Chemical vapor deposition apparatus

Abstract

The utility model relates to a kind of chemical vapor deposition equipment, including coating main body and limiting component.Coating main body includes coating chamber and lower electrode, and multiple support rods are telescopically arranged on lower electrode.Lower electrode is provided with limiting hole through, limiting hole includes first hole section and second hole section, and the inner diameter size of first hole section is greater than the inner diameter size of second hole section.Limiting component includes support and two limiting rods, and the bottom end of support is connected with the cavity bottom of coating chamber, and the top end of support is set in limiting hole.Two limiting rods are respectively arranged at the opposite ends of support, and two limiting rods are elastically connected between, and make two limiting rods between have the movement tendency of mutually away.When lower electrode rises, the bottom end of two limiting rods enters second hole section, and two limiting rods pinch the angle of display panel, to carry out position correction and limiting to display panel, so that the actual placement position of display panel matches with theoretical position, improves coating quality.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a chemical vapor deposition apparatus. Background Technology

[0002] With the development of semiconductor technology, the development and use of plasma-enhanced chemical vapor deposition (PECVD) devices have become increasingly widespread. This device utilizes glow discharge to ionize chemical gases and form thin film structures on a glass substrate. (See reference...) Figure 1 As shown, a conventional chemical vapor deposition (CVD) apparatus includes a housing 1', an upper electrode 2', a lower electrode 3', and a support rod 4'. The housing 1' contains a deposition chamber for accommodating a display panel 5'. The upper electrode 2' is positioned at the top of the deposition chamber, and the lower electrode 3' is vertically adjustable at the bottom of the chamber. The support rod 4' passes through the lower electrode 3' and supports the display panel 5'. During deposition, the display panel 5' is placed on the lower electrode 3', directly opposite the upper electrode 2'. Ionized chemical gases are injected downwards through pores in the upper electrode 2' onto the surface of the display panel 5' to form a thin film structure. When the display panel 5' is removed or placed, the lower electrode 3' descends, the bottom end of the support rod 4' abuts against the bottom of the housing 1', and the support rod 4' lifts the display panel 5', creating a gap between the display panel 5' and the lower electrode 3' for a robotic arm to pick up the display panel 5'.

[0003] The existing technology has the following drawbacks: After the robotic arm places the display panel 5' onto the support rod 4', the lower electrode 3' rises, eventually allowing the display panel 5' to rest flat on the top surface of the lower electrode 3'. Because the top of the support rod 4' is designed with a rounded head to reduce the contact area between the support rod 4' and the display panel 5', the vibration generated during the movement of the lower electrode 3' can cause the display panel 5' to slide on the support rod 4'. This sliding of the display panel 5' results in a deviation between its actual and theoretical position, thus affecting the actual coating area of ​​the display panel 5' and the coating quality. Utility Model Content

[0004] The purpose of this invention is to provide a chemical vapor deposition device that can perform position correction and limiting on the display panel during the loading and unloading process, so that the actual placement position of the display panel matches the theoretical position, thereby improving the coating quality of the display panel.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A chemical vapor deposition apparatus is provided, comprising:

[0007] A coating body includes a coating chamber and a lower electrode that can be lifted and lowered within the coating chamber. The top surface of the lower electrode forms a support surface for placing a display panel. The lower electrode is provided with a plurality of support rods that can telescopically move relative to the lower electrode. The top ends of the support rods are used to selectively support the display panel. A limiting hole is provided through the lower electrode. The limiting hole includes a first hole section close to the support surface and a second hole section away from the support surface. The inner diameter of the first hole section is larger than the inner diameter of the second hole section.

[0008] A limiting assembly includes a support member and two limiting rods. The bottom end of the support member is connected to the bottom of the coating chamber, and the top end of the support member passes through the limiting hole. The two limiting rods are spaced apart at one end of the support member and are rotatably connected to the support member. The two limiting rods are elastically connected and tend to move away from each other. When the limiting rods move from the first hole segment to the second hole segment, the two limiting rods approach each other and abut against the two sides of the display panel respectively. When the limiting rods move from the second hole segment to the first hole segment, the two limiting rods move away from each other and are spaced apart from the display panel.

