Display panel etching apparatus

Abstract

The utility model relates to a kind of display panel etching device, including etching chamber, electrolytic component, first connecting pipe, second connecting pipe and pump body, electrolytic component includes reaction shell, anode chamber and cathode chamber are separately arranged in reaction shell, etching chamber is communicated with cathode chamber by first connecting pipe, cathode chamber is communicated with etching chamber by second connecting pipe, pump body is provided on second connecting pipe, anode piece is set in anode chamber, raw material liquid is provided in anode chamber, cathode piece is set in cathode chamber, anode piece is connected with the positive pole of power supply, cathode piece is connected with the negative pole of power supply, salt bridge connects raw material liquid with etching reagent in cathode chamber.The display panel etching device of the utility model, by the setting of electrolytic component, copper ion in etching reagent in cathode chamber can obtain electron to precipitate copper crystallization on cathode piece, effectively reduce the copper ion content in etching reagent, so that acidic etching reagent can be regenerated and recycled, keep higher etching speed.

Description

Technical Field

[0001] This utility model relates to the field of display panel manufacturing technology, and in particular to a display panel etching apparatus. Background Technology

[0002] Etching is a crucial step in display panel manufacturing. It involves using etching equipment to spray etching solutions onto the display panel to remove the copper film layer not covered by photoresist, thereby forming the patterned circuitry. For example... Figure 1 As shown, the existing display panel etching device includes an etching chamber 1'. The bottom of the etching chamber 1' is connected to a buffer chamber 3' via a first connecting pipe 2'. The buffer chamber 3' is connected to the etching chamber 1' via a second connecting pipe 4'. A pump body 5' is provided on the second connecting pipe 4'. The pump body 5' is driven to return the etching solution flowing from the etching chamber 1' to the buffer chamber 3' to the etching chamber 1' for continued use via the second connecting pipe 4'.

[0003] The existing technology has the following shortcomings: as the etching process proceeds, the amount of copper dissolved increases continuously, the copper ion content in the etching solution gradually increases, the etching speed gradually decreases, and the etching efficiency of the display panel is affected; and when the copper ions in the etching solution approach their maximum capacity, the etching solution can no longer meet the requirements of the etching process. At this time, the etching solution becomes waste liquid and is discharged, causing resource waste and environmental pollution. Utility Model Content

[0004] The purpose of this invention is to provide a display panel etching device, whose electrolytic components can effectively reduce the copper ion content in the etching solution and ensure the etching efficiency of the etching solution for recycling.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A display panel etching apparatus is provided, comprising an etching chamber, an electrolysis assembly, a first connecting pipe, a second connecting pipe, and a pump body. The electrolysis assembly includes a reaction shell, an anode, a cathode, a power supply, and a salt bridge. An anode chamber and a cathode chamber are spaced apart within the reaction shell. The etching chamber is connected to the cathode chamber via the first connecting pipe, and the cathode chamber is connected to the etching chamber via the second connecting pipe. The pump body is mounted on the second connecting pipe. The anode is disposed within the anode chamber, which contains a raw material solution. The cathode is disposed within the cathode chamber, and the anode is connected to the positive terminal of the power supply. The cathode is connected to the negative terminal of the power supply. One end of the salt bridge contacts the raw material solution, and the other end contacts the etching solution within the cathode chamber. When the power supply is energized, copper crystals are deposited from the etching solution within the cathode chamber onto the cathode.

[0007] As a preferred embodiment of the display panel etching apparatus, the electrolysis assembly further includes a first driving member and a scraper. The first driving member is disposed in the cathode chamber and is connected to the scraper in a driving manner, so that the scraper can scrape the copper crystals on the cathode.

[0008] As a preferred embodiment of a display panel etching apparatus, the reaction housing includes a first housing and a second housing arranged along a first direction. The first housing contains the anode chamber, and the second housing contains the cathode chamber. Both the second housing and the cathode are cylindrical structures. The length of the second housing extends along a second direction. The cathode is embedded in the inner wall of the second housing. The first driving component includes a motor and a rotating shaft. The motor is located outside the second housing and is disposed on one side of the second housing along the second direction. The rotating shaft is rotatably connected to the second housing (the connection between the rotating shaft and the second housing must be sealed to reduce leakage). The rotation axis of the rotating shaft extends along the second direction, and a portion of the rotating shaft extends into the cathode chamber. A plurality of scrapers are spaced apart on the portion of the rotating shaft located in the cathode chamber. The length of the scrapers extends along the second direction. The motor is driven by the rotating shaft to drive the scrapers to scrape the inner wall of the cathode. The first direction is perpendicular to the second direction.

