Graphite boat conveying device and coating equipment

Abstract

The utility model discloses a graphite boat conveying device and coated film equipment, including the clamping assembly for clamping graphite boat and the bearing plate of bearing clamping assembly, clamping assembly includes two opposite clamping jaw and controls two first drive assembly of clamping jaw close or far away, at least two clamping assembly symmetrical setting on bearing plate. This graphite boat conveying device is through symmetrical arrangement multiple clamping assembly on the bearing plate, and combines the cooperation of clamping jaw, slide rail and clamping assembly, has realized the efficient, stable transmission to graphite boat. First drive assembly is used for controlling the opening and closing of clamping jaw, realizes the reliable clamping of graphite boat one end, and second drive assembly can adjust the interval of two clamping assemblies, thereby provides the sufficient space for the clamping graphite boat, avoids the problem that the battery piece is damaged in the process of taking and sending and the accident such as interference or collision.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic technology, and in particular to a graphite boat conveying device and coating equipment. Background Technology

[0002] In the field of photovoltaic coating, during PECVD coating using a graphite boat as a carrier, the processing equipment delivers the graphite boat into the reaction chamber for coating. During silicon wafer coating, the graphite boat moves back and forth between the clean bench and the coating reactor to meet process requirements.

[0003] In related technologies, when multiple graphite boats are conveyed simultaneously, the spacing between these graphite boats cannot be flexibly adjusted according to the working conditions, which can easily lead to accidents such as motion interference or collisions when loading and unloading materials from each graphite boat. Utility Model Content

[0004] In view of this, embodiments of this application provide a graphite boat conveying device and a coating equipment to solve at least one of the above-mentioned technical problems.

[0005] The technical solution adopted by this utility model is to design a graphite boat conveying device, including a clamping component for clamping the graphite boat and a support plate for supporting the clamping component. The clamping component includes two opposing jaws and a first driving component for controlling the two jaws to move closer or further apart. At least two clamping components are arranged opposite each other on the support plate.

[0006] In some embodiments, each gripper is provided with a first slider, and the first drive assembly includes a slide rail that slides with the first slider and a drive member that controls the two first sliders to move closer or further apart along the slide rail.

[0007] In some implementations, the grippers are located on one side of the slide rail, and the grippers of the two gripping assemblies face away from each other.

[0008] In some embodiments, the clamping assembly further includes a clamping component corresponding to the upper and lower jaws. The clamping component includes a telescopic frame disposed on the same side as the jaws and the slide rail, and a clamping plate disposed opposite to the jaws. The telescopic frame controls the clamping plate to move closer to or away from the jaws. The jaws are used to clamp one end of the graphite boat, and the clamping component is used to press the other end of the graphite boat toward the jaws.

[0009] In some embodiments, the outer sides of the two grippers are provided with external limiting members that are fixed relative to the slide rail, and the external limiting members limit the maximum distance between the two grippers; the two grippers are provided with opposing inner limiting members, and the inner limiting members limit the minimum distance between the two grippers.

[0010] In some embodiments, a second drive assembly is provided on the carrier plate to control the two clamping assemblies to move closer or further apart.

[0011] In some embodiments, the second drive assembly includes a drive mechanism that independently drives the clamping assembly to move. The drive mechanism includes a lead screw and a motor that drives the lead screw to rotate. The motor is mounted on a support plate between the two clamping assemblies, and the drive assembly is provided with a nut that is threadedly engaged with the lead screw.

[0012] In some embodiments, the support plate is further provided with two parallel guide rods, and each clamping assembly is provided with a second slider that slides with the two guide rods. The lead screw and motor of the second drive assembly are located between the two guide rods.

[0013] A coating apparatus includes a graphite boat conveying device.