[0009] As a preferred embodiment of a chemical vapor deposition apparatus, the inner diameter of the first aperture gradually increases from one end near the second aperture to the end away from the second aperture.

[0010] As a preferred embodiment of a chemical vapor deposition apparatus, the end of the first aperture section opposite to the second aperture section forms two spaced openings, and the two limiting rods are respectively inserted through the two openings.

[0011] As a preferred embodiment of the chemical vapor deposition apparatus, the limiting component further includes a baffle disposed on the side of the limiting rod opposite to the display panel, the baffle being used to block the opening in the vertical direction.

[0012] As a preferred embodiment of the chemical vapor deposition apparatus, the two limiting rods are symmetrically distributed relative to the diagonal of the display panel.

[0013] As a preferred embodiment of a chemical vapor deposition (CVD) apparatus, the support includes a vertically arranged vertical rod and a horizontally arranged horizontal rod. The bottom end of the vertical rod is connected to the bottom of the coating chamber, the top end of the vertical rod extends into the limiting hole, the two ends of the horizontal rod are rotatably connected to the two limiting rods respectively, and the middle part of the horizontal rod is connected to the top end of the vertical rod.

[0014] As a preferred embodiment of chemical vapor deposition equipment, the junction between the first aperture section and the second aperture section is circularly transitioned.

[0015] As a preferred embodiment of a chemical vapor deposition apparatus, two limiting components are provided, which are distributed at both ends of the diagonal of the display panel.

[0016] As a preferred embodiment of a chemical vapor deposition apparatus, one end of the support rod is connected to the bottom of the coating chamber, and the other end passes through the lower electrode and is used to selectively abut against the display panel.

[0017] As a preferred embodiment of a chemical vapor deposition apparatus, an exhaust port is provided at the bottom of the coating chamber, and the exhaust port is located near the limiting component.

[0018] The advantages of this utility model compared to the prior art are:

[0019] This invention relates to a chemical vapor deposition (CVD) apparatus. A limiting component is incorporated, with limiting holes on the lower electrode for the component to pass through. The limiting component includes a support member connected to the bottom of the coating chamber and two limiting rods mounted on the top of the support member. When the lower electrode descends, the display panel abuts against the top of the support rods, creating a gap between the display panel and the lower electrode for a robotic arm to pick up and place the display panel. Simultaneously, both limiting rods fully enter the first hole section, maintaining a gap between the rods and the display panel. When the lower electrode rises, the display panel is placed on the support surface. Simultaneously, the bottom ends of the two limiting rods enter the second hole section, clamping the corners of the display panel to perform position correction and limiting, ensuring the actual placement of the display panel matches the theoretical position and improving coating quality. Attached Figure Description

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0021] Figure 1 This is a schematic diagram of a chemical vapor deposition (CVD) apparatus in the prior art.

[0022] Figure 2 This is a schematic diagram of a chemical vapor deposition apparatus (coating state) according to an embodiment of the present invention.

[0023] Figure 3 This is a schematic diagram of a chemical vapor deposition apparatus (in pick-up and drop state) according to an embodiment of the present invention.

[0024] Figure 4 This is a top view of the lower electrode according to an embodiment of the present invention.

[0025] Figure 5 for Figure 4Cross-sectional view along the AA direction (coating condition).

[0026] Figure 6 for Figure 4 Sectional view along the AA direction (in pick-up and drop position).

[0027] Figure 1 middle:

[0028] 1′, Housing; 2′, Upper electrode; 3′, Lower electrode; 4′, Support rod; 5′, Display panel.

