influence of traditional fixing on the film deposition of the two electrodes 8 on the substrate, and at the same time, it can drive the substrate to rotate to achieve comprehensive ionization. The clamping mechanism 3 includes two first mounting rods 301 fixedly installed inside the mounting cylinder 11 and two second mounting rods 302 inserted inside the first mounting rods 301. A third mounting rod 308 is fixedly installed on the relatively close side of each of the two second mounting rods 302. A pressing block 307 is fixedly installed on one side of each of the two third mounting rods 308. The first mounting rods 301, second mounting rods 302, pressing block 307 and third mounting rod 308 are used to press and fix the substrate to be coated. Since the pressing block 307 and the third mounting rod 308 are located on both sides of the substrate, it is convenient to coat the top and bottom surfaces of the substrate in the future.

[0022] The first mounting rod 301 has a storage groove 303 inside, and the second mounting rod 302 extends through the storage groove 303 to the inner side of the first mounting rod 301. The storage groove 303 is used to accommodate the second mounting rod 302, so that the two second mounting rods 302 move to a relatively far side to place the substrate to be coated between the extrusion block 307 and the third mounting rod 308 for extrusion fixation.

[0023] A spring 304 is fixedly installed on one side of the second mounting rod 302 and inside the storage groove 303. One side of the spring 304 is fixedly connected to the inner cavity of the storage groove 303. The spring 304 is used to squeeze and push the second mounting rod 302, thereby fixing the substrate.

[0024] Limiting grooves 306 are provided inside the first mounting rod 301 and at the top and bottom of the receiving groove 303. A limiting block 305 is slidably connected inside the limiting groove 306. One side of the limiting block 305 is fixedly connected to the second mounting rod 302. The limiting block 305 and the limiting groove 306 are used to limit the second mounting rod 302, increase the stability of the second mounting rod 302 when moving, and thus increase the compression stability of the substrate.

[0025] Multiple rollers 10 are fixedly installed at the bottom of the mounting cylinder 11. The bottom of the rollers 10 contacts the inner side of the mounting cylinder 2. The rollers 10 are used to separate the mounting cylinder 11 from the mounting cylinder 2 to facilitate the subsequent driving of the mounting cylinder 11 to drive the clamping mechanism 3 and the substrate to rotate.

[0026] An mounting plate 5 is fixedly mounted on the outside of the mounting cylinder 2. A drive motor 4 is fixedly mounted on the bottom of the mounting plate 5. The output end of the drive motor 4 passes through the mounting plate 5 and extends to the top of the mounting cylinder 11. The mounting plate 5 is used to install the drive motor 4, so that the mounting cylinder 11 can be driven to rotate by the drive motor 4 in the future.

[0027] A drive gear 6 is fixedly installed at the output end of the drive motor 4, and a gear disk 9 is fixedly installed on the top of the mounting cylinder 11. The gear disk 9 meshes with the drive gear 6. The drive gear 6 and the gear disk 9 are used to enable the drive motor 4 to drive the mounting cylinder 11 to rotate the substrate, thereby achieving comprehensive ionization of the substrate.

[0028] In use, the entire unit is placed inside the vacuum coating machine. In actual use, the substrate is placed inside the mounting cylinder 2, and then the second mounting rod 302 on one side is pressed into the receiving groove 303, placing the substrate between the two pressing blocks 307. The second mounting rod 302 is released, and under the elastic potential energy of the spring 304, the second mounting rod 302 is pushed to drive the pressing blocks 307 to press and fix the substrate. After fixing, the substrate is coated by ionizing the target material through the electrode 8. At the same time, according to the coating requirements, the drive motor 4 drives the drive gear 6 to drive the mounting cylinder 11 to rotate under the action of the roller 10 in cooperation with the gear plate 9. The rotation of the mounting cylinder 11 drives the clamping mechanism 3 and the substrate to rotate, so as to achieve comprehensive coating. After coating is completed, the substrate can be taken out.

[0029] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A rotary substrate clamping device for simultaneous sputtering of double-sided electrodes, characterized in that, Includes a base (1), on the top of the base (1) a mounting cylinder (2) is fixedly installed, the inside of the mounting cylinder (2) is provided with a mounting cylinder (11), the inner side of the mounting cylinder (11) is provided with two clamping mechanisms (3), the upper and lower sides of the inner side of the mounting cylinder (2) are fixedly installed with fourth mounting rods (7), and electrodes (8) are fixedly installed on the side of the two fourth mounting rods (7) that are relatively close to each other. The clamping mechanism (3) includes two first mounting rods (301) fixedly installed inside the mounting cylinder (11) and two second mounting rods (302) inserted inside the first mounting rods (301). A third mounting rod (308) is fixedly installed on the relatively close side of the two second mounting rods (302), and a pressing block (307) is fixedly installed on one side of the two third mounting rods (308).

2. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 1, characterized in that, The first mounting rod (301) has a storage groove (303) inside, and the second mounting rod (302) extends through the storage groove (303) to the inside of the first mounting rod (301).

3. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 2, characterized in that, A spring (304) is fixedly installed on one side of the second mounting rod (302) and inside the storage groove (303), and one side of the spring (304) is fixedly connected to the inner cavity of the storage groove (303).

4. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 2, characterized in that, The first mounting rod (301) has a limiting groove (306) inside and at the top and bottom of the storage groove (303). A limiting block (305) is slidably connected inside the limiting groove (306), and one side of the limiting block (305) is fixedly connected to the second mounting rod (302).

5. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 1, characterized in that, Multiple rollers (10) are fixedly installed at the bottom of the mounting cylinder (11), and the bottom of the rollers (10) contacts the inner side of the mounting cylinder (2).

6. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 1, characterized in that, An installation plate (5) is fixedly installed on the outside of the installation cylinder (2), and a drive motor (4) is fixedly installed on the bottom of the installation plate (5). The output end of the drive motor (4) passes through the installation plate (5) and extends to the top of the installation cylinder (11).

7. The rotary substrate clamping device for simultaneous sputtering of double-sided electrodes according to claim 6, characterized in that, The output end of the drive motor (4) is fixedly mounted with a drive gear (6), and the top of the mounting cylinder (11) is fixedly mounted with a gear disc (9), which meshes with the drive gear (6).

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