Auxiliary discing equipment for large-size microcrystalline products

Abstract

The application relates to the technical field of coating auxiliary devices, in particular to an auxiliary disc loading equipment for large-size microcrystal products. The large-size microcrystal product is pre-assembled with a coating tooling, the coating tooling is adapted to a coating disc of a target coating machine at a desired position, a desired direction and a desired angle, the auxiliary disc loading equipment comprises: a rotating disc assembly, which is used for fixing the large-size microcrystal product and adjusting the coating tooling to the desired direction; a displacement adjusting assembly, which is connected with the rotating disc assembly, is arranged below the rotating disc assembly and is used for adjusting the coating tooling to the desired position; and an angle adjusting assembly, which is connected with the displacement adjusting assembly and is used for adjusting the inclination angle of the microcrystal product to the desired angle. The auxiliary disc loading equipment can realize quick alignment of the coating tooling and the coating disc, effectively improves the disc loading efficiency of the large-size microcrystal product and greatly reduces the working strength of the workers.

Description

Technical Field

[0001] This application relates to the field of coating auxiliary device technology, specifically to an auxiliary loading device for large-size microcrystalline products. Background Technology

[0002] In aerospace and semiconductor lithography fields, high-performance optical components are typically required to meet operational demands. The quality of the coating layer is a crucial indicator of the performance of optical components, and the coating equipment is usually directly related to the quality of the coating layer. Taking a planetary coating machine as an example, this type of coating machine can obtain films with extremely high uniformity. However, this type of coating machine (when rotating) has extremely high requirements for dynamic balance. Therefore, when adjusting the position of the planetary disks (coating disks), the position of a single planetary disk cannot usually be adjusted individually in the vertical direction; the entire machine must be adjusted together. This structural design means that even if the position of the planetary disks is lowered, insufficient space makes it inconvenient to install large-sized microcrystalline products. Large-sized microcrystalline products with coating fixtures are usually heavy and bulky. In addition, microcrystalline materials are relatively fragile and cannot be damaged by impact, making it difficult to install them onto the planetary disks manually. Utility Model Content

[0003] The purpose of this application is to provide an auxiliary tray loading device for large-size microcrystalline products, so as to improve the tray loading efficiency of large-size microcrystalline products and reduce the workload of workers.

[0004] To achieve the above objectives, this application provides an auxiliary loading device for large-size microcrystalline products. The microcrystalline products are pre-assembled with a coating fixture, which is adapted to the coating plate of a target coating machine at a desired position, desired direction, and desired angle. The auxiliary loading device includes: a rotating disk assembly for fixing the microcrystalline products and adjusting the coating fixture to a desired direction; a displacement adjustment assembly connected to the rotating disk assembly and located below the rotating disk assembly for adjusting the coating fixture to a desired position; and an angle adjustment assembly connected to the displacement adjustment assembly for adjusting the tilt angle of the microcrystalline products to a desired angle.

[0005] In this embodiment of the application, the rotating disk assembly includes a turntable and a rotating shaft; the top surface of the turntable is provided with a mounting part for fixing the coating fixture; the bottom of the turntable is rotatably connected to the displacement adjustment assembly through the rotating shaft.

[0006] In this embodiment, the auxiliary upper plate device further includes a support and fixing component; the displacement adjustment component includes: a movable lifting mechanism, which is fixedly connected to the support and fixing component; the movable lifting mechanism is used to adjust the position of the coating fixture for the first time; a displacement platform, the top of which is rotatably connected to the turntable via the rotating shaft, the platform surface of which is parallel to the turntable surface, and the displacement platform is used to adjust the position of the coating fixture for the second time; the displacement platform is connected to the angle adjustment component via the support and fixing component.

[0007] In this embodiment of the application, the support fixing component includes: a support plate, wherein there are multiple support plates, the top of any support plate is connected to or abuts against the displacement platform, and the bottom of any support plate is fixedly connected to a fixing plate; a fixing plate, wherein the surface of the fixing plate is parallel to the surface of the turntable; and an angle adjustment component is disposed between the displacement platform and the fixing plate, wherein the displacement platform and the fixing plate are respectively connected to the angle adjustment component.