[0029] Figures 2 to 6 middle:

[0030] 1. Coating body; 10. Coating chamber; 11. Housing; 12. Upper electrode; 13. Lower electrode; 131. Limiting hole; 1311. First hole segment; 13110. Opening; 1312. Second hole segment; 132. Bearing surface; 14. Support rod; 15. Mask; 16. Base; 17. Exhaust port; 18. Door; 19. Drive component; 2. Limiting assembly; 21. Support component; 211. Vertical rod; 212. Horizontal rod; 22. Limiting rod; 23. Spring; 24. Baffle; 3. Display panel; 4. Gap. Detailed Implementation

[0031] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0032] The present invention will now be described in detail with reference to the accompanying drawings.

[0033] like Figures 2 to 6 As shown, this utility model provides a chemical vapor deposition (CVD) apparatus for coating a display panel 3. The CVD apparatus includes a coating body 1 and a positioning component 2. The coating body 1 is the main part of the CVD apparatus and is used for coating the display panel 3. The positioning component 2 is used to correct and limit the position of the display panel 3 to ensure that the actual placement position of the display panel 3 matches the theoretical position.

[0034] The coating body 1 includes a housing 11, an upper electrode 12, a lower electrode 13, and a support rod 14. The housing 11 has a cuboid structure, and a coating chamber 10 is formed inside the housing 11. The upper electrode 12 is located at the top of the coating chamber 10, and the lower electrode 13 is located at the bottom of the coating chamber 10. The top surface of the lower electrode 13 forms a bearing surface 132. During the coating process, the display panel 3 is placed on the bearing surface 132. The bearing surface 132 faces the upper electrode 12 so that the display panel 3 is located directly below the upper electrode 12. The upper electrode 12 introduces chemical gas into the coating chamber 10, and the upper electrode 12 is connected to an radio frequency current. The lower electrode 13 is grounded. The chemical gas forms plasma in the electric field and deposits a thin film structure on the display panel 3. A drive unit 19 is connected to the bottom of the lower electrode 13. The drive unit 19 can be a hydraulic cylinder, a pneumatic cylinder, or an electric push rod. The drive unit 19 is used to drive the lower electrode 13 to move up and down, so that the lower electrode 13 can be raised and lowered within the coating chamber 10. Multiple support rods 14 are provided, passing through the lower electrode 13. The support rods 14 are capable of telescopic movement relative to the lower electrode 13. The top of each support rod 14 is used to selectively support the display panel 3. During coating, the display panel 3 is in a coated state, and the support rod 14 descends relative to the bearing surface 132 so that its top is below the bearing surface 132, and the display panel 3 abuts against the bearing surface 132. During pick-up and drop operations, the display panel 3 is in a pick-up and drop state, and the support rod 14 rises relative to the bearing surface 132 so that its top is above the bearing surface 132, and the display panel 3 abuts against the support rod 14. Correspondingly, when the support rod 14 rises, the display panel 3 and the lower electrode 13 are spaced apart to form a gap 4, allowing a robotic arm to grip the display panel 3 through the gap 4. The gap 4 serves to avoid obstructing the robotic arm. A limiting hole 131 is provided on the lower electrode 13, penetrating both the bearing surface 132 (i.e., the top surface) and the bottom surface of the lower electrode 13. The limiting hole 131 includes a first hole segment 1311 and a second hole segment 1312. The first hole segment 1311 is located at the end near the bearing surface 132, and the second hole segment 1312 is located at the end away from the bearing surface 132. The first hole segment 1311 and the second hole segment 1312 are connected, that is, the first hole segment 1311 is located above the second hole segment 1312. The inner diameter of the first hole segment 1311 is larger than the inner diameter of the second hole segment 1312.

