Boat structure and process furnace

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a process furnace, which solves the problems of poor heating uniformity and low temperature rise rate of the sheet in the process furnace in the related art. The boat structure comprises a plurality of boat pages, each boat page has a plurality of bearing areas arranged at intervals along a second direction, and a plurality of corresponding bearing areas enclose a bearing space, each bearing space corresponds to a sheet group, a heating assembly is insulatively arranged on the plurality of boat pages, and each heating assembly corresponds to a bearing space, the heating assembly comprises a plurality of electrically connected heating pieces, the plurality of heating pieces are insulatively arranged at positions corresponding to the bearing areas of the plurality of boat pages respectively, and the heating pieces are configured to heat the sheet carried by the bearing area. The boat structure and the process furnace provided by the present disclosure can improve the heating uniformity and the temperature rise rate of the sheet at different positions in the boat structure.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and process furnace. Background Technology

[0002] In the semiconductor and photovoltaic technology fields, coating multiple sheets mounted in a boat structure using coating equipment is a crucial step in the production of semiconductors or photovoltaic cells. Existing coating equipment typically uses heating wires mounted on the sidewalls of the furnace chamber to provide the necessary temperature and heat for the process. However, the considerable distance between the heating wires and the sheets in the boat structure results in low heating efficiency, especially when the process involves alternating temperatures. The heating response becomes sluggish, and the actual heating temperature of the sheets at different locations within the boat structure deviates significantly from the design temperature. This leads to poor heating uniformity and low heating efficiency, ultimately affecting the coating effect on the sheet surfaces. Utility Model Content

[0003] In view of this, the present disclosure provides a boat structure and a process furnace to solve the problems of poor heating uniformity and low temperature rise rate of the sheet material in the process furnace of the reaction furnace in the related art.

[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to support a sheet extending along a first direction. Multiple sheets are spaced apart along a second direction to form a sheet group. The first and second directions are perpendicular. The boat structure includes: multiple boat flaps spaced apart along the second direction, with adjacent boat flaps insulated from each other. Any two adjacent boat flaps are configured to have opposite polarities. Each boat flap has multiple support areas spaced apart along the first direction, each support area configured to support the sheet. The support areas of the multiple boat flaps correspond one-to-one, and the corresponding multiple support areas enclose a support space, each support space corresponding to a sheet group; and multiple sets of heating components arranged along the first direction, each heating component insulated from the multiple boat flaps, and each heating component corresponding to a support space. Each heating component includes multiple electrically connected heating elements, each heating element insulated from the positions of the multiple boat flaps corresponding to their respective support areas, and the heating elements are insulated from the sheet. The heating elements are configured to heat the sheet supported by the support area.

[0005] In some embodiments, the boat leaf includes: a first sub-boat leaf extending along a first direction; a second sub-boat leaf extending along the first direction, the second sub-boat leaf being located on one side of the first sub-boat leaf in a second direction, the first sub-boat leaf being connected to the second sub-boat leaf, a bearing area being located on the surface of the first sub-boat leaf or the second sub-boat leaf on one side in the second direction, a plurality of receiving chambers arranged at intervals along the first direction being enclosed between the first sub-boat leaf and the second sub-boat leaf, each receiving chamber corresponding to a bearing area, and the receiving chambers being configured to insulate and place a heating element.

[0006] In some embodiments, the first sub-boat leaf has a first surface on the side opposite to the second sub-boat leaf, and the second sub-boat leaf has a second surface on the side opposite to the first sub-boat leaf; along a second direction, the distance from the heating element to the first surface is equal to the distance from the heating element to the second surface; and / or, the first direction is a first horizontal direction, and the second direction is a second horizontal direction.

[0007] In some embodiments, the first sub-boat page is provided with a plurality of first openings, the plurality of first openings corresponding to and communicating with a plurality of accommodating chambers, and the heating element exposed by the first openings; and / or, the second sub-boat page is provided with a plurality of second openings, the plurality of second openings corresponding to and communicating with a plurality of accommodating chambers, and the heating element exposed by the first openings.

[0008] In some embodiments, the first sub-boat leaf is provided with a first groove, and the second sub-boat leaf is provided with a second groove corresponding to the first groove. The first groove and the second groove can be closed to form a receiving chamber for receiving a heating element.

[0009] In some embodiments, the heating element includes: an insulating housing having a receiving space; a heating element housed in the receiving space; and a conductive connection group connected to the heating element, a portion of which extends through the insulating housing to protrude from the receiving space, and multiple conductive connection groups located in the same heating assembly being connected together.

[0010] In some embodiments, an insulating protective layer is also included, covering the outer surface of the conductive connection assembly; and / or, the material of the heating element includes graphite.

