A rapid heating chemical vapor deposition reaction furnace device

Abstract

The utility model discloses a chemical vapor deposition reaction furnace device of quick heating, including support baseplate and temperature monitoring meter, the support baseplate is fixedly connected with the casing, the utility model discloses, through the reaction chamber around using vacuum or inert gas environment reduces the heat convection loss, the heat preservation layer adopts multilayer ceramic fiber or graphite felt heat insulating material, spiral heating element adopts high power density resistance wire or strip heater, directly to the reaction zone heating, can satisfy the technological requirement, promotes production efficiency and the accuracy of experimental result, the cylinder work drives the up and down movement of sliding axle, finally drives the up and down movement of operation platform, second motor drives first rotating shaft rotation, and then drives rotary ring rotation, finally drives operation platform rotation, first motor drives second rotating shaft rotation, and then drives operation platform and connecting block rotation, flexible adjustment operation angle and height, not only reduce the labor intensity of staff, also has promoted the convenience and security of equipment operation.

Description

Technical Field

[0001] This utility model relates to the field of reactor devices, and in particular to a chemical vapor deposition reactor device with rapid heating. Background Technology

[0002] Chemical vapor deposition (CVD) reactors can prepare high-purity, uniformly distributed thin film materials with excellent chemical and structural homogeneity. They achieve highly repeatable deposition processes through intelligent programmed temperature control systems (e.g., temperature control accuracy ±1℃). Applicable to a variety of materials, including metals, semiconductors, oxides, and carbon-based materials, they can prepare gradient films, multilayer single-crystal films, and achieve micro-assembly of multilayer films. Suitable for high-volume, compositionally uniform coating production, their efficiency surpasses that of liquid phase epitaxy (LPE) and molecular beam epitaxy (MBE).

[0003] However, the commonly available chemical vapor deposition reactor devices have some obvious drawbacks: First, the equipment lacks rapid heating capability, and the heating rate cannot meet the process requirements, resulting in limited production efficiency and potentially affecting the accuracy of experimental results; second, the operating platform lacks rotation and lifting functions, making it difficult to flexibly adjust the working angle and height, which not only increases the labor intensity of the staff but also seriously restricts the convenience and safety of equipment operation; therefore, it is necessary to design a rapid heating chemical vapor deposition reactor device. Utility Model Content

[0004] The purpose of this invention is to provide a chemical vapor deposition reactor device with rapid heating, in order to solve the defects of existing reactor devices that cannot heat up quickly and whose operating platforms cannot rotate or be raised and lowered.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a rapid heating chemical vapor deposition reactor device, including a supporting base plate, an observation window, a fixed shaft, a rotating ring, and a temperature monitoring meter. A shell is fixedly connected to the supporting base plate, and a reaction chamber is fixedly connected to the shell. A spiral heating element is wound around the outside of the reaction chamber. A second top cover is provided on the top of the reaction chamber. A connecting pipe is fixedly connected to the second top cover, and a temperature monitoring meter is provided on the second top cover. A first fixed flange is fixedly connected to a groove inside the fixed shaft. A cylinder is fixedly connected to the first fixed flange. A second fixed flange is fixedly connected to the cylinder. A sliding shaft is fixedly connected to the second fixed flange. A second motor is fixedly connected to the sliding shaft. A first rotating shaft is fixedly connected to the output end of the second motor. A rotating ring is fixedly connected to the first rotating shaft. A fixed block is fixedly connected to the rotating ring. A first motor is fixedly connected to the fixed block. A second rotating shaft is fixedly connected to the output end of the first motor. A connecting block is fixedly connected to the second rotating shaft. An operating platform is fixedly connected to the connecting block.

[0006] As a further technical solution of this utility model, a support block is fixedly connected to the support base plate, and a fixed shaft is fixedly connected to the support block.

[0007] As a further technical solution of this utility model, a sliding shaft is slidably connected in the groove inside the fixed shaft, and a rotating ring is rotatably connected to the sliding shaft.

[0008] As a further technical solution of this utility model, a second rotating shaft is rotatably connected to the fixed block.

[0009] As a further technical solution of this utility model, an insulation layer is fixedly connected to the outside of the shell, and an observation window is provided on the insulation layer and the shell.

[0010] As a further technical solution of this utility model, a first top cover is provided on the top of the shell, a vacuum pump is fixedly connected to the first top cover, and a connecting pipe is fixedly connected to the vacuum pump.

[0011] As a further technical solution of this utility model, an exhaust pipe and an air inlet pipe are fixedly connected to the reaction chamber, and the exhaust pipe and air inlet pipe penetrate the insulation layer and the shell through the through hole.