[0035] The limiting component 2 includes a support member 21 and two limiting rods 22. The bottom end of the support member 21 is connected to the bottom of the coating chamber 10, and the top end of the support member 21 passes through the limiting hole 131. The two limiting rods 22 are spaced apart at the top end of the support member 21, and the two limiting members 22 are located on opposite sides of the support member 21. The limiting rods 22 are rotatably connected to the support member 21. The limiting rods 22 can rotate around their connection point with the support member 21, so that the two limiting rods 22 move closer to or further away from each other. It should be noted that the distance between the ends of the two limiting rods 22 near the support member 21 is fixed. In this embodiment, "moving closer to or further away from each other" refers to the ends of the limiting rods 22 away from the support member 21 moving closer to or further away from each other. The end of the limiting rod 22 near the support member 21 is located inside the limiting hole 131, and the end of the limiting rod 22 away from the support member 21 extends to the outside of the limiting hole 131 and is higher than the display panel 3. The two limiting rods 22 are elastically connected, and tend to move away from each other. During the raising and lowering of the lower electrode 13, the limiting component 2 and the lower electrode 13 move relative to each other. When the lower electrode 13 rises, the limiting component 2 descends relative to the lower electrode 13, and the limiting rods 22 move from the first hole segment 1311 to the second hole segment 1312. The two limiting rods 22 are spatially restricted by the second hole segment 1312, causing them to move closer together. After the two limiting rods 22 move closer together, they are parallel to each other and abut against the two sides of the display panel 3 respectively. When the lower electrode 13 descends, the limiting component 2 rises relative to the lower electrode 13, and the limiting rods 22 move from the second hole segment 1312 to the first hole segment 1311. The two limiting rods 22 are released from the spatial restriction of the second hole segment 1312, causing them to move away from each other. After the two limit rods 22 move away from each other, there is a certain angle between the two limit rods 22, and the two limit rods 22 are spaced apart from the display panel 3.

[0036] It is understood that the display panel 3 is a square plate, and the limiting component 2 is installed at the corresponding position of one corner of the display panel 3. The limiting component 2 is used to correct and limit the position of the display panel 3. The bottom end of the support member 21 is connected to the bottom of the coating chamber 10, and the top ends of the two limiting rods 22 are higher than the display panel 3, and the two limiting rods 22 are respectively located in the connected length and width sides of the display panel 3. That is, one corner of the display panel 3 is sandwiched between the two limiting rods 22. By elastically connecting the two limiting rods 22, in the free state, the two limiting rods 22 are far apart from each other. At this time, the corresponding corner of the display panel 3 has a certain range of movement between the two limiting rods 22, so as to facilitate the picking and placing of the display panel 3. By providing a limiting hole 131 on the lower electrode 13, the inner diameter of the first hole segment 1311 is larger than the inner diameter of the second hole segment 1312, that is, the limiting hole 131 has a structure that is larger at the top and smaller at the bottom. The change in inner diameter between the first hole segment 1311 and the second hole segment 1312 is used to control the switching between the two states of the limiting component 2. When the bottom end of the limiting rod 22 enters the second hole segment 1312, the two limiting rods 22 are restricted by the space of the second hole segment 1312, and the two limiting rods 22 move closer to each other. At this time, the two limiting rods 22 can clamp the corresponding corners on the display panel 3. When the display panel 3 is displaced during placement, the placement position of the display panel 3 can be corrected under the clamping action of the two limiting rods 22. At the same time, since the corners of the display panel 3 are restricted between the two limiting rods 22, the vibration generated by the movement of the equipment during the upward movement of the lower electrode 13 cannot cause the display panel 3 to shift. When the limiting rods 22 are fully inserted into the first hole segment 1311, the two limiting rods 22 are released from the restriction of the second hole segment 1312, and the two limiting rods 22 move away from each other. At this time, the two limiting rods 22 are spaced apart from the display panel 3, and the display panel 3 can be picked up and placed. The limit component 2 can be switched between two states by directly linking the rise and fall of the lower electrode 13.

