Magnetic force adjusting device for coating machine and coating machine

Abstract

The utility model discloses a kind of magnetic force adjusting device and coating machine for coating machine, and the magnetic force adjusting device for coating machine includes: magnetic field generating module and control module, the magnetic field generating module is located in the coating cavity of the coating machine, the magnetic field generating module can generate multiple adjustment magnetic field, the intensity of the adjustment magnetic field and / or the direction of the adjustment magnetic field is adjustable, the control module is used to control the magnetic field generating module.According to the magnetic force adjusting device for coating machine of the utility model, by applying magnetic force adjusting device on coating machine, adjustment magnetic field and the original magnetic field in coating machine interact, since the intensity of adjustment magnetic field and / or the direction of adjustment magnetic field is adjustable, the intensity of the original magnetic field in coating machine and / or the direction of the original magnetic field is adjustable, to compensate for film thickness deviation, reach the purpose of correcting coating uniformity, improve the coating precision of coating machine, also shorten the debugging time of coating machine, improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of coating processing technology, and in particular to a magnetic adjustment device for a coating machine and a coating machine. Background Technology

[0002] Related technologies indicate that the defects of mechanical masking sheets have become a key bottleneck in PVD coating processes. The problems are concentrated in the following aspects: 1. In terms of debugging, it relies on physical structure adjustment and empirical parameter matching. Parameters are interdependent and lack real-time feedback. For complex workpieces such as deep holes and irregular curved surfaces, repeated trial and error are required, resulting in high costs and long development cycles for process switching and new product development. 2. In terms of functionality, it can only change the film thickness through masking, but cannot adjust the particle deposition direction, leading to no film inside deep cavities or deep holes, uneven film thickness on tilted or curved surfaces, and completely failing to meet special requirements such as directional coating. 3. In terms of efficiency, disassembly and calibration are required during model changes, and regular cleaning and maintenance are also necessary, which is time-consuming. In multi-variety production scenarios, equipment downtime is frequent, and it is difficult to adapt to automated production lines. 4. In terms of precision, the mechanical adjustment precision is limited and cannot meet the high-precision requirements of precision optical films; gaps can easily lead to uneven film layers when splicing large-size substrates; poor edge precision of patterned coatings can also cause pattern defects due to assembly problems, directly affecting product yield and functional stability. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a magnetic adjustment device for a coating machine, which enables adjustment of the strength and / or direction of the original magnetic field within the coating machine to compensate for film thickness deviations, thereby correcting coating uniformity and improving the coating accuracy of the coating machine.

[0004] According to the present invention, a magnetic force adjustment device for a coating machine includes: a magnetic field generating module disposed in the coating cavity of the coating machine, the magnetic field generating module being capable of generating multiple adjustable magnetic fields, the intensity and / or direction of the adjustable magnetic fields being adjustable; and a control module for controlling the magnetic field generating module.

[0005] According to the present invention, a magnetic adjustment device for a coating machine is used to adjust the interaction between the magnetic field and the original magnetic field inside the coating machine. Since the strength and / or direction of the magnetic field can be adjusted, the strength and / or direction of the original magnetic field inside the coating machine can be adjusted to compensate for film thickness deviation, thereby achieving the purpose of correcting coating uniformity, improving the coating accuracy of the coating machine, shortening the debugging time of the coating machine, and improving production efficiency.

[0006] In some embodiments, the coating machine is provided with light-shielding strip points, and a plurality of the adjusting magnetic fields are arranged in a one-to-one correspondence with the light-shielding strip points.

[0007] In some embodiments, the magnetic field generating module includes an insulating component and a magnetic generating component, wherein the magnetic generating component is disposed on the insulating component and is arranged corresponding to the positions of the light-shielding strip, and the magnetic generating component is used to generate the regulating magnetic field when energized.

[0008] In some embodiments, the control module includes a plurality of control units, each of which is configured to correspond one-to-one with a plurality of adjustment magnetic fields. The control units are used to adjust the strength and / or direction of the corresponding adjustment magnetic field.

[0009] In some embodiments, the magnetic generating elements include a plurality of magnetic generating elements arranged along the length direction of the insulating element, and the plurality of magnetic generating elements are spaced apart.

[0010] In some embodiments, the magnetic generating element has a first assembly portion, the insulating element has a second assembly portion, and the magnetic generating element and the insulating element are connected by the first assembly portion and the second assembly portion.

