An inner heating wire support frame for a heating assembly of a MOCVD apparatus

Abstract

The utility model relates to a kind of inner heating wire support frame for MOCVD equipment heating assembly, including the support base of the bottom plane, adjusting block is slidably arranged on support base, support plate one end is fixedly connected support base, adjusting block is slidably connected support plate other end;Support plate top is used to support heating wire, adjusting the position of adjusting block on support base realizes the width size of adjusting support part of support plate top to adapt to the different width requirement of heating wire;Adjusting block is also provided with a locking screw, locking screw is fixed with support plate and realizes position, the utility model uses face contact support in support structure body bottom, and stability effect is better;There is no overhanging extension arm design, reduce the overhanging support of gravity, greatly reduce the risk of support structure fracture;Support part uses telescopic adjustable width design, adjust for different width heating wire, improve the flexibility of support structure.

Description

Technical Field

[0001] This utility model relates to an internal heating wire support frame for the heating assembly of an MOCVD equipment. Background Technology

[0002] In fields such as metal-organic chemical vapor deposition equipment, vacuum coating equipment, or specific industrial heating devices, heating wires are the core components for achieving high-temperature environments. To ensure that the heating wires maintain their predetermined shape and position during operation and to prevent deformation, collapse, or short circuits due to softening at high temperatures, gravity, or thermal stress, specialized support frames must be used to fix and support them.

[0003] Figure 1 This is a structural diagram of the inner heating wire of the heating component of an MOCVD equipment. It is formed into an approximately disc-shaped structure. The heating wire will deform or even tilt during the heating process. Therefore, multiple support frames are set along the trajectory of the heating wire. The structure of the support frame is shown in Chinese Utility Model Patent Application No. 2023233736097, which discloses a support frame structure, namely a ceramic support base 8 and a support rod 9. The bottom of the ceramic support base 8 is equipped with a plug-in rod, which is used to insert into the hole of the heat insulation plate. However, due to the long lever arm, the support effect and stability are relatively poor, the service life is relatively short, and it is easy to break. Moreover, the width of the internal heating wires in the equipment used by our company is not uniform in different parts of the track; some are wide and some are narrow. Traditional support frames cannot adjust the width, which is a shortcoming. To address the support issue, our technical personnel provide an internal heating wire support frame for the heating assembly of MOCVD equipment. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an internal heating wire support frame for the heating assembly of MOCVD equipment.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an internal heating wire support frame for a heating assembly of an MOCVD equipment, comprising a support base with a flat bottom, an adjusting block slidably disposed on the support base, one end of a support plate fixedly connected to the support base, and the adjusting block slidably connected to the other end of the support plate; The top of the support plate is used to support the heating wire. Adjusting the position of the adjusting block on the support base allows for adjustment of the width of the support portion at the top of the support plate to accommodate different width requirements of the heating wire. The adjusting block is also provided with a locking screw, which abuts against the support plate to fix its position.

[0006] Furthermore, the support base includes a first plate and a second plate, the second plate being in contact with the first plate on the same plane, and the adjusting block moving along the extension direction of the second plate; An upwardly protruding protrusion is provided at the junction of the first plate and the second plate, and one end of the support plate is fixedly connected to the protrusion.

[0007] Furthermore, the second plate is provided with an adjustment groove extending along its extension direction, and the adjustment block slides in the adjustment groove.

[0008] Furthermore, the support plate includes a support plate body and a short plug-in rod disposed on the side of the support plate body near the boss; The short plug is inserted into the socket provided on the top of the protrusion; The other end of the support plate penetrates the through slot provided in the adjustment block; The insertion rod slides into the insertion hole; The support plate is slidably fitted with the through groove.

[0009] Furthermore, the adjusting block includes a sliding block and a supporting block, with the supporting block disposed on top of the sliding block; The sliding block is connected within the adjusting groove; The support block extends upward through the opening at the top of the adjustment groove and is connected to the support plate. The through groove is provided on the top of the support block.

[0010] Furthermore, a locking through hole is provided at the top of the through groove, and the lower end of the locking through hole communicates with the through groove; The locking screw is connected in the locking through hole, and the lower end of the locking screw is in contact with the top of the support plate.

[0011] Furthermore, the included angle between the first plate and the second plate is an acute angle.

[0012] Furthermore, the support frames are arranged in a pair, and the pair of support frames are mirror images of each other.

[0013] Furthermore, the first plate is provided with clearance holes, which are used to avoid the ceramic pillars of the heat insulation plate.

