Furnace door control structure and coating equipment

Abstract

The utility model discloses a kind of furnace door control structure and coating equipment, including the furnace door opening and closing subassembly of control furnace door relative furnace mouth movement, so that furnace mouth is opened or closed;The furnace door opening and closing subassembly is connected with furnace door through the multiple fine adjustment components of furnace door, the fine adjustment component includes rotating member connected with furnace door and the positioning member connected with the furnace door opening and closing subassembly, the positioning member is relatively rotated around pivot by adjusting piece control with the rotating member, to make furnace door relative furnace mouth carry out multidirectional angle adjustment.The utility model aims at the problems, such as insufficient, poor sealing, heat is easy to leak etc. of the fit accuracy of furnace door and furnace mouth in existing PECVD equipment, proposes a kind of furnace door control structure with multistage adjustment and accurate positioning function.The structure realizes the opening or closing of furnace door to furnace mouth by furnace door opening and closing subassembly, then multidimensional angle adjustment of fine adjustment component is combined, so that furnace door can realize micron level attitude correction in three-dimensional space, significantly improve the fit accuracy of furnace door and furnace mouth mouth along.

Description

Technical Field

[0001] This utility model relates to the field of door sealing technology, and in particular to a furnace door control structure and coating equipment. Background Technology

[0002] In the field of solar cell manufacturing, the vacuum reaction chamber of a plasma-enhanced chemical vapor deposition (PECVD) system is the core of the process. The inlet and outlet of the vacuum reaction chamber are the channels through which the carrier is fed into the reaction chamber, the process is completed, and then it is removed.

[0003] The furnace door is a structural device that seals the inlet and outlet of the vacuum reaction chamber, isolating the inner cavity of the vacuum reaction chamber from the external environment. Before and during the processing of silicon wafers, the furnace door is in a closed state with the inlet and outlet of the vacuum reaction chamber.

[0004] However, the current accuracy of the alignment between the furnace door and the furnace opening in the vacuum reaction chamber is too low, resulting in excessive heat loss from the vacuum reaction chamber. Utility Model Content

[0005] To solve at least one of the above-mentioned technical problems, on the one hand, this utility model provides a furnace door control structure to improve the sealing performance of the furnace door structure to the furnace opening and prevent heat from the furnace body from being lost from the furnace opening.

[0006] On the other hand, this utility model also proposes a coating equipment with a furnace door control structure.

[0007] The technical solution adopted in this utility model is to design a furnace door control structure, including a furnace door opening and closing assembly that controls the movement of the furnace door relative to the furnace opening, thereby opening or closing the furnace opening; the furnace door opening and closing assembly is connected to the furnace door through multiple fine-tuning components of the furnace door, the fine-tuning components include a rotating component connected to the furnace door and a positioning component connected to the furnace door opening and closing assembly, the positioning component and the rotating component are controlled to rotate relative to each other around a rotating axis through an adjusting component, so that the furnace door can be adjusted in multiple directions relative to the furnace opening.

[0008] In some embodiments, the fine-tuning component includes a first positioning mechanism, which includes a first positioning element, a first rotating element, and a first adjusting element. The first positioning element and the first rotating element are rotatably connected via a first rotating shaft. The first positioning element is connected to the furnace door opening and closing component, the first rotating element is connected to the furnace door, and the first adjusting element controls the rotation angle of the first rotating element relative to the first positioning element.

[0009] In some embodiments, the fine-tuning component further includes a second positioning mechanism, which includes a second positioning element, a second rotating element, and a second adjusting element. The second positioning element and the second rotating element are rotatably connected by a second rotating shaft. The first rotating shaft is perpendicular to the second rotating shaft. The second rotating element is connected to the first positioning element. The second positioning element is connected to the furnace door opening and closing component. The second adjusting element controls the rotation angle of the second rotating element relative to the second positioning element.

[0010] In some embodiments, the fine-tuning component further includes a third positioning mechanism, which includes a third positioning member, a third rotating member, and a third adjusting member. The third positioning member and the third rotating member are rotatably connected via a third rotating shaft. The third rotating member is connected to the second positioning member. The third rotating shaft, the second rotating shaft, and the first rotating shaft are perpendicular to each other. The third rotating member is connected to the second positioning member. The third positioning member is connected to the furnace door opening and closing component. The third adjusting member controls the rotation angle of the third rotating member relative to the third positioning member.