[0011] In some embodiments, the device further includes: a first electrode assembly electrically connected to a plurality of leaf blades, the first electrode assembly being configured such that any two adjacent leaf blades have opposite polarities; a first power supply assembly electrically connected to the first electrode assembly, the first power supply assembly being configured to provide radio frequency power to the first electrode assembly; and / or, a plurality of second electrode assemblies electrically connected to a plurality of heating assemblies in a one-to-one correspondence, each second electrode assembly being configured to be heated by a corresponding heating assembly; and a second power supply assembly electrically connected to the plurality of second electrode assemblies, the second power supply assembly being configured to provide heating power to the plurality of second electrode assemblies respectively.

[0012] In some embodiments, the boat structure is applied to a process furnace, which includes multiple temperature zones arranged along a first direction, multiple sets of heating components corresponding to the multiple temperature zones of the process furnace, and the heating temperature of the multiple sets of heating components is adjusted individually.

[0013] In some embodiments, the system further includes: a plurality of temperature sensors, each corresponding to a plurality of carrying spaces, the temperature sensors being configured to detect the temperature of the corresponding carrying space and generate a detection signal; and a control unit, electrically connected to the plurality of temperature sensors and the plurality of heating components, the control unit being configured to receive the detection signals from the temperature sensors and control the heating temperature of the corresponding heating components according to the detection signals.

[0014] In some embodiments, the bearing area includes two sub-regions spaced apart along a first direction, each sub-region being configured to bear half a sheet of material, and multiple half sheets of material spaced apart along a second direction to form a half sheet of material group; the heating element includes a first sub-heating element and a second sub-heating element, the first sub-heating element and the second sub-heating element respectively corresponding to the two sub-regions, wherein the first sub-heating element and the second sub-heating element are connected in series or in parallel.

[0015] Secondly, embodiments of this disclosure provide a process furnace, including: a furnace body having a furnace cavity; a support member disposed in the furnace cavity; and the boat structure described above, wherein the boat structure can be placed on the support member.

[0016] The boat structure and process furnace provided in this disclosure, by setting heating components corresponding to sheet groups on multiple boat pages, and making multiple heating elements electrically connected in the heating components correspond one-to-one with multiple sheets in the sheet group, enables multiple heating elements to be used to heat each sheet in the corresponding sheet group respectively. The heat from the heating elements can be quickly conducted to the corresponding sheet, which is beneficial to improve the temperature rise rate and heating uniformity of each sheet in the sheet group, thereby improving the coating effect on the surface of each sheet. Attached Figure Description

[0017] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure.

[0019] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0020] Figure 3 for Figure 2 A magnified view of part A in the boat structure shown.

[0021] Figure 4The diagram shown is a simplified schematic of a boat structure placed in a process furnace according to an embodiment of this disclosure.

[0022] Figure 5 The image shown is a front view of a boat structure provided in an embodiment of this disclosure.

[0023] Figure 6 The image shown is a side view of a boat structure provided in an embodiment of this disclosure.

[0024] Figure 7 The image shown is a top view of a boat structure provided in an embodiment of this disclosure.

[0025] Figure 8 for Figure 7 A magnified view of part B in the boat structure shown.

[0026] Figure 9 The image shown is a front view of a boat page in a boat structure provided in an embodiment of this disclosure.

[0027] Figure 10 for Figure 9 The MM section view of the boat structure shown.

[0028] Figure 11 The image shown is an exploded view of a boat page in a boat structure provided in an embodiment of this disclosure.

[0029] Figure 12 The diagram shown is a schematic diagram of a heating assembly provided in an embodiment of this disclosure.

[0030] Figure 13 The image shown is an exploded view of a heating assembly provided in an embodiment of this disclosure.

[0031] Figure label: 100. Process furnace; 10. Boat structure; 10a. Temperature detection element; 1. Boat blade; 1a. Bearing space; 1b. Bearing area; 1b1. Sub-area; 1c. Locking point; 1d. First through hole; 1e. Opening; 1e1. First opening; 1e2. Second opening; 11. First sub-boat blade; 11a. First groove; 11b. Second through hole; 11c. Third through hole; 1N. Receiving space; 1A. Receiving chamber; 111. First surface; 12. Second sub-boat blade; 121. Second surface; 12a. Second groove; 2. Heating assembly; 2A. Heating element; 2a. First sub-heating element; 2b. Second sub-heating element; 21. Insulating shell; 21a. First insulating shell; 21b. Second insulating shell; 211a. Fourth through hole; 22. Heating element; 23. Conductive connection group; 231. Conductive connector; 24. Insulating protective layer; 3. First electrode assembly; 31. First electrode group; 32. Second electrode group; 4. Insulating connector; 5. Second electrode assembly; 6. First power supply assembly; 7. Second power supply assembly; 8. Control unit; 20. Furnace body; 201. Furnace cavity; 201a. Temperature zone; 30. Support member; 40. Sheet; 40a. Sheet group; 40b. Half sheet group; X. First direction; Y. Second direction; Z. Vertical direction. Detailed Implementation

