A rotating load rack mechanism and a pecvd apparatus having the same

Abstract

The utility model relates to a kind of rotary material loading frame mechanism and the PECVD equipment with the mechanism, it includes installation frame, more than two rotating material racks are provided on installation frame, installation frame can carry out rotary motion under the driving of external driving mechanism, the top of installation frame is above or the bottom is below and is provided with gear ring, gear ring is fixedly connected with external PECVD equipment;The position of the top or bottom of installation frame is opened with through hole corresponding each rotating material rack, more than two through holes are located inside gear ring, one end of each rotating material rack is connected with gear by connecting mechanism, and connecting mechanism is set through through hole;Under the action of external force, connecting mechanism and gear can be moved along horizontal direction relative to through hole, to make gear and gear ring mutually engage or mutually separate;Effectively reduce the installation difficulty of rotary material loading frame mechanism and improve the angle adjustment of rotating material rack Simple and quick nature of alignment.

Description

Technical Field

[0001] This utility model relates to the field of PECVD production equipment, and in particular to a rotating material carrier mechanism and a PECVD device having the mechanism. Background Technology

[0002] PECVD equipment is a thin film preparation technology that uses plasma to activate gaseous precursors and achieve high-quality thin film deposition at relatively low temperatures. Its core principle is to use microwaves or radio frequency to ionize the gas containing the atoms of the thin film components, forming plasma locally. The plasma has strong chemical activity and is easy to react, thus depositing a thin film on the substrate.

[0003] When loading and unloading materials in a PECVD machine, multiple rotating racks are driven by a planetary and self-rotating drive mechanism to move sequentially to positions opposite the door. To facilitate loading and unloading operations, it is necessary to ensure that the rotating racks are positioned so that their front or back faces the door when they reach the opposite position. For example, Chinese utility model patent CN222082892U discloses a rotating rack that can simultaneously revolve and rotate. By setting the gear ratio between the gear ring and the drive gear to n:2, where n is a natural number and n≥2, the multiple rotating rack components are positioned so that they are always facing the door, either front or back, when they move sequentially to the opposite position, facilitating loading and unloading operations for the staff.

[0004] However, the above technology has the following problems: When installing the rotating frame, the gear ring is first fixedly installed in the PECVD equipment, then each rotating frame assembly is installed in the fixed end plate, and then the drive gear is installed on each shaft. In order to ensure that each rotating frame assembly is facing the door directly, either front or back, when it moves to the position opposite the door, the angle of each rotating frame assembly needs to be adjusted and aligned. After adjustment, the fixed end plate and the rotating frame assembly are placed into the PECVD equipment together. After placement, the drive gear meshes with the gear ring. However, during the process of placing the fixed end plate and the rotating frame assembly into the PECVD equipment, the positions of multiple drive gears and gear rings need to be aligned simultaneously, which is difficult to operate. During the alignment process, the drive gears are prone to rotation due to collision with the gear ring, which causes the previously adjusted angles of each rotating frame assembly to change and fail to meet the requirements. When the angles of each rotating frame assembly fail to meet the requirements, the fixed end plate and the rotating frame assembly need to be removed and the adjustment and placement process repeated.

[0005] Based on the above problems, further solutions are urgently needed. Utility Model Content

[0006] The purpose of this utility model is to provide a rotating material carrier mechanism and a PECVD equipment having the mechanism, which can solve the technical problems in the prior art of inconvenience in adjusting and aligning the rotating material carrier and the difficulty in the installation process of the entire rotating carrier.

[0007] To achieve the above objectives, this utility model provides a rotating material rack mechanism, including a mounting frame. The mounting frame has two or more rotating material racks, which can rotate under the drive of an external driving mechanism. A gear ring is provided above the top or below the bottom of the mounting frame, and the gear ring is fixedly connected to an external PECVD device. A through hole is provided at the top or bottom of the mounting frame corresponding to the position of each rotating material rack, and the two or more through holes are located inside the gear ring. One end of each rotating material rack is connected to a gear via a connecting mechanism that passes through the through hole. Under the action of an external force, the connecting mechanism and the gear can move horizontally relative to the through hole, thereby causing the gear and the gear ring to mesh or separate.

[0008] Furthermore, the mounting frame includes a top plate, a bottom plate, and a plurality of connecting columns disposed between the top plate and the bottom plate. The gear ring is disposed below the bottom plate, and the through hole is formed on the bottom plate. A plurality of rollers are disposed on the gear ring along the circumferential direction, and the rollers are used to support the bottom plate.

