Boat structure and process furnace

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a process furnace, which solves the problems of poor heating uniformity and low temperature rise rate of the sheet in the process furnace in the prior art. The boat structure comprises a plurality of boat pages, a plurality of heating assemblies and a plurality of electrical connection assemblies. The heating assemblies are insulatively arranged on the plurality of boat pages, and each heating assembly corresponds to a bearing space. The heating assembly comprises a plurality of electrically connected heating pieces. The plurality of heating pieces are insulatively arranged at positions corresponding to the bearing areas of the plurality of boat pages respectively, and the heating pieces are insulated from the sheet. The heating pieces are configured to heat the sheet carried by the bearing area. The plurality of electrical connection assemblies are insulatively connected with the plurality of boat pages, and the electrical connection assemblies are electrically connected with each heating piece in the same heating assembly. The boat structure and the process furnace provided by the present disclosure can improve the heating uniformity and the temperature rise rate of the sheet carried by the boat structure.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and process furnace. Background Technology

[0002] In the semiconductor and photovoltaic technology fields, coating multiple sheets mounted in a boat structure using coating equipment is a crucial step in the production of semiconductors or photovoltaic cells. As sheet sizes increase and production capacity demands rise, the dimensions of both the boat structure and the furnace cavity of the coating equipment also increase. However, existing coating equipment typically uses heating wires on the side walls of the furnace cavity for heating. The heat is then sequentially transferred to the boat structure and the sheets, resulting in poor heating uniformity among the sheets within the boat structure, which in turn affects the coating effect on the sheet surfaces. Utility Model Content

[0003] In view of this, the present disclosure provides a boat structure and a process furnace to solve the problems of poor heating uniformity and low temperature rise rate of sheet materials in process furnaces in the related art.

[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to support a sheet extending along a first direction. Multiple sheets are spaced apart along a vertical direction to form a sheet assembly. The first direction is perpendicular to the vertical direction. The boat structure includes: multiple boat flaps spaced apart along a vertical direction, with adjacent boat flaps insulated from each other. Any two adjacent boat flaps are configured to have opposite polarities. Each boat flap has multiple support areas spaced apart along the first direction, each support area configured to support the sheet. The support areas of the multiple boat flaps correspond one-to-one, and the corresponding multiple support areas enclose a support space, each support space corresponding to a sheet assembly; multiple sets of heating components arranged along the first direction, insulated from the multiple boat flaps, each heating component corresponding to a support space; each heating component includes multiple electrically connected heating elements, each heating element insulated from the position of the corresponding support area on the multiple boat flaps, and insulated from the sheet. The heating elements are configured to heat the sheet supported by the support area; and multiple sets of electrical connection components insulatedly connected to the multiple boat flaps, and electrically connected to each heating element in the same heating component.

[0005] In some embodiments, the heating element includes: an insulating housing having a receiving space; a heating element housed in the receiving space; and an electrical connection assembly configured to connect the heating elements in the same heating element in series and / or in parallel through the receiving space.

[0006] In some embodiments, the heating element is configured as a serpentine arrangement of heating bars, each heating bar having a first connecting end and a second connecting end. The electrical connection assembly includes: a plurality of conductive connectors, wherein in the plurality of heating elements of the same heating assembly arranged vertically, each first connecting end is sequentially connected by a plurality of conductive connectors, and each second connecting end is sequentially connected by a plurality of conductive connectors; or, the first connecting end of the heating bar located in an odd-numbered position is connected to the next adjacent first connecting end by a conductive connector, and the second connecting end of the heating bar located in an even-numbered position is connected to the next adjacent second connecting end by a conductive connector; and an insulating sleeve, fitted onto the outer periphery of the conductive connector, the insulating sleeve being at least disposed between the spool and the conductive connector.

[0007] In some embodiments, the heating element is configured as heating bars arranged in a serpentine pattern, the heating bars having a first connection end and a second connection end, and the electrical connection assembly includes: a plurality of conductive connectors, in the same group of heating assemblies, a portion of the heating elements are connected in parallel through conductive connectors to form a parallel group, and multiple parallel groups are connected in series; wherein, in adjacent parallel groups, the first connection end of the last heating bar in the preceding parallel group and the first connection end of the first heating bar in the following parallel group are insulated from each other, and the second connection end of the last heating bar in the preceding parallel group and the second connection end of the first heating bar in the following parallel group are electrically connected.