[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0033] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 3 for Figure 2 A magnified view of part A in the boat structure shown. Figure 4 The diagram shown is a simplified schematic of a boat structure placed in a process furnace according to an embodiment of this disclosure. Figure 5 The image shown is a front view of a boat structure provided in an embodiment of this disclosure. Figure 6 The image shown is a side view of a boat structure provided in an embodiment of this disclosure. Figure 7 The image shown is a top view of a boat structure provided in an embodiment of this disclosure. Figure 8 for Figure 7The diagram shows a partial enlarged view of part B in the boat structure. Arrow X points to a first direction (which can be a first horizontal direction), arrow Y points to a second direction (which can be a second horizontal direction), and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other. The first direction X is the length direction of the boat structure 10, which is also the extension direction of the process furnace 100. The second direction Y is the width direction of the boat structure 10, and the vertical direction Z is the height direction of the boat structure 10, which will not be emphasized separately thereafter.

[0034] This disclosure provides a boat structure, such as Figures 1 to 8 The boat structure 10 is used in a coating equipment, the boat structure 10 is configured to carry the sheet 40, and the coating equipment is configured to process the sheet 40 carried by the boat structure 10.

[0035] It is understandable that, such as Figure 1 The coating equipment can be a plasma-enhanced chemical vapor deposition (PECVD) device. The PECVD device includes a PECVD furnace, which comprises a furnace body 20 having at least one furnace opening. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening. A support member 30 is provided inside the furnace cavity 201. A boat structure 10 carrying a sheet 40 can enter and exit the furnace cavity 201 from the furnace opening and is placed on the support member 30 while inside the furnace cavity 201. In the furnace cavity 201, the surface of the sheet 40 to be processed carried in the boat structure 10 can be coated with one or more thin films. The specific structure of the coating equipment is not described in detail.

[0036] Optionally, the sheet 40 can be a solar cell, also known as a silicon wafer. The solar cell has a surface to be processed on one side in the thickness direction. The sheet 40, supported in the boat structure 10, can be deposited onto the surface to be coated by the escaping plasma in the PECVD furnace to complete the coating. The shape of the sheet 40 can be, for example, rectangular, square, or circular, etc., without specific limitation.

[0037] Among them, such as Figures 2 to 8The boat structure 10 includes multiple boat blades 1, each boat blade 1 extending along a first direction X. The multiple boat blades 1 are spaced apart along a second direction Y, and adjacent boat blades 1 are insulated from each other. Any two adjacent boat blades 1 are configured to have opposite polarities. Each boat blade 1 has multiple load-bearing regions 1b spaced apart along the first direction X. The load-bearing regions 1b are configured to carry sheets 40, and the load-bearing regions 1b of the multiple boat blades 1 correspond one-to-one. When each load-bearing region 1b of the multiple boat blades 1 carries a sheet 40, the multiple sheets 40 carried by the multiple load-bearing regions 1b corresponding along the second direction Y can be referred to as a sheet group 40a (i.e., the multiple sheets 40 of the sheet group 40a are spaced apart along the second direction Y). The corresponding multiple load-bearing regions 1b enclose a load-bearing space 1a, and each load-bearing space 1a corresponds to a sheet group 40a.

[0038] It is understandable that, such as Figure 3 , Figure 6 and Figure 8 The surface of the boat leaf 1 on one side in the second direction Y is configured to support the sheet 40, and multiple sheets 40 are all disposed on the same side of the boat leaf 1 in the second direction Y. The sheet 40 is located in the gap between two adjacent boat leaves 1. The area occupied by the sheet 40 on the boat leaf 1 is called the support area 1b, and the space occupied by the support area 1b along the second direction Y is called the support space 1a. The position, size, and shape of each support area 1b on the boat leaf 1 can be adaptively adjusted according to the position, size, and shape of the supported sheet 40; each support space 1a can be adaptively adjusted according to the number of boat leaves 1 and the arrangement of the support areas 1b on the boat leaf 1, without specific limitations.

[0039] Optionally, multiple boat flaps 1 can be insulatedly connected by insulating connectors 4. Multiple insulating connectors 4 can be provided, and they are located outside the bearing space 1a. Sheets 40 can be inserted through the gaps between adjacent boat flaps 1 to be placed in the bearing area 1b. For example, the insulating connectors 4 can be insulating connecting rods with insulating properties, such as ceramic rods. Each of the multiple boat flaps 1 has a corresponding third through hole 11c extending along the second direction Y. The insulating connecting rods extend along the second direction Y and pass through the corresponding third through hole 11c to insulately connect the multiple boat flaps 1. The multiple insulating connecting rods are arranged around the bearing space 1a.