[0011] In some embodiments, a first positioning portion is formed on the insulating member, a second positioning portion is provided on the coating machine, and the magnetic field generating module is connected to the second positioning portion through the first positioning portion.

[0012] A coating machine according to a second aspect of the present invention includes a magnetic adjustment device for the coating machine according to the first aspect of the present invention. The coating machine can generate a primary magnetic field, which is located within the coating cavity of the coating machine. The magnetic adjustment device can generate multiple adjustment magnetic fields, which are used to adjust the intensity and / or direction of the primary magnetic field.

[0013] According to the present invention, the coating machine, by setting the above-mentioned magnetic adjustment device for the coating machine, has the same technical effect. That is, by applying the magnetic adjustment device on the coating machine, the magnetic field is adjusted to interact with the original magnetic field inside the coating machine. Since the strength and / or direction of the magnetic field can be adjusted, the strength and / or direction of the original magnetic field inside the coating machine can be adjusted to compensate for the film thickness deviation, thereby achieving the purpose of correcting the coating uniformity, improving the coating accuracy of the coating machine, shortening the debugging time of the coating machine, and improving production efficiency.

[0014] In some embodiments, the coating cavity is provided with at least a first mounting position and a second mounting position, the first mounting position is arranged adjacent to the target material, the second mounting position is arranged adjacent to the substrate, and the magnetic adjustment device is provided at the first mounting position and / or the second mounting position.

[0015] In some embodiments, the coating cavity is provided with a mounting frame, and a second positioning part is formed on the mounting frame. The magnetic adjustment device and the mounting frame are connected through the first positioning part and the second positioning part of the magnetic adjustment device.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] To more clearly illustrate the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of a magnetic adjustment device for a coating machine provided in the first aspect embodiment of this utility model; Figure 2 for Figure 1 A schematic diagram of the magnetic field generating module shown; Figure 3 for Figure 2 The diagram shows an explosion of the magnetic field generating module. Figure 4 for Figure 1 A schematic diagram of the control module shown; Figure 5 for Figure 4 An exploded view of the control module shown in the diagram; Figure 6 A schematic diagram of a coating machine provided for a second aspect embodiment of the present invention; Figure 7 This is a schematic diagram of another coating machine provided in the second aspect of the present invention.

[0019] The above figures include the following reference numerals: 10. Magnetic adjustment device for coating machines; 1. Magnetic field generating module; 11. Insulating component; 111. First positioning part; 112. Protective part; 12. Magnetic generating component; 121. First assembly part; 13. Second wiring terminal; 2. Control module; 21. Switch button; 22. Reset button; 23. Start button; 24. Adjustment knob; 25. Display unit; 26. First terminal block; 100. Sputtering coating machine; 101. Sputtering target; 200. Evaporation coating machine; 201. Coating material; 300. Substrate; P1, first mounting position; P2, second mounting position. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] It should be noted that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. The terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. The terms "parallel," "perpendicular," and "equal" include the described situation and situations similar to the described situation, where the range of similar situations is within an acceptable deviation range, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, "parallel" includes absolute parallelism and approximate parallelism, where the acceptable deviation range for approximate parallelism can be, for example, within 5°; "perpendicular" includes absolute perpendicularity and approximate perpendicularity, where the acceptable deviation range for approximate perpendicularity can also be, for example, within 5°. "Equal" includes absolute equality and approximate equality, where the acceptable deviation range for approximate equality can be, for example, the difference between the two equal items being less than or equal to 5% of either one. Those skilled in the art will understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the invention, are intended to cover non-exclusive inclusion.

[0023] In the description of the embodiments of this utility model, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this utility model, "multiple" means two or more, unless otherwise explicitly defined.

[0024] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0025] In the description of this utility model embodiment, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0026] In the description of the embodiments of this utility model, the term "multiple" refers to two or more (including two).

