Vacuum coating equipment door valve convenient maintenance structure

Abstract

The utility model relates to door valve maintenance technical field, concretely relates to a kind of vacuum coating equipment door valve convenient maintenance structure, including machine body, first cavity and second cavity are provided with adjacent on machine body, door valve for on-off is equipped between first cavity and second cavity, the position corresponding with door valve of the lateral wall of machine body is equipped with maintenance window, maintenance door is provided at maintenance window, and maintenance door includes the load-bearing pedestal fixed in the lateral wall of maintenance window, rotatable pedestal is hingedly arranged on load-bearing pedestal, rotatable pedestal is connected with the door plate for closing maintenance window, sealing element is equipped between the lateral wall of door plate and maintenance window, and door plate can be opened, to carry out online maintenance to door valve.

Description

Technical Field

[0001] This utility model relates to the field of valve maintenance technology, and in particular to a convenient maintenance structure for valves in vacuum coating equipment. Background Technology

[0002] In vacuum coating equipment (such as magnetron sputtering coating equipment), gate valves are core components that ensure process stability and a stable vacuum environment. Their primary function is vacuum isolation, separating different vacuum pressure chambers or isolating the vacuum from the atmosphere to prevent cross-contamination and maintain the background vacuum level and process gas purity in each chamber. They also ensure the sealing of the inlet and outlet during substrate entry and exit when not in operation. Secondly, gate valves can precisely control chamber pressure by adjusting the degree and timing of opening and closing, adapting to operational needs such as parts exchange. In multi-chamber systems, gate valves can control the transfer of substrates between chambers, ensuring seamless process continuity. They can also control the introduction of process gases, maintaining the necessary atmosphere for coating. Furthermore, in the event of sudden pressure changes or gas leaks, gate valves can quickly disconnect chambers, preventing the escalation of the fault and providing safety protection.

[0003] Traditional valve structures require the two chambers to be separated for maintenance, a cumbersome and time-consuming process that may also cause unnecessary damage to other components, reducing maintenance efficiency and increasing maintenance costs.

[0004] For example, the patent published on December 12, 2023, with announcement number CN220166270U, ​​entitled "A valve device for a vacuum coating equipment", includes a housing and a valve mechanism. The housing includes a feeding chamber, a vacuum chamber, and a feeding port on the vacuum chamber for workpieces to enter and exit. The sealing feeding component can seal the feeding port, so that the inside of the feeding chamber and the inside of the vacuum chamber can be independent of each other. The feeding chamber can be emptied independently, which helps to shorten the emptying time and improve the coating efficiency. However, when the valve needs to be maintained, the maintenance cost is high. Utility Model Content

[0005] In view of this, the purpose of this utility model is to propose a convenient maintenance structure for the valve of a vacuum coating equipment, so as to solve the problem of high maintenance costs.

[0006] To achieve the above objectives, this utility model provides a convenient maintenance structure for a vacuum coating equipment valve, comprising a body, on which adjacent first and second cavities are provided, and a valve for switching on and off is provided between the first and second cavities. A maintenance window is provided on the side wall of the body at a position corresponding to the valve, and a maintenance door is provided at the maintenance window. The maintenance door includes a support base fixed to the side wall of the maintenance window, and a rotating base is hinged to the support base. The rotating base is connected to a door panel for closing the maintenance window, and a sealing element is provided between the door panel and the side wall of the maintenance window.

[0007] Optionally, the sealing element is a sealing strip.

[0008] Optionally, a sealing ring is provided between the bearing base and the rotating base.

[0009] Optionally, the valve includes a main shaft rotatably connected to the machine body, and a valve plate is connected to the side wall of the main shaft through at least two connectors. The rotation of the main shaft drives the valve plate to rotate, thereby opening and closing the valve.

[0010] Optionally, the gate valve is a slide gate valve or a baffle valve.

[0011] The beneficial effects of this utility model are as follows: This utility model provides a convenient maintenance structure for the valve of a vacuum coating equipment. The valve is installed between the first and second chambers to isolate the first and second chambers during vacuum adjustment. When the first and second chambers are operating at different times, the valve is closed for isolation. Furthermore, when the first and second chambers are connected, the valve connection allows for wafer feeding while maintaining the vacuum environment of the chambers, thus maintaining production rhythm. However, during operation, particles and contaminants may accumulate on the valve, damaging its original sealing rings and other components. The maintenance door provides a window for valve maintenance, simplifying subsequent valve maintenance, shortening maintenance time, reducing the risk of equipment damage, reducing equipment recovery time after maintenance, lowering equipment maintenance costs, and improving convenience. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the structure of the valve of this utility model;

[0015] Figure 3 This is a schematic diagram of the body structure of this utility model.