[0008] In this embodiment, the angle adjustment assembly includes: a first fixing block and a second fixing block, the first fixing block and the second fixing block being disposed between the displacement platform and the fixing plate, and the first fixing block and the second fixing block being fixedly connected to the fixing plate respectively; a lead screw, one end of which is rotatably connected to the first fixing block, and the other end of which passes through the second fixing block and is fixedly connected to a rotating member; a rotating member for rotating the lead screw; a moving block, which is sleeved on the lead screw, and the moving block has an internal thread in its sleeve hole that matches the external thread of the lead screw, and the moving block is threadedly connected to the lead screw; a rigid push rod, one end of which is rotatably connected to the moving block, and the other end of which is rotatably connected to the bottom of the displacement platform through a connecting member; a first sidewall of the displacement platform is rotatably connected to at least one support plate, and the remaining support plates are located below the displacement platform and abut against or separate from the displacement platform; the connection point between the rigid push rod and the displacement platform is away from the first sidewall.

[0009] In this embodiment, the rotating component includes a rotating handwheel or a servo motor connected to the controller.

[0010] In this embodiment of the application, the auxiliary upper plate device further includes an angle sensor, which is disposed on the top of the displacement platform and is used to detect the angle between the platform surface and the plate surface of the coating plate.

[0011] In this embodiment of the application, the bottom of the fixing plate is provided with rollers.

[0012] In this embodiment of the application, the mobile lifting mechanism includes a scissor lift platform.

[0013] In this embodiment, the turntable is connected to the rotating shaft in a damped rotational manner.

[0014] The solution provided in this application has at least the following beneficial effects: The auxiliary mounting device provided in this application is compatible with the coating fixture pre-assembled with the target large-size microcrystalline product. Its usage process can be summarized as follows: First, adjust the coating fixture (and the target large-size microcrystalline product) to the desired position, direction, and angle. Then, install the coating fixture onto the coating tray. Finally, remove the auxiliary mounting device to complete the installation. During this process, operators only need to follow a predetermined sequence to quickly align the coating fixture and the coating tray, effectively improving the mounting efficiency of large-size microcrystalline products. Furthermore, it eliminates the need for manual handling of the target large-size microcrystalline product, saving time and effort and significantly reducing the workload of operators.

[0015] Other features and advantages of the embodiments of this application will be described in detail in the following detailed description section. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the following detailed description to explain the embodiments of this application, but do not constitute a limitation on the embodiments of this application. In the drawings: Figure 1 The schematic diagram illustrates the structure of the auxiliary upper plate device in an embodiment of this application; Figure 2 This schematic diagram illustrates the structure of the auxiliary upper plate device in an inclined state according to an embodiment of this application; Figure 3 The schematic diagram illustrates the structure of the angle adjustment component in an embodiment of this application; Figure 4 The diagram illustrates the distribution of the coating disks (planetary disks) in the planetary coating machine in an embodiment of this application. Figure 5 The schematic diagram illustrates the structure of the coating disk in an embodiment of this application.

[0017] Explanation of reference numerals in the attached figures 1. Turntable; 2. Rotating shaft; 3. Displacement platform; 4. Support plate; 5. Fixing plate; 6. First fixing block; 7. Second fixing block; 8. Lead screw; 9. Rotating component; 10. Moving block; 11. Rigid push rod; 12. Angle sensor; 100. Coating fixture; 101. Pin; 200. Microcrystalline product; 300. Coating disc; 301. Fixing hole. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only for illustration and explanation of the embodiments of this application and are not intended to limit the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0019] It should be noted that if the embodiments of this application involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0020] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0021] Example

