A vacuum coating machine

Abstract

The utility model discloses a vacuum coating machine, including coating machine, pre -evacuation structure, detachable base material frame structure, drive structure, evacuation structure, pre -evacuation structure installs in the right side of coating machine, pre -evacuation structure is by vacuum buffer tank, connecting pipe no.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a vacuum coating machine. Background Technology

[0002] Vacuum coating technology, as a key process in modern industry, occupies an important position in optics, electronics, and hardware industries. In optics, it is used to manufacture precision optical lenses with high light transmittance and low reflectivity; in the electronics industry, vacuum coating is used to deposit metal wiring and insulating layers on chip surfaces; and in the hardware industry, this technology is used to improve the wear resistance and aesthetics of product surfaces. As the core equipment of this technology, the performance of the vacuum coating machine directly determines the coating quality and production efficiency. Its structural design, vacuum control accuracy, evaporation source performance, and other parameters all have a profound impact on key indicators such as coating uniformity and adhesion.

[0003] Existing vacuum coating machines have many shortcomings: 1. Vacuum systems often use a single vacuum pump to directly pump air, which takes a long time to reach the target vacuum level from atmospheric pressure, and lacks a pre-vacuum buffer structure, resulting in low production efficiency.

[0004] 2. The substrate frame is mostly fixed as one piece. Disassembly and assembly require the removal of multiple parts, which is cumbersome. In addition, the substrate is prone to loosening, which affects the uniformity of coating. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum coating machine that can solve the defects of low vacuuming efficiency and inconvenient disassembly and assembly of substrate frames in existing vacuum coating machines, and provide a vacuum coating machine with optimized structure, convenient disassembly and assembly, high vacuuming efficiency and stable substrate fixation.

[0006] To achieve the above objectives, a vacuum coating machine is provided, comprising a coating machine, a pre-vacuum structure, a detachable substrate frame structure, a drive structure, and a vacuum structure. The pre-vacuum structure is installed on the right side of the coating machine, and the detachable substrate frame structure is installed inside the vacuum chamber of the coating machine.

[0007] According to the aforementioned vacuum coating machine, the pre-vacuum structure comprises a vacuum buffer tank, a connecting pipe 1, a solenoid valve 2, another connecting pipe 2, a solenoid valve 3, and a small pre-vacuum pump.

[0008] According to the aforementioned vacuum coating machine, the vacuum buffer tank and the coating machine are connected by a connecting pipe 1, and the vacuum buffer tank and the small pre-pump are connected by a connecting pipe 2. A solenoid valve 2 is installed inside the connecting pipe 1, and a solenoid valve 3 is installed inside the connecting pipe 2.

[0009] According to the aforementioned vacuum coating machine, a sealing door is connected to the outer surface of the coating machine, a partition is fixedly installed inside the coating machine and the sealing door, and an emission source is installed on the inner surface of the coating machine.

[0010] According to the aforementioned vacuum coating machine, the drive structure consists of a motor, a rotating shaft, and a connecting seat. The motor is installed below the partition plate, and the output end of the motor extends into the vacuum chamber of the coating machine and is fixedly connected to the rotating shaft. The top end of the rotating shaft is fixedly connected to the connecting seat, and the upper surface of the connecting seat is provided with several threaded holes.

[0011] According to the aforementioned vacuum coating machine, the detachable substrate frame structure consists of a fixed base, fixing bolts, a fixing shaft, a substrate frame, a clamp frame, a clamping plate, a threaded rod, and a knob.

[0012] According to the vacuum coating machine, the upper surface of the fixed base is provided with a plurality of threaded holes, the fixed base and the connecting seat are connected by fixing bolts, the upper surface of the fixed base is fixedly connected with a fixed shaft, the outer surface of the fixed shaft is mounted with a substrate frame, the frame of the substrate frame is mounted with a plurality of clamp frames, the upper surface of the clamp frame is threadedly connected with a threaded rod, the top end of the threaded rod is fixedly connected with a knob, the bottom end of the threaded rod is fixedly connected with a clamping plate, and the outer surface of the clamping plate is provided with anti-slip texture.

[0013] According to the aforementioned vacuum coating machine, the vacuuming structure consists of a vacuum pump, a vacuum tube, and a solenoid valve. The vacuum pump and the coating machine are connected via the vacuum tube, and the solenoid valve is installed inside the vacuum tube.

[0014] This utility model has the following beneficial effects: 1. Compared with existing technologies, the pre-vacuum structure pre-stores a low vacuum in a vacuum buffer tank and uses the pressure difference to quickly reduce the initial pressure of the vacuum chamber of the coating machine. Combined with the main vacuum pump of the vacuum structure, the overall vacuuming time is greatly reduced.