[0014] In some implementations, the support plate is mounted on a conveyor rail located between the purification station and the reactor.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The graphite boat conveying device provided by this utility model achieves efficient and stable conveying of graphite boats by arranging multiple clamping components opposite to each other on a support plate and combining them with the coordinated action of the grippers. The grippers can be flexibly adjusted under the action of the first driving component to ensure reliable clamping of graphite boats of different specifications, avoid offset and vibration, ensure a smooth conveying process, and prevent damage to the solar cells due to interference or collisions during the picking and delivering process, thereby improving conveying efficiency and reliability.

[0016] This invention further incorporates a second driving component, thereby enhancing the device's flexibility during transport. The first driving component controls the opening and closing of the grippers to reliably hold one end of the graphite boat; the second driving component adjusts the distance between the two gripping components, providing ample space for gripping the graphite boat. Attached Figure Description

[0017] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings. To illustrate the details and facilitate understanding of its principles, the drawings are not necessarily to scale, and similar reference numerals may describe similar components in different views. The accompanying drawings generally illustrate the embodiments discussed herein by way of example and not limitation. Wherein: Figure 1 This is a three-dimensional schematic diagram of the conveying device in Embodiment 1.

[0018] Figure 2 This is a top view schematic diagram of the conveying device in Embodiment 1.

[0019] Figure 3 This is a three-dimensional schematic diagram of a clamping component mounted on a carrier plate according to Embodiment 1.

[0020] Figure 4This is a three-dimensional schematic diagram of the conveying device in Embodiment 1 installed on the conveying guide rail.

[0021] Figure 5 This is a three-dimensional schematic diagram of the conveying device in Embodiment 2.

[0022] Figure 6 This is a top view schematic diagram of the conveying device in Embodiment 2.

[0023] Figure 7 yes Figure 6 A schematic diagram of the two clamping components when brought close together.

[0024] Figure 8 This is a three-dimensional schematic diagram of a clamping component mounted on a carrier plate according to Embodiment 2.

[0025] Figure 9 This is a three-dimensional schematic diagram of the conveying device in Embodiment 2, which is installed on the conveying guide rail.

[0026] Figure 10 This is a schematic diagram of the conveying device in Embodiment 2 installed between the purification table and the reactor.

[0027] In the diagram, 1. Graphite boat; 2. Cleaning platform; 3. Reactor; 4. Clamping assembly; 41. Gripper; 411. Rod; 412. Clamping plate; 42. First drive assembly; 421. Slide rail; 422. Drive component; 43. First slider; 44. Inner limiting component; 45. Buffer component; 46. Outer limiting component; 47. Second slider; 5. Bearing plate; 6. Clamping assembly; 61. Telescopic frame; 62. Pressure plate; 7. Second drive assembly; 71. Lead screw; 72. Motor; 8. Guide rod; 9. Conveyor rail; 10. Fixing block; 11. Support plate; 12. Third slider. Detailed Implementation

[0028] The following are specific embodiments of this utility model, and the technical solution of this utility model will be further described with reference to the accompanying drawings. However, this utility model is not limited to these embodiments, and the following embodiments do not limit the utility model involved in the claims. In addition, all combinations of features described in the embodiments are not necessarily necessary for the solution of the utility model.

[0029] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0030] like Figure 1 , 2As shown in Figures 3 and 4, this embodiment relates to a graphite boat conveying device, mainly used in the field of photovoltaic vacuum furnace coating, especially in the PECVD coating process, for clamping and conveying graphite boat 1. In the photovoltaic coating process, the graphite boat 1, as a carrier, needs to move back and forth between the clean bench 2 and the coating reaction furnace 3 to meet different process requirements. To improve the conveying stability, efficiency, and reliability of the graphite boat 1, this embodiment proposes a novel graphite boat conveying device. The device includes a clamping assembly 4 for clamping the graphite boat 1 and a support plate 5 for supporting the clamping assembly 4. The clamping assembly 4 consists of two opposing grippers 41 and a first driving assembly 42 for controlling the movement of the grippers 41. Under the action of the driving assembly, the spacing of the grippers 41 can be flexibly adjusted to adapt to graphite boats 1 of different specifications, ensuring firm clamping and avoiding damage. At least two clamping assemblies 4 are symmetrically distributed on the support plate 5, so that the support plate 5 is subjected to balanced force during the conveying process, avoiding offset, vibration, or instability caused by unilateral force, thereby achieving smooth conveying. This structure not only enables the simultaneous transport of multiple graphite boats 1, significantly improving production efficiency, but also enhances the reliability and service life of the bearing plate 5 and the transmission mechanism through a symmetrical force design.