[0008] In some embodiments, the process furnace includes a support member disposed in the furnace cavity, the support member having multiple sets of first electrical leads arranged at intervals along a first direction, and further includes: a carrier member, configured as an insulating member, on which multiple boats are supported, the carrier member having multiple sets of second electrical leads arranged at intervals along the first direction, the multiple sets of electrical connection components being electrically connected to the multiple sets of second electrical leads in a one-to-one correspondence; and a first power supply component, electrically connected to the multiple sets of first electrical leads, wherein when the carrier member is placed on the support member, the multiple sets of first electrical leads are in contact with the multiple sets of second electrical leads in a one-to-one correspondence, and the first power supply component is configured to provide heating power to the multiple sets of electrical connection components respectively.

[0009] In some embodiments, the boat leaf includes: a first sub-boat leaf extending along a first direction; and a second sub-boat leaf extending along the first direction. The first sub-boat leaf is located above the second sub-boat leaf in a vertical direction. The first sub-boat leaf is connected to the second sub-boat leaf. A bearing area is located on the surface of the first sub-boat leaf away from the second sub-boat leaf. A plurality of receiving chambers are arranged at intervals along the first direction between the first sub-boat leaf and the second sub-boat leaf. Each receiving chamber corresponds to a bearing area. The receiving chambers are configured to insulate and hold the heating element.

[0010] In some embodiments, the first sub-boat leaf is provided with a first groove, and the second sub-boat leaf is provided with a second groove corresponding to the first groove. The first groove and the second groove can be closed to form a receiving chamber for receiving a heating element.

[0011] In some embodiments, the process furnace includes multiple temperature zones arranged along a first direction, multiple sets of heating components respectively corresponding to the multiple temperature zones of the process furnace, and the heating temperature of the multiple sets of heating components is adjusted individually.

[0012] In some embodiments, the boat structure further includes: a plurality of temperature sensors, each corresponding to a plurality of carrying spaces, the temperature sensors being configured to detect the temperature of the corresponding carrying space and generate a detection signal; and a control unit, electrically connected to the plurality of temperature sensors and the plurality of heating components, the control unit being configured to receive the detection signals from the temperature sensors and control the heating temperature of the corresponding heating components according to the detection signals.

[0013] Secondly, embodiments of this disclosure provide a process furnace, including: a furnace body having a furnace cavity; a support member disposed in the furnace cavity; and the boat structure described above, wherein the boat structure can be placed on the support member.

[0014] The boat structure and process furnace provided in this disclosure, by setting heating components corresponding to sheet groups on multiple boat pages, and making multiple heating elements electrically connected in the heating components correspond one-to-one with multiple sheets in the sheet group, enables multiple heating elements to be used to heat each sheet in the corresponding sheet group respectively. The heat from the heating elements can be quickly conducted to the corresponding sheet, which is beneficial to improve the temperature rise rate and heating uniformity of each sheet in the sheet group, thereby improving the coating effect on the surface of each sheet.

[0015] In addition, by setting up multiple sets of electrical connection components that are insulated from multiple boat leaves, and using them to electrically connect the heating elements in the same heating assembly, the heating elements connected by the electrical connection can be heated or cooled synchronously. This avoids the problem of large temperature differences between the sheets in the middle and the sheets at both ends of the sheet group due to the influence of external environmental factors, and further improves the temperature rise rate and heating uniformity of each sheet in the sheet group. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure.

[0018] Figure 2 The diagram shown is a schematic of a boat structure supported by a support member according to an embodiment of the present disclosure.

[0019] Figure 3 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0020] Figure 4 The diagram shown is a schematic diagram of a boat structure provided in one embodiment of this disclosure from another direction.

[0021] Figure 5 As shown Figure 4 A magnified view of part B in the boat structure shown.

[0022] Figure 6 The image shown is a partial exploded view of the boat leaf in a boat structure provided in an embodiment of this disclosure.

[0023] Figure 7 As shown Figure 6 A magnified view of part A in the boat structure shown.

[0024] Figure 8 The diagram shown is a schematic diagram of an electrical connection component in a boat structure provided in an embodiment of this disclosure.

[0025] Figure 9 The diagram shown is a schematic diagram of the connection between the electrical connection component and the heating component in a boat structure provided in an embodiment of this disclosure.

[0026] Figure 10 The diagram shown is a schematic diagram of the electrical connection component and the heating element connected in parallel in a boat structure provided in an embodiment of this disclosure.