[0027] Related technologies indicate that the defects of mechanical masking sheets have become a key bottleneck in PVD coating processes, with problems concentrated in four aspects: 1. In terms of debugging, it relies on physical structure adjustment and empirical parameter matching. Parameters are interdependent and lack real-time feedback. For complex workpieces such as deep holes and irregular curved surfaces, repeated trial and error are required, resulting in high costs and long cycles for process switching and new product development. 2. In terms of functionality, it can only change the film thickness through masking, but cannot adjust the particle deposition direction, leading to no film inside deep cavities or deep holes, uneven film thickness on tilted or curved workpieces, and completely failing to meet special requirements such as directional coating. 3. In terms of efficiency, disassembly and calibration are required during model changes, and regular cleaning and maintenance are also necessary, which is time-consuming. In multi-variety production scenarios, equipment downtime is frequent, and it is difficult to adapt to automated production lines. 4. In terms of precision, the mechanical adjustment precision is limited and cannot meet the high-precision requirements of precision optical films; when splicing large-size substrates, gaps can easily lead to uneven film layers; the edge precision of patterned coatings is poor, and assembly problems may also cause pattern defects, directly affecting product yield and functional stability.

[0028] Therefore, how to solve the problems of debugging difficulty, functional limitations, low efficiency and insufficient accuracy in existing technologies has become an urgent issue to be addressed.

[0029] Based on the above considerations, and in order to solve the problems of debugging difficulty, functional limitations, low efficiency, and insufficient precision in the existing technology, the inventor, after in-depth research, designed a magnetic adjustment device for a coating machine, as described below. Figures 1-7 This invention describes a magnetic adjustment device for a coating machine according to a first aspect of the present invention.

[0030] According to a first aspect of the present invention, a magnetic force adjustment device 10 for a coating machine includes a magnetic field generating module 1 and a control module 2.

[0031] Specifically, the magnetic field generating module 1 is located inside the coating chamber of the coating machine. The magnetic field generating module 1 can generate multiple adjustable magnetic fields, and the strength and / or direction of the adjustable magnetic fields are adjustable. The control module 2 is used to control the magnetic field generating module 1. It is understandable that during the debugging of traditional coating machines, mechanical adjustments are required to control the coating thickness (e.g., sputtering coating machine 100 requires manual movement of the magnet to optimize the magnetic field distribution, evaporation coating machine 200 requires manual replacement of the evaporation source position to adapt to different coating requirements, or the extension length of the mechanical shielding plate needs to be set to adapt to different coating requirements). However, such operations are not only time-consuming, but also rely on manual experience to control precision, often requiring a long time to complete a single debugging, and are also prone to affecting the subsequent coating quality due to operational errors. The magnetic adjustment device 10 for a coating machine in this embodiment of the present invention controls the magnetic field generating module 1 by using the control module 2, thereby changing the strength and / or direction of the adjustment magnetic field. The adjustment magnetic field interacts with the original magnetic field in the coating machine. The magnetic field strength and direction in the coating machine can be adjusted without mechanical disassembly and assembly, which shortens the debugging time and improves the work efficiency.

[0032] Furthermore, during the production process, the film thickness monitoring system monitors and provides feedback on the thickness of the substrate 300 in real time. If the film thickness monitoring system detects a deviation in film thickness, it needs to send an adjustment signal to the magnetic field generating module 1 through the control module 2 to adjust the strength and / or direction of the adjusting magnetic field generated by the magnetic field generating module 1, thereby compensating for the film thickness deviation (for example, by adjusting the strength and / or direction of the adjusting magnetic field to optimize the sputtering efficiency of the target 101 or the evaporation atomic deposition state, ensuring that the film thickness meets production standards). This reduces manual intervention, avoids errors caused by manual operation, improves coating accuracy, and ensures the uniformity and consistency of the coating.

[0033] According to the embodiment of the present invention, the magnetic adjustment device 10 for a coating machine, by applying the magnetic adjustment device on the coating machine, adjusts the interaction between the magnetic field and the original magnetic field inside the coating machine. Since the strength and / or direction of the magnetic field can be adjusted, the strength and / or direction of the original magnetic field inside the coating machine can be adjusted to compensate for the film thickness deviation, thereby achieving the purpose of correcting the coating uniformity, improving the coating accuracy of the coating machine, shortening the debugging time of the coating machine, and improving production efficiency.

[0034] In some feasible embodiments, the control module 2 can also enable the magnetic force adjustment device to have parameter storage and reuse function by setting a memory unit. In this way, for the same film layer formula, the parameters of the magnetic field adjustment can be stored in the memory unit after debugging, and can be directly called in subsequent production, avoiding repeated debugging and further reducing the complexity of operation and time cost.