[0031] Each gripper 41 includes two opposing rods 411, and each rod 411 is provided with two clamping plates 412 that hold the end of the graphite boat 1.

[0032] Furthermore, each gripper 41 is equipped with a first slider 43, and the first drive assembly 42 includes a slide rail 421 that slides with the first slider 43 and a drive component 422 that controls the two first sliders 43 to move closer or further apart along the slide rail 421. Specifically, the first sliders 43 and the slide rail 421 achieve precise adjustment of the grippers 41 through relative sliding. The slide rail 421 is a linear track, and its length and shape are designed according to actual needs to adapt to graphite boats 1 of different sizes. The cooperation between the slide rail 421 and the slider ensures the smooth movement of the grippers 41 and avoids jamming or uneven force caused by excessive friction or structural asymmetry. The ends of the two rods of each gripper are connected to the first sliders through a support plate 11. This increases the stability of the grippers during movement and avoids the problem of inaccurate contact positions between the long rods of the support arms and the ends of the graphite boat due to swaying.

[0033] The driving component 422 is a device that controls the sliding of the first slider 43 along the slide rail 421. Common driving components 422 include electric motors, pneumatic devices, or hydraulic systems, which can precisely adjust the movement position of the first slider 43, thereby making the opening and closing action of the gripper 41 more flexible and stable. In this embodiment, a bidirectional synchronous telescopic cylinder is used, that is, the telescopic cylinder has telescopic rods at both ends that extend and retract relative to the cylinder body. The two telescopic rods are respectively connected to the two grippers 41, thereby controlling the two grippers 41 to move closer or further away synchronously, realizing the clamping or releasing of the graphite boat 1.

[0034] Furthermore, the grippers 41 are located on one side of the slide rail 421, and the grippers 41 of the two symmetrical gripping components 4 are arranged facing away from each other. Through this structure, the two grippers 41 can respectively limit and clamp the graphite boat 1 from opposite sides of the slide rail 421, ensuring that the graphite boat 1 maintains a fixed running path under the guidance of the slide rail 421, while avoiding unilateral force or interference problems that might occur if the grippers 41 are arranged in the same direction. The principle is that the slide rail 421 bears the main guiding and load-bearing functions, while the opposing grippers 41 clamp and limit the lateral position of the graphite boat 1. Moreover, because the grippers 41 are arranged on one side of the slide rail 421 and facing away from each other, the device structure is more compact, facilitating the integration and arrangement of multiple components, and improving the overall space utilization and adaptability of the device.

[0035] Furthermore, an outer limiting member 46 is provided on the outer side of the two grippers 41 and fixed relative to the slide rail 421. The main function of the outer limiting member 46 is to limit the maximum distance between the two grippers 41, thereby ensuring that the opening and closing range of the grippers 41 during the clamping process will not exceed the predetermined maximum value.

[0036] The outer limiting member 46 ensures reliable safety during the opening and closing of the gripper 41, preventing mechanical impact or structural damage caused by excessive opening and closing. In practical applications, the dimensions of the graphite boat 1 may vary. The outer limiting member 46 ensures that the maximum opening and closing distance of the gripper 41 always meets the dimensional requirements of the graphite boat 1, thus preventing the gripper 41 from opening excessively and failing to effectively hold the graphite boat 1. Furthermore, the outer limiting member 46 also ensures that the gripper 41 remains within its optimal working range under different operating conditions, preventing mechanical instability caused by excessive opening and closing of the gripper 41, and ensuring smooth and precise transmission.