[0012] This invention provides a rapid heating chemical vapor deposition reactor device, which has the following advantages: It reduces heat convection loss by using a vacuum or inert gas environment around the reaction chamber; the insulation layer uses multi-layer ceramic fiber or graphite felt insulation material; the spiral heating element uses high-power-density resistance wire or strip heater to directly heat the reaction zone, meeting process requirements and improving production efficiency and the accuracy of experimental results; the reaction chamber is typically made of quartz tube or stainless steel to ensure high temperature resistance and chemical stability; a vacuum pump ensures internal vacuum conditions; the spiral heating element heats the reactor to the set temperature at a rate of 10-15℃ / min; and the reaction gas is introduced through the inlet pipe and maintained at a specific temperature. With a fixed partial pressure ratio, the deposition time is controlled between 2 and 6 hours according to the coating thickness requirements. The temperature control system uses a PID algorithm to achieve a temperature control accuracy of ±1℃. After the reaction ends, exhaust is discharged from the exhaust pipe. The cylinder works, driving the sliding shaft to move up and down, which in turn drives the operating platform to move up and down. The output end of the second motor rotates, driving the first rotating shaft to rotate, which in turn drives the rotating ring to rotate, ultimately driving the operating platform to rotate. The output end of the first motor rotates, driving the second rotating shaft to rotate, which in turn drives the operating platform and connecting block to rotate. It can rotate and lift, flexibly adjusting the working angle and height, which not only reduces the labor intensity of the workers, but also improves the convenience and safety of equipment operation. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a partial top view of the present invention; Figure 3 This is a three-dimensional schematic diagram of the reaction chamber of this utility model; Figure 4 This is a partial sectional view of the fixed shaft of this utility model.

[0015] In the diagram: 1. Support base plate; 2. Shell; 3. Insulation layer; 4. Observation window; 5. Exhaust pipe; 6. Intake pipe; 7. First top cover; 8. Vacuum pump; 9. Support block; 10. Fixed shaft; 11. First rotating shaft; 12. Rotating ring; 13. Sliding shaft; 14. Operating platform; 15. Fixed block; 16. First motor; 17. Connecting block; 18. Second rotating shaft; 19. Second top cover; 20. Connecting pipe; 21. Temperature monitor; 22. Reaction chamber; 23. Spiral heating element; 24. Second motor; 25. Cylinder; 26. First fixed flange; 27. Second fixed flange. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0017] Please see the appendix Figure 1 - Appendix Figure 4This utility model provides an embodiment of a rapid heating chemical vapor deposition reactor, comprising a supporting base plate 1, an observation window 4, a fixed shaft 10, a rotating ring 12, and a temperature monitoring meter 21. A housing 2 is fixedly connected to the supporting base plate 1, and a reaction chamber 22 is fixedly connected to the housing 2. A spiral heating element 23 is wound around the outside of the reaction chamber 22. A second top cover 19 is provided on the top of the reaction chamber 22, and a connecting pipe 20 is fixedly connected to the second top cover 19. The temperature monitoring meter 21 is also provided on the second top cover 19. A first fixed flange 26 is fixedly connected to a groove inside the fixed shaft 10. A cylinder 25 is fixedly connected to the first fixed flange 26, and a second fixed flange 27 is fixedly connected to the cylinder 25. A sliding shaft 13 is fixedly connected to the second fixed flange 27, and a second motor 24 is fixedly connected to the sliding shaft 13. A first rotating shaft 11 is fixedly connected to the output end of the second motor 24, and a rotating ring 12 is fixedly connected to the first rotating shaft 11. A fixing block 15 is fixedly connected to the rotating ring 12. A first motor 16 is fixedly connected to the fixed block 15. A second rotating shaft 18 is fixedly connected to the output end of the first motor 16. A connecting block 17 is fixedly connected to the second rotating shaft 18. An operating platform 14 is fixedly connected to the connecting block 17. A support block 9 is fixedly connected to the support base plate 1. A fixed shaft 10 is fixedly connected to the support block 9. A sliding shaft 13 is slidably connected in the groove inside the fixed shaft 10. A rotating ring 12 is rotatably connected to the sliding shaft 13. The second rotating shaft 18 is rotatably connected to the fixed block 15. An insulation layer 3 is fixedly connected to the outside of the shell 2, and an observation window 4 is provided on the insulation layer 3 and the shell 2. A first top cover 7 is provided on the top of the shell 2, and a vacuum pump 8 is fixedly connected to the first top cover 7. The vacuum pump 8 is fixedly connected to a connecting pipe 20, and the vacuum pump 8 provides a vacuum environment. An exhaust pipe 5 and an air inlet pipe 6 are fixedly connected to the reaction chamber 22, and the exhaust pipe 5 and the air inlet pipe 6 pass through the through holes of the insulation layer 3 and the shell 2. The insulation layer 3 is made of multi-layer ceramic fiber or graphite felt insulation material to ensure slow temperature loss.