[0009] As a preferred embodiment of the display panel etching apparatus, the reaction housing further includes a cover, and the top of the first housing has an installation port communicating with the anode chamber. The cover is used to block the installation port, and the cover is detachably connected to the installation port. The anode component is detachably disposed on the side of the cover facing the anode chamber.

[0010] As a preferred embodiment of the display panel etching apparatus, the electrolysis assembly further includes a drain pipe, a first branch pipe, a second branch pipe, and a first three-way valve. The first branch pipe is connected to the bottom of the first housing and communicates with the anode chamber. The second branch pipe is connected to the bottom of the second housing and communicates with the cathode chamber. The drain pipe is connected to the end of the first branch pipe away from the first housing and the end of the second branch pipe away from the second housing, respectively, through the first three-way valve.

[0011] As a preferred embodiment of the display panel etching apparatus, the length of the second housing is the same as the length of the cathode component. The inner sidewall of the cathode component is recessed with a relief groove, and the relief groove is located at the bottom of the cathode component in the vertical direction. The length of the relief groove extends along the second direction, and the bottom of the relief groove has a communication port that communicates with the second branch pipe. The vertical direction is perpendicular to the first direction and the second direction, respectively.

[0012] As a preferred embodiment of the display panel etching apparatus, the bottom of the clearance groove is at least partially inclined, and the inclined bottom of the clearance groove slopes downward from the end away from the communication opening toward the end adjacent to the communication opening; and / or,

[0013] The bottom cavity wall of the anode chamber is at least partially inclined, and the inclined bottom cavity wall of the anode chamber is inclined downward from the end away from the first branch pipe toward the end adjacent to the first branch pipe.

[0014] As a preferred embodiment of the display panel etching apparatus, the display panel etching apparatus further includes a first recovery tank, a third connecting pipe, and a first valve body. The first recovery tank is disposed between the etching chamber and the reaction shell. The etching chamber is connected to the first recovery tank through the first connecting pipe. The first recovery tank is connected to the cathode chamber through the third connecting pipe. The first valve body is disposed on the third connecting pipe.

[0015] As a preferred embodiment of the display panel etching apparatus, the display panel etching apparatus further includes a second recovery tank, a fourth connecting pipe, and a second valve body. The second recovery tank is disposed between the reaction shell and the etching chamber. The cathode chamber is connected to the second recovery tank through the fourth connecting pipe. The second valve body is disposed on the fourth connecting pipe. The second recovery tank is connected to the etching chamber through the second connecting pipe.

[0016] As a preferred embodiment of the display panel etching apparatus, the display panel etching apparatus further includes a detection element, which is disposed in the first recovery tank. The detection element is used to detect the copper ion concentration of the etching solution in the first recovery tank; and / or,

[0017] The second recycling tank is equipped with the detection device, which is used to detect the copper ion concentration of the etching solution in the second recycling tank.

[0018] The advantages of this utility model compared to the prior art are:

[0019] The display panel etching apparatus of this invention, through the setting of the electrolysis component, enables copper ions in the etching solution in the cathode chamber to gain electrons and precipitate copper crystals on the cathode, effectively recovering metals and simultaneously reducing the copper ion content in the etching solution. This allows the acidic etching solution to be regenerated and recycled, maintaining a high etching rate and reducing the decrease in etching rate caused by excessive copper ion concentration. It also reduces wastewater discharge, resulting in good production, economic, and environmental benefits. Attached Figure Description

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0021] Figure 1 This is a schematic diagram of the structure of a display panel etching device in the prior art.

[0022] Figure 2 This is a schematic diagram of the display panel etching apparatus according to an embodiment of the present invention.

[0023] Figure 3 This is a schematic diagram of the structure of the electrolysis component according to an embodiment of the present invention.

[0024] Figure 1 middle:

[0025] 1′, Etching chamber; 2′, First connecting pipe; 3′, Buffer chamber; 4′, Second connecting pipe; 5′, Pump body.

