Annealing apparatus for preventing oxidation discoloration of sputtered copper layer

Abstract

The utility model provides a kind of sputtering copper layer oxidation discoloration annealing device, it is related to wafer processing field, including oven, the inner chamber both sides of oven are evenly provided with placing groove, the top edge portion of oven is connected with air inlet pipe by the penetration of sealing bearing, and the air inlet pipe is rotatably connected between the oven, the side of air inlet pipe is evenly fixedly connected with air outlet pipe;The application is provided by the setting of swing mechanism, starts drive motor, drives turntable rotation, makes connecting shaft circumferential motion, and then drives connecting rod to swing back and forth, so that connecting seat moves back and forth, to drive rack to move back and forth, make slider reciprocating sliding on the outside of slide rod, when rack moves back and forth, make gear reciprocating swing, and then make air inlet pipe deflect back and forth, make air outlet pipe deflect back and forth, avoid the fixed position of air outlet, conveniently back and forth to wafer blow, prevent insufficient reduction, improve the quality of processing.

Description

Technical Field

[0001] This utility model is specifically an annealing device for oxidation and discoloration of sputtered copper layers, belonging to the field of wafer processing technology. Background Technology

[0002] In the wafer bumping process, sputtered copper layers need to be baked at high temperatures to optimize film properties. However, copper is prone to react with oxygen at high temperatures to form copper oxide (CuO) or cuprous oxide (Cu2O), which leads to surface discoloration, increased roughness and electrical degradation. In order to avoid the sputtered copper layer being oxidized, a nitrogen-hydrogen mixed gas (N2 / H2) annealing process is introduced after sputtering the copper layer to suppress copper oxidation through a reducing atmosphere.

[0003] In existing technologies, when introducing gas, the gas is ejected from a single or fixed direction, resulting in a limited airflow coverage and a fixed direction. This makes it difficult to achieve all-round, no-dead-angle blowing on the wafer surface, which can easily lead to uneven reduction of the wafer surface by the gas, thereby affecting the quality of the wafer and reducing the practicality of the device. Utility Model Content

[0004] The purpose of this invention is to provide an annealing device for sputtered copper layer oxidation and discoloration in order to solve the above-mentioned problems. This addresses the issues in the prior art where the gas outlet position is fixed, making it difficult to evenly blow gas onto the wafer surface, which easily leads to uneven reduction of the wafer surface by gas, thereby affecting the quality of the wafer and reducing the practicality of the device.

[0005] This utility model is achieved through the following technical solution: an annealing device for oxidation and discoloration of sputtered copper layer, including a baking oven, wherein placement slots are evenly opened on both sides of the inner cavity of the baking oven, an air inlet pipe is connected through the top edge of the baking oven via a sealed bearing, and the air inlet pipe is rotatably connected to the baking oven, an air outlet pipe is evenly fixedly connected to one side of the air inlet pipe, and a connecting pipe is connected to the inner side wall of the air inlet pipe via a sealed bearing, and the connecting pipe is rotatably connected to the air inlet pipe; The top of the baking oven is connected to a swing mechanism, and one side of the connecting pipe is connected to a filter mechanism.

[0006] Preferably, the swing mechanism includes a gear fixedly connected to the top of the outer wall of the air intake pipe, a fixed plate symmetrically fixedly connected to the top of the oven, a slide rod symmetrically fixedly connected between opposite sides of the two fixed plates, a slider slidably connected to the outer wall of the slide rod, and a rack fixedly connected to the top of the slider.

[0007] Preferably, the swing mechanism further includes a connecting seat fixedly connected to one end of the rack, a drive motor fixedly connected to the top edge of the baking oven, a turntable fixedly connected to the output shaft end of the drive motor, a connecting shaft fixedly connected to the top edge of the turntable, and a connecting rod rotatably connected to the outer side wall of the connecting shaft.

[0008] Preferably, one end of the connecting rod is rotatably connected to the inside of the connecting seat. When the connecting shaft moves in a circular motion, the connecting rod deflects, thereby causing the connecting seat to move back and forth. One side of the rack meshes with the outer side of the gear, and when the rack moves, the gear deflects.