[0037] Furthermore, each of the two grippers 41 is provided with an opposing inner limiting member 44. The main function of the inner limiting member 44 is to limit the minimum distance between the two grippers 41, thereby ensuring that the grippers 41 can effectively hold the graphite boat 1 during the gripping process. The inner limiting member 44 is usually installed on the grippers 41 and is positioned opposite to the grippers 41. When the grippers 41 move through the drive assembly, the inner limiting member 44 will physically limit the movement of the grippers 41 when they approach each other, preventing the distance between the grippers 41 from being too small, which could cause the grippers 41 to over-grip the graphite boat 1 or damage it.

[0038] The inner limiting member 44 can be designed as a simple protrusion, baffle, or other form of limiting device, and its specific form can be adjusted according to actual needs. The inner limiting member 44 prevents the gripper 41 from closing excessively, ensuring that the gripper 41 does not exert excessive clamping force on the graphite boat 1, thereby avoiding deformation or damage to the graphite boat 1 due to over-clamping. Especially in photovoltaic coating processes, the graphite boat 1 usually needs to maintain a certain structural integrity; the inner limiting member 44 effectively protects the graphite boat 1, preventing mechanical damage caused by over-clamping during clamping. The inner limiting member 44 makes the working range of the entire conveying device more controllable, helping to extend the service life of the equipment and reduce maintenance costs.

[0039] A buffer 45 can also be provided between the two grippers 41 or at the relative contact portions of the two inner limiting members 44. For example, it can be an elastic element such as a buffer rubber block, thereby avoiding rigid contact between the two grippers 41. In this embodiment, a buffer 45 is provided below the inner limiting member 44, and the front contact surface of the buffer 45 is higher than the inner limiting member 44, so that the two buffers 45 touch before the two inner limiting members 44 touch.

[0040] Furthermore, in this embodiment, the clamping assembly 4 not only includes a jaw 41 for clamping one end of the graphite boat 1, but also further includes a clamping assembly 6 corresponding vertically to the jaw 41. The clamping assembly 6 consists of a telescopic frame 61 and a pressure plate 62 disposed opposite to the jaw 41. The telescopic frame 61 is installed on the same side as the jaw 41 and the slide rail 421, and is used to drive the pressure plate 62 to move closer to or away from the jaw 41. Through this structure, the jaw 41 can clamp and position one end of the graphite boat 1, while the clamping assembly 6 acts on the other end of the graphite boat 1, reliably pressing it towards the jaw 41, thus forming a double-end clamping arrangement. The principle is that the jaw 41 and the clamping assembly 6 correspond to each other and form a constraint on both ends of the graphite boat 1, effectively preventing the graphite boat 1 from tilting, shaking, or falling off during transport due to unilateral clamping. The technical advantage of this structure lies in significantly improving the stability of the graphite boat 1, ensuring it maintains a stable posture during longitudinal conveying and high-speed operation, while reducing the impact of vibration or positional displacement of the graphite boat 1 on the coating process. Furthermore, by driving the pressure plate 62 via the telescopic frame 61, the clamping force can be flexibly adjusted according to the size of the graphite boat 1, enhancing the adaptability of the device to different models of graphite boat 1 and improving the reliability and versatility of the overall conveying device. The telescopic frame 61 can be, for example, a pneumatic cylinder, electric cylinder, or other telescopic control device.

[0041] like Figure 5 , 6As shown in Figures 7 and 8, unlike the embodiments described above, the support plate 5 is provided with a second drive component 7 for controlling the relative proximity or distance between the two clamping components 4. The second drive component 7 is used to adjust the relative position between the two clamping components 4, thereby flexibly adjusting the distance between the two clamped objects as needed. The second drive component 7 can be composed of an electric motor, pneumatic device, hydraulic system, or other adjustable drive device, and can achieve parallel movement of the clamping components 4 through precise control.