[0026] Figures 2 to 3 middle:

[0027] 1. Etching chamber; 2. Electrolysis assembly; 21. Reaction shell; 211. Anode chamber; 212. Cathode chamber; 213. First shell; 214. Second shell; 215. Cover; 22. Anode component; 23. Cathode component; 231. Clearance groove; 24. Power supply; 25. Salt bridge; 26. First drive component; 27. Scraper; 28. Drain pipe; 29. ​​First branch pipe; 30. Second branch pipe; 31. First three-way valve; 3. First connecting pipe; 4. Second connecting pipe; 5. Pump body; 6. First recovery tank; 7. Third connecting pipe; 8. First valve body; 9. Second recovery tank; 10. Fourth connecting pipe; 11. Second valve body; 12. Detection component; 13. Fifth connecting pipe. Detailed Implementation

[0028] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0029] The present invention will now be described in detail with reference to the accompanying drawings.

[0030] like Figure 2 and Figure 3As shown, this embodiment of the present invention provides a display panel etching apparatus, including an etching chamber 1, an electrolysis component 2, a first connecting pipe 3, a second connecting pipe 4, and a pump body 5. The electrolysis component 2 includes a reaction housing 21, an anode component 22, a cathode component 23, a power supply 24, and a salt bridge 25. An anode chamber 211 and a cathode chamber 212 are spaced apart inside the reaction housing 21. The etching chamber 1 is connected to the cathode chamber 212 through the first connecting pipe 3, and the cathode chamber 212 is connected to the etching chamber 1 through the second connecting pipe 4. A pump body 5 is installed on the second connecting pipe 4. The anode component 22 is installed in the anode chamber 211, which contains raw material liquid. The cathode component 23 is installed in the cathode chamber 212. The anode component 22 is connected to the positive terminal of the power supply 24, and the cathode component 23 is connected to the negative terminal of the power supply 24. One end of the salt bridge 25 is in contact with the raw material liquid, and the other end of the salt bridge 25 is in contact with the etching solution in the cathode chamber 212. When the power supply 24 is energized, copper crystals are precipitated from the etching solution in the cathode chamber 212 onto the cathode component 23.

[0031] The display panel etching apparatus of this invention, through the setting of the electrolysis component 2, enables copper ions in the etching solution in the cathode chamber 212 to gain electrons and precipitate copper crystals on the cathode component 23, effectively recovering metals, while effectively reducing the copper ion content in the etching solution, allowing the acidic etching solution to be regenerated and recycled, maintaining a high etching rate, reducing the situation where the etching rate of the etching solution decreases due to excessive copper ion concentration, and reducing waste liquid discharge, thus having good production efficiency, economic efficiency and environmental benefits.

[0032] In this embodiment, the anode 22 is a zinc rod, the raw material solution is a zinc sulfate mixed solution, and the cathode 23 is made of one of the non-reactive metals such as silver, platinum, or gold. Here, a copper component is used as an example, and the etching solution after etching the display panel contains a copper sulfate solution. A conductive circuit is formed by connecting the anode 22, the raw material solution, the salt bridge 25, the etching solution, the cathode 23, and the positive and negative terminals of the power supply 24. When the power supply 24 is turned on, the zinc rod loses electrons and dissolves into the zinc sulfate solution (the zinc sulfate mixed solution contains dilute sulfuric acid). Copper ions in the copper sulfate solution gain electrons to precipitate metallic copper crystals on the cathode 23, thereby achieving the electrolytic recovery of the etching solution.

[0033] Furthermore, the electrolysis assembly 2 also includes a first driving member 26 and a scraper 27. The first driving member 26 is disposed in the cathode chamber 212 and is connected to the scraper 27 in a driving manner, enabling the scraper 27 to scrape the copper crystals on the cathode component 23. After electrolysis for a period of time, the copper crystals precipitated and adhered to the cathode component 23 become increasingly thick. Therefore, by driving the scraper 27 to move via the first driving member 26, the scraper 27 effectively removes the copper crystals on the cathode component 23, ensuring the smooth stripping and recovery of the copper crystals, avoiding the accumulation or blockage of copper crystals, ensuring the continuous and smooth electrolysis process, and also keeping the surface of the cathode component 23 clean, thereby improving electrolysis efficiency.

[0034] Specifically, the reaction shell 21 includes a first shell 213 and a second shell 214 arranged along a first direction (the first direction is the X direction shown in the figure). An anode chamber 211 is disposed within the first shell 213, and a cathode chamber 212 is disposed within the second shell 214. Both the second shell 214 and the cathode element 23 are cylindrical structures. The length of the second shell 214 extends along a second direction (the second direction faces the front-back direction of the drawing). The cathode element 23 is embedded in the inner wall of the second shell 214. The first driving element 26 includes a motor and a rotating shaft. The motor is located within the second shell 214. The first direction is rotatably connected to the second housing 214 and the rotation axis of the rotating shaft extends along the second direction. The rotation axis of the rotating shaft coincides with the central axis of the cathode component 23. Part of the rotating shaft extends into the cathode chamber 212. A plurality of scrapers 27 are spaced apart on the part of the rotating shaft located in the cathode chamber 212. The length of the scrapers 27 extends along the second direction. The motor is connected to the rotating shaft to drive the scrapers 27 to scrape the inner sidewall of the cathode component 23. The first direction is perpendicular to the second direction.