[0040] It is understandable that when the sheet 40 is supported in the support area 1b of the leaf 1, the sheet 40 and the leaf 1 are electrically connected, so that the sheet 40 and the corresponding leaf 1 have the same polarity.

[0041] For example, multiple leaflets 1 include first leaflets and second leaflets arranged alternately along the second direction Y. The first leaflets are configured as positive electrodes, and the second leaflets are configured as negative electrodes. In adjacent first and second leaflets, the bearing region 1b of the first leaflet is disposed on the surface of the first leaflet facing the second leaflet, and the bearing region 1b of the second leaflet is disposed on the surface of the second leaflet facing away from the first leaflet. Taking the sheet 40 being carried in the bearing region 1b of the first leaflet as an example, the surface of the sheet 40 to be processed is opposite to the second leaflet in the second direction Y. The sheet 40 and the first leaflet have the same polarity, i.e., the sheet 40 is the positive electrode. During the coating process, the positive electrode sheet 40 and the negative electrode second leaflet form an electric field at the gap. The gas in the gap is ionized into dissipated plasma to form a film on the surface of the sheet 40 to be processed. This will not be described in detail.

[0042] Specifically, the boat structure 10 also includes multiple sets of heating components 2, which are arranged along the first direction X. The heating components 2 are insulated from the multiple boat leaves 1, and each heating component 2 corresponds to a bearing space 1a. The heating component 2 includes multiple electrically connected heating elements 2A, which are insulated from the multiple boat leaves 1 at the positions corresponding to the bearing areas 1b. The heating elements 2A are insulated from the sheet 40, and the heating elements 2A are configured to heat the sheet 40 carried in the bearing area 1b.

[0043] The boat structure provided in this embodiment of the present disclosure, by setting heating components 2 corresponding to sheet groups 40a on multiple boat pages 1, and making multiple heating elements 2A electrically connected in the heating components 2 correspond one-to-one with multiple sheets 40 in the sheet group 40a, allows the multiple heating elements 2A to be used to heat each sheet 40 in the corresponding sheet group 40a respectively. The heat from the heating elements 2A can be quickly conducted to the corresponding sheet 40, which is beneficial to improving the temperature rise rate and heating uniformity of each sheet 40 in the sheet group 40a, thereby improving the coating effect on the surface of each sheet 40.

[0044] With the boat structure 10 placed inside the furnace cavity 201, the two ends of the boat structure 10 along the extension direction of the furnace cavity 201 are referred to as the bow and stern, respectively. The furnace cavity 201 has poor heat preservation performance at both ends in the extension direction, meaning heat is easily lost. Since the bow and stern of the boat structure 10 are close to the two ends of the furnace cavity 201, the actual temperature around the sheet group 40a near the bow and stern will be lower than the process temperature during the coating process. In order to keep the actual temperature around each sheet group 40a at the process temperature, the actual heating temperature of each heating component 2 is individually controlled, so that the heating temperature of the heating component 2 near the bow and stern is higher than that of the heating component 2 at other locations. Ultimately, the temperature at each location in the boat structure 10 is maintained at the process temperature, which is beneficial to improving the heating uniformity and stability of the sheet 40, thereby improving the coating effect.

[0045] For example, such as Figure 4 The furnace cavity 201 of the process furnace 100 can be divided into multiple temperature zones 201a arranged along a first direction X. Multiple sets of heating components 2 correspond to the multiple temperature zones 201a of the process furnace 100, and the heating temperature of each set of heating components 2 can be adjusted independently. Optionally, the heating temperatures of each individually adjusted heating component 2 can be the same or different, and can be adaptively adjusted according to actual conditions without specific limitations. In the multiple temperature zones 201a of the process furnace 100, the process temperatures set for each temperature zone 201a can be the same or different. When the process temperatures of the multiple temperature zones 201a are set differently, from the furnace opening to the furnace tail of the process furnace 100, the process temperatures set for the multiple temperature zones 201a can gradually increase, or gradually decrease, or first rise, then fall, and then rise again, without specific limitations.

[0046] In some optional embodiments, the boat structure 10 further includes multiple temperature detection elements 10a and a control element 8. The multiple temperature detection elements 10a are configured to correspond one-to-one with multiple carrying spaces 1a. Each temperature detection element 10a is configured to detect the temperature of its corresponding carrying space 1a and generate a detection signal. The control element 8 is electrically connected to the multiple temperature detection elements 10a and multiple sets of heating components 2. The control element 8 is configured to receive the detection signals from the temperature detection elements 10a and control the heating temperature of the corresponding heating components 2 according to the detection signals. This allows the heating temperature of each heating component 2 to be individually controllable. For example, if the temperature detection element 10a detects that the temperature of the carrying space 1a near the bow and stern is lower than the temperature of the carrying space 1a in the middle position, the control element 8 can control the increase of the heating temperature of the heating components 2 near the bow and stern sides to maintain the heating temperature of each carrying space 1a in the boat structure 10 at the same process temperature, thereby ensuring the consistency of the sheet 40 temperature at different locations.