[0042] The distance between the two clamped objects is adjusted to provide sufficient space for retrieving the graphite boat 1, thus avoiding collisions between different graphite boats 1 that could damage the battery cells. After retrieving the graphite boat 1, the graphite boat 1 retrieval mechanism moves towards the drive component, allowing it to clamp the graphite boat 1 and run smoothly on the guide rail.

[0043] The second drive assembly 7 provides an adjustable clamping range, ensuring that the clamping assembly 4 can operate normally under different process and size requirements. This adjustment function not only improves the adaptability of the equipment but also allows for flexible handling of the clamping needs of graphite boats 1 of different specifications during production, improving the efficiency and flexibility of the production line. Through the control of the second drive assembly 7, the relative positions of the two clamping assemblies 4 can be precisely adjusted, giving the graphite boat 1 conveying device higher precision and flexibility, ensuring efficient operation under different production needs.

[0044] Furthermore, the second drive assembly 7 includes a drive mechanism that independently drives the clamping assemblies 4 to move. This drive mechanism consists of a lead screw 71 and a motor 72 that drives the lead screw 71 to rotate. The motor 72 is mounted on a support plate 5 between the two clamping assemblies 4. The drive assembly also has a nut (not shown in the figure) that threadedly engages with the lead screw 71. The precise adjustment of the spacing between the clamping assemblies 4 is achieved through the engagement of the nut and the lead screw 71.

[0045] The lead screw 71 is a common transmission device that rotates to move the nut along its thread direction. The motor 72 drives the lead screw 71 to rotate, transmitting motion to it via the transmission device, thereby moving the nut and achieving relative opening / closing or parallel movement between the clamping components 4. The threaded engagement between the nut and the lead screw 71 provides high-precision linear adjustment, allowing the spacing of the clamping components 4 to be fine-tuned as needed, thus ensuring the precise position of the clamping components 4 during clamping.

[0046] The threaded engagement structure between the lead screw 71 and the nut provides a precise and stable transmission method, avoiding loosening, wear, or uneven movement that may be caused by traditional sliding or friction structures. The lead screw 71 has high transmission accuracy and a simple structure, enabling the entire drive system to achieve efficient adjustment of the distance between the two clamping components 4 within a small space, thereby improving the stability and reliability of the transmission device.

[0047] The second drive assembly 7 employs a combination design of a lead screw 71 transmission structure and a motor 72 drive, providing a more precise and reliable movement method for the clamping assembly 4. This structure ensures the stability of the clamping assembly 4's movement during high-precision adjustments. The threaded fit design between the lead screw 71 and the nut avoids clamping errors caused by friction, loosening, or uneven force, ensuring the accuracy of the clamping operation.

[0048] Furthermore, the support plate 5 is also provided with two parallel guide rods 8, and each clamping component 4 is provided with a second slider 47 that slides in cooperation with the two guide rods 8. The lead screw 71 and motor 72 of the second drive component 7 are located between the two guide rods 8. The purpose of this design is to achieve smooth and precise sliding of the clamping component 4 through the cooperation of the guide rods 8 and the second slider 47, while ensuring the stability of the drive component's position.

[0049] A fixing block 10 is provided on the second slider 47 between the two grippers 41. The two ends of the fixing block 10 are provided with inner limiting members 44 corresponding to the two grippers 41. That is, the inner limiting members 44 in this embodiment are not provided on the grippers 41 as in the above embodiment.

[0050] Specifically, the guide rod 8, acting as a support and guiding element, provides a smooth path for the clamping assembly 4 to move in a straight line. Through the second slider 47, which slides in cooperation with the guide rod 8, the clamping assembly 4 can move precisely under the guidance of the guide rod 8, avoiding clamping errors and equipment wear caused by asymmetrical forces or poor guidance. The cooperation between the second slider 47 and the guide rod 8 ensures that the clamping assembly 4 maintains parallel movement throughout the adjustment process, reducing offset and instability, thereby improving the stability and accuracy of the conveying process. The guiding effect provided by the guide rod 8 ensures that the clamping assembly 4 always maintains parallel movement, avoiding unnecessary displacement or tilting, improving the accuracy of the conveying process, and ensuring that the graphite boat 1 remains stable during conveying. By placing the lead screw 71 and motor 72 of the second drive assembly 7 between the guide rods 8, the entire conveying device has a more compact structure.