[0015] 2. Compared with existing technologies, the detachable substrate frame structure enables quick assembly and disassembly through bolt connection between the fixed base and the connecting seat, without the need to disassemble the drive structure, reducing assembly and disassembly time and significantly improving material change efficiency. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a three-dimensional front view of a vacuum coating machine according to the present invention; Figure 2 This is an internal structural diagram of a vacuum coating machine according to the present invention; Figure 3This is a front view of a vacuum coating machine according to the present invention; Figure 4 This is a structural diagram of a detachable substrate frame for a vacuum coating machine according to the present invention.

[0017] Legend: 1. Coating machine; 2. Sealed door; 3. Pre-vacuum structure; 301. Vacuum buffer tank; 302. Connecting pipe one; 303. Solenoid valve two; 304. Connecting pipe two; 305. Solenoid valve three; 306. Small pre-vacuum pump; 4. Partition plate; 5. Detachable substrate frame structure; 501. Fixed base; 502. Fixing bolt; 503. Fixed shaft; 504. Substrate frame; 505. Clamp frame; 506. Clamping plate; 507. Threaded rod; 508. Knob; 6. Drive structure; 601. Motor; 602. Rotating shaft; 603. Connecting seat; 7. Vacuum structure; 701. Vacuum pump; 702. Vacuum tube; 703. Solenoid valve one. Detailed Implementation

[0018] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0019] Reference Figure 1-4 This utility model provides a vacuum coating machine, which includes a coating machine 1, a pre-vacuum structure 3, a detachable substrate frame structure 5, a drive structure 6, and a vacuum structure 7.

[0020] The pre-vacuum structure 3 is installed on the right side of the coating machine 1, and the detachable substrate frame structure 5 is installed inside the vacuum chamber of the coating machine 1.

[0021] The pre-vacuum structure 3 consists of a vacuum buffer tank 301, a connecting pipe 1 302, a solenoid valve 2 303, a connecting pipe 2 304, a solenoid valve 3 305, and a small pre-vacuum pump 306.

[0022] The vacuum buffer tank 301 and the coating machine 1 are connected by a connecting pipe 302. The vacuum buffer tank 301 and the small pre-pump 306 are connected by a connecting pipe 304. A solenoid valve 303 is installed inside the connecting pipe 302, and a solenoid valve 305 is installed inside the connecting pipe 304.

[0023] A sealing door 2 is connected to the outer surface of the coating machine 1. A partition 4 is fixedly installed inside the coating machine 1 and the sealing door 2. An emission source is installed on the inner surface of the coating machine 1.

[0024] The drive structure 6 consists of a motor 601, a rotating shaft 602, and a connecting seat 603. The motor 601 is installed below the partition plate 4. The output end of the motor 601 extends into the vacuum chamber of the coating machine 1 and is fixedly connected to the rotating shaft 602. The top end of the rotating shaft 602 is fixedly connected to the connecting seat 603, and the upper surface of the connecting seat 603 has several threaded holes.

[0025] The detachable substrate frame structure 5 consists of a fixed base 501, a fixing bolt 502, a fixing shaft 503, a substrate frame 504, a clamp frame 505, a clamping plate 506, a threaded rod 507, and a knob 508.

[0026] The upper surface of the fixed base 501 has several threaded holes. The fixed base 501 and the connecting seat 603 are connected by a fixing bolt 502. The upper surface of the fixed base 501 is fixedly connected to a fixed shaft 503. The outer surface of the fixed shaft 503 is equipped with a substrate frame 504. Several clamp frames 505 are installed on the frame of the substrate frame 504. The upper surface of the clamp frame 505 is threadedly connected to a threaded rod 507. The top end of the threaded rod 507 is fixedly connected to a knob 508. The bottom end of the threaded rod 507 is fixedly connected to a clamping plate 506. The outer surface of the clamping plate 506 is provided with anti-slip texture.

[0027] The vacuum structure 7 consists of a vacuum pump 701, a vacuum tube 702, and a solenoid valve 703. The vacuum pump 701 and the coating machine 1 are connected through the vacuum tube 702, and the solenoid valve 703 is installed inside the vacuum tube 702.

[0028] Working principle: In standby mode, start the small pre-pump 306, open solenoid valve 305, and close solenoid valve 2 303 and solenoid valve 1 703. The small pre-pump 306 evacuates the vacuum buffer tank 301 through connecting pipe 2 304 until the pressure inside the vacuum buffer tank 301 reaches the maximum. Then the small pre-pump 306 switches to intermittent mode to maintain the pressure inside the vacuum buffer tank 301.