[0035] In some embodiments of this invention, the coating machine is equipped with light-shielding strip points, and multiple adjusting magnetic fields are arranged in a one-to-one correspondence with the light-shielding strip points. It is understood that the area covered by each adjusting magnetic field corresponds precisely to the substrate area affected by a light-shielding strip. When it is necessary to adjust the film thickness at a certain point, the prior art involves adjusting the extension length of the light-shielding strip corresponding to that point. However, in this embodiment of the invention, the intensity and / or direction of the adjusting magnetic field corresponding to that point are adjusted to change the plasma density and electron confinement within the area covered by that point, thereby altering the local coating thickness.

[0036] In some embodiments of this utility model, such as Figures 1-3 As shown, the magnetic field generating module 1 includes an insulating component 11 and a magnetic generating component 12. The magnetic generating component 12 is mounted on the insulating component 11 and is arranged correspondingly to the positions of the light-shielding strip. The magnetic generating component 12 is used to generate an adjustable magnetic field when energized. It is understood that the insulating component 11 effectively prevents short circuits, achieving electrical isolation, and also provides an assembly position for the magnetic generating component 12, achieving heat insulation. Specifically, the insulating component 11 effectively isolates the magnetic generating component 12 from the grounding cavity under high-voltage conditions, preventing leakage, arcing, and other issues caused by particle conductivity or sputtering deposition, thus improving the safety of the coating machine. Since the magnetic generating component 12 is arranged correspondingly to the light-shielding positions, the area affected by the adjustable magnetic field generated by the energized magnetic generating component 12 corresponds to the substrate area controlled by the original light-shielding strip (i.e., the light-shielding strip position), allowing for adjustment of the coating thickness within the corresponding area.

[0037] Furthermore, a cooling section can be provided on the insulating component 11 to prevent the performance of the magnetic generating component 12 from deteriorating or being damaged due to heat generated by prolonged energization.

[0038] In some embodiments of this utility model, such as Figure 1 , Figure 4 and Figure 5As shown, the control module 2 includes multiple control units, each corresponding to a different adjusting magnetic field. The control units are used to adjust the strength and / or direction of the corresponding adjusting magnetic field. It can be understood that each adjusting magnetic field is generated by an independent magnetic generator 12, and correspondingly, each magnetic generator 12 is configured with a control unit, independent of each other. This allows for adjustment of each shading strip point, improving the uniformity of the film layer.

[0039] Specifically, the control unit controls the strength of the corresponding magnetic field by adjusting the output current; that is, increasing the current strengthens the magnetic field, and decreasing the current weakens the magnetic field. For example, when the substrate film layer in a certain area is too thick, the control unit reduces the current of the corresponding magnetic generator 12, thereby weakening the local magnetic field strength, reducing electron confinement, lowering particle density and sputtering rate, and achieving the effect of reducing the film thickness.

[0040] The control unit changes the direction of the regulating magnetic field by adjusting the direction of the output current. For example, in deep hole coating, the direction of the magnetic field on both sides of the hole opening can be adjusted to guide particles to deflect into the hole, thereby improving the uniformity of particle coverage.

[0041] For example, a control unit may include a drive circuit, a microcontroller, and a current feedback sensor. The drive circuit is used to precisely adjust the magnitude and direction of the output current, the microcontroller is used to receive instructions from the host computer and execute local control algorithms, and the current feedback sensor is used to monitor the output current in real time.

[0042] In some embodiments of this utility model, such as Figures 1-3 As shown, the magnetic generating element 12 includes multiple elements arranged along the length of the insulating element 11, and these multiple magnetic generating elements 12 are spaced apart. It can be understood that the spaced arrangement of the multiple magnetic generating elements 12 can avoid mutual coupling and interference of magnetic fields between adjacent magnetic generating elements 12, ensuring that the regulating magnetic field generated by each magnetic generating element 12 has good spatial independence. This ensures that each regulating magnetic field can stably regulate the film thickness within its corresponding region, reducing the influence of film thickness outside the corresponding region.

[0043] In some embodiments of this utility model, the magnetic generating component 12 has a first assembly portion 121, and the insulating component 11 has a second assembly portion. The magnetic generating component 12 and the insulating component 11 are connected by the first assembly portion 121 and the second assembly portion. It can be understood that by setting the first assembly portion 121 and the second assembly portion to cooperate, the positioning and assembly between the magnetic generating component 12 and the insulating component 11 is achieved, which improves the assembly accuracy and reliability between the magnetic generating component 12 and the insulating component 11, and makes the magnetic generating component 12 and the insulating component 11 have sufficient mechanical connection strength, so that they can withstand the thermal expansion and contraction, electromagnetic vibration and gas extraction and degassing in the vacuum environment during the PVD process, and prevent the magnetic generating component 12 from loosening or falling off.