[0011] In some embodiments, the third positioning element is connected to the furnace door opening and closing assembly via a limit fine-tuning mechanism, which causes the third positioning element to move closer to or further away from the furnace opening.

[0012] In some embodiments, the furnace door opening and closing assembly includes a lifting mechanism, which includes a vertically arranged first guide rail and a lifting plate that slides with the first guide rail. The lifting plate is controlled by a first driving member to move up and down along the first guide rail, and the lifting plate is connected to a fine-tuning assembly via a support arm.

[0013] In some embodiments, the furnace door opening and closing assembly further includes a lateral movement mechanism, which includes a second guide rail arranged in a horizontal direction and a lateral movement plate that slides with the second guide rail. The lateral movement plate is controlled by a second driving member to move horizontally along the second guide rail, and the first guide rail and the first driving member are disposed on the lateral movement plate.

[0014] In some embodiments, the lifting plate is provided with a pin that extends and retracts toward the transverse plate. The pin is controlled to extend and retract by a third drive member. The transverse plate is provided with a hole corresponding to the pin. When the pin is inserted into the hole, the lifting plate is fixed in the vertical direction relative to the transverse plate.

[0015] In some embodiments, the transverse plate is provided with a position detection sensor to detect the lifting position of the lifting plate. When the position of the lifting plate is detected such that the pin corresponds to the socket, the third driving member drives the pin to insert into the socket.

[0016] In some embodiments, the inner side panel of the furnace door facing the furnace opening faces upward, and a collection tray corresponding to the furnace opening is provided on the inner side panel. A baffle is provided on the inner side panel surrounding the collection tray to prevent the collection tray from moving along the inner side panel. The collection tray is detachably arranged between the baffles.

[0017] A coating apparatus includes a furnace door control structure and a furnace body, with a furnace opening at one end of the furnace body.

[0018] Compared with the prior art, the present invention has the following beneficial effects: This invention addresses the problems of insufficient fitting accuracy between the furnace door and furnace opening, poor sealing, and easy heat leakage in existing PECVD equipment. It proposes a furnace door control structure with multi-level adjustment and precise positioning functions. This structure uses a furnace door opening and closing component to open or close the furnace door to the furnace opening. Combined with multi-dimensional angle adjustment of a fine-tuning component, the furnace door can achieve micron-level posture correction in three-dimensional space, significantly improving the fitting accuracy between the furnace door and furnace opening. Attached Figure Description

[0019] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings. To illustrate the details and facilitate understanding of its principles, the drawings are not necessarily to scale, and similar reference numerals may describe similar components in different views. The accompanying drawings generally illustrate the embodiments discussed herein by way of example and not limitation. Wherein: Figure 1 This is a schematic diagram showing the furnace door located below the furnace door.

[0020] Figure 2 This is a front schematic diagram of the furnace door control structure.

[0021] Figure 3 yes Figure 2 Enlarged diagram of point A in the middle.

[0022] Figure 4 yes Figure 2 A left-side view diagram.

[0023] Figure 5 yes Figure 4 An enlarged schematic diagram of point B.

[0024] Figure 6 This is a schematic diagram of the furnace door's fine-tuning components.

[0025] Figure 7 This is a schematic diagram showing the assembly of some components of the furnace door fine-tuning assembly.

[0026] Figure 8 This is a diagram showing the pin after it has been inserted into the socket.

[0027] Figure 9 This is a three-dimensional schematic diagram of the furnace door control structure.