[0022] like Figure 1 As shown, this embodiment provides an auxiliary loading device for large-size microcrystalline products. The microcrystalline product 200 is pre-assembled with a coating fixture 100. The coating fixture 100 is adapted to the coating disk 300 of the target coating machine at a desired position, desired direction, and desired angle. The auxiliary loading device includes: a rotating disk assembly for fixing the microcrystalline product 200 and adjusting the coating fixture 100 to a desired direction (the turntable 1 drives the coating fixture 100 to rotate); a displacement adjustment assembly connected to the rotating disk assembly and located below the rotating disk assembly for adjusting the coating fixture 100 to a desired position; and an angle adjustment assembly connected to the displacement adjustment assembly for adjusting the tilt angle of the microcrystalline product 200 to a desired angle.

[0023] Specifically, the rotating disk assembly includes a turntable 1 and a rotating shaft 2; the top surface of the turntable 1 is provided with a mounting part (several screw holes) for fixing the coating fixture 100; the bottom of the turntable 1 is rotatably connected to the displacement adjustment assembly through the rotating shaft 2. Preferably, the turntable 1 and the rotating shaft 2 are connected by damping rotation, which can reduce the steps and tools required to fix the rotating shaft 2 and improve the efficiency of loading the disk.

[0024] Furthermore, such as Figure 1 and Figure 2 As shown, the auxiliary upper plate device also includes a support and fixing component; the displacement adjustment component includes: a movable lifting mechanism (such as a scissor lift platform), which is fixedly connected to the support and fixing component; the movable lifting mechanism is used to adjust the position of the coating fixture 100 at first; a displacement platform 3, the top of which is rotatably connected to the turntable 1 via the rotating shaft 2, the platform surface of which is parallel to the surface of the turntable 1, and the displacement platform 3 is used to adjust the position of the coating fixture 100 at second time; the displacement platform 3 is connected to the angle adjustment component via the support and fixing component. In this embodiment, the above-mentioned support and fixing component is mainly used to integrate the rotating disc component, the angle adjustment component, and the displacement platform 3 into a whole, so as to facilitate the displacement adjustment component to transport the whole.

[0025] Specifically, the support and fixing assembly includes a support plate 4 and a fixing plate 5. There are multiple support plates 4. The top of any support plate 4 is connected to or abuts against the displacement platform 3, and the bottom of any support plate 4 is fixedly connected to the fixing plate 5. The surface of the fixing plate 5 is parallel to the surface of the turntable 1. The angle adjustment assembly is located between the displacement platform 3 and the fixing plate 5. The displacement platform 3 and the fixing plate 5 are respectively connected to the angle adjustment assembly.

[0026] For details, please refer to Figure 2 and Figure 3 The angle adjustment assembly includes: a first fixing block 6 and a second fixing block 7, the first fixing block 6 and the second fixing block 7 being disposed between the displacement platform 3 and the fixing plate 5, and the first fixing block 6 and the second fixing block 7 being fixedly connected to the fixing plate 5 respectively; a lead screw 8, one end of which is rotatably connected to the first fixing block 6, and the other end of which passes through the second fixing block 7 and is fixedly connected to a rotating component 9; the rotating component 9 (exemplary, such as...) Figure 2 and Figure 3The rotating handwheel (or servo motor connected to the controller) shown is used to rotate the lead screw 8; the moving block 10 is sleeved on the lead screw 8, and the moving block 10 has an internal thread in its sleeve hole that matches the external thread of the lead screw 8, and the moving block 10 is threadedly connected to the lead screw 8; the rigid push rod 11 has one end rotatably connected to the moving block 10, and the other end rotatably connected to the bottom of the displacement platform 3 through a connector; the first sidewall of the displacement platform 3 is rotatably connected to at least one support plate 4, and the remaining support plates 4 are located below the displacement platform 3 and abut against or separate from the displacement platform 3 (abut against when not tilted, separate when tilted); the connection point between the rigid push rod 11 and the displacement platform 3 is away from the first sidewall.