[0037] Specifically, refer to Figure 4 As shown, two limiting components 2 are provided, distributed at both ends of the diagonal of the display panel 3. The bearing surface 132 on the lower electrode 13 is rectangular, and the two limiting components 2 are distributed at both ends of the diagonal of the rectangle corresponding to the lower electrode 13. Correspondingly, limiting holes 131 for the passing of the limiting components 2 are provided at both ends of the diagonal of the rectangle corresponding to the lower electrode 13. By providing two limiting components 2, the two limiting components 2 respectively limit the two corners on the diagonal of the display panel 3, thereby improving the installation accuracy of the display panel 3 on the lower electrode 13. In the same limiting component 2, two limiting rods 22 are symmetrically distributed with respect to the diagonal of the display panel 3. This structure allows the two limiting rods 22 to simultaneously abut or separate from the length and width sides of the display panel 3, improving the stability when performing position correction on the display panel 3.

[0038] Specifically, refer to Figure 5 and Figure 6 As shown, the first hole segment 1311 is located at the end of the lower electrode 13 near its top surface, and the second hole segment 1312 is located at the end of the lower electrode 13 near its bottom surface. The inner diameter of the first hole segment 1311 is different, gradually increasing in size from the end near the second hole segment 1312 to the end away from the second hole segment 1312. That is, the first hole segment 1311 is trumpet-shaped, with a larger upper end and a smaller lower end. By setting the first hole segment 1311 to a trumpet shape, it can limit the movement range of the two limiting rods 22, that is, the two limiting rods 22 respectively abut against the opposite two side walls of the first hole segment 1311. The inner diameter of the second hole segment 1312 is the same, and the inner diameter of the second hole segment 1312 is equal to the minimum inner diameter of the first hole segment 1311. The inner diameter of the second hole section 1312 is designed to match the spacing between the two limiting rods 22 when they clamp the display panel 3. When the two limiting rods 22 enter the second hole section 1312, the two limiting rods 22 abut against the two opposite side walls of the second hole section 1312 respectively. At this time, the two limiting rods 22 just clamp the corner of the display panel 3.

[0039] It should be noted that, in this embodiment, the inner diameter of the limiting hole 131 refers to the dimension of the limiting hole 131 in the S direction shown in the figure. When the limiting hole 131 is a circular hole, the inner diameter of the limiting hole 131 is the diameter; when the limiting hole 131 is a square hole, the inner diameter of the limiting hole 131 is the side length. In an optional embodiment, the limiting hole 131 is a square hole, and the limiting rod 22 can only move along the depth direction of the limiting hole 131 (i.e., the Z direction shown in the figure) and along the S direction shown in the figure.

[0040] Two openings 13110 are formed at the end of the first hole segment 1311 opposite to the second hole segment 1312. The two openings 13110 are spaced apart from each other, and two limiting rods 22 are respectively inserted through the two openings 13110. The size of the openings 13110 is matched with the movement trajectory of the limiting rods 22 to minimize the area of ​​the openings 13110 and prevent plasma gas from entering the limiting hole 131 during deposition. The limiting component 2 also includes a baffle 24, which is disposed on the side of the limiting rod 22 opposite to the display panel 3. The baffle 24 is used to block the openings 13110 in the vertical direction. During the coating process, the upper electrode 12 sprays plasma gas downward. By setting the baffle 24, the openings 13110 can be blocked in the vertical direction to prevent the plasma gas from being directly sprayed into the limiting hole 131, thereby preventing the formation of foreign matter in the deposited film in the limiting hole 131 and thus avoiding obstruction of the movement of the limiting component 2. Of course, in other embodiments, the end of the first hole segment 1311 opposite to the second hole segment 1312 forms an opening 13110, so that the entire first hole segment 1311 is exposed.