[0028] In the diagram, 1. Furnace opening; 2. Furnace door; 11. First positioning component; 12. First rotating component; 13. First adjusting component; 14. First rotating shaft; 21. Second positioning component; 22. Second rotating component; 23. Second adjusting component; 24. Second rotating shaft; 31. Third positioning component; 32. Third rotating component; 33. Third adjusting component; 34. Third rotating shaft; 3. Fixing bolt; 4. Drive nut; 5. Adjusting side plate; 6. Lifting bolt; 7. First guide rail; 8. Lifting plate; 9. First driving component; 26. Second guide rail; 10. Horizontal sliding plate; 27. Displacement sensor; 15. Pin; 16. Third driving component; 17. Insertion hole; 18. Position detection sensor; 19. Collection tray; 20. Limiting post; 25. Support arm; 28. Second driving component. Detailed Implementation

[0029] The following are specific embodiments of this utility model, and the technical solution of this utility model will be further described with reference to the accompanying drawings. However, this utility model is not limited to these embodiments, and the following embodiments do not limit the utility model involved in the claims. In addition, all combinations of features described in the embodiments are not necessarily necessary for the solution of the utility model.

[0030] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0031] Example like Figures 1 to 7 As shown, a furnace door control structure for a coating equipment is used to control the opening and closing of the furnace opening 1 of a vacuum reaction chamber. The furnace door control structure includes a furnace door opening and closing assembly that controls the movement of the furnace door relative to the furnace opening 1, thereby opening or closing the furnace opening 1. The furnace door opening and closing assembly is connected to the furnace door through multiple fine-tuning components of the furnace door. The fine-tuning components include a rotating component connected to the furnace door and a positioning component connected to the furnace door opening and closing assembly. The positioning component and the rotating component are controlled to rotate relative to each other around a rotating axis by an adjusting component, so that the furnace door can be adjusted in multiple directions relative to the furnace opening 1.

[0032] The furnace door opening and closing assembly is used to control the long-distance movement of the furnace door 2 relative to the furnace opening 1, controlling the furnace door 2 to move away from the front of the furnace opening 1 or to initially fasten onto the furnace opening 1. The furnace door fine-tuning assembly is used to fine-tune the angle of the furnace door 2 relative to the furnace opening 1, so that the edge of the furnace door 2 fits better and the sealing performance is improved.

[0033] The furnace door control structure, through the coordination of the furnace door opening and closing assembly and the furnace door fine-tuning assembly, enables the movement and adjustment of furnace opening 1 relative to furnace opening 1 at different levels. Specifically, the furnace door opening and closing assembly undertakes the large-stroke movement function of furnace door 2. When furnace opening 1 is open, it moves furnace door 2 away from furnace opening 1, facilitating the entry and exit of carriers and silicon wafers; when furnace opening 1 is closed, furnace door 2 is pushed in front of furnace opening 1 for initial alignment. Because the vacuum reaction chamber requires extremely high sealing precision, relying solely on the opening and closing assembly often cannot guarantee a complete fit between furnace door 2 and the edge of furnace opening 1. Therefore, the furnace door fine-tuning assembly is further used to achieve fine adjustment of the furnace door 2's posture. This fine-tuning assembly can control the tilt angle of furnace door 2 relative to the plane of furnace opening 1, allowing the furnace door 2 panel to undergo angle compensation within a certain range, thereby correcting alignment errors caused by assembly deviations or thermal deformation. This structure allows the furnace door 2 to fit more tightly against the edge of the furnace opening 1, significantly improving the sealing performance of the furnace opening 1. This effectively prevents heat from leaking from the interface during the process, maintains a stable temperature environment inside the vacuum reaction chamber, thereby improving the consistency and yield of the silicon wafer process, extending the service life of the equipment, and reducing energy consumption.

[0034] It should be noted that the positioning component may include a first positioning component 11, and / or a second positioning component 21, and / or a third positioning component 31. The rotating component may include a first rotating component 12, and / or a second rotating component 22, and / or a third rotating component 32. The adjusting component may include a first adjusting component 13, and / or a second adjusting component 23, and / or a third adjusting component 33. The rotating shaft may include a first rotating shaft 14, and / or a second rotating shaft 24, and / or a third rotating shaft 34.

[0035] Furthermore, the fine-tuning component includes a first positioning mechanism, which includes a first positioning element 11, a first rotating element 12, and a first adjusting element 13. The first positioning element 11 and the first rotating element 12 are rotatably connected by a first rotating shaft 14. The first positioning element 11 is connected to the furnace door opening and closing component, the first rotating element 12 is connected to the furnace door 2, and the first adjusting element 13 controls the rotation angle of the first rotating element 12 relative to the first positioning element 11.