[0044] Optionally, the first assembly part 121 and the second assembly part can be a snap-fit ​​structure; the first assembly part 121 and the second assembly part can be a tenon and mortise structure; the first assembly part 121 and the second assembly part can be connected by fasteners; the connection structure of the first assembly part 121 and the second assembly part includes, but is not limited to, these.

[0045] Reference Figure 3 As shown, the first assembly part 121 is formed as an assembly hole.

[0046] In some embodiments of this utility model, a first positioning part 111 is formed on the insulating component 11, and a second positioning part is provided on the coating machine. The magnetic field generating module 1 is connected to the second positioning part through the cooperation of the first positioning part 111 and the second positioning part. It can be understood that by setting the first positioning part 111 and the second positioning part to cooperate, the assembly positioning between the insulating component 11 and the coating machine is realized, which improves the assembly accuracy and assembly stability between the magnetic field generating module 1 and the coating machine, avoids the failure of film thickness control due to installation deviation, and ensures the consistency and uniformity of film thickness.

[0047] Optionally, the first positioning part 111 and the second positioning part can be a mating structure of a protrusion and a groove; the first positioning part 111 and the second positioning part can be formed as positioning holes, and a fastener is inserted into the positioning hole for positioning.

[0048] Reference Figure 3 As shown, the first positioning part 111 is formed as a positioning hole.

[0049] In some feasible embodiments, a channel is formed on the insulating member 11, and the wire harness for energizing the magnetic generating member 12 is passed through the channel, thereby avoiding the situation of messy wire harness, improving the safety and reliability of the magnetic field generating module 1, and extending the service life of the magnetic field generating module 1.

[0050] Furthermore, such as Figure 2 and Figure 3 As shown, a protective portion 112 is formed on the insulating member 11, and a channel is formed in the protective portion 112.

[0051] Reference Figure 1 , Figure 4 and Figure 5 As shown, the control module 2 includes a switch button 21, a reset button 22, and a start button 23, which respectively perform the switching function, reset function, and start function. Each control unit includes an adjustment knob 24. The control module 2 also has a display unit 25 for easy reading of parameter information by the operator. The control module 2 also has a first terminal block 26, and the magnetic field generating module 1 has a second terminal block 13 that mates with the first terminal block 26 of the control module 2.

[0052] A coating machine according to a second aspect of the present invention includes a magnetic adjustment device 10 for a coating machine according to the first aspect of the present invention described above.

[0053] Specifically, the coating machine generates a primary magnetic field located within its coating chamber. A magnetic adjustment device generates multiple adjusting magnetic fields to regulate the strength and / or direction of the primary magnetic field. Understandably, the primary magnetic field generated by the coating machine can constrain electron trajectories, lengthen electron paths in the emission field, improve argon ionization efficiency, form high-density plasma, maintain stable glow discharge, and ensure continuous sputtering of 101 atoms from the target material. When the adjusting magnetic field couples with the primary magnetic field, if they are aligned, they superimpose, thereby enhancing the magnetic field strength, strengthening electron confinement, increasing plasma density, and thus improving the sputtering rate. Conversely, if the direction of the adjusting magnetic field is opposite to that of the primary magnetic field, the magnetic field strength is weakened, reducing the sputtering rate.

[0054] The coating machine according to the present invention, by setting the magnetic adjustment device 10 for the coating machine in the above embodiment, has the same technical effect. That is, by applying the magnetic adjustment device on the coating machine, the interaction between the magnetic field and the original magnetic field in the coating machine is adjusted. Since the strength and / or direction of the magnetic field can be adjusted, the strength and / or direction of the original magnetic field in the coating machine can be adjusted to compensate for the film thickness deviation, thereby achieving the purpose of correcting the coating uniformity, improving the coating accuracy of the coating machine, shortening the debugging time of the coating machine, and improving production efficiency.

