A carrier plate insulation structure for vacuum coating

Abstract

The utility model discloses a kind of vacuum coating's carrier plate insulation structure, including cavity, the cavity one end is provided with carrier plate entrance and exit, the two sides of the cavity are respectively provided with multiple sealing transmission mechanism;The sealing transmission mechanism includes magnetic fluid transmission assembly, the transmission end of the magnetic fluid transmission assembly is inducted into cavity, transmission end of the magnetic fluid transmission assembly is provided with transmission roller, the magnetic fluid transmission assembly is provided with insulation layer between cavity. This structure is provided with multiple sealing transmission mechanism in the two sides of cavity, and sealing transmission mechanism uses magnetic fluid transmission assembly and transmission roller cooperation, and insulation layer is arranged between magnetic fluid transmission assembly and cavity, effectively avoid the discharge phenomenon generated due to charge accumulation when plating conductive film on insulating material, reduce film layer defect, improve the yield of product.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and in particular to a carrier plate insulation structure for vacuum coating. Background Technology

[0002] Magnetron sputtering is a type of physical vapor deposition (PVD) coating. It involves ionizing gas molecules in a vacuum environment to generate positively charged ions and electrons. These ions are accelerated by an electric field and bombard a target material, ejecting target atoms and depositing them onto the substrate to form a film. Due to its advantages such as fast deposition rate, high film quality, and strong adhesion, it is widely used in semiconductors, architectural glass, displays, optics, electronics, and decorative industries.

[0003] During the coating process, some electrons generated by ionization accumulate on the substrate. This is especially true when coating conductive films (such as metals or ITO) onto insulating substrates (such as glass). The edges of the insulating substrate rarely receive the conductive film, failing to establish good conductivity with the metal carrier supporting the substrate. Consequently, a large number of electrons accumulate within the conductive film layer of the insulating substrate. These electrons can move freely within the conductive film layer, and under certain conditions, they can cause breakdown discharge with the metal carrier near the substrate edges. This results in discharge streaks on the film layer, affecting product performance and appearance, ultimately leading to product failure. Utility Model Content

[0004] The technical problem solved by this utility model is to provide a carrier plate insulation structure for vacuum coating. This structure can avoid the discharge phenomenon caused by charge accumulation in the film layer during magnetron sputtering coating, especially when coating conductive films on insulating materials, which causes film layer defects and generates waste products.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a carrier plate insulation structure for vacuum coating, including a cavity, one end of which is provided with a carrier plate inlet and outlet, and multiple sealing and transmission mechanisms are respectively provided on both sides of the cavity; the sealing and transmission mechanism includes a magnetic fluid transmission component, the transmission end of which extends into the cavity, a transmission roller is provided at the transmission end of which, and an insulation layer is provided between the magnetic fluid transmission component and the cavity.

[0006] Furthermore, the insulating layer is made of polytetrafluoroethylene or PEEK.

[0007] Furthermore, the surface of the transmission roller is fitted with multiple rubber rings.

[0008] Furthermore, a guide rod is provided on one side of the magnetohydrodynamic transmission assembly located inside the cavity, and a guide wheel is provided at the front end of the guide rod.

[0009] Furthermore, it also includes a carrier plate, on both sides of which are provided L-shaped side plates. The L-shaped side plates include a horizontal plate and a vertical plate. When the carrier plate is transported on the transmission rollers, the transmission rollers contact the horizontal plate and the guide rollers contact the vertical plate.

[0010] Furthermore, a positioning component is provided at the bottom end of the cavity; The positioning component includes a first positioning block installed at the bottom of the cavity and a second positioning block installed on the side of the bottom end of the carrier plate, with the first positioning block and the second positioning block being positioned and engaged.

[0011] Furthermore, the first positioning block has a V-shaped groove on the side facing the second positioning block, the second positioning block has a positioning tip on the side facing the first positioning block, and a positioning roller is provided on the positioning tip.

[0012] The beneficial effects of this utility model are: 1. By setting multiple sealing and transmission mechanisms on both sides of the cavity, and using magnetic fluid transmission components in conjunction with transmission rollers, and setting an insulating layer between the magnetic fluid transmission components and the cavity, the discharge phenomenon caused by charge accumulation when depositing conductive films on insulating materials is effectively avoided, reducing film defects and improving product yield.