[0027] Figure label: 100. Process furnace; 10. Boat structure; 10a. Temperature detection element; 1. Boat blade; 1a. Bearing area; 1b. Bearing space; 11. Third groove; 12. First sub-boat blade; 13. Second sub-boat blade; 131. Second groove; 2. Heating assembly; 2N. Accommodation space; 21. Heating element; 211. Insulating shell; 211a. First insulating shell; 211b. Second insulating shell; 212. Heating element; 212a. First connecting end; 212b. Second connecting end; 3. Electrical connection assembly; 31. Conductive connector; 3 2. Insulating sleeve; 33. Connecting strip; 4. Electrode assembly; 41. First electrode group; 42. Second electrode group; 5. Second power supply assembly; 6. First power supply assembly; 7. Control component; 8. Insulating connector; 9. Bearing component; 91. Bearing plate; 911. Mounting groove; 912. Second power supply assembly; 92. Boat foot; 20. Furnace body; 201. Furnace cavity; 201a. Temperature zone; 30. Support component; 301. First power supply assembly; 40. Sheet; 40a. Sheet group; X, First direction; Y, Second direction; Z, Vertical direction. Detailed Implementation

[0028] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0029] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure. Figure 2 The diagram shown is a schematic of a boat structure supported by a support member according to an embodiment of the present disclosure. Figure 3 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 4 The diagram shown is a schematic representation of a boat structure provided in one embodiment of this disclosure from another direction. Arrow X points to the first direction, arrow Y points to the second direction, and arrow Z points to the vertical direction. The first direction X, the second direction Y, and the vertical direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other. The first direction X is the length direction of the boat structure 10 and also the extension direction of the process furnace 100, which will not be emphasized separately thereafter.

[0030] This disclosure provides a boat structure, such as Figures 1 to 4 The boat structure 10 is used in the coating equipment. The boat structure 10 is configured to carry the sheet 40, and the coating equipment is configured to process the sheet 40 carried by the boat structure 10.

[0031] It is understandable that, such as Figure 1 The coating equipment can be a plasma-enhanced chemical vapor deposition (PECVD) device. The PECVD device includes a PECVD furnace, which comprises a furnace body 20 having at least one furnace opening. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening. A support member 30 is provided inside the furnace cavity 201. A boat structure 10 carrying a sheet 40 can enter and exit the furnace cavity 201 from the furnace opening and is placed on the support member 30 while inside the furnace cavity 201. In the furnace cavity 201, the surface of the sheet 40 to be processed carried in the boat structure 10 can be coated with one or more thin films. The specific structure of the coating equipment is not described in detail.

[0032] Optionally, the sheet 40 can be a solar cell, also known as a silicon wafer. The solar cell has a surface to be processed on one side in the thickness direction. The sheet 40, supported in the boat structure 10, can be deposited onto the surface to be coated by the escaping plasma in the PECVD furnace to complete the coating. The shape of the sheet 40 can be, for example, rectangular, square, or circular, etc., without specific limitation.

[0033] Among them, such as Figures 1 to 4 The boat structure 10 includes multiple boat leaves 1, each boat leaf 1 extending along a first direction X. The multiple boat leaves 1 are arranged at intervals along a vertical direction Z. Adjacent boat leaves 1 are insulated from each other. Any two adjacent boat leaves 1 are configured to have opposite polarities. Each boat leaf 1 has multiple load-bearing regions 1a arranged at intervals along the first direction X. The load-bearing regions 1a are configured to carry sheets 40. The load-bearing regions 1a of the multiple boat leaves 1 correspond one-to-one. When each load-bearing region 1a of the multiple boat leaves 1 carries a sheet 40, the multiple sheets 40 carried by the multiple load-bearing regions 1a corresponding along the vertical direction Z can be referred to as a sheet group 40a (i.e., the multiple sheets 40 of the sheet group 40a are arranged at intervals along the vertical direction Z). The corresponding multiple load-bearing regions 1a enclose a load-bearing space 1b, and each load-bearing space 1b corresponds to a sheet group 40a.

[0034] It is understood that the boat structure 10 can be a vertically inserted boat structure 10, that is, the sheet 40 supported by the bearing area 1a is placed vertically, and the boat structure 10 can also be called a vertical boat. Alternatively, the boat structure 10 can also be a parallel inserted boat structure 10, that is, the sheet 40 supported by the bearing area 1a is placed horizontally, and multiple sheets 40 are arranged at intervals along the vertical direction Z, with each sheet 40 extending along the horizontal plane containing the first direction X and the second direction Y, and the boat structure 10 can also be called a horizontal boat. For ease of understanding and explanation, the embodiments of this disclosure use a horizontally inserted boat structure 10 as an example for detailed description.

[0035] Optionally, the leaf 1 has a bearing area 1a on its upper surface on the vertical Z-side. Each bearing area 1a can be used to bear one sheet 40 or multiple sheets 40. For example, when the bearing area 1a bears one sheet 40, the upper surface of the leaf 1 has a third groove 11. The area where the third groove 11 is located encloses the bearing area 1a, and the depth of the third groove 11 can be greater than or equal to the thickness of the sheet 40. When the bearing area 1a bears multiple sheets 40, the upper surface of the leaf 1 has multiple spaced third grooves 11. Each third groove 11 is configured to accommodate one sheet 40, and the area where the multiple third grooves 11 are located encloses the bearing area 1a, without specific limitation.