[0047] Optionally, when the boat structure 10 is placed in the furnace cavity 201 of the process furnace 100, each carrying space 1a can correspond to a temperature zone 201a, that is, each heating component 2 corresponds to a temperature zone 201a. Alternatively, two or more adjacent carrying spaces 1a can correspond to a temperature zone 201a, that is, two or more adjacent heating components 2 correspond to a temperature zone 201a. This can be adapted according to actual needs without specific limitations.

[0048] Optionally, such as Figure 4 and Figure 5The boat structure 10 also includes multiple sets of second electrode assemblies 5 and a second power supply assembly 7. The multiple sets of second electrode assemblies 5 are electrically connected to multiple sets of heating assemblies 2 in a one-to-one correspondence. Each second electrode assembly 5 is configured to be heated by a corresponding heating assembly 2. The second power supply assembly 7 is electrically connected to the multiple sets of second electrode assemblies 5 and is configured to provide heating power to each set of second electrode assemblies 5. The arrangement of the second electrode assemblies 5 and the second power supply assembly 7 enables each heating assembly 2 to heat the corresponding sheet group 40a. The heating power supply of the second power supply assembly 7 can be a DC power supply or an AC power supply. In some optional embodiments, the outer surface of the second electrode assembly 5 may be covered with an insulating protective layer 24.

[0049] In some alternative embodiments, such as Figure 3 The boat structure 10 also includes a first electrode assembly 3 and a first power supply assembly 6. The first electrode assembly 3 is electrically connected to a plurality of boat leaves 1 and is configured such that any two adjacent boat leaves 1 have opposite polarities. The first power supply assembly 6 is electrically connected to the first electrode assembly 3 and is configured to provide radio frequency power to the first electrode assembly 3.

[0050] Optionally, such as Figure 3 The first electrode assembly 3 may specifically include a first electrode group 31 and a second electrode group 32. The first electrode group 31 includes multiple first conductive connection blocks and a first electrode, and the second electrode group 32 includes multiple second conductive connection blocks and a second electrode. One of the first electrode and the second electrode is a positive electrode, and the other is a negative electrode. Along the second direction Y, multiple first conductive connection blocks are connected and conductively connected to each leaf 1 located at an even number of positions, and multiple second conductive connection blocks are connected and conductively connected to each leaf 1 located at an odd number of positions. The first electrode and the second electrode are electrically connected to the positive and negative terminals of the radio frequency power supply, respectively, so that each pair of adjacent leaves 1 have opposite polarities.

[0051] Optionally, the control unit 8 can be electrically connected to the first power supply assembly 6, the second power supply assembly 7, the first electrode assembly 3, and the second electrode assembly 5.

[0052] Figure 9 The image shown is a front view of a boat page in a boat structure provided in an embodiment of this disclosure. Figure 10 for Figure 9 The MM section view of the boat structure shown. Figure 11 The image shown is an exploded view of a boat page in a boat structure provided in an embodiment of this disclosure. Figure 12 The diagram shown is a schematic diagram of a heating assembly provided in an embodiment of this disclosure. Figure 13 The image shown is an exploded view of a heating assembly provided in an embodiment of this disclosure.

[0053] like Figure 1 , Figure 4 , Figure 8 and Figure 9 The sheet 40 can be a whole solar cell or a cut half-cell solar cell. In this embodiment, as shown... Figure 4 and Figure 9 The sheet 40 includes two cut half-sheets. The same sheet group 40a includes two groups of half-sheets 40b spaced apart along a first direction X. Each half-sheet group 40b includes multiple half-sheets spaced apart along a second direction Y. The bearing area 1b includes two sub-areas 1b1 spaced apart along the first direction X. Each sub-area 1b1 is configured to bear a half-sheet. In this case, the bearing space 1a is correspondingly divided into two sub-bearing spaces to correspond to the two groups of half-sheets 40b respectively.

[0054] In some alternative embodiments, such as Figure 8 and Figure 9 The boat structure 10 also includes multiple locking points 1c, which are disposed on the boat leaf 1, specifically around each sub-region 1b1. When a half-sheet is placed in the corresponding sub-region 1b1, the half-sheet can be locked into the gap between the locking point 1c and the boat leaf 1. For example, the locking point 1c can be a protruding structure of the boat leaf 1, i.e., a locking part. The half-sheet can be restricted within the gap formed between the locking part and the boat leaf 1, and the half-sheet can contact the corresponding boat leaf 1 to ensure that the half-sheet has the same polarity, while preventing the half-sheet from falling off. The locking part can be a conductive part or an insulating part. The locking part can be integrally formed with the boat leaf 1, or it can be detachably connected to the boat leaf 1 by means of threaded connection, locking, etc., without specific limitations.