[0014] The positive effects of this utility model are as follows: 1. The bottom of the supporting structure adopts surface contact support, which provides better stability; 2. The extended lever arm design without suspension reduces the suspended support caused by gravity, greatly reducing the risk of structural failure. 3. In special locations and environments, without compromising the original design, a hole-fitting design is adopted to ensure the fixation of the supporting structure body. 4. The support section adopts a telescopic and adjustable width design, which can be adjusted for heating wires of different widths, thus improving the flexibility of the support structure. Attached Figure Description

[0015] Figure 1 A schematic diagram of the internal heating wire structure of the heating assembly in an MOCVD device; Figure 2 This is a schematic diagram of the structure of this utility model; Figure 3 This is a cross-sectional view of the adjustment part of this utility model; Figure 4 This is a structural diagram of the support base of this utility model; Figure 5 This is a structural diagram of the support plate proposed in this utility model; Figure 6 This is a structural diagram of the adjusting block of this utility model; Figure 7 This is a schematic diagram of a further embodiment of the present utility model.

[0016] Legend: 1-Support base, 2-Support plate, 3-Locking screw, 4-Adjusting block, 5-Heating wire; 11-First plate, 12-Protrusion, 13-Second plate; 111 - Alternating Hole; 121-Socket; 131 - Adjustment groove; 21-Support plate, 22-Plug-in short rod; 41-Sliding block, 42-Supporting block; 421 - Through groove, 422 - Locking through hole. Detailed Implementation

[0017] Please see Figures 2 to 3 This utility model provides a technical solution: an internal heating wire support frame for a heating assembly of an MOCVD equipment, including a support base 1 with a flat bottom, an adjusting block 4 slidably disposed on the support base 1, a support plate 2 fixedly connected to the support base 1 at one end, and the adjusting block 4 slidably connected to the other end of the support plate 2; The top of the support plate 2 is used to support the heating wire 5. Adjusting the position of the adjustment block 4 on the support base 1 can adjust the width of the support part at the top of the support plate 2 to adapt to different width requirements of the heating wire 5. The adjusting block 4 is also provided with a locking screw 3, which abuts against the support plate 2 to fix its position; To meet usage requirements, the adjusting block 4 and the support base 1 are made of ceramic, while the locking screw 3 and the support plate 2 are made of molybdenum.

[0018] The above solution provides strong support for the heating wire 5, and the bottom of the support plate 2 adopts surface contact support, which provides better stability. At the same time, adjusting the adjusting block 4 can change the width of the support part at the top of the support plate 2 to adapt to different width requirements of the heating wire 5, thus improving the flexibility of the support structure. Compared to the scheme in application number 2023233736097, this scheme has no suspended extended lever arm design, reduces the suspended support due to gravity, and greatly reduces the risk of support structure failure.

[0019] Please see Figure 4 The diagram shows the structure of the support base 1. The support base 1 includes a first plate 11 and a second plate 13. The second plate 13 is connected to the first plate 11 on the same plane to achieve a flat bottom and stable placement. The included angle between the second plate 13 and the first plate 11 is an acute angle, and the shape looks like a "7". The first plate 11 is provided with a clearance hole 111, which is used to avoid the ceramic pillar of the heat insulation board. The purpose of setting the clearance hole 111 is: due to the special position and environment of the ceramic column of the heat insulation board, without destroying the original design, the clearance hole 111 can be used to connect with the ceramic column to achieve the state fixation. There are two clearance holes 111 in the figure. After being installed on the ceramic column, the first plate 11 will not have a swing problem. The hole position fitting design ensures the fixation of the position of the supporting structure body. The adjusting block 4 moves along the extending direction of the second plate 13; An upwardly protruding protrusion 12 is provided at the junction of the first plate 11 and the second plate 13, and one end of the support plate 2 is fixedly connected to the protrusion 12.

[0020] The second plate 13 is provided with an adjustment groove 131 extending along its extension direction. The top of the adjustment groove 131 is provided with an opening, and the top of the adjustment block 4 extends out of the opening to achieve connection with the support plate 2. The depth direction of the adjustment groove 131 abuts against the surface of the protrusion 12, and the adjustment block 4 slides in the adjustment groove 131.

[0021] Please see Figure 5 and combined Figure 4 and Figure 6For example, in a support plate 2 embodiment, the support plate 2 includes a support plate body 21 and a short plug-in rod 22 disposed on the side of the support plate body 21 near the boss 12; The short plug 22 is inserted into the plug hole 121 provided on the top of the protrusion 12; The other end of the support plate 21 penetrates the through slot 421 provided in the adjusting block 4; The short plug-in rod 22 and the plug hole 121 are in a sliding fit connection relationship; The support plate 21 and the through groove 421 are connected by a sliding fit.