[0055] In some embodiments of this utility model, at least a first mounting position P1 and a second mounting position P2 are provided in the coating cavity. The first mounting position P1 is arranged adjacent to the target 101, and the second mounting position P2 is arranged adjacent to the substrate 300. A magnetic adjustment device is provided at the first mounting position P1 and / or the second mounting position P2. It can be understood that by setting a magnetic field generating module 1 at the first mounting position P1, the magnetic field strength and / or magnetic field direction of the target 101 region can be adjusted, thereby changing the sputtering rate of the target 101 region and achieving uniform etching of the target 101, thus optimizing the initial distribution of film thickness. By setting a magnetic field generating module 1 at the second mounting position P2, the magnetic field strength and / or magnetic field direction of the substrate 300 region can be adjusted, ensuring the consistency and uniformity of the film thickness.

[0056] Reference Figure 6 As shown, the coating machine is a sputtering coating machine 100. The first mounting position P1 is arranged adjacent to the target material 101, and the second mounting position P2 is arranged adjacent to the substrate 300. The first mounting position P1 is located below the second mounting position P2. (Refer to...) Figure 7 As shown, the coating machine is a vapor deposition coating machine 200. The first mounting position P1 is arranged adjacent to the coating material 201, and the second mounting position P2 is arranged adjacent to the substrate 300.

[0057] In some embodiments of this utility model, a mounting frame is provided inside the coating cavity, and a second positioning part is formed on the mounting frame. The magnetic adjustment device is connected to the mounting frame through the cooperation of the first positioning part 111 and the second positioning part of the magnetic adjustment device. It can be understood that by setting the first positioning part 111 and the second positioning part to cooperate, the assembly positioning between the insulating component 11 and the mounting frame is realized, which improves the assembly accuracy and assembly stability between the magnetic field generating module 1 and the mounting frame, avoids the failure of film thickness control due to installation deviation, and ensures the consistency and uniformity of film thickness.

[0058] The following will refer to Figure 6 and Figure 7 This invention describes a coating machine according to two specific embodiments of the present invention.

[0059] Example 1 is described using a sputtering coating machine 100 as an example.

[0060] like Figure 6As shown, the sputtering coating machine 100 operates on the principle of high-energy particle bombardment of the target material 101, causing atoms or molecules of the target material 101 to be sputtered and deposited onto the substrate 300 to form a thin film. Traditional magnetron sputtering coating machines 100 have a fixed magnetic field, which can easily lead to localized over-sputtering or sputtering blind zones when ions bombard the target material 101 due to uneven magnetic field distribution, resulting in film thickness deviations. In this embodiment, the sputtering coating machine 100 can adjust the magnetic field direction and / or magnetic field strength using a magnetic adjustment device, ensuring that the electron confinement region covers the entire surface of the target material 101, guaranteeing uniform atomic emission from the target material 101, and ultimately reducing the film thickness difference on the substrate 300.

[0061] Since different target materials 101 have different requirements for magnetic field strength (for example, insulator target material 101 requires a stronger magnetic field to enhance electron collision ionization efficiency), the sputtering coating machine 100 of this embodiment can adjust the parameters of different adjustable magnetic fields through the control module 2. In this way, it can be adapted to a variety of target materials 101 without changing the magnet assembly. At the same time, it can also optimize the ionization efficiency of reactive gas in reactive sputtering by adjusting the magnetic field, thereby reducing film impurities.

[0062] Furthermore, under a fixed magnetic field, the target 101 will form grooves due to continuous localized bombardment, thus requiring frequent replacement of the target 101 to ensure coating quality. The sputtering coating machine 100 of this embodiment can dynamically adjust the magnetic field direction, causing the ion bombardment area to circulate on the surface of the target 101, avoiding excessive localized wear of the target 101, effectively improving the utilization rate of the target 101, and reducing the replacement frequency and operating costs.

[0063] Example 2 is described using a vapor deposition coating machine 200 as an example.

[0064] like Figure 7 As shown, the working principle of the vapor deposition coating machine 200 is that in a high vacuum environment, the coating material 201 (source material) is evaporated or sublimated by heating to form vapor. These vapor atoms or molecules fly in a straight line in the path of freedom, and after reaching the surface of the substrate 300 at a lower temperature, they condense, nucleate and grow, and finally form a solid film.

[0065] For magnetic coating materials 201 (such as iron, cobalt, and nickel alloys, commonly used in magnetic recording thin films), atoms diffuse randomly during traditional vapor deposition, making it difficult to accurately deposit them in specific areas of the substrate 300 (such as localized coatings on components). The vapor deposition machine 200 of this embodiment can guide the evaporated magnetic atoms along a magnetic field path by setting a specific magnetic field direction, allowing them to be directly deposited onto the target area, avoiding material waste and reducing subsequent etching processes.