[0027] The main steps in using the aforementioned auxiliary upper plate equipment include:

[0028] 1) Adjust the position of the coating fixture 100 (microcrystalline product 200) once; after fixing the coating fixture 100 onto the turntable 1, place the entire assembly, which is integrated using the support and fixing components, onto the lifting platform of the moving lifting mechanism, and secure it using screws and other fasteners. After securing, adjust the position of the moving lifting mechanism and send the coating fixture 100 to a specific height.

[0029] 2) Tilting Angle Adjustment; When adjusting the angle, control the rotating component 9 to rotate, which drives the lead screw 8 to rotate. The moving block 10 sleeved on the lead screw 8 is rotatably connected to one end of the rigid push rod 11 (its rotation direction is perpendicular to the rotation direction of the lead screw 8). The other end of the rigid push rod 11 is rotatably connected to the bottom of the displacement platform 3 through a connector (its rotation direction is perpendicular to the rotation direction of the lead screw 8). Since the moving block 10 cannot drive the rigid push rod 11 to rotate with the lead screw 8, the moving block 10 will slide up and down along the lead screw 8. In addition, the length of the rigid push rod 11 remains constant, so the rigid push rod 11 can push the displacement platform 3 (the side opposite to the first sidewall) to different heights, thereby achieving different degrees of tilting. In this embodiment, the tilt angle of the displacement platform 3 (here it is assumed that the upper surface of the microcrystalline product 200 is parallel to the table surface of the displacement platform 3) needs to be adjusted to the desired angle so that the table surface of the displacement platform 3 is parallel to the surface of the coating disk 300 (e.g., Figure 4 (As shown) Parallel. To determine whether the platform surface of the displacement platform 3 is parallel to the surface of the coating disk 300, the angle sensor 12 can be used. For example, a laser angle meter can be set on the platform surface of the displacement platform 3 to measure the angle between the platform surface of the displacement platform 3 and the surface of the coating disk 300. When the measured angle is 0° or 180°, the platform surface of the displacement platform 3 is parallel to the surface of the coating disk 300.

[0030] 3) Secondary adjustment of the position of the coating fixture 100 (microcrystalline product 200); based on the tilt angle determined in process 2) above, adjust the position of the coating fixture 100 up, down, left, and right to align the fixed surface of the coating fixture 100 with the disk surface of the coating disk 300. The displacement platform 3 can be a high-precision two-dimensional displacement stage.

[0031] 4) Adjusting the orientation of the plate: By rotating the turntable 1, align the hanger of the coating fixture 100 with the fixing hole 301 on the coating plate 300. The hanger can be made of... Figure 2 The pin 101 shown includes a pin shaft and a nut. The free end of the pin shaft is fixedly connected to the coating fixture 100. The structure of the fixing hole 301 can be referenced. Figure 5 As shown, it consists of two connected parts: a round hole and a slotted hole, where the diameter of the round hole is larger than the diameter of the nut, and the diameter of the nut is larger than the width of the slotted hole. During installation, first, the nut end of the pin 101 is inserted into the round hole. Then, the rotating turntable 1 is turned, causing the coating fixture 100 to rotate, causing the pin shaft of the pin 101 to engage in the slotted hole. This completes the installation of the upper plate of the coating fixture 100.

[0032] Preferably, rollers (e.g., casters) can also be provided at the bottom of the fixed plate 5 to facilitate movement and transportation.

[0033] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0034] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. An auxiliary loading device for large-size microcrystalline products, characterized in that, The microcrystalline product (200) is pre-assembled with a coating fixture (100), which is adapted to the coating tray (300) of the target coating machine at a desired position, desired direction, and desired angle; the auxiliary tray mounting equipment includes: A rotating disk assembly for fixing the microcrystalline product (200) and adjusting the coating fixture (100) to the desired orientation; A displacement adjustment assembly is connected to the rotating disk assembly and is located below the rotating disk assembly. The displacement adjustment assembly is used to adjust the coating fixture (100) to the desired position. An angle adjustment component, which is connected to the displacement adjustment component, is used to adjust the tilt angle of the microcrystalline product (200) to the desired angle.