[0018] Specifically, in use, a vacuum or inert gas environment is first used around the reaction chamber 22 to reduce heat convection loss. The insulation layer 3 uses multi-layer ceramic fiber or graphite felt insulation material. The spiral heating element 23 uses a high-power-density resistance wire or strip heater to directly heat the reaction zone, which can meet process requirements and improve production efficiency and the accuracy of experimental results. The reaction chamber 22 is usually made of quartz tube or stainless steel to ensure high temperature resistance and chemical stability. The vacuum pump 8 ensures internal vacuum conditions. The spiral heating element 23 heats up to the set temperature at a rate of 10-15℃ / min. The reaction gas is introduced through the gas inlet pipe 6 and a specific partial pressure ratio is maintained. The deposition time is controlled according to the coating thickness requirements. The reaction takes 2-6 hours. The temperature control system uses a PID algorithm to achieve a temperature control accuracy of ±1℃. After the reaction ends, exhaust is discharged from the exhaust pipe 5. The cylinder 25 works to drive the sliding shaft 13 to move up and down, which in turn drives the operating platform 14 to move up and down. The output end of the second motor 24 rotates to drive the first rotating shaft 11 to rotate, which in turn drives the rotating ring 12 to rotate, which in turn drives the operating platform 14 to rotate. The output end of the first motor 16 rotates to drive the second rotating shaft 18 to rotate, which in turn drives the operating platform 14 and the connecting block 17 to rotate. It can rotate and lift, flexibly adjusting the working angle and height. This not only reduces the labor intensity of the workers, but also improves the convenience and safety of equipment operation.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0020] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0021] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A rapid heating chemical vapor deposition reactor apparatus, comprising a supporting base plate (1), an observation window (4), a fixed shaft (10), a rotating ring (12), and a temperature monitoring meter (21), characterized in that: A housing (2) is fixedly connected to the supporting base plate (1), a reaction chamber (22) is fixedly connected to the housing (2), a spiral heating element (23) is wound around the outside of the reaction chamber (22), a second top cover (19) is provided on the top of the reaction chamber (22), a connecting pipe (20) is fixedly connected to the second top cover (19), a temperature monitoring meter (21) is provided on the second top cover (19), a first fixed flange (26) is fixedly connected to the groove inside the fixed shaft (10), a cylinder (25) is fixedly connected to the first fixed flange (26), a second fixed flange (27) is fixedly connected to the cylinder (25), and the second fixed flange (28) is fixedly connected to the cylinder (29). A sliding shaft (13) is fixedly connected to the flange (27). A second motor (24) is fixedly connected to the sliding shaft (13). A first rotating shaft (11) is fixedly connected to the output end of the second motor (24). A rotating ring (12) is fixedly connected to the first rotating shaft (11). A fixed block (15) is fixedly connected to the rotating ring (12). A first motor (16) is fixedly connected to the fixed block (15). A second rotating shaft (18) is fixedly connected to the output end of the first motor (16). A connecting block (17) is fixedly connected to the second rotating shaft (18). An operating platform (14) is fixedly connected to the connecting block (17).

2. The rapid heating chemical vapor deposition reactor apparatus according to claim 1, characterized in that: A support block (9) is fixedly connected to the support base plate (1), and a fixed shaft (10) is fixedly connected to the support block (9).

3. The rapid heating chemical vapor deposition reactor apparatus according to claim 2, characterized in that: A sliding shaft (13) is slidably connected in the groove inside the fixed shaft (10), and a rotating ring (12) is rotatably connected to the sliding shaft (13).

4. The rapid heating chemical vapor deposition reactor apparatus according to claim 1, characterized in that: A second rotating shaft (18) is rotatably connected to the fixed block (15).

5. The rapid heating chemical vapor deposition reactor apparatus according to claim 1, characterized in that: An insulation layer (3) is fixedly connected to the outside of the shell (2), and an observation window (4) is provided on the insulation layer (3) and the shell (2).

6. The rapid heating chemical vapor deposition reactor apparatus according to claim 5, characterized in that: The top of the housing (2) is provided with a first top cover (7), and a vacuum pump (8) is fixedly connected to the first top cover (7). The vacuum pump (8) is fixedly connected to a connecting pipe (20).

7. The rapid heating chemical vapor deposition reactor apparatus according to claim 1, characterized in that: The reaction chamber (22) is fixedly connected to an exhaust pipe (5) and an air inlet pipe (6), which pass through the insulation layer (3) and the shell (2) through the through holes.

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