[0036] Both the first positioning member 11 and the first rotating member 12 are rectangular plates. The first adjusting member 13 includes two nuts, which are fixed on two opposite sides of the plate of the first positioning member 11. The nuts are fitted with bolts, and the ends of the two bolts push against the two opposite sides of the plate of the first rotating member 12. The bolts rotate relative to the nuts to push against different sides of the plate of the first positioning member 11, thereby controlling the rotation angle of the first rotating member 12 relative to the first positioning member 11.

[0037] The fine-tuning component, through the establishment of a first positioning mechanism, achieves precise adjustment of the angle between the furnace door 2 and the furnace opening 1. Specifically, the first positioning component 11 is fixedly connected to the furnace door opening and closing assembly to provide a stable installation reference; the first rotating component 12 is connected to the furnace door 2 and can rotate relative to the first positioning component 11 around the first rotating shaft 14; the first adjusting component 13 applies a control force, causing the first rotating component 12 to rotate within a limited range, thereby causing a slight change in the posture of the furnace door 2. With this structure, after the furnace door 2 completes its initial alignment under the action of the furnace door opening and closing assembly, the operator or control system can adjust the first adjusting component 13 to correct the angle between the furnace door 2 and the plane of the furnace opening 1, thereby eliminating alignment errors caused by processing or installation deviations. This solution not only improves the fitting accuracy between the furnace door 2 and the edge of the furnace opening 1, significantly enhancing sealing, but also reduces heat and gas leakage, ensuring a stable temperature and atmosphere environment within the vacuum reaction chamber, thereby improving the reliability of the coating process and product yield.

[0038] Furthermore, the fine-tuning component also includes a second positioning mechanism, which includes a second positioning element 21, a second rotating element 22, and a second adjusting element 23. The second positioning element 21 and the second rotating element 22 are rotatably connected by a second rotating shaft 24. The second positioning element 21 is connected to the first rotating element 12. The first rotating shaft 14 is perpendicular to the second rotating shaft 24. The first rotating element 12 is connected to the second positioning element 21. The second positioning element 21 is connected to the furnace door opening and closing component. The second adjusting element 23 controls the rotation angle of the second rotating element 22 relative to the second positioning element 21.

[0039] Both the second positioning member 21 and the second rotating member 22 are rectangular plates. The second adjusting member 23 includes two nuts, which are respectively fixed on two opposite sides of the plate of the second positioning member 21. The nuts are fitted with bolts, and the ends of the two bolts push against the two opposite sides of the plate of the second rotating member 22. The bolts rotate relative to the nuts to push against different sides of the plate of the second positioning member 21, thereby controlling the rotation angle of the second rotating member 22 relative to the second positioning member 21.

[0040] The fine-tuning component, through the further addition of a second positioning mechanism, enables precise adjustment of the furnace door 2 in multiple degrees of freedom. Specifically, the second positioning element 21 is connected to the first rotating element 12 and rotatably connected to the second rotating element 22 via a second rotating shaft 24, with the second rotating shaft 24 arranged perpendicularly to the first rotating shaft 14. This allows the furnace door 2 to be adjusted in two mutually perpendicular rotational directions. The second adjusting element 23 controls the rotation angle of the second rotating element 22 relative to the second positioning element 21, thereby causing the furnace door 2 to undergo angle compensation in another direction. Through the combination of the first and second positioning mechanisms, the furnace door 2 can achieve independent fine-tuning relative to the furnace opening 1 plane in different degrees of freedom, avoiding incomplete fitting due to insufficient adjustment in a single direction. This structure effectively improves the all-around fitting accuracy between the furnace door 2 and the edge of the furnace opening 1, further enhancing sealing performance, reducing heat and gas leakage, thereby ensuring a stable process environment within the vacuum reaction chamber and improving the yield of the coating process.

[0041] Furthermore, the fine-tuning component also includes a third positioning mechanism, which includes a third positioning element 31, a third rotating element 32, and a third adjusting element 33. The third positioning element 31 and the third rotating element 32 are rotatably connected by a third rotating shaft 34. The third positioning element 31 is connected to the second rotating element 22. The third rotating shaft 34, the second rotating shaft 24, and the first rotating shaft 14 are perpendicular to each other. The third rotating element 32 is connected to the second positioning element 21. The third positioning element 31 is connected to the furnace door opening and closing component. The third adjusting element 33 controls the rotation angle of the third rotating element 32 relative to the third positioning element 31.

