Anti-crystallization micro-etching liquid heating circulation system

Abstract

The utility model discloses a kind of anti-crystallization microetching liquid heating circulation systems, belong to microetching liquid circulation technical field, including stablely placed in corresponding position fixed chassis, fixed chassis is installed with outer tank body, and the inside of outer tank body is provided with inner tank body, further include: the controller is arranged on the fixed chassis, and controller is set to the right side of outer tank body, and the top of controller is fixed with first pump body by screw, temperature control mechanism is arranged between the inner tank body and outer tank body, and the temperature of microetching liquid is automatically controlled by temperature control mechanism;The inside of inner tank body is provided with anti-deposition mechanism, and deposition is prevented in microetching liquid heating process by anti-deposition mechanism.The anti-crystallization microetching liquid heating circulation system is provided with temperature control mechanism, and the purpose of automatic temperature control is realized when microetching liquid is circulated and heated by temperature control mechanism, effectively prevent the phenomenon that microetching liquid crystallizes at low temperature.

Description

Technical Field

[0001] This utility model relates to the field of micro-etching solution circulation technology, specifically a micro-etching solution heating and circulation system to prevent crystallization. Background Technology

[0002] The main function of micro-etching solution is to uniformly etch the copper substrate at the micron level, forming a micro-rough structure on its surface. During the circulation process of micro-etching solution, since temperature is a key factor affecting the chemical reaction rate, heating is required during the circulation of micro-etching solution. Therefore, the use of a heating circulation device is particularly important.

[0003] In the prior art, Chinese Patent No. CN221028686U discloses a micro-etching liquid circulation device for a micro-etching equipment, including a tank. The tank's interior is equipped with an anti-sedimentation mechanism, and the surface of the tank is equipped with a liquid volume monitoring mechanism. The surfaces of the perforated body and the fixed baffle are equipped with disinfection and sterilization mechanisms. This not only facilitates the agitation of copper-containing micro-etching waste liquid during use, preventing sedimentation, but also improves the copper electrolytic recovery efficiency of the waste liquid. It also allows for longer disinfection time and better disinfection effect, improving wastewater purification efficiency and enabling the recycling of micro-etching waste liquid. This increases the utilization rate of the waste liquid, exhibits strong environmental performance, high recovery efficiency, and avoids excessive liquid volume inside the tank during use.

[0004] The aforementioned device only filters and sterilizes the micro-etching solution during the circulation process, but it cannot automatically control the temperature of the micro-etching solution. If the temperature is too low during circulation, it will reduce the decomposition rate of hydrogen peroxide and cause crystallization, which will affect the etching efficiency. If the temperature is too high, it may cause side reactions or equipment corrosion, thereby affecting the normal use of the device. Utility Model Content

[0005] The purpose of this invention is to provide a micro-etching solution heating and circulation system that prevents crystallization, in order to solve the problems mentioned in the background art, such as the inability to automatically control the temperature of the micro-etching solution, the fact that if the temperature is too low during circulation, the hydrogen peroxide decomposition rate will be reduced, crystallization will occur, and the etching efficiency will be affected, while if the temperature is too high, side reactions or equipment corrosion may be triggered, thereby affecting the normal use of the device.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a micro-etching liquid heating and circulation system for preventing crystallization, comprising a fixed base frame stably placed in a corresponding position, an outer tank mounted on the fixed base frame, and an inner tank provided inside the outer tank, and further comprising:

[0007] A controller is installed on the fixed base frame and is located on the right side of the outer tank. The top of the controller is fixed with a first pump body by screws. A temperature control mechanism is installed between the inner tank and the outer tank to automatically control the temperature of the micro-etching liquid.

[0008] The inner tank is equipped with an anti-settling mechanism to prevent sedimentation from occurring during the heating process of the micro-etching solution.

[0009] Preferably, the temperature control mechanism includes an electromagnetic relay disposed between the outer tank and the inner tank, and an insulation pad is fixed to the inner wall of the outer tank, and the electromagnetic relay is installed on the inner surface of the insulation pad. An electric heating tape that fits tightly against the inner tank is installed on the outer surface of the inner tank, and the electric heating tape is distributed in a spiral shape.