2. The auxiliary mounting device for large-size microcrystalline products according to claim 1, characterized in that, The rotating disk assembly includes a turntable (1) and a rotating shaft (2); the top surface of the turntable (1) is provided with a mounting part for fixing the coating fixture (100); the bottom of the turntable (1) is rotatably connected to the displacement adjustment assembly through the rotating shaft (2).

3. The auxiliary mounting device for large-size microcrystalline products according to claim 2, characterized in that, The auxiliary upper plate device also includes a support and fixing component; the displacement adjustment component includes: A movable lifting mechanism is fixedly connected to the support and fixing assembly; the movable lifting mechanism is used to adjust the position of the coating fixture (100) once. The top of the displacement platform (3) is rotatably connected to the turntable (1) via the rotating shaft (2). The table surface of the displacement platform (3) is parallel to the disk surface of the turntable (1). The displacement platform (3) is used for secondary adjustment of the position of the coating fixture (100). The displacement platform (3) is connected to the angle adjustment component via the support and fixing component.

4. The auxiliary mounting device for large-size microcrystalline products according to claim 3, characterized in that, The supporting and fixing components include: Support plate (4), there are multiple support plates (4), the top of any support plate (4) is connected to or abuts against the displacement platform (3), and the bottom of any support plate (4) is fixedly connected to the fixing plate (5); A fixed plate (5) is provided, the surface of which is parallel to the surface of the turntable (1); the angle adjustment component is located between the displacement platform (3) and the fixed plate (5), and the displacement platform (3) and the fixed plate (5) are respectively connected to the angle adjustment component.

5. The auxiliary mounting device for large-size microcrystalline products according to claim 4, characterized in that, The angle adjustment component includes: The first fixing block (6) and the second fixing block (7) are located between the displacement platform (3) and the fixing plate (5), and the first fixing block (6) and the second fixing block (7) are fixedly connected to the fixing plate (5) respectively. A lead screw (8), one end of which is rotatably connected to a first fixed block (6), and the other end of which passes through a second fixed block (7) and is fixedly connected to a rotating component (9); Rotating component (9) is used to rotate lead screw (8); The movable block (10) is sleeved on the lead screw (8). The sleeve hole of the movable block (10) is provided with an internal thread that is adapted to the external thread of the lead screw (8). The movable block (10) is threadedly connected to the lead screw (8). A rigid push rod (11) is provided, one end of which is rotatably connected to the moving block (10), and the other end of which is rotatably connected to the bottom of the displacement platform (3) via a connector. The first sidewall of the displacement platform (3) is rotatably connected to at least one support plate (4), and the remaining support plates (4) are located below the displacement platform (3) and abut against or separate from the displacement platform (3); The connection between the rigid push rod (11) and the displacement platform (3) is far from the first side wall of the displacement platform (3).

6. The auxiliary mounting device for large-size microcrystalline products according to claim 5, characterized in that, The rotating component (9) includes a rotating handwheel or a servo motor connected to the controller.

7. The auxiliary mounting device for large-size microcrystalline products according to claim 3, characterized in that, The auxiliary upper plate device also includes: An angle sensor (12) is located on the top of the displacement platform (3) and is used to detect the angle between the platform surface of the displacement platform (3) and the surface of the coating disk (300).

8. The auxiliary mounting device for large-size microcrystalline products according to any one of claims 4 to 6, characterized in that, The bottom of the fixing plate (5) is provided with rollers.

9. The auxiliary mounting device for large-size microcrystalline products according to any one of claims 3 to 7, characterized in that, The mobile lifting mechanism includes a scissor lift platform.

10. The auxiliary mounting device for large-size microcrystalline products according to any one of claims 2 to 7, characterized in that, The turntable (1) is connected to the rotating shaft (2) by a damped rotation.

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