[0009] Preferably, the filtration mechanism includes a mounting base fixedly connected to one end of the connecting pipe, the inner sidewall of the mounting base having symmetrically formed slots, a filter screen being connected to the inner sidewall of the mounting base, and a pull handle being symmetrically fixedly connected to one side of the filter screen.

[0010] Preferably, the filtering mechanism further includes mounting cavities symmetrically formed on the outer wall of the filter screen, a return spring is fixedly connected to one side of the mounting cavity, a circular plate is fixedly connected to one end of the return spring, and a clip is fixedly connected to the middle of one side of the circular plate.

[0011] Preferably, the circular plate is slidably connected to the interior of the mounting cavity, and the outer wall of the circular plate is in contact with the inner wall of the mounting cavity, so that the circular plate can move stably inside the mounting cavity.

[0012] Preferably, one end of the clamp head is hemispherical, the clamp slot is hemispherical, and the clamp head and clamp slot cooperate with each other. The outer side wall of the mounting base is provided with threads to facilitate the connection of the mounting base to an external air supply pipe.

[0013] This invention provides an annealing device for oxidation and discoloration of sputtered copper layers, which has the following beneficial effects: 1. This application utilizes a swing mechanism to activate a drive motor, causing the turntable to rotate, which in turn causes the connecting shaft to rotate circumferentially. This, in turn, causes the connecting rod to swing back and forth, resulting in the connecting seat moving back and forth. This, in turn, causes the rack to move back and forth, allowing the slider to slide back and forth on the outside of the slide rod. Because the rack meshes with the gear, the gear swings back and forth as the rack moves back and forth, causing the air inlet pipe to deflect back and forth and the air outlet pipe to deflect back and forth. This prevents the air outlet from being fixed in one position, facilitates the back and forth blowing of the wafer, prevents insufficient reduction, and improves the quality of the processing.

[0014] 2. This application utilizes a filtration mechanism. By embedding the filter screen within the mounting base, the inner wall of the mounting base presses against the clamping head, causing the clamping head to retract into the mounting cavity. This moves the circular plate, which in turn presses against the return spring. The filter screen is then rotated. When the clamping head aligns with the slot, the return spring resets the circular plate, causing the clamping head to embed into the slot and fix the filter screen in place. This filter screen design facilitates gas filtration during ventilation, ensuring gas cleanliness and preventing interference with processing. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the air intake pipe installation structure of this utility model; Figure 3 This is a schematic diagram of the swing mechanism structure of this utility model; Figure 4 A schematic diagram of the card slot structure of this utility model; Figure 5 This is a schematic diagram of the card head installation structure of this utility model.

[0016] [Explanation of Key Component Symbols] 1. Baking oven; 101. Placement slot; 2. Intake pipe; 201. Exhaust pipe; 3. Connecting pipe; 4. Swinging mechanism; 401. Gear; 402. Fixed plate; 403. Slide bar; 404. Slider; 405. Rack; 406. Connecting seat; 407. Drive motor; 408. Turntable; 409. Connecting shaft; 410. Connecting rod; 5. Filtering mechanism; 501. Mounting base; 502. Slot; 503. Filter screen; 504. Pull handle; 505. Mounting cavity; 506. Return spring; 507. Round plate; 508. Clip. Detailed Implementation

[0017] This invention provides an annealing apparatus for oxidation and discoloration of sputtered copper layers. Example 1

[0018] An annealing device for oxidation and discoloration of sputtered copper layers includes a baking oven 1. Placement slots 101 are evenly provided on both sides of the inner cavity of the baking oven 1. An air inlet pipe 2 is connected through a sealed bearing to the top edge of the baking oven 1 and is rotatably connected to the baking oven 1. An air outlet pipe 201 is evenly fixedly connected to one side of the air inlet pipe 2. A connecting pipe 3 is connected to the inner wall of the air inlet pipe 2 through a sealed bearing and is rotatably connected to the air inlet pipe 2. A swing mechanism 4 is connected to the top of the baking oven 1, and a filter mechanism 5 is connected to one side of the connecting pipe 3.