[0055] In some embodiments, such as Figure 10 and Figure 11 The boat 1 includes a first sub-boat 11 and a second sub-boat 12. The first sub-boat 11 extends along a first direction X, and the second sub-boat 12 extends along the first direction X. The second sub-boat 12 is located on one side of the first sub-boat 11 in a second direction Y. The first sub-boat 11 and the second sub-boat 12 are connected. A bearing area 1b is located on the surface of the first sub-boat 11 or the second sub-boat 12 on the side of the second direction Y. A plurality of accommodating chambers 1A are enclosed between the first sub-boat 11 and the second sub-boat 12 and are arranged at intervals along the first direction X. Each accommodating chamber 1A corresponds to a bearing area 1b. The accommodating chamber 1A is configured to insulate and hold a heating element 2A. By placing the heating element 2A inside the boat 1, heat can be quickly conducted to the corresponding sheet 40, and heat diffusion is reduced, which is beneficial to further improve the temperature rise rate of the sheet 40.

[0056] Optionally, the first sub-boat leaf 11 and the second sub-boat leaf 12 are detachably connected. The first sub-boat leaf 11 has a first groove 11a, and the second sub-boat leaf 12 has a second groove 12a corresponding to the first groove 11a. When the first sub-boat leaf 11 and the second sub-boat leaf 12 are connected, the first groove 11a and the second groove 12a can surround and form a receiving chamber 1A for receiving the heating element 2A. It is understood that when the heating element 2A is placed in the receiving chamber 1A, the surface of the heating element 2A at least partially abuts against the bottom wall of the first groove 11a and the bottom wall of the second groove 12a, so that the heating element 2A is sandwiched between the first sub-boat leaf 11 and the second sub-boat leaf 12. On the one hand, the heating element 2A can be fixed without the need for additional fixing connectors, improving assembly efficiency and reducing costs; on the other hand, the heat generated by the heating element 2A can be quickly conducted to the first sub-boat leaf 11 and the second sub-boat leaf 12, and then conducted to the corresponding sheet 40 through the sub-boat leaf, thereby further increasing the temperature rise rate of the sheet.

[0057] Understandably, when sheet 40 is configured as two cut half-sheets, the receiving chamber 1A can also be further divided into two interconnected or independent sub-chambers. Correspondingly, as... Figure 12 The heating element 2A includes a first sub-heating element 2a and a second sub-heating element 2b. The first sub-heating element 2a and the second sub-heating element 2b are respectively disposed in two sub-chambers and correspond to two sub-regions 1b1. The first sub-heating element 2a and the second sub-heating element 2b are connected in series or in parallel to have the same heating temperature, which will not be described in detail.

[0058] Optionally, the locking point 1c is detachably disposed on the surface of the first sub-boat 11 and / or the second sub-boat 12 opposite to the side where the groove is disposed. Specifically, the first sub-boat 11 and / or the second sub-boat 12 around the sub-region 1b1 are provided with a second through hole 11b, and the locking point 1c is engaged with the second through hole 11b.

[0059] In some alternative embodiments, the first sub-boat sheet 11 has a first surface 111 on the side opposite to the second sub-boat sheet 12, and the second sub-boat sheet 12 has a second surface 121 on the side opposite to the first sub-boat sheet 11. Along the second direction Y, the distance from the heating element 2A to the first surface 111 is equal to the distance from the heating element 2A to the second surface 121. This further improves the heating uniformity of each half-sheet.

[0060] In some alternative embodiments, such as Figure 5 , Figure 10 and Figure 11Along the second direction Y, the boat 1 is provided with an opening 1e that extends along the second direction Y and connects to the receiving chamber 1A. The opening 1e is located within the range of the corresponding sub-region 1b1 so that a portion of the first sub-heating element 2a or the second sub-heating element 2b can be exposed from the corresponding opening 1e, thereby further improving the heating effect on the half sheet and increasing the temperature rise rate of the half sheet. Specifically, the first sub-boat 11 is provided with a plurality of first openings 1e1, each corresponding to and connected to a sub-cavity of a plurality of accommodating chambers 1A. Each first opening 1e1 exposes a corresponding portion of the first sub-heating element 2a or a portion of the second sub-heating element 2b (i.e., a portion of the heating element 2A). And / or, the second sub-boat 12 is provided with a plurality of second openings 1e2, each corresponding to and connected to a sub-cavity of a plurality of accommodating chambers 1A. Each second opening 1e2 exposes a corresponding portion of the first sub-heating element 2a or a portion of the second sub-heating element 2b (i.e., a portion of the heating element 2A). By providing openings 1e (first openings 1e2 and second openings 1e2), the heat from the heating element 2A can be directly radiated to the silicon wafer, thereby improving heating efficiency.