[0041] The support member 21 includes a vertical rod 211 and a horizontal rod 212. The vertical rod 211 is vertically arranged, with its bottom end connected to the bottom of the coating chamber 10 and its top end extending into the limiting hole 131. The horizontal rod 212 is horizontally arranged, with its middle part connected to the top end of the vertical rod 211. Two limiting rods 22 are respectively arranged at both ends of the horizontal rod 212 along its length, and the limiting rods 22 are rotatably connected to the horizontal rod 212. The limiting assembly 2 also includes a spring 23, which is located above the horizontal rod 212. The two ends of the spring 23 are respectively connected to the two limiting rods 22, so that the two limiting rods 22 are elastically connected through the spring 23. The spring 23 is located near the bottom end of the limiting rod 22. When the bottom ends of the two limiting rods 22 enter the second hole section 1312, the spring 23 is in a compressed state. When both limit rods 22 are fully inserted into the first hole section 1311, the spring 23 drives the two limit rods 22 to move away from each other.

[0042] Specifically, the junction of the first hole segment 1311 and the second hole segment 1312 is rounded. Since the limiting rod 22 needs to move between the first hole segment 1311 and the second hole segment 1312, setting the junction of the first hole segment 1311 and the second hole segment 1312 as a rounded structure helps to reduce the friction between the limiting rod 22 and the hole wall of the limiting hole 131, and reduces the risk of the limiting rod 22 generating debris due to friction.

[0043] Specifically, refer to Figure 2 and Figure 3As shown, a door 18 is provided at one end of the housing 11 along its length. When picking up or placing the display panel 3, the robotic arm transports the display panel 3 into and out of the coating chamber 10 through the door 18. The door 18 is closed during the coating process of the display panel 3. A support rod 14 passes through the lower electrode 13, and the bottom end of the support rod 14 is connected and fixed to the bottom of the coating chamber 10. The support rod 14 extends or retracts relative to the lower electrode 13 by the lifting and lowering movement of the lower electrode 13. When the lower electrode 13 descends, the display panel 3 is lifted by the support rod 14, creating a gap 4 between the display panel 3 and the bearing surface 132 of the lower electrode 13 to allow the robotic arm to pass. This indicates that the chemical vapor deposition equipment is in the picking / placing state. When the lower electrode 13 rises, the top end of the support rod 14 retracts into the lower electrode 13, and the display panel 3 is placed on the bearing surface 132. This indicates that the chemical vapor deposition equipment is in the coating state. Correspondingly, when the lower electrode 13 descends, the bottom end of the limiting rod 22 enters the first hole section 1311 from the second hole section 1312. Driven by the spring 23, the two limiting rods 22 move away from each other, maintaining a distance between themselves and the display panel 3, allowing the robotic arm to pick up and place the display panel 3. When the lower electrode 13 rises, the bottom end of the limiting rod 22 enters the second hole section 1312 from the first hole section 1311. The two limiting rods 22 move closer together, clamping the corner of the display panel 3, thus confining the display panel 3 between the two limiting rods 22. In this embodiment, the lower electrode 13 is driven to rise and fall by the driving component 19 to achieve linkage between the limiting component 2 and the support rod 14, eliminating the need for a separate driving device and simplifying the structure.

[0044] The bottom of the coating chamber 10 is provided with an exhaust port 17, which is used to discharge the plasma gas after the reaction. The exhaust port 17 is located close to the limiting component 2 so that foreign objects generated by friction between the limiting component 2 and the lower electrode 13 can be directly discharged through the exhaust port 17, preventing foreign objects from falling onto the display panel 3 with the airflow.

[0045] The coating body 1 also includes a mask 15 and a base 16. The mask 15 has a square annular structure and is installed on the inner wall of the housing 11, located above the lower electrode 13. The mask 15 is used to shield the periphery of the display panel 3 to prevent plasma gas from being sprayed onto the periphery of the display panel 3. The periphery of the display panel 3 is a waste material area, which does not require coating. The base 16 is disposed at the bottom of the coating chamber 10, and the bottom end of the support rod 14 and the bottom end of the support member 21 are installed on the base 16. Of course, in some embodiments, the base 16 can be omitted, and the support member 21 and the support rod 14 can be directly installed on the housing 11.