[0009] Furthermore, the connecting mechanism includes a support member, a connecting shaft, and a bearing. The support member is detachably connected to the base plate. A central through hole is provided at the center of the support member. The connecting shaft is installed in the central through hole through the bearing. The upper end of the connecting shaft is detachably connected to the rotating material rack. The lower end of the connecting shaft extends to the lower side of the base plate through the through hole and is detachably connected to the gear.

[0010] Furthermore, the support member includes a central ring portion and a support portion disposed on the outer periphery of the central ring portion. The support portion is detachably connected to the upper surface of the base plate through a plurality of threaded connectors. The lower end of the central ring portion is disposed in the through hole, and the diameter of the through hole is larger than the outer diameter of the central ring portion.

[0011] Furthermore, the connecting mechanism also includes a protective cover, which covers the upper end of the support member, and the upper end of the connecting shaft extends through the protective cover and is detachably connected to the rotating material rack.

[0012] Furthermore, the rotating material rack includes a support frame and a material tray, and a plurality of the material trays are detachably installed in the support frame.

[0013] Furthermore, the number of teeth D of the gear ring and the number of teeth d of the gear satisfy the following relationship: D = K1 * d + 0.5d, where K1 is a natural number and K1 ≥ 2.

[0014] Furthermore, the number of teeth D of the gear ring and the number of teeth d of the gear satisfy the following relationship: D=(K2+0.5)*N*d+0.5d, where K2 is a natural number and K2≥1, and N is the number of rotating material racks and N is an even number.

[0015] On the other hand, the present invention also provides a PECVD device, the PECVD device including a vacuum chamber, wherein a rotating material carrier mechanism as described in any of the above claims is provided in the vacuum chamber.

[0016] Furthermore, the PECVD equipment also includes an RF power supply and an electrode assembly. The electrode assembly is located at the center of the rotating material carrier mechanism and is connected to the RF power supply. Both or more rotating material carriers are grounded.

[0017] The beneficial effects of this utility model are as follows:

[0018] (1) By setting a through hole with a larger diameter, the connecting mechanism and gear can move horizontally relative to the through hole under the action of external force. Therefore, the rotating material rack mechanism does not need to consider the angle alignment of the rotating material rack during installation. After the rotating material rack mechanism is installed in the PECVD equipment, the angle of each rotating material rack is adjusted and aligned, which effectively reduces the installation difficulty of the rotating material rack mechanism and improves the ease and speed of the angle adjustment and alignment of the rotating material rack. Moreover, the angle of a certain rotating material rack in the assembled rotating material rack mechanism can be adjusted without disassembling the rotating material rack mechanism.

[0019] (2) By limiting the number of teeth of the gear ring and gear to satisfy the relationship: D=(K2+0.5)*N*d+0.5d, where K2 is a natural number and K2≥1, the upper horizontal plates of each support frame are not parallel to each other, and the angle difference between adjacent support frames is equal, thus ensuring that the angles of each support frame are evenly distributed in the rotating material rack mechanism. Thus, during the revolution and rotation, the distance between the side plates of half of the support frames and the electrode assembly decreases while the distance between the side plates of the other half of the support frames and the electrode assembly increases. The relative area between the side plates of half of the support frames and the electrode assembly decreases while the relative area between the side plates of the other half of the support frames and the electrode assembly increases. Thus, during the revolution and rotation, the distance and relative area between the two side plates of each support frame and the electrode assembly in the rotating material rack mechanism are in a dynamic equilibrium state to maintain radio frequency stability, thereby ensuring the stability and uniformity of the coating. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the rotating material carrier mechanism and electrode assembly of this utility model.

[0021] Figure 2 This is a schematic diagram of part of the structure of the rotating material carrier mechanism and the electrode assembly of this utility model.

[0022] Figure 3 This is a schematic diagram of part of the structure of the rotating material carrier mechanism and the electrode assembly of this utility model.

[0023] Figure 4 This is a schematic diagram of the rotating material carrier mechanism of this utility model from another angle.

[0024] Figure 5 This is a schematic diagram of the structure of the gear and gear ring of this utility model when they are separated.

[0025] Figure 6 This is a schematic diagram of the structure of the gear and gear ring of this utility model when they mesh with each other.