[0029] Open the sealed door 2, place the substrate to be coated into the clamp frame 505 of the detachable substrate frame structure 5, rotate the knob 508 to drive the threaded rod 507 down, so that the clamping plate 506 presses the substrate, and the substrate is fixed.

[0030] Align the fixed base 501 of the assembled detachable substrate frame structure 5 with the connecting seat 603 of the drive structure 6, fix it with the fixing bolts 502, and close the sealing door 2.

[0031] Initiate the pre-vacuuming process by opening solenoid valve 2 (303) and closing solenoid valve 3 (305). The low vacuum environment in the vacuum buffer tank 301 is connected to the vacuum chamber of coating machine 1 through connecting pipe 1 (302). The pressure in the vacuum chamber is rapidly reduced by utilizing the pressure difference. After the pre-vacuuming is completed, close solenoid valve 2 (303), open solenoid valve 1 (703), and start vacuum pump 701. Vacuum pump 701 pumps the pressure in the vacuum chamber of coating machine 1 to the target vacuum level through vacuum pipe 702.

[0032] Once the vacuum level is reached, the motor 601 is started. The motor 601 drives the rotating shaft 602, the connecting seat 603, and the detachable substrate frame structure 5 to rotate. At the same time, the emission source is started to begin the coating operation.

[0033] After coating is completed, turn off the emission source and motor 601, close the solenoid valve 703, stop the vacuum pump 701, and wait for the vacuum chamber of coating machine 1 to return to atmospheric pressure. Then open the sealing door 2, remove the fixing bolts 502, and remove the detachable substrate frame structure 5 to complete the substrate loading and unloading.

[0034] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A vacuum coating machine, characterized in that, Includes a coating machine (1), a pre-vacuum structure (3), a detachable substrate frame structure (5), a drive structure (6), and a vacuum structure (7). The pre-vacuum structure (3) is installed on the right side of the coating machine (1), and the detachable substrate frame structure (5) is installed inside the vacuum chamber of the coating machine (1).

2. The vacuum coating machine according to claim 1, characterized in that, The pre-vacuum structure (3) consists of a vacuum buffer tank (301), a connecting pipe (302), a solenoid valve (303), a connecting pipe (304), a solenoid valve (305), and a small pre-vacuum pump (306).

3. The vacuum coating machine according to claim 2, characterized in that, The vacuum buffer tank (301) and the coating machine (1) are connected by a connecting pipe one (302), and the vacuum buffer tank (301) and the small pre-pump (306) are connected by a connecting pipe two (304). A solenoid valve two (303) is installed inside the connecting pipe one (302), and a solenoid valve three (305) is installed inside the connecting pipe two (304).

4. A vacuum coating machine according to claim 1, characterized in that, The outer surface of the coating machine (1) is connected to a sealing door (2), and a partition (4) is fixedly installed inside the coating machine (1) and the sealing door (2). An emission source is installed on the inner surface of the coating machine (1).

5. A vacuum coating machine according to claim 1, characterized in that, The drive structure (6) consists of a motor (601), a rotating shaft (602), and a connecting seat (603). The motor (601) is installed below the partition (4). The output end of the motor (601) extends into the vacuum chamber of the coating machine (1) and is fixedly connected to the rotating shaft (602). The top end of the rotating shaft (602) is fixedly connected to the connecting seat (603). The upper surface of the connecting seat (603) has several threaded holes.

6. A vacuum coating machine according to claim 1, characterized in that, The detachable substrate frame structure (5) consists of a fixed base (501), a fixing bolt (502), a fixing shaft (503), a substrate frame (504), a clamp frame (505), a clamping plate (506), a threaded rod (507), and a knob (508).

7. A vacuum coating machine according to claim 6, characterized in that, The upper surface of the fixed base (501) is provided with several threaded holes. The fixed base (501) and the connecting seat (603) are connected by a fixing bolt (502). A fixed shaft (503) is fixedly connected to the upper surface of the fixed base (501). A substrate frame (504) is installed on the outer surface of the fixed shaft (503). Several clamp frames (505) are installed on the frame of the substrate frame (504). A threaded rod (507) is threadedly connected to the upper surface of the clamp frame (505). A knob (508) is fixedly connected to the top end of the threaded rod (507). A clamp plate (506) is fixedly connected to the bottom end of the threaded rod (507). The outer surface of the clamp plate (506) is provided with anti-slip texture.

8. A vacuum coating machine according to claim 1, characterized in that, The vacuum structure (7) consists of a vacuum pump (701), a vacuum tube (702), and a solenoid valve (703). The vacuum pump (701) and the coating machine (1) are connected through the vacuum tube (702), and the solenoid valve (703) is installed inside the vacuum tube (702).

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