[0061] In some alternative embodiments, such as Figure 6 , Figure 8 , Figure 12 and Figure 13 The heating element 2A includes an insulating housing 21, a heating element 22, and conductive connection groups 23. The insulating housing 21 has a receiving space 1N, in which the heating element 22 is housed. The conductive connection groups 23 are connected to the heating element 22, with a portion of the conductive connection groups 23 extending through the insulating housing 21 and out of the receiving space 1N. Multiple conductive connection groups 23 located in the same heating element 2A are connected together. The insulating housing 21 insulates the heating element 22 from the boat 1 to avoid interference between the heating circuit and the radio frequency circuit.

[0062] Optionally, the insulating housing 21 may include a first insulating housing 21a and a second insulating housing 21b that are detachably connected. The first insulating housing 21a and the second insulating housing 21b enclose a receiving space 1N. The first insulating housing 21a and the second insulating housing 21b are provided with a fourth through hole 211a that communicates with the receiving space 1N. A portion of the conductive connection group can pass through the fourth through hole 211a and be electrically connected to the heating element 22 in the receiving space 1N. The accommodating space 1N can be one of the following: the middle area of ​​each of the opposite sides of the first insulating shell 21a and the second insulating shell 21b has an accommodating groove, the edge areas of the opposite sides of the first insulating shell 21a and the second insulating shell 21b are connected, and the two accommodating grooves together form the accommodating space 1N; or, the middle area of ​​one of the opposite sides of the first insulating shell 21a and the second insulating shell 21b has an accommodating groove, and the other opposite side and the accommodating groove together form the accommodating space 1N; or, the heating element 22 is sandwiched between the opposite sides of the first insulating shell 21a and the second insulating shell 21b, and the area between the opposite sides of the first insulating shell 21a and the second insulating shell 21b is the accommodating space 1N.

[0063] Optionally, the conductive connection group 23 includes a plurality of conductive connectors 231 connected in series. The plurality of conductive connectors 231 extend along the second direction Y. The boat 1 is provided with a first through hole 1d extending along the second direction Y. The conductive connectors 231 can pass through the corresponding first through hole 1d so that the corresponding conductive connectors 231 of each boat 1 are connected in series, and the series conductive connectors 231 are electrically connected to a second electrode assembly 5. This will not be described in detail.

[0064] It is understandable that the specific position of the first through hole 1d on the boat 1 can be adaptively adjusted according to actual needs. For example, when the sheet 40 is set as a whole solar cell, the first through hole 1d should be set outside the bearing area 1b. Or, when the sheet 40 is set as two half sheets, the first through hole 1d should be set outside the sub-area 1b1. Specifically, it can be set at the position between the two sub-areas 1b1 corresponding to the same bearing area 1b. Multiple conductive connectors 231 can connect the corresponding first sub-heating elements 2a in series or in parallel. Multiple conductive connectors 231 can connect the corresponding second sub-heating elements 2b in series or in parallel. Moreover, the multiple conductive connectors 231 used to electrically connect the multiple first sub-heating elements 2a and the multiple conductive connectors 231 used to electrically connect the multiple second sub-heating elements 2b are connected in parallel outside the boat structure 10 and then connected to the same second electrode assembly 5.

[0065] Optionally, the outer surface of each conductive connector 231 in the conductive connection group 23 is covered with an insulating protective layer 24 to prevent impurities from adhering to the surface of the conductive connector 231 and affecting the heating performance.

[0066] Optionally, the material of the heating element 22 includes graphite. It is understood that the material of the heating element 22 can be the same as or different from that of the leaf 1. The shape of the heating element 22 can be configured as a serpentine heating strip located on the plane formed by the vertical direction Z and the first direction X. The plane where the heating strip is located is parallel to the surface of the sheet 40 to be processed. The beginning and end of the heating strip are electrically connected to the positive and negative electrodes of the second electrode assembly 5 through conductive connectors 231, so that the heating strip can generate heat. This will not be described in detail.

[0067] This disclosure also provides a process furnace, such as... Figure 1 and Figure 2 The process furnace 100 includes a furnace body 20, a support member 30, and a boat structure 10. The furnace body 20 has a furnace cavity 201, the support member 30 is disposed in the furnace cavity 201, and the boat structure 10 can be placed on the support member 30.