[0042] Both the third positioning member 31 and the third rotating member 32 are rectangular plates. The third adjusting member 33 includes two nuts, which are fixed on two opposite sides of the plate of the third positioning member 31. The nuts are fitted with bolts, and the ends of the two bolts push against the two opposite sides of the plate of the third rotating member 32. The bolts rotate relative to the nuts to push against different sides of the plate of the third positioning member 31, thereby controlling the rotation angle of the third rotating member 32 relative to the third positioning member 31.

[0043] The fine-tuning component, by adding a third positioning mechanism, enables the furnace door 2 to have omnidirectional fine-tuning capabilities in three-dimensional space. Specifically, the third positioning component 31 is connected to the second rotating component 22 and is rotatably connected to the third rotating component 32 via a third rotating shaft 34. The third rotating shaft 34 is arranged perpendicularly to both the first and second rotating shafts 24, thus adding an independent direction for angle correction on top of the original two-degree-of-freedom adjustment. The third adjusting component 33 is used to precisely control the rotation angle of the third rotating component 32 relative to the third positioning component 31, enabling the furnace door 2 to achieve attitude compensation in three directions. Through the cooperation of the first, second, and third positioning mechanisms, the furnace door 2 can be adjusted in three mutually perpendicular directions, solving complex deviation problems caused by equipment assembly errors, thermal deformation, or long-term operation. This solution further ensures that the furnace door 2 fits tightly against the edge of the furnace opening 1 in multiple dimensions, significantly improving sealing and stability, thereby effectively preventing heat and gas leakage, ensuring temperature and atmosphere control within the vacuum reaction chamber, and improving the consistency and yield of the coating process.

[0044] It should be noted that the shapes of the first positioning component 11, the first rotating component 12, the second positioning component 21, the second rotating component 22, the third positioning component 31, and the third rotating component 32 can be rectangular, rhomboid, polygonal, etc., as long as they can achieve the functions of fixed connection and rotation adjustment. The number of the first adjusting component 13, the second adjusting component 23, and the third adjusting component 33 can be multiple, and their positions can be on one side or multiple sides, which is not limited here.

[0045] Furthermore, the third positioning component 31 is connected to the furnace door opening and closing assembly via a limiting and fine-tuning mechanism. This mechanism allows the third positioning component 31 to move closer to or further away from the furnace opening 1. The limiting and fine-tuning mechanism includes a fixing bolt 3 and a drive nut 4 that engages with the fixing bolt 3. A through hole is provided on the support arm 25 of the furnace door opening and closing assembly. The drive nut 4 is located above the through hole. The fixing bolt 3 passes through the through hole and the upper end of the drive nut 4 and is fixedly connected to the plate of the third rotating component 32. By rotating the drive nut 4, the fixing bolt 3 is raised or lowered, thereby controlling the third rotating component 32 to make fine adjustments in the vertical direction. This, in turn, allows the furnace door 2 to make fine adjustments in the vertical direction relative to the furnace opening 1, resulting in a better seal between the furnace door 2 and the furnace opening 1. In this embodiment, the lower end of the third positioning component 31 plate is connected to an adjusting side plate 5. The support arm 25 of the furnace door opening and closing assembly is provided with two parallel lifting bolts 6. The support arm 25 of the furnace door opening and closing assembly is provided with a screw hole that is threaded to the lifting bolt 6. The upper ends of the two lifting bolts 6 support the lower surface of the adjusting side plate 5. The lifting bolts 6 rotate relative to the screw hole to achieve up-and-down fine adjustment of the third positioning component 31, thereby cooperating with the third rotating component 32 to achieve up-and-down fine adjustment of the furnace door 2.