[0013] 2. Multiple rubber rings are fitted on the surface of the transmission rollers. On the one hand, they serve to insulate the magnetic fluid from the carrier plate, and on the other hand, they serve to buffer the carrier plate and reduce its vibration.

[0014] 3. The V-groove of the first positioning block, the positioning tip of the second positioning block, and the positioning roller all make the carrier plate more accurate and reliable during the transmission and positioning process, thereby improving the stability and efficiency of the entire vacuum coating process. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the carrier plate insulation structure for vacuum coating according to an embodiment of this application.

[0016] Figure 2 This is a cross-sectional view of the carrier plate insulation structure for vacuum coating according to an embodiment of this application.

[0017] Figure 3 This is an internal schematic diagram of the carrier plate insulation structure for vacuum coating according to an embodiment of this application.

[0018] Figure 4 This is a schematic diagram of a positioning assembly for a carrier plate insulation structure used in vacuum coating, according to an embodiment of this application.

[0019] The following are labeled in the figure: cavity 1, carrier plate inlet / outlet 2, magnetohydrodynamic transmission assembly 3, transmission roller 4, insulation layer 5, rubber ring 6, guide rod 7, guide wheel 8, L-shaped side plate 9, first positioning block 10, V-groove 101, second positioning block 11, and positioning roller 111. Detailed Implementation

[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0021] like Figure 1 As shown, an embodiment of this application discloses a carrier plate insulation structure for vacuum coating, including a cavity 1, a carrier plate inlet / outlet 2 at one end of the cavity 1, and multiple sealing and transfer mechanisms on both sides of the cavity 1. The sealing transmission mechanism includes a magnetic fluid transmission assembly 3, the transmission end of which extends into the cavity 1. A transmission roller 4 is provided at the transmission end of the magnetic fluid transmission assembly 3, and an insulating layer 5 is provided between the magnetic fluid transmission assembly 3 and the cavity 1.

[0022] Specifically, the product is placed on a carrier plate, and the carrier plate enters the cavity 1 through the magnetic fluid transmission component 3 from the carrier plate inlet 2. After the carrier plate enters the cavity 1, the external mechanism seals the carrier plate inlet 2, making the cavity 1 a closed environment. Then, the product is sputtered and coated inside the cavity 1.

[0023] In this structure, since an insulating layer 5 is provided between the magnetohydrodynamic transmission component 3 and the cavity 1, the insulating layer 5 effectively blocks the conduction path of the charge. Even when a conductive film is deposited on the insulating material, there will be no discharge phenomenon due to the accumulation of charge between the insulating substrate and the metal carrier plate. This avoids defects such as discharge stripes in the film layer and ensures the performance and appearance quality of the product.

[0024] In this embodiment, the insulating layer 5 is made of polytetrafluoroethylene or PEEK.

[0025] Specifically, polytetrafluoroethylene (PTFE) possesses excellent chemical stability, corrosion resistance, sealing properties, high lubricity and non-stickiness, electrical insulation, and good aging resistance. It can be used for extended periods at temperatures ranging from -180℃ to +260℃. Using it as an insulating layer material effectively ensures insulation performance during vacuum coating processes and can withstand harsh working environments. PEEK material also exhibits excellent mechanical properties, heat resistance, and insulation properties. It has a high temperature resistance rating, with a long-term operating temperature up to 250℃ and a short-term operating temperature even reaching 300℃. Furthermore, it possesses good dimensional and chemical stability, enabling it to stably perform its insulating function even in the complex environment of vacuum coating, preventing discharge problems caused by charge conduction.

[0026] In this embodiment, the surface of the transmission roller 4 is fitted with a plurality of rubber rings 6.

[0027] Specifically, during the transport of the carrier plate, the carrier plate comes into contact with the rubber ring 6. The rubber ring 6 serves two purposes: firstly, it insulates the magnetic fluid from the carrier plate, and secondly, it acts as a buffer for the carrier plate, reducing vibration during its movement.

[0028] In this embodiment, a guide rod 7 is provided on one side of the magnetohydrodynamic transmission assembly 3 located in the cavity 1, and a guide wheel 8 is provided at the front end of the guide rod 7.