[0035] In other words, the cylindrical structure of the cathode 23 provides a larger surface area, allowing copper ions to react more efficiently with the cathode 23, thereby improving electrolysis efficiency. It also reduces cleaning dead zones, enabling the motor-driven rotating shaft to allow the scraper 27 to thoroughly and smoothly scrape the inner wall of the cathode 23, improving copper crystal recovery efficiency and ensuring a clean finish.

[0036] Furthermore, since the anode 22 is continuously consumed during the electrolysis reaction, it should be maintained and replaced promptly after a period of use to ensure electrolysis efficiency. Therefore, the reaction shell 21 also includes a cover 215. The top of the first shell 213 has an installation port communicating with the anode chamber 211. The cover 215 is used to seal the installation port, and it is detachably connected to the installation port. The anode 22 is detachably mounted on the side of the cover 215 facing the anode chamber 211. This detachable connection between the anode 22 and the cover 215, and between the cover 215 and the first shell 213, facilitates timely removal of the cover 215 for maintenance and replacement of the anode 22, improving maintenance efficiency.

[0037] For example, the cover 215 has a slot on the side facing the anode chamber 211. The bottom of the slot has a mounting hole for the power supply cable 24 to pass through. The anode component 22 is partially embedded in the slot, allowing for a detachable connection between the anode component 22 and the cover 215. The outer periphery of the cover 215 has a first thread, and the cavity wall of the mounting opening has a second thread. The first and second threads engage, and tightening the cover 215 allows for a detachable connection between the cover 215 and the first housing 213. The detachable connection method is not limited to the above scheme and will not be specifically exemplified here.

[0038] Optionally, the electrolysis assembly 2 further includes a drain pipe 28, a first branch pipe 29, a second branch pipe 30, and a first three-way valve 31. The first branch pipe 29 is connected to the bottom of the first housing 213 and communicates with the anode chamber 211. The second branch pipe 30 is connected to the bottom of the second housing 214 and communicates with the cathode chamber 212. The first three-way valve 31 is provided at one end of the drain pipe 28 near the reaction housing 21. The ends of the first branch pipe 29 away from the first housing 213 and the ends of the second branch pipe 30 away from the second housing 214 are both connected to the first three-way valve 31. The drain pipe 28 allows for independent discharge and unified recycling of the anode chamber 211 and cathode chamber 212 during maintenance and cleaning to ensure electrolysis efficiency. This makes discharge more efficient and flexible, reducing the possibility of copper crystals scraped off in the cathode chamber 212 flowing with the second connecting pipe 4 and contaminating other structures. The first three-way valve 31 can be used to selectively discharge waste liquid from the anode chamber 211 or the cathode chamber 212, and to collect the first branch pipe 29 and the second branch pipe 30 for unified discharge, which can reduce the complex structure of the pipeline and make the structure simple and neat.

[0039] Preferably, the length of the second housing 214 is the same as the length of the cathode component 23. A relief groove 231 is recessed on the inner wall of the cathode component 23, and the relief groove 231 is located at the bottom of the cathode component 23 in the vertical direction (vertical direction is the Z direction shown in the figure). The length of the relief groove 231 extends along the second direction, and a connecting port communicating with the second branch pipe 30 is opened at the bottom of the relief groove 231. By making the length of the second housing 214 the same as the length of the cathode component 23, the structural length of the cathode component 23 is ensured, thereby ensuring electrolysis efficiency. The relief groove 231 and the connecting port allow copper crystals and waste liquid hanging from the scraper 27 to flow through the connecting port into the drain pipe 28. The vertical directions are perpendicular to the first and second directions, respectively. It should be noted that the end of the salt bridge 25 furthest from the anode chamber 211 is connected to the relief groove 231 to prevent interference and impact between the scraper 27 and the salt bridge 25, which could affect the structural service life.