[0046] Furthermore, the furnace door opening and closing assembly includes a lifting mechanism, which includes a vertically arranged first guide rail 7 and a lifting plate 8 that slides with the first guide rail 7. The lifting plate 8 is controlled by a first driving component 9 to move up and down along the first guide rail 7, and the lifting plate 8 is connected to a fine-tuning component via a support arm 25. The first driving component 9 can be, for example, a cylinder, an electric cylinder, a motor, or other telescopic driving device.

[0047] The furnace door opening and closing assembly utilizes a lifting mechanism to achieve vertical opening and closing of the furnace door 2 relative to the furnace opening 1. Specifically, the lifting mechanism includes a vertically arranged first guide rail 7, with a lifting plate 8 slidingly engaged with it. Under the drive of a first driving component 9, the lifting plate 8 can move stably up and down along the guide rail. The lifting plate 8 is connected to a fine-tuning component via a support arm 25. In this embodiment, the lifting plate 8 is connected to the fine-tuning component via the support arm 25 and a fixing bolt 3, ensuring that the furnace door 2 maintains a linkage with the fine-tuning component during the lifting process. When the furnace opening 1 needs to be opened, the lifting plate 8 moves upward or downward under the driving action, thereby moving the furnace door 2 away from the furnace opening 1, facilitating the entry and exit of the carrier. When the furnace opening 1 is closed, the lifting plate 8 pushes the furnace door 2 to the position of the furnace opening 1, and then the fine-tuning component performs angle fine-tuning to achieve precise fitting between the furnace door 2 and the furnace opening 1. This design not only ensures the smoothness and positioning accuracy of the lifting movement of the furnace door 2 but also improves the sealing effect of the furnace door 2 during final fitting, reducing heat and gas leakage and ensuring the stability of the process environment in the vacuum reaction chamber.

[0048] Furthermore, the furnace door opening and closing assembly also includes a horizontal sliding mechanism. This mechanism includes a second guide rail 26 arranged horizontally and a horizontal sliding plate 10 slidably engaged with the second guide rail 26. The horizontal sliding plate 10 is controlled by a second driving member 28 to move horizontally along the second guide rail 26. The first guide rail 7 and the first driving member 9 are mounted on the horizontal sliding plate 10. The second driving member 28 can be, for example, a cylinder, an electric cylinder, a motor, or other telescopic driving device. A displacement sensor 27 for detecting the position of the horizontal sliding plate 10 can be mounted on the second guide rail 26. The displacement sensor 27 can be, for example, a position detection sensor such as a touch switch.

[0049] The furnace door opening and closing assembly, through the inclusion of a horizontal sliding mechanism, enables the furnace door 2 to open and close horizontally. Specifically, the horizontal sliding mechanism includes a second guide rail 26 arranged horizontally, with a horizontal sliding plate 10 slidingly engaged with the second guide rail 26, allowing for stable horizontal movement under the drive of a second driving component. The first guide rail 7 and the first driving component 9 are mounted on the horizontal sliding plate 10, causing the entire lifting mechanism to move horizontally along with the horizontal sliding plate 10. During the opening and closing process, the furnace door 2 is first moved horizontally by the horizontal sliding mechanism, moving it away from or closer to the furnace opening 1. Then, the lifting mechanism makes vertical adjustments, and finally, the fine-tuning component completes precise angle compensation. This multi-stage motion coordination structure ensures the flexibility and controllability of the furnace door 2's movement. It not only meets the need for long-distance opening and closing of the furnace door 2 but also ensures precise alignment of the furnace door 2 with the furnace opening 1 when closed, significantly improving the sealing effect, reducing energy and gas leakage, and ensuring a stable process environment in the vacuum reaction chamber.

[0050] Furthermore, such as Figure 8 As shown, the lifting plate 8 is provided with a pin 15 that extends and retracts toward the transverse plate 10. The pin 15 is controlled to extend and retract by a third drive member 16. The transverse plate 10 is provided with a hole 17 corresponding to the pin 15. When the pin 15 is inserted into the hole 17, the lifting plate 8 is fixed in the vertical direction relative to the transverse plate 10. The third drive member 16 can be, for example, a cylinder, an electric cylinder, a motor, or other extension and retraction drive device.