[0026] Figure 7 This is a cross-sectional view of the connection structure of this utility model, which is connected to the base plate and the lower horizontal plate.

[0027] Figure 8 This is a schematic diagram of the gear ring of this utility model.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Mounting frame; 11-Through hole; 12-Top plate; 13-Bottom plate; 14-Connecting column; 2-Rotating material rack; 21-Support frame; 211-Upper horizontal plate; 212-Lower horizontal plate; 213-Side plate; 22-Carrying tray; 3-Gear ring; 31-Roller; 4-Connecting mechanism; 41-Support component; 410-Central through hole; 411-Central ring; 412-Support component; 42-Connecting shaft; 43-Bearing; 44-Protective cover; 5-Gear; 6-Drive spindle; 7-Electrode assembly; 8-Rotary connection assembly. Detailed Implementation

[0030] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0031] Example 1

[0032] like Figures 1 to 8 As shown, this embodiment provides a rotating material rack mechanism, including a mounting frame 1. The mounting frame 1 has two or more rotating material racks 2. The mounting frame 1 can rotate under the drive of an external drive mechanism. A gear ring 3 is provided above the top or below the bottom of the mounting frame 1, and the gear ring 3 is fixedly connected to an external PECVD equipment. A through hole 11 is provided at the top or bottom of the mounting frame 1 corresponding to the position of each rotating material rack 2. Two or more through holes 11 are located inside the gear ring 3. One end of each rotating material rack 2 is connected to a gear 5 via a connecting mechanism 4, which passes through the through hole 11. Under the action of an external force, the connecting mechanism 4 and the gear 5 can move horizontally relative to the through hole 11, thereby causing the gear 5 to mesh or separate from the gear ring 3. Specifically, a drive spindle 6 is connected to the center of the bottom of the mounting frame 1, and the drive spindle 6 is connected to an external drive mechanism. The mounting frame 1 includes a top plate 12, a bottom plate 13, and several connecting columns 14 disposed between the top plate 12 and the bottom plate 13. The gear ring 3 is disposed below the bottom plate 13, and the through hole 11 is formed on the bottom plate 13. The upper end of the rotating material rack 2 is connected to the top plate 12 through a rotary connecting assembly 8. In actual use, the external drive mechanism drives the mounting frame 1, the rotating material rack 2, and the gear 5 to revolve through the drive spindle 6. Since the gear 5 and the gear ring 3 mesh with each other, the gear 5 also rotates on its own axis during the revolution, thereby driving the rotating material rack 2 to move automatically in sync.

[0033] In this embodiment, by setting a through hole 11 with a larger diameter, the connecting mechanism 4 and the gear 5 can move horizontally relative to the through hole 11 under the action of external force. Therefore, in this embodiment, the rotation rack mechanism does not need to consider the angle alignment of the rotating rack 2 during installation. After the rotation rack mechanism is installed in the PECVD equipment, the angles of each rotating rack 2 are adjusted and aligned. Specifically, during installation, the gear ring 3 is first installed in the PECVD equipment, and then the drive spindle 6, connecting mechanism 4, gear 5, rotating connecting assembly 8, etc. are installed on the mounting frame 1. At this time, there is no locking between the connecting mechanism 4 and the base plate 13. Move the connecting mechanism 4 and gear 5 to the side of the through hole 11 away from the gear ring 3. At this time, each gear 5 is separated from the gear ring 3 (that is, there is no meshing between them). Therefore, the angle of the connecting mechanism 4 can be adjusted one by one according to the angle requirements of each rotating material rack 2. After the angle of the connecting mechanism 4 is adjusted, move the connecting mechanism 4 and gear 5 to the side of the through hole 11 close to the gear ring 3 to achieve meshing between the gear ring 3 and gear 5. Then, lock the connecting mechanism 4 and the base plate 13 with the threaded connector. Finally, install the upper and lower ends of the rotating material rack 2 on the rotating connecting assembly 8 and the connecting mechanism 4 respectively, thus completing the installation of the rotating material rack mechanism. The operation is simple and quick. Furthermore, when the angle of a rotating rack 2 in the assembled rotating rack mechanism needs to be adjusted, the threaded connection between the connecting mechanism 4 and the base plate 13 is disassembled, and then the rotating rack, connecting mechanism 4, and gear 5 are moved to the side of the through hole 11 away from the gear ring 3, so that the gear 5 and the gear ring 3 are separated from each other. At this time, the angle of the rotating rack 2 can be adjusted. After the adjustment is completed, the rotating rack 2, connecting mechanism 4, and gear 5 are moved to the side of the through hole 11 close to the gear ring 3 so that the gear ring 3 and gear 5 re-mesh. Then, the connecting mechanism 4 and the base plate 13 are reconnected and locked through the threaded connection. The angle adjustment of a rotating rack 2 in the assembled rotating rack mechanism can be completed without disassembling the rotating rack mechanism.