[0036] In some alternative embodiments, multiple leaflets 1 can be insulatedly connected by insulating connectors 8. Multiple insulating connectors 8 can be configured and located outside the bearing space 1b. Sheets 40 can be inserted through the gaps between adjacent leaflets 1 to be placed in the bearing area 1a. For example, the insulating connectors 8 can be configured as insulating connecting rods with insulating properties, with multiple insulating connecting rods arranged around the bearing space 1b.

[0037] It is understandable that when the sheet 40 is supported in the support area 1a of the leaf 1, the sheet 40 and the leaf 1 are electrically connected, so that the sheet 40 and the corresponding leaf 1 have the same polarity.

[0038] For example, multiple leaflets 1 include first leaflets and second leaflets arranged alternately along the vertical direction Z. The first leaflets are configured as positive electrodes, and the second leaflets are configured as negative electrodes. In adjacent first and second leaflets, the bearing region 1a of the first leaflet is disposed on the surface of the first leaflet facing the second leaflet, and the bearing region 1a of the second leaflet is disposed on the surface of the second leaflet facing away from the first leaflet. Taking sheet 40 being carried in the bearing region 1a of the first leaflet as an example, the surface of the sheet 40 to be processed is opposite to the second leaflet in the vertical direction Z. Sheet 40 and the first leaflet have the same polarity, i.e., sheet 40 is the positive electrode. During the coating process, the positive electrode sheet 40 and the negative electrode second leaflet form an electric field at the gap. The gas in the gap is ionized into dissipated plasma to form a film on the surface of the sheet 40 to be processed. This will not be described in detail.

[0039] Specifically, the boat structure 10 also includes multiple sets of heating components 2 and multiple sets of electrical connection components 3. The multiple sets of heating components 2 are arranged along the first direction X. The heating components 2 are insulated from multiple boat leaves 1, and each heating component 2 corresponds to a bearing space 1b. The heating component 2 includes multiple electrically connected heating elements 21. The multiple heating elements 21 are respectively insulated from the multiple boat leaves 1 at the positions corresponding to the bearing areas 1a, and the heating elements 21 are insulated from the sheet 40. The heating elements 21 are configured to heat the sheet 40 carried in the bearing area 1a. The multiple sets of electrical connection components 3 are insulated from and connected to the multiple boat leaves 1, and the electrical connection components 3 are electrically connected to each heating element 21 in the same heating component 2.

[0040] The boat structure provided in this embodiment of the present disclosure, by setting heating components 2 corresponding to sheet groups 40a on multiple boat pages 1, and making multiple heating elements 21 electrically connected in the heating components 2 correspond one-to-one with multiple sheets 40 in the sheet group 40a, allows the multiple heating elements 21 to be used to heat each sheet 40 in the corresponding sheet group 40a respectively. The heat from the heating elements 21 can be quickly conducted to the corresponding sheet 40, which is beneficial to improving the temperature rise rate and heating uniformity of each sheet 40 in the sheet group 40a, thereby improving the coating effect on the surface of each sheet 40.

[0041] In addition, by setting multiple sets of electrical connection components 3 that are insulated from and connected to multiple leaf 1, and using them to electrically connect each heating element 21 in the same heating assembly 2, the heating elements 21 connected by electricity can be heated or cooled synchronously, avoiding the problem that the sheet 40 in the middle position of the sheet group 40a and the sheets 40 at both ends are heated due to the influence of external environmental factors, and further improving the temperature rise rate and heating uniformity of each sheet 40 in the sheet group 40a.

[0042] With the boat structure 10 placed inside the furnace cavity 201, the two ends of the boat structure 10 along the extension direction of the furnace cavity 201 are referred to as the bow and stern, respectively. The furnace cavity 201 has poor heat preservation performance at both ends in the extension direction, meaning heat is easily lost. Since the bow and stern of the boat structure 10 are close to the two ends of the furnace cavity 201, the actual temperature around the sheet group 40a near the bow and stern will be lower than the process temperature during the coating process. In order to keep the actual temperature around each sheet group 40a at the process temperature, the actual heating temperature of each heating component 2 is individually controlled, so that the heating temperature of the heating component 2 near the bow and stern is higher than that of the heating component 2 at other locations. Ultimately, the temperature at each location in the boat structure 10 is maintained at the process temperature, which is beneficial to improving the heating uniformity and stability of the sheet 40, thereby improving the coating effect.