[0068] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0069] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0070] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0071] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0072] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0073] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0074] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support a sheet extending along a first direction, and multiple sheets spaced apart along a second direction to form a sheet group, wherein the first direction and the second direction are perpendicular, the boat structure includes: Multiple planks are arranged at intervals along the second direction, with adjacent planks insulated from each other. Any two adjacent planks are configured to have opposite polarities. Each plank has multiple load-bearing areas arranged at intervals along the first direction. The load-bearing areas are configured to carry the sheet. The load-bearing areas of the multiple planks correspond one-to-one, and the corresponding multiple load-bearing areas enclose a load-bearing space. Each load-bearing space corresponds to a sheet group. Multiple sets of heating components are arranged along the first direction. The heating components are insulated from the multiple boats, and each heating component corresponds to a carrying space. Each heating component includes multiple electrically connected heating elements. The multiple heating elements are insulated from the multiple boats at positions corresponding to the carrying areas, and the heating elements are insulated from the sheet. The heating elements are configured to heat the sheet carried in the carrying areas.

2. The boat structure according to claim 1, characterized in that, The boat page includes: The first sub-page extends along the first direction; The second sub-boat extends along the first direction and is located on one side of the first sub-boat in the second direction. The first sub-boat is connected to the second sub-boat. The bearing area is located on the surface of the first sub-boat or the second sub-boat on one side in the second direction. A plurality of receiving chambers are arranged at intervals along the first direction between the first sub-boat and the second sub-boat. Each receiving chamber corresponds to a bearing area. The receiving chamber is configured to insulate the heating element.

3. The boat structure according to claim 2, characterized in that, The first sub-boat leaf has a first surface on the side opposite to the second sub-boat leaf, and the second sub-boat leaf has a second surface on the side opposite to the first sub-boat leaf. Along the second direction, the distance from the heating element to the first surface is equal to the distance from the heating element to the second surface; and / or, The first direction is a first horizontal direction, and the second direction is a second horizontal direction.

4. The boat structure according to claim 2, characterized in that, The first sub-boat leaf is provided with a plurality of first openings, and the plurality of first openings correspond one-to-one with and are connected to the plurality of accommodating chambers, and the heating element is exposed in the first openings; And / or, The second sub-boat leaf is provided with a plurality of second openings, which correspond one-to-one with and are connected to a plurality of the accommodating chambers, and the heating element is exposed in the first opening.

5. The boat structure according to claim 2, characterized in that, The first sub-boat leaf has a first groove, and the second sub-boat leaf has a second groove corresponding to the first groove. The first groove and the second groove can be closed to form the receiving chamber for receiving the heating element.

6. The boat structure according to any one of claims 1-5, characterized in that, The heating element includes: An insulating housing with a receiving space; The heating element is housed within the receiving space; A conductive connection group, connected to the heating element, with a portion of the conductive connection group extending through the insulating housing to protrude from the receiving space, and multiple conductive connection groups located in the same heating assembly connected together.

7. The boat structure according to claim 6, characterized in that, It also includes an insulating protective layer covering the outer surface of the conductive connection assembly; and / or, The heating element is made of graphite.

8. The boat structure according to any one of claims 1-5, characterized in that, Also includes: A first electrode assembly is electrically connected to a plurality of the said leaf blades, and the first electrode assembly is configured such that any two adjacent said leaf blades have opposite polarities; A first power supply component is electrically connected to the first electrode component, and the first power supply component is configured to provide radio frequency power to the first electrode component. And / or, Multiple sets of second electrode assemblies are electrically connected to multiple sets of heating assemblies one-to-one, and each second electrode assembly is configured to be heated by the corresponding heating assembly. A second power supply assembly is electrically connected to multiple sets of the second electrode assemblies, and the second power supply assembly is configured to provide heating power to the multiple sets of the second electrode assemblies respectively.

9. The boat structure according to claim 1, wherein the boat structure is applied to a process furnace, the process furnace comprising a plurality of temperature zones arranged along the first direction, characterized in that, The multiple sets of heating components correspond to multiple temperature zones of the process furnace, and the heating temperature of the multiple sets of heating components can be adjusted independently.

10. The boat structure according to claim 9, characterized in that, Also includes: Multiple temperature sensors are configured to detect the temperature of the corresponding carrying space and generate a detection signal. The control unit is electrically connected to multiple temperature sensors and multiple sets of heating components, and is configured to receive detection signals from the temperature sensors and control the heating temperature of the corresponding heating components according to the detection signals.

11. The boat structure according to claim 1, characterized in that, The bearing area includes two sub-regions arranged at intervals along the first direction, each sub-region being configured to bear half a sheet of material, and a plurality of half sheets of material being arranged at intervals along the second direction to form a half sheet of material group; The heating element includes a first sub-heating element and a second sub-heating element, which correspond to the two sub-regions respectively. The first sub-heating element and the second sub-heating element are connected in series or in parallel.

12. A process furnace, characterized in that, include: The furnace body has a furnace cavity; Support members are provided in the furnace cavity; The boat structure according to any one of claims 1-11, wherein the boat structure can be placed on the support member.

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