[0034] Furthermore, such as Figure 8As shown, the gear ring 3 has a plurality of rollers 31 arranged along the circumferential direction. Specifically, a plurality of receiving grooves are arranged along the circumferential direction on the upper surface of the gear ring 3. The rollers 31 are rotatably arranged in the receiving grooves, and the upper surface of the rollers 31 protrudes from the receiving grooves, so that the rollers 31 contact the lower surface of the base plate 13, that is, the rollers 31 are used to support the base plate 13. In this embodiment, by setting the base plate 13 on the rollers 31, when the drive spindle 6 drives the mounting frame 1 to rotate, the base plate 13 and the rollers have rolling friction, which helps to reduce the wear between the base plate 13 and the gear ring 3 and extend the service life of the rotating material carrier mechanism. In addition, the gear ring 3 is spliced ​​from multiple arc-shaped racks, which facilitates processing and can better ensure processing accuracy.

[0035] Furthermore, such as Figure 7 As shown, the connecting mechanism 4 includes a support member 41, a connecting shaft 42, and a bearing 43. The support member 41 is detachably connected to the base plate 13. A central through hole 410 is provided at the center of the support member 41. The connecting shaft 42 is installed in the central through hole 410 through the bearing 43. The upper end of the connecting shaft 42 is detachably connected to the rotating material rack 2, and the lower end of the connecting shaft 42 extends to the lower side of the base plate 13 through the through hole 11 and is detachably connected to the gear 5. Specifically, the rotating material rack 2 includes a support frame 21 and a material tray 22. Multiple material trays 22 are detachably installed in the support frame 21. The support frame 21 includes an upper horizontal plate 211, a lower horizontal plate 212, and a side plate 213 for connecting the upper horizontal plate 211 and the lower horizontal plate 212. In this embodiment, the upper horizontal plate 211 and the lower horizontal plate 212 of the support frame 21 are connected to the rotating connection assembly 8 and the connection mechanism 4 respectively through a magnetic quick-release structure, thereby realizing the quick and convenient installation of the rotating material rack 2.

[0036] Furthermore, such as Figure 7 As shown, the support member 41 includes a central ring portion 411 and a support portion 412 disposed on the outer periphery of the central ring portion 411. The support portion 412 is detachably connected to the upper surface of the base plate 13 via several threaded connectors. The lower end of the central ring portion 411 is disposed in the through hole 11, and the diameter of the through hole 11 is larger than the outer diameter of the central ring portion 411. Specifically, the difference between the diameter of the through hole 11 and the outer diameter of the central ring portion 411 is at least greater than the tooth height of the gear 5, so as to facilitate the separation between the gear 5 and the gear ring 3.

[0037] When installing the rotating material rack mechanism, first install the gear ring 3 in the PECVD equipment, and then install the drive spindle 6, connecting mechanism 4, gear 5, rotating connecting assembly 8, etc. on the mounting frame 1. At this time, the support part 412 is not locked to the base plate 13, and the connecting mechanism 4 and gear 5 are moved to the side away from the gear ring 3 in the through hole 11. At this time, each gear 5 is separated from the gear ring 3 (that is, there is no meshing between them). Therefore, the angle of the connecting mechanism 4 can be adjusted one by one according to the angle requirements of each rotating material rack 2. After the angle of the connecting mechanism 4 is adjusted, the connecting mechanism 4 and gear 5 are moved to the side of the through hole 11 close to the gear ring 3 to achieve meshing between the gear ring 3 and gear 5. Then, the support part 412 and the base plate 13 are locked by the threaded connector. Finally, the upper and lower ends of the rotating material rack 2 are installed on the rotating connecting assembly 8 and the connecting mechanism 4 respectively by the magnetic quick release structure, thus completing the installation of the rotating material rack mechanism. The operation is simple and quick.