[0029] Specifically, it also includes a carrier plate, on both sides of which are provided L-shaped side plates 9. The L-shaped side plates 9 include a horizontal plate and a vertical plate. When the carrier plate is transported on the transmission rollers, the transmission rollers 4 contact the horizontal plate and the guide rollers 8 contact the vertical plate.

[0030] Specifically, during the carrier plate transfer process, the guide rod 7 and guide wheel 8 play a precise guiding role. The transmission roller 4 contacts the horizontal plate of the L-shaped side plate 9 of the carrier plate, providing forward propulsion, while the guide wheel 8 contacts the vertical plate, ensuring that the carrier plate does not deviate during transfer and always moves stably along the predetermined path. This design ensures accurate transfer of the carrier plate within the cavity 1, improving the stability and consistency of the coating process.

[0031] In this embodiment, a positioning component is provided at the bottom of the cavity 1; the positioning component includes a first positioning block 10 installed at the bottom of the cavity 1 and a second positioning block 11 installed on the side of the bottom end of the carrier plate, and the first positioning block 10 and the second positioning block 11 are positioned and cooperated.

[0032] Specifically, the first positioning block 10 is provided with a V-groove 101 on the side facing the second positioning block 11, the second positioning block 11 is provided with a positioning tip on the side facing the first positioning block 10, and a positioning roller 111 is provided on the positioning tip.

[0033] Specifically, when the carrier plate is transported to the designated position within cavity 1, the first positioning block 10 and the second positioning block 11 begin to engage in positioning. The V-groove 101 on the side of the first positioning block 10 facing the second positioning block 11 engages with the positioning tip on the side of the second positioning block 11 facing the first positioning block 10. This design makes the positioning process more precise. The positioning roller 111 on the positioning tip plays an auxiliary role in carrier plate positioning, reducing friction during the positioning process and allowing the carrier plate to reach the accurate position more smoothly. It also reduces wear on the carrier plate and positioning components that may be caused by friction. Through this positioning component design, the carrier plate's position within cavity 1 is precisely fixed, providing a stable foundation for subsequent coating operations and further improving the accuracy and product quality of the entire vacuum coating process.

[0034] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A carrier plate insulation structure for vacuum coating, characterized in that: Includes a cavity (1), one end of which is provided with a carrier plate inlet / outlet (2), and multiple sealing and transfer mechanisms are provided on both sides of the cavity (1); The sealing transmission mechanism includes a magnetic fluid transmission assembly (3), the transmission end of which extends into the cavity (1), a transmission roller (4) is provided at the transmission end of the magnetic fluid transmission assembly (3), and an insulating layer (5) is provided between the magnetic fluid transmission assembly (3) and the cavity (1).

2. The carrier plate insulation structure for vacuum coating as described in claim 1, characterized in that: The insulating layer (5) is made of polytetrafluoroethylene or PEEK.

3. The carrier plate insulation structure for vacuum coating as described in claim 1, characterized in that: The transmission roller (4) is fitted with multiple rubber rings (6).

4. The carrier plate insulation structure for vacuum coating as described in claim 1, characterized in that: A guide rod (7) is provided on one side of the magnetohydrodynamic transmission assembly (3) located in the cavity (1), and a guide wheel (8) is provided at the front end of the guide rod (7).

5. The carrier plate insulation structure for vacuum coating as described in claim 4, characterized in that: It also includes a carrier plate, on both sides of which are provided L-shaped side plates (9). The L-shaped side plates (9) include a horizontal plate and a vertical plate. When the carrier plate is transported on the transmission rollers, the transmission roller (4) contacts the horizontal plate and the guide roller (8) contacts the vertical plate.

6. The carrier plate insulation structure for vacuum coating as described in claim 5, characterized in that: The bottom end of the cavity (1) is provided with an L-shaped side plate (9). The positioning assembly includes a first positioning block (10) installed at the bottom of the cavity (1) and a second positioning block (11) installed on the side of the bottom end of the carrier plate. The first positioning block (10) and the second positioning block (11) are positioned and engaged.

7. The carrier plate insulation structure for vacuum coating as described in claim 6, characterized in that: The first positioning block (10) has a V-groove (101) on the side facing the second positioning block (11), and the second positioning block (11) has a positioning tip on the side facing the first positioning block (10), and a positioning roller (111) is provided on the positioning tip.

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