[0043] For example, such as Figure 1 The furnace cavity 201 of the process furnace 100 can be divided into multiple temperature zones 201a arranged along a first direction X. Multiple sets of heating components 2 correspond to the multiple temperature zones 201a of the process furnace 100, and the heating temperature of each set of heating components 2 can be adjusted independently. Optionally, the heating temperatures of each individually adjusted heating component 2 can be the same or different, and can be adaptively adjusted according to actual conditions without specific limitations. In the multiple temperature zones 201a of the process furnace 100, the process temperatures set for each temperature zone 201a can be the same or different. When the process temperatures of the multiple temperature zones 201a are set differently, from the furnace opening to the furnace tail of the process furnace 100, the process temperatures set for the multiple temperature zones 201a can gradually increase, or gradually decrease, or first rise, then fall, and then rise again, without specific limitations.

[0044] In some optional embodiments, the boat structure 10 further includes multiple temperature detection elements 10a and a control element 7. The multiple temperature detection elements 10a are configured to correspond one-to-one with multiple support spaces 1b. Each temperature detection element 10a is configured to detect the temperature of its corresponding support space 1b and generate a detection signal. The control element 7 is electrically connected to the multiple temperature detection elements 10a and multiple sets of heating components 2. The control element 7 is configured to receive the detection signals from the temperature detection elements 10a and control the heating temperature of the corresponding heating components 2 according to the detection signals. This allows the heating temperature of each heating component 2 to be individually controllable. For example, if the temperature detection element 10a detects that the temperature of the support space 1b near the bow and stern is lower than the temperature of the support space 1b in the middle position, the control element 7 can control the increase of the heating temperature of the heating components 2 near the bow and stern sides to maintain the heating temperature of each support space 1b in the boat structure 10 at the same process temperature, thereby ensuring the consistency of the sheet 40 temperature at different locations.

[0045] Optionally, when the boat structure 10 is placed in the furnace cavity 201 of the process furnace 100, each carrying space 1b can correspond to a temperature zone 201a, that is, each heating component 2 corresponds to a temperature zone 201a. Alternatively, two or more adjacent carrying spaces 1b can correspond to a temperature zone 201a, that is, two or more adjacent heating components 2 correspond to a temperature zone 201a. This can be adapted according to actual needs without specific limitations.

[0046] In some alternative embodiments, such as Figure 1 and Figure 2 The boat structure 10 also includes an electrode assembly 4 and a second power supply assembly 5. The electrode assembly 4 is electrically connected to a plurality of boat leaves 1 and is configured such that any two adjacent boat leaves 1 have opposite polarities. The second power supply assembly 5 is electrically connected to the electrode assembly 4 and is configured to provide radio frequency power to the electrode assembly 4.

[0047] Optionally, such as Figure 2 The electrode assembly 4 may specifically include a first electrode group 41 and a second electrode group 42. The first electrode group 41 includes multiple first conductive connecting blocks and a first electrode, and the second electrode group 42 includes multiple second conductive connecting blocks and a second electrode. One of the first electrode and the second electrode is a positive electrode, and the other is a negative electrode. Along the vertical direction Z, multiple first conductive connecting blocks are connected and conductively connected to each leaf 1 located at an even number of positions, and multiple second conductive connecting blocks are connected and conductively connected to each leaf 1 located at an odd number of positions. The first electrode and the second electrode are electrically connected to the positive and negative terminals of the radio frequency power supply, respectively, so that each pair of adjacent leaves 1 have opposite polarities.

[0048] Figure 5 As shown Figure 4 A magnified view of part B in the boat structure shown. Figure 6 The image shown is a partial exploded view of the boat leaf in a boat structure provided in an embodiment of this disclosure. Figure 7 As shown Figure 6 A magnified view of part A in the boat structure shown. Figure 8 The diagram shown is a schematic diagram of an electrical connection component in a boat structure provided in an embodiment of this disclosure. Figure 9 The diagram shown is a schematic diagram of the connection between the electrical connection component and the heating component in a boat structure provided in an embodiment of this disclosure. Figure 10 The diagram shown is a schematic diagram of the electrical connection component and the heating element connected in parallel in a boat structure provided in an embodiment of this disclosure.

[0049] In some embodiments, such as Figures 5 to 7 The boat 1 includes a first sub-boat 12 and a second sub-boat 13. The first sub-boat 12 extends along a first direction X, and the second sub-boat 13 extends along the first direction X. The first sub-boat 12 is located above the second sub-boat 13 in the vertical direction Z. The first sub-boat 12 and the second sub-boat 13 are connected. The bearing area 1a is located on the surface of the first sub-boat 12 away from the second sub-boat 13. A plurality of accommodating chambers are arranged at intervals along the first direction X between the first sub-boat 12 and the second sub-boat 13. Each accommodating chamber corresponds to a bearing area 1a. The accommodating chambers are configured to insulate and hold the heating element 21. By placing the heating element 21 inside the boat 1, heat can be quickly conducted to the corresponding sheet 40, and heat diffusion is reduced, which is beneficial to further improve the temperature rise rate of the sheet 40.