[0038] Furthermore, the connecting mechanism 4 also includes a protective cover 44, which covers the upper end of the support member 41. The upper end of the connecting shaft 42 extends through the protective cover 44 and is detachably connected to the rotating material rack 2. In this embodiment, the protective cover prevents dust and other impurities from falling into the connecting shaft 42 and the bearing 43, ensuring the normal operation of the connecting shaft 42 and the bearing 43.

[0039] Furthermore, the number of teeth D of the gear ring 3 and the number of teeth d of the gear 5 satisfy the following relationship: D = K1 * d + 0.5d, where K1 is a natural number and K1 ≥ 2.

[0040] In this embodiment, the relationship between the number of teeth of the gear ring 3 and the gear 5 is defined by setting the formula. Taking K1=3 as an example, when the gear ring 3 rotates 1 revolution, the gear 5 rotates exactly 3.5 revolutions, that is, the gear 5 rotates K1 revolutions plus half a revolution. When the rotating material rack 2 is installed, the front of the rotating material rack 2 faces the door. Then, no matter how many revolutions the gear ring rotates, when the rotating material rack 2 rotates to the position opposite the door, the front or back of the rotating material rack 2 will face the door, which is convenient for the operator to load and unload the workpieces on the rotating material rack 2 at the door position. Since there are several evaporator outlets in the PECVD equipment, the material concentration near the evaporator outlet will be higher than that at other positions. Since the evaporator outlet is fixed, and when the gear ring 3 rotates 1 revolution, the gear 5 rotates exactly K1 revolutions plus half a revolution, so that each time the rotating material rack 2 passes a certain evaporator outlet, it is not a fixed position facing the evaporator outlet. This makes the thickness of the film deposited on the workpiece on the rotating material rack 2 more uniform.

[0041] Furthermore, the number of teeth D of the gear ring 3 and the number of teeth d of the gear 5 satisfy the following relationship: D=(K2+0.5)*N*d+0.5d, where K2 is a natural number and K2≥1, and N is the number of rotating material racks 2 and N is an even number. In practical applications, an electrode assembly 7 connected to the radio frequency power supply is located at the middle position of the rotating material rack mechanism. The electrode assembly 7 serves as the first electrode, and the rotating material rack 2 is grounded as the second electrode. Since the electrode assembly 7 is cylindrical and the material tray 22 in the rotating material rack 2 is circular, and the material tray 22 is perpendicular to the electrode assembly 7, the distance and relative area between the electrode assembly 7 and the material tray 22 remain unchanged during the revolution and rotation. However, the support frame 21 in the rotating material rack 2 is a rectangular frame. Therefore, during the revolution and rotation, the distance and relative area between the two side plates 213 of each support frame 21 and the electrode assembly 7 will keep changing, which will cause the radio frequency capacitance to change. Therefore, the angle of each support frame 21 will affect the stability of the radio frequency, which will affect the stability of the coating and lead to uneven coating. In this embodiment, by further limiting the number of teeth of the gear ring 3 and the gear 5 to satisfy the relationship: D=(K2+0.5)*N*d+0.5d, where K2 is a natural number and K2≥1, the upper horizontal plates 211 of each support frame 21 are not parallel to each other, and the angle difference between adjacent support frames 21 is equal. This ensures that the angles of each support frame 21 are evenly distributed in the rotating material rack mechanism. Thus, during the revolution and rotation, the distance between the side plates 213 of half of the support frames 21 and the electrode assembly 7 decreases while the distance between the other half decreases. The spacing between the side plates 213 of half of the support frames 21 and the electrode assembly 7 is increasing, and the relative area between the side plates 213 of half of the support frames 21 and the electrode assembly 7 is decreasing. At the same time, the relative area between the side plates 213 of the other half of the support frames 21 and the electrode assembly 7 is increasing. This ensures that during the revolution and rotation, the spacing and relative area between the side plates 213 of each support frame 21 and the electrode assembly 7 in the rotating material rack mechanism are in a dynamic equilibrium state to maintain radio frequency stability, thereby ensuring the stability and uniformity of the coating.

[0042] Example 2

[0043] Based on Embodiment 1, this embodiment also provides a PECVD equipment, which includes a vacuum chamber and a rotating material rack mechanism as described in any one of Embodiment 1. Specifically, a door is provided on the wall of the vacuum chamber. When the rotating material rack 2 rotates to a position opposite to the door, the front or back of the rotating material rack 2 is facing the door, which facilitates the operator to load and unload workpieces on the rotating material rack 2 at the door position.