[0051] The lifting plate 8 and the transverse plate 10 are reliably positioned and locked through the cooperation of a pin 15 and a socket 17. Specifically, the lifting plate 8 is provided with a pin 15 that can extend and retract in the direction toward the transverse plate 10. This pin 15 is driven by a third drive member 16 to automatically extend or retract. A corresponding socket 17 is provided on the transverse plate 10. When the lifting plate 8 moves to the predetermined position, the pin 15 extends into the socket 17 under the action of the third drive member 16, fixing the lifting plate 8 relative to the transverse plate 10 in the vertical direction, thereby preventing shaking or displacement during the lifting process. After the lifting plate 8 completes the required vertical movement and enters the working position, the insertion of the pin 15 can effectively enhance the stability of the overall structure, withstand the weight of the furnace door 2 or the reaction force during the sealing and pressing process, prevent the furnace door 2 from falling, and ensure that the furnace door 2 remains stable when it is aligned with the furnace opening 1. This design not only improves the motion accuracy and positioning reliability, but also extends the service life of the lifting and transverse mechanisms, ensuring the sealing effect of the vacuum reaction chamber and the stability of the process environment. When the furnace door 2 needs to be stopped in an emergency, the latch 15 can be inserted into the through hole of the horizontal sliding plate 10 to stop the movement of the furnace door 2 in an emergency and prevent the furnace door 2 from falling.

[0052] Furthermore, the transverse plate 10 is equipped with a position detection sensor 18 for detecting the lifting position of the lifting plate 8. When the position of the lifting plate 8 is detected such that the pin 15 corresponds to the socket 17, the third driving member 16 causes the pin 15 to be inserted into the socket 17. The position detection sensor 18 can be, for example, a touch switch.

[0053] A positioning sensor 18 installed on the transverse plate 10 is used to monitor the vertical position of the lifting plate 8 in real time. When the lifting plate 8 moves to a state where the pin 15 and the socket 17 are accurately aligned, the sensor outputs a detection signal to control the third drive component 16 to extend the pin 15 and insert it into the socket 17, thereby achieving precise locking between the lifting plate 8 and the transverse plate 10. This avoids the problem of the pin 15 being misaligned or unable to be inserted due to manual judgment or positional deviation, ensuring that the pin 15 and the socket 17 are in the optimal alignment position. This automatic detection and linkage control method not only improves the accuracy and reliability of the pin 15 insertion, but also reduces the accumulation of errors during equipment operation and improves the overall accuracy of the opening and closing positioning of the furnace door 2. Ultimately, it can effectively enhance the stability of the furnace door 2 when it is in contact with the furnace opening 1, ensure the sealing effect of the vacuum reaction chamber and the constancy of the process environment, and improve the intelligence and safety of equipment operation.

[0054] Furthermore, such as Figure 9 As shown, the inner side panel of the furnace door 2, opposite to the furnace opening 1, faces upward. A collection tray 19, corresponding vertically to the furnace opening 1, is provided on the inner side panel. A baffle is provided around the collection tray 19 on the inner side panel to prevent the collection tray 19 from moving along the inner side panel. The collection tray 19 is detachably arranged between the baffles. The baffle can be a limiting post 20 protruding relative to the furnace door 2.

[0055] During the process, any accidental event causing chip or fragment drop will result in the chip or fragment falling directly to the bottom of the reaction chamber or the inlet / outlet area located at the bottom of the chamber. Normally, the seal between the furnace opening 1 and the inlet / outlet ports of the reaction chamber is achieved using a sealing ring between them; this seal is a crucial requirement for achieving a vacuum level in the vacuum reaction chamber. If the fragments fall directly below the furnace opening 1 or to other areas and are not cleaned up promptly, these fragments can easily contaminate the reaction chamber.

[0056] To prevent debris from falling below the furnace opening 1 or into other areas, this embodiment employs a collection tray 19 on the furnace door 2, corresponding vertically to the furnace opening 1. This tray blocks debris that would otherwise fall below the furnace opening 1 or into other areas, and can accommodate a certain volume of accumulated debris, avoiding the need for frequent cleaning and improving economic efficiency. During maintenance, the tray is removed from the furnace door 2, the debris is emptied, and the tray is then reinstalled on the furnace door 2. The simple limiting mechanism relative to the protrusion on the furnace door 2 eliminates the need for additional tools such as wrenches or hexagonal screwdrivers when removing the collection tray 19.