[0016] In the diagram: 1. Body; 2. First cavity; 3. Second cavity; 4. Valve; 5. Main shaft; 6. Valve plate; 7. Connecting parts; 8. Maintenance door; 9. Maintenance window; 10. Bearing base; 11. Rotating base; 12. Door panel. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0018] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0019] like Figures 1 to 3 As shown, a convenient maintenance structure for a vacuum coating equipment valve includes a body 1. The body 1 has an adjacent first cavity 2 and a second cavity 3. A valve 4 for switching on and off is provided between the first cavity 2 and the second cavity 3. A maintenance window 9 is provided on the side wall of the body 1 at a position corresponding to the valve 4. A maintenance door 8 is provided at the maintenance window 9. The maintenance door 8 includes a support base 10 fixed to the side wall of the maintenance window 9. A rotating base 11 is hinged to the support base 10. A door plate 12 for closing the maintenance window 9 is connected to the rotating base 11. A sealing element is provided between the door plate 12 and the side wall of the maintenance window 9.

[0020] Valve 4 is installed between the first chamber 2 and the second chamber 3 to isolate them during vacuum adjustment. When the first chamber 2 and the second chamber 3 are operating at different times, valve 4 is closed for isolation. In addition, when the first chamber 2 and the second chamber 3 are connected, the valve 4 allows wafer feeding to be completed while maintaining the vacuum environment of the chambers, thus maintaining the production cycle. However, during operation, particles and contaminants may accumulate on valve 4, damaging its original sealing rings and other components. Maintenance door 8 can be used to address this. Maintenance door 8 provides a window for the maintenance of valve 4, simplifying subsequent maintenance work, shortening maintenance time, reducing the risk of equipment damage, reducing equipment recovery time after maintenance, lowering equipment maintenance costs, and improving convenience.

[0021] After both the first cavity 2 and the second cavity 3 are vented to atmospheric pressure, the door panel 12 can be opened to perform online maintenance on the valve 4.

[0022] The sealing element can be a sealing strip to improve sealing performance.

[0023] A sealing ring is provided between the bearing base 10 and the rotating base 11 to improve the sealing performance.

[0024] The valve 4 includes a main shaft 5 rotatably connected to the body 1. The side wall of the main shaft 5 is connected to a valve plate 6 through at least two connecting parts 7. The connecting parts 7 can be hinges. During the rotation of the main shaft 5, the valve plate 6 is rotated to realize the opening and closing of the valve 4. The valve 4 is connected to the valve plate 6 by at least two connecting parts 7, which makes the rotation of the valve plate 6 by the main shaft 5 more stable and has a longer service life.

[0025] The above description of valve 4 uses the reverse valve 4 as an example. The same applies to other valves that require maintenance, such as slide gate valves and baffle valves.

[0026] The maintenance structure can be set between two process chambers that require isolation control, whether it is a continuous line or a discontinuous line.

[0027] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples. The present invention is not limited to the above-described embodiments, that is, it does not mean that the present invention must rely on the above methods and structures to be implemented. Under the concept of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0028] The embodiments of this utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A convenient maintenance structure for a valve of a vacuum coating equipment, comprising a body, characterized in that, The machine body is provided with an adjacent first cavity and a second cavity. A valve for switching on and off is provided between the first cavity and the second cavity. A maintenance window is provided on the side wall of the machine body at a position corresponding to the valve. A maintenance door is provided at the maintenance window. The maintenance door includes a support base fixed to the side wall of the maintenance window. A rotating base is hinged on the support base. The rotating base is connected to a door panel for closing the maintenance window. A sealing element is provided between the door panel and the side wall of the maintenance window.

2. The convenient maintenance structure for a vacuum coating equipment valve according to claim 1, characterized in that, The sealing element is a sealing strip.

3. The convenient maintenance structure for a vacuum coating equipment valve according to claim 1, characterized in that, A sealing ring is provided between the bearing base and the rotating base.

4. The convenient maintenance structure for a vacuum coating equipment valve according to claim 1, characterized in that, The valve includes a main shaft rotatably connected to the machine body. A valve plate is connected to the side wall of the main shaft through at least two connectors. The rotation of the main shaft drives the valve plate to rotate, thereby opening and closing the valve.

5. The convenient maintenance structure for a vacuum coating equipment valve according to claim 1, characterized in that, The gate valve is either a slide gate valve or a baffle valve.

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