[0050] Optionally, the first sub-boat leaf 12 and the second sub-boat leaf 13 are detachably connected. The first sub-boat leaf 12 has a first groove, and the second sub-boat leaf 13 has a second groove 131 corresponding to the first groove. When the first sub-boat leaf 11 and the second sub-boat leaf 12 are connected, the first groove 11a and the second groove 12a can enclose and form a receiving chamber for accommodating the heating element 21. It is understood that when the heating element 21 is placed in the receiving chamber, the surface of the heating element 21 at least partially abuts against the bottom wall of the first groove and the bottom wall of the second groove 131, so that the heating element 21 is sandwiched between the first sub-boat leaf 12 and the second sub-boat leaf 13. On the one hand, the heating element 21 can be fixed without the need for additional fixing connectors, improving assembly efficiency and reducing costs; on the other hand, the heat generated by the heating element 21 can be quickly conducted to the first sub-boat leaf 12 and the second sub-boat leaf 13, and then conducted to the corresponding sheet 40 through the sub-boat leaf, thereby further increasing the temperature rise rate of the sheet 40.

[0051] Continue as Figures 5 to 7The heating element 21 includes an insulating housing 211 and a heating element 212. The insulating housing 211 has a receiving space 2N, in which the heating element 212 is housed. The electrical connection assembly 3 is configured to connect the heating elements 212 in the same heating element 2 in series and / or in parallel through the receiving space 2N. The insulating housing 211 insulates the heating element 212 from the boat 1 to avoid interference between the heating circuit and the radio frequency circuit.

[0052] Optionally, the insulating housing 211 may include a first insulating housing 211a and a second insulating housing 211b that are detachably connected. The first insulating housing 211a and the second insulating housing 211b enclose a receiving space 2N. The first insulating housing 211a and the second insulating housing 211b are provided with through holes communicating with the receiving space 2N. The electrical connection assembly 3 can pass through the through holes and be electrically connected to the heating element 212 in the receiving space. The accommodating space 2N can be one of the following: the middle area of ​​each of the opposite sides of the first insulating shell 211a and the second insulating shell 211b has an accommodating groove, the edge areas of the opposite sides of the first insulating shell 211a and the second insulating shell 211b are connected, and the two accommodating grooves together form the accommodating space 2N; or, the middle area of ​​one of the opposite sides of the first insulating shell 211a and the second insulating shell 211b has an accommodating groove, and the other opposite side and the accommodating groove together form the accommodating space 2N; or, the heating element 212 is sandwiched between the opposite sides of the first insulating shell 211a and the second insulating shell 211b, and the area between the opposite sides of the first insulating shell 211a and the second insulating shell 211b is the accommodating space 2N.

[0053] Optionally, the heating element 212 may be made of one or more of the following materials: carbon fiber, silicon carbide fiber, graphite, and high-temperature resistant metal.

[0054] In some alternative embodiments, such as Figure 8 , Figure 9 and Figure 10 The heating element 212 can be configured as a serpentine arrangement of heating bars, each heating bar having a first connecting end 212a and a second connecting end 212b. The electrical connection assembly 3 includes multiple conductive connectors 31 and an insulating sleeve 32. Among the multiple heating elements 212 of the same heating assembly 2 arranged in the vertical Z direction, each first connecting end 212a is sequentially connected through multiple conductive connectors 31, and each second connecting end 212b is sequentially connected through multiple conductive connectors 31, so as to connect the heating elements 212 in the same heating assembly 2 in parallel. The insulating sleeve 32 is sleeved on the outer periphery of the conductive connector 31, and the insulating sleeve 32 is at least disposed between the boat 1 and the conductive connector 31 to insulate the conductive connector 31 from the boat 1 and avoid interference between the heating circuit and the radio frequency circuit.

[0055] Optionally, when the heating elements 212 in the same heating assembly 2 are connected in series, the first connection end 212a of the heating bar located in the odd-numbered position is connected to the next adjacent first connection end 212a through the conductive connector 31, and the second connection end 212b of the heating bar located in the even-numbered position is connected to the next adjacent second connection end 212b through the conductive connector 31, so that the heating elements 212 in the same heating assembly 2 are connected in series. The insulating sleeve 32 is sleeved on the outer periphery of the conductive connector 31, and the insulating sleeve 32 is at least disposed between the boat 1 and the conductive connector 31 so as to insulate the conductive connector 31 from the boat 1.