[0040] Furthermore, the bottom of the clearance tank 231 is at least partially inclined, with the inclined bottom of the clearance tank 231 sloping downwards from the end furthest from the connection port towards the end adjacent to the connection port. The inclined bottom of the clearance tank 231 helps guide and discharge the copper crystals and waste liquid scraped by the scraper 27 in the cathode chamber 212, improving discharge efficiency and cleanliness, and reducing the residue of copper crystals and waste liquid in the clearance tank 231.

[0041] Of course, the bottom cavity wall of the anode chamber 211 is at least partially inclined, with the inclined bottom cavity wall of the anode chamber 211 inclined downward from the end away from the first branch pipe 29 toward the end adjacent to the first branch pipe 29. The inclined bottom cavity wall of the anode chamber 211 helps to guide and discharge the raw material liquid in the anode chamber 211 after a period of use, improving discharge efficiency and discharge cleanliness, and reducing the residue of raw material liquid in the anode chamber 211.

[0042] In some embodiments, such as Figure 2 As shown, the display panel etching apparatus also includes a first recovery tank 6, a third connecting pipe 7, and a first valve body 8. The first recovery tank 6 is located between the etching chamber 1 and the reaction shell 21. The etching chamber 1 is connected to the first recovery tank 6 via the first connecting pipe 3, and the first recovery tank 6 is connected to the cathode chamber 212 via the third connecting pipe 7. The first valve body 8 is installed on the third connecting pipe 7. By setting up the first recovery tank 6, the etching solution with a high copper content that flows out of the etching chamber 1 after etching is temporarily stored in the first recovery tank 6. Closing the first valve body 8 prevents it from directly entering the cathode chamber 212 and affecting the etching solution after electrolytic treatment in the cathode chamber 212, thereby improving the overall efficiency and safety of the apparatus.

[0043] Furthermore, the display panel etching apparatus also includes a second recovery tank 9, a fourth connecting pipe 10, and a second valve body 11. The second recovery tank 9 is located between the reaction shell 21 and the etching chamber 1. The cathode chamber 212 is connected to the second recovery tank 9 via the fourth connecting pipe 10, and the second valve body 11 is installed on the fourth connecting pipe 10. The second recovery tank 9 is connected to the etching chamber 1 via the second connecting pipe 4. Combined with the aforementioned first recovery tank 6, the recovery, electrolysis, and reuse of the etching solution after etching are independent and do not affect each other. That is, the etching solution in the second recovery tank 9 flows to the etching chamber 1 for etching under the drive of the pump body 5; the etched etching solution in the etching chamber 1 flows to the first recovery tank 6 for temporary storage; and the etching solution in the cathode chamber 212 is electrolyzed for recovery. These processes are independent, effectively improving the recycling efficiency of the etching solution.

[0044] It is worth noting that in this embodiment, in order to ensure that the etching solution after treatment in the cathode chamber 212 is completely drained, the fourth connecting pipe 10 is also connected to the communication port. Therefore, a fifth connecting pipe 13 is provided. The fifth connecting pipe 13 is connected to the communication port. The second valve body 11 is a second three-way valve. The end of the fifth connecting pipe 13 away from the reaction shell 21 is connected to the second three-way valve. The second three-way valve is connected to the end of the second branch pipe 30 away from the first three-way valve 31 and the end of the fourth connecting pipe 10 away from the second recovery tank 9.

[0045] Furthermore, the display panel etching apparatus also includes a detection element 12. The first recovery tank 6 is equipped with the detection element 12, which detects the copper ion concentration of the etching solution within the first recovery tank 6. By detecting the copper ion concentration in the etching solution within the first recovery tank 6, it ensures that the subsequent electrolysis reaction occurs within a set concentration range, helping to precisely control the concentration of the etching solution after electrolysis and improving the consistency and stability of the etching effect. The second recovery tank 9 is also equipped with the detection element 12, which detects the copper ion concentration of the etching solution within the second recovery tank 9. By detecting the copper ion concentration in the etching solution within the second recovery tank 9, it provides feedback on whether the copper ion concentration of the etching solution to be used is consistent with and stable against the set threshold. If inconsistent, the subsequent etching time is adaptively adjusted to ensure etching accuracy.