[0057] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A furnace door control structure, characterized in that: The furnace door includes a furnace door opening and closing assembly that controls the movement of the furnace door relative to the furnace opening, thereby opening or closing the furnace opening. The furnace door opening and closing assembly is connected to the furnace door through multiple fine-tuning components of the furnace door. The fine-tuning components include a rotating component connected to the furnace door and a positioning component connected to the furnace door opening and closing assembly. The positioning component and the rotating component are controlled to rotate relative to each other around a rotating axis through an adjusting component, so that the furnace door can be adjusted in multiple directions relative to the furnace opening.

2. The furnace door control structure according to claim 1, characterized in that, The fine-tuning component includes a first positioning mechanism, which includes a first positioning element, a first rotating element, and a first adjusting element. The first positioning element and the first rotating element are rotatably connected via a first rotating shaft. The first positioning element is connected to the furnace door opening and closing component, the first rotating element is connected to the furnace door, and the first adjusting element controls the rotation angle of the first rotating element relative to the first positioning element.

3. The furnace door control structure according to claim 2, characterized in that, The fine-tuning component further includes a second positioning mechanism, which includes a second positioning element, a second rotating element, and a second adjusting element. The second positioning element and the second rotating element are rotatably connected via a second rotating shaft. The second rotating element is connected to the first positioning element, and the first rotating shaft is perpendicular to the second rotating shaft. The second positioning element is connected to the furnace door opening and closing component, and the second adjusting element controls the rotation angle of the second rotating element relative to the second positioning element.

4. The furnace door control structure according to claim 3, characterized in that, The fine-tuning component further includes a third positioning mechanism, which includes a third positioning element, a third rotating element, and a third adjusting element. The third positioning element and the third rotating element are rotatably connected by a third rotating shaft. The third rotating element is connected to the second positioning element. The third rotating shaft, the second rotating shaft, and the first rotating shaft are perpendicular to each other. The third positioning element is connected to the furnace door opening and closing component. The third adjusting element controls the rotation angle of the third rotating element relative to the third positioning element.

5. The furnace door control structure according to claim 4, characterized in that, The third positioning component is connected to the furnace door opening and closing assembly through a limiting and fine-tuning mechanism, which allows the third positioning component to move closer to or further away from the furnace opening.

6. The furnace door control structure according to claim 1, characterized in that, The furnace door opening and closing assembly includes a lifting mechanism, which includes a vertically arranged first guide rail and a lifting plate that slides with the first guide rail. The lifting plate is controlled by a first driving component to move up and down along the first guide rail, and the lifting plate is connected to the fine-tuning assembly via a support arm.

7. The furnace door control structure according to claim 6, characterized in that, The furnace door opening and closing assembly also includes a horizontal sliding mechanism, which includes a second guide rail arranged in a horizontal direction and a horizontal sliding plate that slides with the second guide rail. The horizontal sliding plate is controlled by a second driving member to move horizontally along the second guide rail. The first guide rail and the first driving member are arranged on the horizontal sliding plate.

8. The furnace door control structure according to claim 7, characterized in that, The lifting plate is provided with a pin that extends and retracts toward the transverse plate. The pin is controlled to extend and retract by a third driving component. The transverse plate is provided with a hole corresponding to the pin. When the pin is inserted into the hole, the lifting plate is fixed in the vertical direction relative to the transverse plate.

9. The furnace door control structure according to claim 8, characterized in that, The transverse plate is equipped with a positioning sensor to detect the lifting position of the lifting plate. When the position of the lifting plate is detected such that the pin corresponds to the socket, the third driving member drives the pin to insert into the socket.

10. The furnace door control structure according to claim 1, characterized in that, The inner side panel of the furnace door, which is opposite to the furnace opening, faces upward. A collection tray corresponding to the furnace opening is provided on the inner side panel. A baffle is provided on the inner side panel to surround the collection tray, and the baffle prevents the collection tray from moving along the inner side panel.

11. A coating apparatus, characterized in that, It includes the furnace door control structure and furnace body as described in any one of claims 1-10, wherein one end of the furnace body is provided with a furnace opening.

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