[0056] Optionally, when the heating elements 212 in the same heating assembly 2 are electrically connected in a series and parallel combination, in the same group of heating assemblies 2, a portion of the heating elements 21 are first connected in parallel through conductive connectors 31 to form parallel groups, and multiple parallel groups are then connected in series. In adjacent parallel groups, the first connection end 212a of the last heating bar in the preceding parallel group and the first connection end 212a of the first heating bar in the following parallel group are insulated from each other, while the second connection end 212b of the last heating bar in the preceding parallel group and the second connection end 212b of the first heating bar in the following parallel group are electrically connected. If all the heating elements 21 in the heating assembly 2 are connected in series, the resistance will be large and the current will be small, resulting in less heat generation when the voltage remains constant. If all the heating elements 21 in the heating assembly 2 are connected in parallel, the resistance will be too small. Although the heat generation will be large when the voltage remains constant, the current carried by the second lead component 912, which is used to connect to the first power supply assembly 6, will also increase, making the second lead component 912 prone to burnout. Therefore, in this embodiment, by first connecting the heating elements 21 in the heating assembly 2 in parallel to form multiple parallel groups and then connecting the multiple parallel groups in series, the heat generation and current can be kept moderate.

[0057] In some embodiments, such as Figure 1 and Figure 5The boat structure 10 also includes a support member 9, which is an insulating member. Multiple boat leaves 1 are supported on the support member 9. The support member 9 has multiple sets of second electrical leads 912 arranged at intervals along a first direction X. Multiple sets of electrical connection components 3 are electrically connected to the multiple sets of second electrical leads 912 in a one-to-one correspondence. The boat structure 10 also includes a first power supply assembly 6. The support member 30 has multiple sets of first electrical leads 301 arranged at intervals along the first direction X. The first power supply assembly 6 is electrically connected to the multiple sets of first electrical leads 301. When the support member 9 is placed on the support member 30, the multiple sets of first electrical leads 301 and the multiple sets of second electrical leads 912 are in contact with each other in a one-to-one correspondence. The first power supply assembly 6 is configured to provide heating power to the multiple sets of electrical connection components 3 respectively. The first power supply assembly 6 and the heating assembly 2 are electrically connected through the first electrical leads 301 and the second electrical leads 912 to form a heating circuit for heating the corresponding sheet group 40a. The heating power supply of the first power supply assembly 6 can be a DC power supply or an AC power supply. In some alternative embodiments, the surfaces of the first current-leading component 301 and the second current-leading component 912, other than the surfaces that come into contact with each other, may be covered with an insulating protective layer.

[0058] Optionally, the support member 30 can be configured as two support rods extending along the first direction X, with the two support rods spaced apart along the second direction Y. The plurality of first power-leading components 301 can be configured as a plurality of first power-leading blocks insulatedly connected to the support rods, with the first power-leading blocks electrically connected to the first power supply component 6 via wires.

[0059] Specifically, the support member 9 can be configured as two sets of support plates 91 spaced apart along the second direction Y. The support plates 91 extend along the first direction X, and boat feet 92 can be connected to at least both ends of the support plates 91 in the first direction X. Each support plate 91 is provided with a plurality of mounting slots 911 spaced apart along the first direction X. The second power lead assembly 912 includes a second power lead block, which is detachably connected to the mounting slot 911. The electrical connection assembly 3 also includes a connecting strip 33, which connects the second power lead block and the conductive connector 31. When the boat structure 10 is placed on the support member 30, the first power lead block and the second power lead block correspond one-to-one and contact each other, so that the first power supply assembly 6 is electrically connected to the parallel and / or series-connected heating element 21 to form a heating circuit.

[0060] This disclosure also provides a process furnace, such as... Figure 1 and Figure 2 The process furnace 100 includes a furnace body 20, a support member 30, and a boat structure 10. The furnace body 20 has a furnace cavity 201, the support member 30 is disposed in the furnace cavity 201, and the boat structure 10 can be placed on the support member 30.