[0044] Furthermore, the PECVD equipment also includes an RF power supply and an electrode assembly 7. The electrode assembly 7 is located at the center of the rotating material carrier mechanism and is connected to the RF power supply. Two or more rotating material carriers 2 are each grounded. Specifically, the electrode assembly 7 serves as the first electrode, the rotating material carrier 2 serves as the second electrode, and the electrode assembly 7 is cylindrical.

[0045] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A rotating material carrier mechanism, comprising a mounting frame (1), wherein two or more rotating material carriers (2) are provided on the mounting frame (1), the mounting frame (1) is capable of rotating under the drive of an external drive mechanism, and a gear ring (3) is provided above the top or below the bottom of the mounting frame (1), the gear ring (3) being fixedly connected to an external PECVD equipment; characterized in that: The top or bottom of the mounting frame (1) is provided with a through hole (11) corresponding to the position of each rotating material rack (2). Two or more through holes (11) are located inside the gear ring (3). One end of each rotating material rack (2) is connected to a gear (5) through a connecting mechanism (4). The connecting mechanism (4) is set through the through hole (11). Under the action of external force, the connecting mechanism (4) and the gear (5) can move in the horizontal direction relative to the through hole (11), so that the gear (5) and the gear ring (3) mesh with each other or separate from each other.

2. The rotating material carrier mechanism according to claim 1, characterized in that: The mounting frame (1) includes a top plate (12), a bottom plate (13), and a plurality of connecting columns (14) disposed between the top plate (12) and the bottom plate (13). The gear ring (3) is disposed below the bottom plate (13), and the through hole (11) is opened on the bottom plate (13). A plurality of rollers (31) are disposed on the gear ring (3) along the circumferential direction, and the rollers (31) are used to support the bottom plate (13).

3. The rotating material carrier mechanism according to claim 2, characterized in that: The connecting mechanism (4) includes a support (41), a connecting shaft (42), and a bearing (43). The support (41) is detachably connected to the base plate (13). A central through hole (410) is provided at the center of the support (41). The connecting shaft (42) is installed in the central through hole (410) through the bearing (43). The upper end of the connecting shaft (42) is detachably connected to the rotating material rack (2). The lower end of the connecting shaft (42) extends to the lower side of the base plate (13) through the through hole (11) and is detachably connected to the gear (5).

4. The rotating material carrier mechanism according to claim 3, characterized in that: The support member (41) includes a central ring (411) and a support (412) disposed on the outer periphery of the central ring (411). The support (412) is detachably connected to the upper surface of the base plate (13) through a plurality of threaded connectors. The lower end of the central ring (411) is disposed in the through hole (11), and the diameter of the through hole (11) is larger than the outer diameter of the central ring (411).

5. The rotating material carrier mechanism according to claim 3, characterized in that: The connecting mechanism (4) also includes a protective cover (44), which covers the upper end of the support (41), and the upper end of the connecting shaft (42) extends through the protective cover (44) and is detachably connected to the rotating material rack (2).

6. The rotating material carrier mechanism according to claim 2, characterized in that: The rotating material rack (2) includes a support frame (21) and a material tray (22), and a plurality of the material trays (22) are detachably installed in the support frame (21).

7. The rotating material carrier mechanism according to any one of claims 1-6, characterized in that: The number of teeth D of the gear ring (3) and the number of teeth d of the gear (5) satisfy the following relationship: D = K1 * d + 0.5d, where K1 is a natural number and K1 ≥ 2.

8. The rotating material carrier mechanism according to claim 7, characterized in that: The number of teeth D of the gear ring (3) and the number of teeth d of the gear (5) satisfy the following relationship: D=(K2+0.5)*N*d+0.5d, where K2 is a natural number and K2≥1, and N is the number of rotating material racks (2) and N is an even number.

9. A PECVD device, characterized in that: The PECVD equipment includes a vacuum chamber, in which a rotating material carrier mechanism as described in any one of claims 1-8 is provided.

10. The PECVD equipment according to claim 9, characterized in that: The PECVD equipment also includes an RF power supply and an electrode assembly (7). The electrode assembly (7) is located at the center of the rotating material rack mechanism and is connected to the RF power supply. Two or more rotating material racks (2) are grounded respectively.

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