[0046] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A display panel etching apparatus, characterized in that, The device includes an etching chamber, an electrolysis assembly, a first connecting pipe, a second connecting pipe, and a pump. The electrolysis assembly includes a reaction shell, an anode, a cathode, a power supply, and a salt bridge. The reaction shell contains an anode chamber and a cathode chamber spaced apart. The etching chamber is connected to the cathode chamber via the first connecting pipe, and the cathode chamber is connected to the etching chamber via the second connecting pipe. The pump is mounted on the second connecting pipe. The anode is located in the anode chamber, which contains a raw material solution. The cathode is located in the cathode chamber, connected to the positive terminal of the power supply, and connected to the negative terminal of the power supply. One end of the salt bridge contacts the raw material solution, and the other end contacts the etching solution in the cathode chamber. When the power supply is energized, copper crystals are deposited from the etching solution in the cathode chamber onto the cathode.

2. The display panel etching apparatus according to claim 1, characterized in that, The electrolysis assembly further includes a first driving member and a scraper. The first driving member is disposed in the cathode chamber and is connected to the scraper in a driving manner, so that the scraper can scrape the copper crystals on the cathode.

3. The display panel etching apparatus according to claim 2, characterized in that, The reaction shell includes a first shell and a second shell arranged along a first direction. The anode chamber is disposed in the first shell, and the cathode chamber is disposed in the second shell. Both the second shell and the cathode are cylindrical structures. The length of the second shell extends along a second direction. The cathode is embedded in the inner wall of the second shell. The first driving component includes a motor and a rotating shaft. The motor is located outside the second shell and disposed on one side of the second shell along the second direction. The rotating shaft is rotatably connected to the second shell, and the axis of rotation of the rotating shaft extends along the second direction. A portion of the rotating shaft extends into the cathode chamber. A plurality of scrapers are spaced apart on the portion of the rotating shaft located in the cathode chamber. The length of the scrapers extends along the second direction. The motor is driven by the rotating shaft to drive the scrapers to scrape the inner wall of the cathode. The first direction is perpendicular to the second direction.

4. The display panel etching apparatus according to claim 3, characterized in that, The reaction shell also includes a cover. The top of the first shell has an installation port communicating with the anode chamber. The cover is used to block the installation port. The cover is detachably connected to the installation port. The anode component is detachably disposed on the side of the cover facing the anode chamber.

5. The display panel etching apparatus according to claim 3, characterized in that, The electrolysis assembly further includes a drain pipe, a first branch pipe, a second branch pipe, and a first three-way valve. The first branch pipe is connected to the bottom of the first housing and communicates with the anode chamber. The second branch pipe is connected to the bottom of the second housing and communicates with the cathode chamber. The drain pipe is connected to the end of the first branch pipe away from the first housing and the end of the second branch pipe away from the second housing, respectively, through the first three-way valve.

6. The display panel etching apparatus according to claim 5, characterized in that, The length of the second housing is the same as the length of the cathode component. The inner sidewall of the cathode component is recessed and a clearance groove is provided. The clearance groove is located at the bottom of the cathode component in the vertical direction. The length of the clearance groove extends along the second direction. The bottom of the clearance groove is provided with a communication port that communicates with the second branch pipe. The vertical direction is perpendicular to the first direction and the second direction, respectively.

7. The display panel etching apparatus according to claim 6, characterized in that, The bottom of the clearance groove is at least partially inclined, and the inclined bottom of the clearance groove slopes downward from the end away from the communication opening toward the end adjacent to the communication opening; and / or, The bottom cavity wall of the anode chamber is at least partially inclined, and the inclined bottom cavity wall of the anode chamber is inclined downward from the end away from the first branch pipe toward the end adjacent to the first branch pipe.

8. The display panel etching apparatus according to any one of claims 1 to 5, characterized in that, It also includes a first recovery tank, a third connecting pipe, and a first valve body. The first recovery tank is disposed between the etching chamber and the reaction shell. The etching chamber is connected to the first recovery tank through the first connecting pipe. The first recovery tank is connected to the cathode chamber through the third connecting pipe. The first valve body is disposed on the third connecting pipe.

9. The display panel etching apparatus according to claim 8, characterized in that, It also includes a second recovery tank, a fourth connecting pipe, and a second valve body. The second recovery tank is disposed between the reaction shell and the etching chamber. The cathode chamber is connected to the second recovery tank through the fourth connecting pipe. The second valve body is disposed on the fourth connecting pipe. The second recovery tank is connected to the etching chamber through the second connecting pipe.

10. The display panel etching apparatus according to claim 9, characterized in that, It also includes a detection element, which is installed inside the first recovery tank, and the detection element is used to detect the copper ion concentration of the etching solution in the first recovery tank; and / or, The second recycling tank is equipped with the detection device, which is used to detect the copper ion concentration of the etching solution in the second recycling tank.

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