[0061] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0062] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0063] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0064] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0065] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0066] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0067] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support a sheet extending along a first direction, a plurality of the sheets are spaced apart along a vertical direction to form a sheet group, the first direction being perpendicular to the vertical direction, the boat structure comprising: Multiple boats are arranged at intervals along a vertical direction, with adjacent boats being insulated from each other. Any two adjacent boats are configured to have opposite polarities. Each boat has multiple bearing areas arranged at intervals along the first direction. The bearing areas are configured to bear the sheet material. The bearing areas of the multiple boats correspond one-to-one, and the corresponding multiple bearing areas enclose a bearing space. Each bearing space corresponds to a sheet material group. Multiple sets of heating components are arranged along the first direction. The heating components are insulated from the multiple boats, and each heating component corresponds to a carrying space. Each heating component includes multiple electrically connected heating elements. The multiple heating elements are insulated from the multiple boats at positions corresponding to the carrying area. The heating elements are insulated from the sheet. The heating elements are configured to heat the sheet carried in the carrying area. Multiple sets of electrical connection components are insulated from and connected to multiple of the said leaf blades, and the electrical connection components are electrically connected to each of the heating elements in the same heating assembly.

2. The boat structure according to claim 1, characterized in that, The heating element includes: An insulating housing with a receiving space; A heating element is housed in the receiving space, and the electrical connection assembly is configured to connect each of the heating elements in the same heating assembly in series and / or in parallel through the receiving space.

3. The boat structure according to claim 2, characterized in that, The heating element is configured as heating strips arranged in a serpentine pattern, the heating strips having a first connecting end and a second connecting end, and the electrical connection assembly includes: In a plurality of heating elements of the same heating assembly arranged along the vertical direction, each first connection end is sequentially connected by a plurality of conductive connectors, and each second connection end is sequentially connected by a plurality of conductive connectors. Alternatively, the first connection end of the heating strip located in an odd-numbered position is connected to the next adjacent first connection end by a conductive connector, and the second connection end of the heating strip located in an even-numbered position is connected to the next adjacent second connection end by a conductive connector. An insulating sleeve is fitted onto the outer periphery of the conductive connector, and the insulating sleeve is disposed at least between the boat leaf and the conductive connector.

4. The boat structure according to claim 2, characterized in that, The heating element is configured as heating strips arranged in a serpentine pattern, the heating strips having a first connecting end and a second connecting end, and the electrical connection assembly includes: Multiple conductive connectors are used in the same group of heating components. Some of the heating components are connected in parallel through the conductive connectors to form a parallel group, and multiple parallel groups are connected in series. In adjacent parallel groups, the first connection end of the last heating bar in the preceding parallel group and the first connection end of the first heating bar in the following parallel group are insulated from each other, and the second connection end of the last heating bar in the preceding parallel group and the second connection end of the first heating bar in the following parallel group are electrically connected.

5. The boat structure according to claim 1, wherein the process furnace includes a support member disposed in the furnace cavity, the support member being provided with a plurality of sets of first power-leading components arranged at intervals along the first direction, characterized in that, Also includes: The carrier is configured as an insulating component, and a plurality of the boats are carried on the carrier. The carrier has a plurality of sets of second electrical lead-in components arranged at intervals along the first direction. The plurality of sets of electrical connection components are electrically connected to the plurality of sets of second electrical lead-in components in a one-to-one correspondence. A first power supply assembly is electrically connected to multiple sets of first power lead assemblies. When the carrier is placed on the support, the multiple sets of first power lead assemblies are in one-to-one contact with multiple sets of second power lead assemblies. The first power supply assembly is configured to provide heating power to the multiple sets of electrical connection assemblies respectively.

6. The boat structure according to claim 1, characterized in that, The boat page includes: The first sub-boat page extends along the first direction; The second sub-boat extends along the first direction, and the first sub-boat is located above the second sub-boat in the vertical direction. The first sub-boat is connected to the second sub-boat. The bearing area is located on the surface of the first sub-boat away from the second sub-boat. A plurality of receiving chambers are arranged at intervals along the first direction between the first sub-boat and the second sub-boat. Each receiving chamber corresponds to a bearing area. The receiving chamber is configured to insulate the heating element.

7. The boat structure according to claim 6, characterized in that, The first sub-boat leaf has a first groove, and the second sub-boat leaf has a second groove corresponding to the first groove. The first groove and the second groove can be closed to form the receiving chamber for receiving the heating element.

8. The boat structure according to claim 1, characterized in that, The process furnace includes multiple temperature zones arranged along the first direction, and multiple sets of heating components correspond to the multiple temperature zones of the process furnace, and the heating temperature of the multiple sets of heating components can be adjusted individually.

9. The boat structure according to claim 8, characterized in that, The boat structure also includes: Multiple temperature sensors are configured to detect the temperature of the corresponding carrying space and generate a detection signal. The control unit is electrically connected to multiple temperature sensors and multiple sets of heating components, and is configured to receive detection signals from the temperature sensors and control the heating temperature of the corresponding heating components according to the detection signals.

10. A process furnace, characterized in that, include: The furnace body has a furnace cavity; Support members are provided in the furnace cavity; The boat structure according to any one of claims 1-9, wherein the boat structure can be placed on the support member.

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