[0019] Please refer to it again. Figure 2 , Figure 3 and Figure 4 The swing mechanism 4 includes a gear 401 fixedly connected to the top of the outer wall of the air intake pipe 2; fixed plates 402 are symmetrically fixedly connected to the top of the oven 1; slide rods 403 are symmetrically fixedly connected between opposite sides of the two fixed plates 402; a slider 404 is slidably connected to the outer wall of the slide rod 403; a rack 405 is fixedly connected to the top of the slider 404; the swing mechanism 4 also includes a connecting seat 406 fixedly connected to one end of the rack 405; a drive motor 407 is fixedly connected to the top edge of the oven 1; a turntable 408 is fixedly connected to the end of the output shaft of the drive motor 407; a connecting shaft 409 is fixedly connected to the top edge of the turntable 408; a connecting rod 410 is rotatably connected to the outer wall of the connecting shaft 409; one end of the connecting rod 410... The rack 405 is rotatably connected inside the connecting seat 406, and one side of the rack 405 is meshed with the outer side of the gear 401. Through the setting of the swing mechanism 4, the drive motor 407 is started, which drives the turntable 408 to rotate, causing the connecting shaft 409 to move in a circular motion, which in turn drives the connecting rod 410 to swing back and forth, causing the connecting seat 406 to move back and forth, thereby driving the rack 405 to move back and forth, causing the slider 404 to slide back and forth on the outer side of the slide rod 403. Since the rack 405 is meshed with the gear 401, when the rack 405 moves back and forth, the gear 401 swings back and forth, which in turn causes the air inlet pipe 2 to deflect back and forth, and the air outlet pipe 201 to deflect back and forth, avoiding the fixed position of the air outlet, facilitating the back and forth blowing of the wafer, preventing insufficient reduction, and improving the processing quality. Example 2

[0020] Please refer to it again. Figure 5The filter mechanism 5 includes a mounting base 501 fixedly connected to one end of the connecting pipe 3. The inner wall of the mounting base 501 has symmetrically formed slots 502. A filter screen 503 is connected to the inner wall of the mounting base 501, and a pull handle 504 is symmetrically fixedly connected to one side of the filter screen 503. The filter mechanism 5 also includes mounting cavities 505 symmetrically formed on the outer wall of the filter screen 503. A return spring 506 is fixedly connected to one side of the mounting cavity 505. A circular plate 507 is fixedly connected to one end of the return spring 506, and a clamping head 508 is fixedly connected to the middle of one side of the circular plate 507. The circular plate 507 is slidably connected to the interior of the mounting cavity 505, and the outer wall of the circular plate 507 is in contact with the inner wall of the mounting cavity 505. One end of the clamping head 508 is a hemispherical surface. The slot 502 is hemispherical, and the outer wall of the mounting base 501 is threaded. Through the setting of the filter mechanism 5, the filter screen 503 is embedded in the mounting base 501, and the inner wall of the mounting base 501 is pressed against the clamp head 508, causing the clamp head 508 to retract into the mounting cavity 505. This drives the circular plate 507 to move, causing the circular plate 507 to press against the return spring 506. Then, the filter screen 503 is rotated. When the clamp head 508 is aligned with the slot 502, the return spring 506 resets the circular plate 507, causing the clamp head 508 to be embedded in the slot 502, thus fixing the filter screen 503. The filter screen 503 facilitates gas filtration during ventilation, ensuring gas cleanliness and avoiding interference with processing.