[0046] The beneficial effects of this embodiment are as follows: By setting a limiting component 2 and providing a limiting hole 131 for the limiting component 2 to pass through on the lower electrode 13, the limiting component 2 includes a support member 21 connected to the bottom of the coating chamber 10 and two limiting rods 22 installed on the top of the support member 21. When the lower electrode 13 descends, the display panel 3 abuts against the top of the support rod 14, and a gap is formed between the display panel 3 and the lower electrode 13, allowing the robot arm to pick up and place the display panel 3. Simultaneously, both limiting rods 22 enter the first hole section 1311, and the two limiting rods 22 are spaced apart from the display panel 3. When the lower electrode 13 rises, the display panel 3 is placed on the bearing surface 132. Simultaneously, the bottom ends of the two limiting rods 22 enter the second hole section 1312, and the two limiting rods 22 clamp the corners of the display panel 3 to perform position correction and limiting of the display panel 3, so that the actual placement position of the display panel 3 matches the theoretical position, thereby improving the coating quality.

[0047] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A chemical vapor deposition apparatus, characterized in that, include: A coating body includes a coating chamber and a lower electrode that can be lifted and lowered within the coating chamber. The top surface of the lower electrode forms a support surface for placing a display panel. The lower electrode is provided with a plurality of support rods that can telescopically move relative to the lower electrode. The top ends of the support rods are used to selectively support the display panel. A limiting hole is provided through the lower electrode. The limiting hole includes a first hole section close to the support surface and a second hole section away from the support surface. The inner diameter of the first hole section is larger than the inner diameter of the second hole section. A limiting assembly includes a support member and two limiting rods. The bottom end of the support member is connected to the bottom of the coating chamber, and the top end of the support member passes through the limiting hole. The two limiting rods are spaced apart at one end of the support member and are rotatably connected to the support member. The two limiting rods are elastically connected and tend to move away from each other. When the limiting rods move from the first hole segment to the second hole segment, the two limiting rods approach each other and abut against the two sides of the display panel respectively. When the limiting rods move from the second hole segment to the first hole segment, the two limiting rods move away from each other and are spaced apart from the display panel.

2. The chemical vapor deposition apparatus according to claim 1, characterized in that, The inner diameter of the first hole gradually increases from the end near the second hole to the end away from the second hole.

3. The chemical vapor deposition apparatus according to claim 1, characterized in that, The first hole segment has two spaced openings at one end opposite to the second hole segment, and the two limiting rods are respectively inserted into the two openings.

4. The chemical vapor deposition apparatus according to claim 3, characterized in that, The limiting component also includes a baffle, which is disposed on the side of the limiting rod away from the display panel, and the baffle is used to block the opening in the vertical direction.

5. The chemical vapor deposition apparatus according to claim 1, characterized in that, The two limiting rods are symmetrically distributed relative to the diagonal of the display panel.

6. The chemical vapor deposition apparatus according to claim 1, characterized in that, The support includes a vertically arranged vertical rod and a horizontally arranged horizontal rod. The bottom end of the vertical rod is connected to the bottom of the coating chamber, and the top end of the vertical rod extends into the limiting hole. The two ends of the horizontal rod are respectively rotatably connected to the two limiting rods, and the middle part of the horizontal rod is connected to the top end of the vertical rod.

7. The chemical vapor deposition apparatus according to claim 1, characterized in that, The junction between the first hole segment and the second hole segment is rounded.

8. The chemical vapor deposition apparatus according to any one of claims 1 to 7, characterized in that, The limiting components are configured as two, and the two limiting components are distributed at both ends of the diagonal of the display panel.

9. The chemical vapor deposition apparatus according to any one of claims 1 to 7, characterized in that, One end of the support rod is connected to the bottom of the coating chamber, and the other end passes through the lower electrode and is used to selectively abut against the display panel.

10. The chemical vapor deposition apparatus according to any one of claims 1 to 7, characterized in that, The bottom of the coating chamber is provided with an exhaust port, which is located near the limiting component.

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