[0010] Preferably, a sealed box is provided below the electromagnetic relay, and a movable block is provided inside the sealed box. A top rod is fixed on the upper surface of the movable block, and the end of the top rod away from the movable block is located on the outside of the sealed box. A connecting spring is installed between the upper surface of the movable block and the inner wall of the sealed box.

[0011] Preferably, a delivery pipe is installed at the outlet end of the first pump body, and the end of the delivery pipe away from the first pump body extends into the inner tank through the liquid inlet, and the liquid inlet is located at the top of the inner tank.

[0012] Preferably, the anti-settling mechanism includes a rotating shaft, and a limiting plate is connected to the outer surface bearing of the rotating shaft, and the limiting plate is welded and fixed to the inner wall of the inner tank.

[0013] Preferably, the outer wall of the rotating shaft is equipped with connecting blades and connecting rods that are distributed at equal angles, and the connecting blades and the outlet end of the conveying pipe correspond to each other.

[0014] Preferably, a fixing pipe is fixedly installed at the bottom of the inner tank, and the end of the fixing pipe away from the inner tank is connected to the inlet end of the second pump body, and the second pump body is installed on the fixed base frame by screws.

[0015] Compared with the prior art, the beneficial effects of this utility model are: the anti-crystallization micro-etching liquid heating circulation system adopts a novel structural design, the specific details of which are as follows:

[0016] 1. A temperature control mechanism is installed between the inner and outer tanks. The temperature control mechanism includes an electromagnetic relay, and an electric heating tape that fits tightly against the inner tank is installed on the outer surface of the inner tank. A sealing box is installed below the electromagnetic relay, and a moving block is installed inside the sealing box. A top rod is fixed on the upper surface of the moving block. The sealing box is filled with inert gas. This allows the moving block and the top rod to move up and down through the thermal expansion and contraction of the inert gas, thereby connecting and disconnecting the electromagnetic relay and the electric heating tape, achieving automatic temperature control and effectively preventing crystallization due to low temperature.

[0017] 2. An anti-settling mechanism is provided. When the micro-etching liquid enters the inner tank through the delivery pipe, the connecting blades will rotate under the impact of the liquid. This will cause the connecting blades to rotate along with the rotating shaft. As the rotating shaft rotates, it will also drive the connecting rod to rotate, thus agitating the micro-etching liquid. This not only makes the micro-etching liquid heat more evenly, but also effectively prevents the micro-etching liquid from settling. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the installation position of the inner tank of this utility model;

[0020] Figure 3 This is a schematic diagram of the connection structure between the rotating shaft and the connecting blades of this utility model;

[0021] Figure 4 This is a schematic diagram of the installation position of the conveying pipe of this utility model;

[0022] Figure 5 This utility model Figure 4 Enlarged structural diagram at point A in the middle;

[0023] Figure 6 This is a schematic diagram of the connection structure between the movable block and the top rod of this utility model;

[0024] Figure 7 This is a schematic diagram of the connection structure between the inner tank and the electric heating tape of this utility model.

[0025] In the diagram: 1. Fixed base frame; 2. Outer tank; 3. Inner tank; 4. Controller; 5. First pump body; 6. Delivery pipe; 7. Liquid inlet; 8. Rotating shaft; 9. Connecting blade; 10. Electric heating tape; 11. Electromagnetic relay; 12. Sealing box; 13. Moving block; 14. Top rod; 15. Connecting spring; 16. Insulation pad; 17. Limiting plate; 18. Connecting rod; 19. Fixed pipe; 20. Second pump body. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Example 1: Please refer to Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In order to achieve the purpose of temperature control, this embodiment provides the following technical solution, which is specifically disclosed as follows:

[0028] An outer tank 2 is mounted on a fixed base frame 1, and an inner tank 3 is located inside the outer tank 2. The system also includes a controller 4 mounted on the fixed base frame 1, positioned on the right side of the outer tank 2. A first pump body 5 is fixed to the top of the controller 4 by screws. A temperature control mechanism is located between the inner tank 3 and the outer tank 2 to automatically control the temperature of the micro-etching solution. The temperature control mechanism includes an electromagnetic relay 11 located between the outer tank 2 and the inner tank 3. A heat insulation pad 16 is fixed to the inner wall of the outer tank 2, and the electromagnetic relay 11 is mounted on the inner surface of the heat insulation pad 16. A pump body 5 is mounted on the outer surface of the inner tank 3. The inner tank 3 is tightly fitted with an electric heating tape 10, which is spirally distributed. Below the electromagnetic relay 11, a sealing box 12 is provided, and a movable block 13 is provided inside the sealing box 12. A top rod 14 is fixed on the upper surface of the movable block 13. The end of the top rod 14 away from the movable block 13 is located on the outside of the sealing box 12. A connecting spring 15 is installed between the upper surface of the movable block 13 and the inner wall of the sealing box 12. A delivery pipe 6 is installed at the outlet end of the first pump body 5. The end of the delivery pipe 6 away from the first pump body 5 extends into the inner tank 3 through the liquid inlet 7. The liquid inlet 7 is located at the top of the inner tank 3.

[0029] In use, the micro-etching solution can be drawn through the pipe at the inlet end of the first pump body 5, and then transported to the inner tank 3 through the delivery pipe 6. After the micro-etching solution enters the inner tank 3, the controller 4 controls the electromagnetic relay 11, which connects the electromagnetic relay 11 to the heating tape 10, and the heating tape 10 starts to heat up. Since the heating tape 10 is spirally and tightly attached to the outer surface of the inner tank 3, it can heat the inner tank 3. The heated inner tank 3 transfers heat to the micro-etching solution inside, thus achieving the effect of micro-etching solution... The purpose of heating is to facilitate temperature control through indirect heating, ensuring the normal operation of the micro-etching solution. Heat from the inner tank 3 will also diffuse between the inner tank 3 and the outer tank 2. The inner tank 3 and the outer tank 2 are fixed together by welding. Because an insulation pad 16, made of rubber and plastic insulation cotton, is connected to the inner wall of the outer tank 2, heat can be insulated, achieving an energy-saving effect. Inside the sealed box 12, specifically on the lower surface of the moving block 13 and the sealed box... The cavity between 12 is filled with an inert gas, such as nitrogen. At a given volume, pressure is directly proportional to temperature. Therefore, when the sealed box 12 is heated, the inert gas expands, pushing the moving block 13 upwards. The moving block 13 then drives the top rod 14 upwards, compressing the connecting spring 15. Once the top rod 14 reaches a certain position, it triggers the electromagnetic relay 11, disconnecting the connection between the electromagnetic relay 11 and the heating tape 10, thus stopping the heating tape 10 from heating further. When the temperature inside the sealed box 12 drops, the inert gas cools and contracts. At this point, the connecting spring 15 resets, pushing the moving block 13 and the top rod 14 downwards, resetting them. The top rod 14 then separates from the electromagnetic relay 11, reconnecting the electromagnetic relay 11 and the heating tape 10, allowing the heating tape 10 to continue heating. Through the principle of thermal expansion and contraction of the inert gas inside the sealed box 12, automatic temperature control can be achieved. Uniform temperature not only improves the etching efficiency of the micro-etching solution but also prevents low-temperature crystallization.

[0030] Example 2: Please refer to Figure 2 and Figure 4 In order to prevent the precipitation of micro-etching solution, this embodiment provides the following technical solution, which is specifically disclosed:

[0031] The inner tank 3 is equipped with an anti-settling mechanism to prevent sedimentation during the heating process of the micro-etching liquid. The anti-settling mechanism includes a rotating shaft 8, and a limiting plate 17 is connected to the outer surface of the rotating shaft 8 by a bearing. The limiting plate 17 is welded and fixed to the inner wall of the inner tank 3. Connecting blades 9 and connecting rods 18 are installed on the outer wall of the rotating shaft 8 at equal angles. The connecting blades 9 and the outlet end of the conveying pipe 6 correspond to each other. A fixing pipe 19 is fixedly installed at the bottom of the inner tank 3. The end of the fixing pipe 19 away from the inner tank 3 is connected to the inlet end of the second pump body 20. The second pump body 20 is installed on the fixed base frame 1 by screws.