[0022] During installation, the short rod 22 is inserted into the socket 121, and the support plate 21 extends to the other side and penetrates the through groove 421 of the adjusting block 4. When the adjusting block 4 is in the appropriate position, the locking screw 3 is tightened to fix it. Due to the connection relationship between the support plate 21 and the through groove 421 and between the short rod 22 and the socket 121, the short rod 22 will not be lifted out of the socket 121 when the locking screw 3 is tightened.

[0023] Please see Figure 6 In an embodiment of the adjusting block 4, the adjusting block 4 includes a sliding block 41 and a supporting block 42. The supporting block 42 is disposed on the top of the sliding block 41. Both are in the shape of a cube, and the width dimension of the supporting block 42 is smaller than the dimension of the sliding block 41. The sliding block 41 is connected within the adjusting groove 131; The support block 42 penetrates upward through the opening at the top of the adjustment groove 131 and is connected to the support plate 22; The support block 42 is provided with the through groove 421 on its top.

[0024] The top of the through groove 421 is provided with a locking through hole 422, and the lower end of the locking through hole 422 communicates with the through groove 421; The locking screw 3 is connected in the locking through hole 422, and the lower end of the locking screw 3 is in contact with the top of the support plate 22.

[0025] For ease of practical use, the support frames are configured in pairs, as shown in the reference. Figure 7 As shown, the pair of support frames are mirror-shaped, allowing for easy selection based on the installation environment. The usage status is referenced. Figure 1 .

[0026] The method of adjusting and using this support frame is to fit the clearance hole 111 of the support base 1 onto the ceramic column at the installation position, then connect the short rod 22 at one end of the support plate 2 to the insertion hole 121, and push the adjustment block 4 into the opening end of the adjustment groove 131 to ensure that the support plate 21 passes through the through groove 421 of the adjustment block 4. After the movable adjusting block 4 is in the appropriate position in the adjusting groove 131, the locking screw 3 is screwed in and the lower end of the locking screw 3 is attached to the top of the support plate 21 to achieve fixation. This solution has the requirements of wide support surface, reliable support and adaptability to different widths of heating wire 5.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Any changes and modifications made without departing from the spirit and scope of this utility model fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An internal heating wire support frame for a heating assembly in an MOCVD equipment, characterized in that: It includes a support base with a flat bottom, an adjustment block slidably disposed on the support base, a support plate fixedly connected to the support base at one end, and the adjustment block slidably connected to the other end of the support plate; The top of the support plate is used to support the heating wire. Adjusting the position of the adjusting block on the support base allows for adjustment of the width of the support portion at the top of the support plate to accommodate different width requirements of the heating wire. The adjusting block is also provided with a locking screw, which abuts against the support plate to fix its position.

2. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 1, characterized in that: The support base includes a first plate and a second plate, the second plate being connected to the first plate on the same plane, and the adjusting block moving along the extension direction of the second plate; An upwardly protruding protrusion is provided at the junction of the first plate and the second plate, and one end of the support plate is fixedly connected to the protrusion.

3. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 2, characterized in that: The second plate is provided with an adjustment groove extending along its extension direction, and the adjustment block slides in the adjustment groove.

4. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 3, characterized in that: The support plate includes a support plate body and a short plug-in rod disposed on the side of the support plate body near the protrusion; The short plug is inserted into the socket provided on the top of the protrusion; The other end of the support plate penetrates the through slot provided in the adjustment block; The insertion rod slides into the insertion hole; The support plate is slidably fitted with the through groove.

5. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 4, characterized in that: The adjusting block includes a sliding block and a supporting block, with the supporting block disposed on top of the sliding block; The sliding block is connected within the adjusting groove; The support block extends upward through the opening at the top of the adjustment groove and is connected to the support plate. The through groove is provided on the top of the support block.

6. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 5, characterized in that: The top of the through groove is provided with a locking through hole, and the lower end of the locking through hole communicates with the through groove; The locking screw is connected in the locking through hole, and the lower end of the locking screw is in contact with the top of the support plate.

7. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 6, characterized in that: The angle between the first plate and the second plate is an acute angle.

8. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 7, characterized in that, The support frames are arranged in a pair, and the pair of support frames are mirror images of each other.

9. The internal heating wire support frame for a heating assembly in an MOCVD device according to claim 8, characterized in that, The first plate is provided with a clearance hole, which is used to avoid the ceramic column of the heat insulation plate.

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