[0066] Furthermore, for non-magnetic materials (such as aluminum and gold), the vapor deposition machine 200 of this embodiment can improve the density and adhesion of the non-magnetic film layer by using a weak magnetic field. On the one hand, the magnetic field can slightly change the trajectory of the evaporating atoms, reducing the gaps during atomic deposition (especially for loose films caused by rapid atomic diffusion under high vacuum), thereby improving the density of the film layer; on the other hand, the magnetic field can generate a weak induced current on the surface of the substrate 300, enhancing the bonding force between the evaporating atoms and the substrate 300, preventing detachment during subsequent use, thus improving the adhesion of the film layer.

[0067] Furthermore, if the vapor deposition target is a thin film with specific magnetic properties (e.g., a soft magnetic film, a permanent magnet film, etc.), the vapor deposition machine 200 of this embodiment can guide the magnetic domains to align during atomic condensation deposition by adjusting the magnetic field strength (e.g., aligning the magnetic domains in the same direction). This allows the target magnetic properties to be achieved without subsequent annealing, simplifying the process and reducing damage to the substrate 300 caused by high-temperature annealing.

[0068] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. At the same time, other implementation methods can be derived from the above embodiments, so that structural and logical substitutions and changes can be made without departing from the scope of this disclosure.

[0069] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A magnetic adjustment device for a coating machine, characterized in that, include: A magnetic field generating module (1) is provided in the coating chamber of the coating machine. The magnetic field generating module (1) can generate multiple adjustable magnetic fields, and the intensity and / or direction of the adjustable magnetic fields are adjustable. Control module (2), which is used to control the magnetic field generating module (1).

2. The magnetic adjustment device for a coating machine according to claim 1, characterized in that, The coating machine is equipped with light-shielding strip positions, and multiple adjustment magnetic fields are arranged in a one-to-one correspondence with the light-shielding strip positions.

3. The magnetic adjustment device for a coating machine according to claim 2, characterized in that, The magnetic field generating module (1) includes an insulating component (11) and a magnetic generating component (12). The magnetic generating component (12) is disposed on the insulating component (11) and is arranged corresponding to the position of the light-shielding strip. The magnetic generating component (12) is used to generate the regulating magnetic field when energized.

4. The magnetic adjustment device for a coating machine according to claim 3, characterized in that, The control module (2) includes multiple control units, each of which is configured to correspond one-to-one with a multiple regulating magnetic field. The control units are used to adjust the strength of the corresponding regulating magnetic field and / or the direction of the corresponding regulating magnetic field.

5. The magnetic adjustment device for a coating machine according to claim 4, characterized in that, The magnetic generating element (12) includes a plurality of magnetic generating elements (12) arranged along the length direction of the insulating element (11) and the plurality of magnetic generating elements (12) are spaced apart.

6. The magnetic adjustment device for a coating machine according to claim 5, characterized in that, The magnetic generating component (12) has a first assembly portion (121), and the insulating component (11) has a second assembly portion. The magnetic generating component (12) and the insulating component (11) are connected by the first assembly portion (121) and the second assembly portion.

7. The magnetic adjustment device for a coating machine according to claim 5, characterized in that, The insulating component (11) has a first positioning part (111) formed on it, the coating machine has a second positioning part, and the magnetic field generating module (1) is connected to the second positioning part through the first positioning part (111).

8. A coating machine, characterized in that, The magnetic adjustment device (10) for a coating machine according to any one of claims 1-7 is included, wherein the coating machine can generate an original magnetic field located in the coating cavity of the coating machine, and the magnetic adjustment device can generate a plurality of adjustment magnetic fields, wherein the adjustment magnetic fields are used to adjust the strength and / or direction of the original magnetic field.

9. The coating machine according to claim 8, characterized in that, The coating cavity is provided with at least a first mounting position (P1) and a second mounting position (P2). The first mounting position (P1) is arranged adjacent to the target material (101), and the second mounting position (P2) is arranged adjacent to the substrate (300). The magnetic adjustment device is provided at the first mounting position (P1) and / or the second mounting position (P2).

10. The coating machine according to claim 8, characterized in that, The coating cavity is provided with an installation frame, and a second positioning part is formed on the installation frame. The magnetic adjustment device and the installation frame are connected through the first positioning part (111) of the magnetic adjustment device and the second positioning part.

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