[0032] When the micro-etching solution enters the inner tank 3 through the delivery pipe 6, it drives the connecting blades 9 to rotate under the impact force of the liquid. This causes the connecting blades 9 to drive the rotating shaft 8 to rotate as well. The rotating shaft 8 is connected to the limiting plate 17 by a bearing, which ensures the stability of the rotating shaft 8 during rotation. As the rotating shaft 8 rotates, it drives the connecting rod 18 to rotate as well, stirring the micro-etching solution. This not only makes the micro-etching solution heat more evenly, but also effectively prevents the micro-etching solution from settling, further improving the etching cycle efficiency of the micro-etching solution. Moreover, by utilizing the impact force of the micro-etching solution itself, it effectively saves the kinetic energy input of the drive equipment, achieving the purpose of energy saving and further improving the performance of the device. The heated micro-etching solution is transported through the fixed pipe 19 at the inlet end of the second pump body 20, ensuring the normal operation of the circulation.

[0033] In the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In addition, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A micro-etching liquid heating and circulation system for preventing crystallization, comprising a fixed base frame (1) stably placed in a corresponding position, wherein an outer tank (2) is mounted on the fixed base frame (1), and an inner tank (3) is provided inside the outer tank (2), characterized in that, Also includes: A controller (4) is provided on the fixed base frame (1), and the controller (4) is located on the right side of the outer tank (2). The top of the controller (4) is fixed with a first pump body (5) by screws. A temperature control mechanism is provided between the inner tank (3) and the outer tank (2) to automatically control the temperature of the micro-etching liquid. The inner tank (3) is equipped with an anti-settling mechanism to prevent sedimentation during the heating process of the micro-etching liquid.

2. The anti-crystallization micro-etching liquid heating and circulation system according to claim 1, characterized in that: The temperature control mechanism includes an electromagnetic relay (11) disposed between the outer tank (2) and the inner tank (3), and an insulation pad (16) is fixed on the inner wall of the outer tank (2), and the electromagnetic relay (11) is installed on the inner surface of the insulation pad (16). An electric heating tape (10) is installed on the outer surface of the inner tank (3) and fits tightly against the inner tank (3), and the electric heating tape (10) is distributed in a spiral shape.

3. The anti-crystallization micro-etching solution heating and circulation system according to claim 2, characterized in that: A sealing box (12) is provided below the electromagnetic relay (11), and a moving block (13) is provided inside the sealing box (12). A top rod (14) is fixed on the upper surface of the moving block (13). One end of the top rod (14) away from the moving block (13) is located outside the sealing box (12), and a connecting spring (15) is installed between the upper surface of the moving block (13) and the inner wall of the sealing box (12).

4. The anti-crystallization micro-etching liquid heating and circulation system according to claim 1, characterized in that: The first pump body (5) is equipped with a delivery pipe (6) at its outlet end, and the end of the delivery pipe (6) away from the first pump body (5) extends into the inner tank (3) through the liquid inlet (7), and the liquid inlet (7) is located at the top of the inner tank (3).

5. The micro-etching liquid heating and circulation system for preventing crystallization according to claim 1, characterized in that: The anti-settling mechanism includes a rotating shaft (8), and a limiting plate (17) is connected to the outer surface bearing of the rotating shaft (8), and the limiting plate (17) is welded and fixed to the inner wall of the inner tank (3).

6. The micro-etching solution heating and circulation system for preventing crystallization according to claim 5, characterized in that: The outer wall of the rotating shaft (8) is equipped with connecting blades (9) and connecting rods (18) that are distributed at equal angles, and the outlet ends of the connecting blades (9) and the conveying pipe (6) correspond to each other.

7. The anti-crystallization micro-etching liquid heating and circulation system according to claim 1, characterized in that: A fixing pipe (19) is fixedly installed at the bottom of the inner tank (3), and the end of the fixing pipe (19) away from the inner tank (3) is connected to the inlet end of the second pump body (20), and the second pump body (20) is installed on the fixed base frame (1) by screws.

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