[0021] When using this utility model: Working principle: Connect the electrical components to an external power supply and control switch. Embed the filter screen 503 in the mounting base 501, causing the inner wall of the mounting base 501 to press against the clamp head 508, retracting the clamp head 508 into the mounting cavity 505. This moves the circular plate 507, causing it to press against the return spring 506. Then, rotate the filter screen 503. When the clamp head 508 aligns with the slot 502, the return spring 506 resets the circular plate 507, causing the clamp head 508 to embed into the slot 502, fixing the filter screen 503. Connect the air supply pipe to the mounting base 501. The filter screen 503 facilitates gas filtration during ventilation, ensuring gas cleanliness. During the copper sputtering process of the circular bump process, the wafer is placed on a tray, and then the tray is placed in the placement slot 101. The oven door of the baking oven 1 is closed for baking. The drive motor 407 is started, which drives the turntable 408 to rotate, causing the connecting shaft 409 to move in a circular motion. This, in turn, drives the connecting rod 410 to swing back and forth, causing the connecting seat 406 to move back and forth. This, in turn, drives the rack 405 to move back and forth, causing the slider 404 to slide back and forth on the outside of the slide rod 403. Since the rack 405 meshes with the gear 401, when the rack 405 moves back and forth, the gear 401 swings back and forth, which in turn causes the air inlet pipe 2 to deflect back and forth, and the air outlet pipe 201 to deflect back and forth. This avoids the air outlet position being fixed, making it convenient to blow back and forth on the wafer and prevent incomplete reduction.

[0022] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An annealing device for oxidation discoloring of sputtered copper layer, comprising a baking oven (1), evenly provided with placing grooves (101) on both sides of the inner cavity of the baking oven (1), characterized in that: The top edge of the baking oven (1) is connected to an air inlet pipe (2) through a sealed bearing, and the air inlet pipe (2) is rotatably connected to the baking oven (1). An air outlet pipe (201) is uniformly fixedly connected to one side of the air inlet pipe (2). A connecting pipe (3) is connected to the inner wall of the air inlet pipe (2) through a sealed bearing, and the connecting pipe (3) is rotatably connected to the air inlet pipe (2). A swing mechanism (4) is connected to the top of the baking oven (1), and a filter mechanism (5) is connected to one side of the connecting pipe (3).

2. The apparatus for annealing to oxidize and discolor a sputtered copper layer according to claim 1, wherein: The swing mechanism (4) includes a gear (401) fixedly connected to the top of the outer wall of the air inlet pipe (2), a fixed plate (402) symmetrically fixedly connected to the top of the baking oven (1), a slide rod (403) symmetrically fixedly connected between the opposite sides of the two fixed plates (402), a slider (404) slidably connected to the outer wall of the slide rod (403), and a rack (405) fixedly connected to the top of the slider (404).

3. The apparatus according to claim 2, wherein the apparatus is characterized by: The swing mechanism (4) also includes a connecting seat (406) fixedly connected to one end of the rack (405), a drive motor (407) fixedly connected to the top edge of the baking oven (1), a turntable (408) fixedly connected to the output shaft end of the drive motor (407), a connecting shaft (409) fixedly connected to the top edge of the turntable (408), and a connecting rod (410) rotatably connected to the outer side wall of the connecting shaft (409).

4. The apparatus according to claim 3, wherein the apparatus is characterized by: One end of the connecting rod (410) is rotatably connected to the inside of the connecting seat (406), and one side of the rack (405) is meshed with the outside of the gear (401).

5. The apparatus for annealing to prevent oxidation discoloration of sputtered copper layer according to claim 1, wherein: The filter mechanism (5) includes a mounting base (501) fixedly connected to one end of the connecting pipe (3). The inner sidewall of the mounting base (501) is symmetrically provided with slots (502). The inner sidewall of the mounting base (501) is connected with a filter screen (503). A handle (504) is symmetrically fixedly connected to one side of the filter screen (503).

6. The apparatus according to claim 5, wherein the apparatus is characterized by: The filter mechanism (5) further includes mounting cavities (505) symmetrically opened on the outer side wall of the filter screen (503). A reset spring (506) is fixedly connected to one side of the mounting cavity (505), a circular plate (507) is fixedly connected to one end of the reset spring (506), and a clip (508) is fixedly connected to the middle of one side of the circular plate (507).

7. The apparatus according to claim 6, wherein the apparatus is characterized by: The circular plate (507) is slidably connected to the interior of the mounting cavity (505), and the outer sidewall of the circular plate (507) is in contact with the inner sidewall of the mounting cavity (505).

8. The apparatus according to claim 6, wherein the apparatus is characterized by: One end of the card head (508) is hemispherical, the card slot (502) is hemispherical, and the outer wall of the mounting base (501) is threaded.

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