[0051] like Figure 9 , 10As shown, a coating equipment includes a graphite boat 1 conveying device. A support plate 5 is slidably mounted on a conveying guide rail 9 located between two workstations, a clean bench 2 and a reactor 3, via a third slider 12. Two clamping assemblies 4 are symmetrically arranged about the conveying guide rail 9 to ensure stable conveying of the graphite boat 1. This also allows the clamping assemblies 4 to work smoothly and symmetrically during conveying, thereby improving the overall operating efficiency and stability of the conveying device. The conveying guide rail 9 guides the movement of the support plate 5, ensuring that the device can operate stably along a predetermined trajectory when conveying the graphite boat 1.

[0052] After the clamping assembly 4 picks up the graphite boat 1 at one of the workstations, it moves closer to the central guide rail and then transports it on the conveyor rail 9. The two symmetrical clamping assemblies 4 can be relatively far apart before picking up the graphite boat 1 at one of the workstations, thus providing sufficient space for clamping the graphite boat 1 and avoiding problems such as interference or collisions during the picking and delivery process that could damage the battery cells.

[0053] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A graphite boat conveying device, characterized in that, The device includes a clamping assembly for holding a graphite boat and a support plate for supporting the clamping assembly. The clamping assembly includes two opposing jaws and a first drive assembly for controlling the two jaws to move closer or further apart. At least two of the clamping assemblies are disposed opposite each other on the support plate.

2. The graphite boat conveying device according to claim 1, characterized in that, Each of the grippers is provided with a first slider, and the first drive assembly includes a slide rail that slides with the first slider and a drive member that controls the two first sliders to move closer or further apart along the slide rail.

3. The graphite boat conveying device according to claim 2, characterized in that, The gripper is located on one side of the slide rail, and the grippers of the two gripping assemblies face away from each other.

4. The graphite boat conveying device according to claim 3, characterized in that, The clamping assembly further includes a clamping component corresponding to the upper and lower jaws. The clamping component includes a telescopic frame disposed on the same side as the jaws and the slide rail, and a pressure plate disposed opposite to the jaws. The telescopic frame controls the pressure plate to move closer to or away from the graphite boat. The jaws are used to clamp one end of the graphite boat, and the clamping component is used to press the other end of the graphite boat toward the jaws.

5. The graphite boat conveying device according to claim 2, characterized in that, The outer sides of the two grippers are provided with outer limiting members that are fixed relative to the slide rail, and the outer limiting members limit the maximum distance between the two grippers; the two grippers are provided with opposing inner limiting members, and the inner limiting members limit the minimum distance between the two grippers.

6. The graphite boat conveying device according to any one of claims 1-5, characterized in that, The support plate is provided with a second drive component that controls the two clamping components to move closer or further apart.

7. The graphite boat conveying device according to claim 6, characterized in that, The second drive assembly includes a drive mechanism that independently drives the clamping assembly to move. The drive mechanism includes a lead screw and a motor that drives the lead screw to rotate. The motor is mounted on the support plate between the two clamping assemblies. The drive assembly is provided with a nut that is threadedly engaged with the lead screw.

8. The graphite boat conveying device according to claim 7, characterized in that, The support plate is also provided with two parallel guide rods, and each clamping component is provided with a second slider that slides with the two guide rods. The lead screw and motor of the second drive component are located between the two guide rods.

9. A coating apparatus, characterized in that, Includes the graphite boat conveying device as described in any one of claims 1-8.

10. The coating equipment according to claim 9, characterized in that, The support plate is mounted on the conveyor rail located between the purification table and the reactor.

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