Additive feeding device and electroplating equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, provide an additive feeding device and electroplating equipment, additive feeding device includes: feeding container, acidity and alkalinity detection spare, a plurality of medicament container and discharge control subassembly, the feeding container has the feeding cavity, the acidity and alkalinity detection spare sets up in the feeding cavity is used for detecting the acidity and alkalinity of additive in the feeding cavity, be provided with a plurality of discharge port with the feeding cavity communication on the feeding container, a the discharge port with a the inner chamber intercommunication of medicament container, discharge control subassembly sets up in the feeding container is used for opening or closing each the discharge port.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to an additive feeding device and an electroplating equipment. Background Technology

[0002] Electroplating is one of the core processes in semiconductor manufacturing. This technology is based on electrochemical principles, using an electrolytic process to directionally deposit metal ions from an electroplating solution onto the wafer surface, thereby constructing a high-precision metal interconnect structure.

[0003] During the electroplating process, electroplating machines typically add additives to the electroplating solution, such as accelerators, leveling agents S or L. Accelerators are used to increase the deposition rate of the electroplated metal, while leveling agents S and L are additives that improve the surface smoothness of the plating layer by regulating the metal deposition rate in the electroplating solution.

[0004] Currently, the addition of additives to electroplating machines is usually done manually. Aside from slight differences in color, there are no other obvious ways to distinguish the three additives mentioned above. When adding additives to the tank, the existing method involves manually identifying the type of additive and adding the appropriate one. This process is prone to errors in additive selection, and errors cannot be detected and prevented in a timely manner, leading to product scrap.

[0005] Therefore, this utility model provides an additive feeding device and electroplating equipment to accurately identify the type of additive being added and prevent incorrect addition of reagents. Utility Model Content

[0006] The purpose of this invention is to provide an additive feeding device and electroplating equipment to accurately identify the type of additive being added and prevent incorrect addition of reagents.

[0007] This utility model provides an additive feeding device, including: a feeding container, an acid-base detection element, multiple reagent containers, and a discharge control component;

[0008] The feeding container has a feeding chamber, and the pH detection element is disposed in the feeding chamber for detecting the pH of the additive in the feeding chamber;

[0009] The feeding container is provided with multiple discharge ports that communicate with the feeding chamber, and one of the discharge ports communicates with the inner cavity of one of the medicine containers;

[0010] The discharge control component is located in the feeding container and is used to open or close each of the discharge ports.

[0011] Optionally, the feeding container has a feeding port that communicates with the feeding chamber, and the feeding port has an outwardly expanding structure.

[0012] Optionally, the feeding port is located at the top of the feeding container, and the discharge port is located at the bottom of the feeding container.

[0013] Optionally, the acidity / alkalinity detection element is a pH sensor.

[0014] Optionally, the discharge control component includes a valve.

[0015] Optionally, the valve is a solenoid valve.

[0016] Optionally, the additive feeding device further includes a discharge pipe, the discharge port being connected to the inlet end of the discharge pipe, and the outlet end of the discharge pipe being connected to the inner cavity of the pharmaceutical container.

[0017] Optionally, at least one pharmaceutical container serves as a waste container.

[0018] Optionally, the additive feeding device further includes a controller, which is connected to the pH detection element and / or the discharge control component.

[0019] This utility model also provides a semiconductor electroplating device, including the additive feeding device described above.

[0020] With this configuration, the additive dispensing device detects the pH level of the additive solution after it is added to the dispensing container. Based on the pH level, it determines the type of additive. Then, based on the type of additive, the corresponding outlet is opened via the discharge control component, allowing the corresponding additive to flow into the appropriate reagent container. This additive dispensing device standardizes the additive addition process, preventing errors caused by human error. This avoids additive waste and product spoilage due to incorrect additive addition. Furthermore, the standardized process prevents incorrect additives from flowing into the reagent container, thus combining additive detection and error-proofing in liquid dispensing. Attached Figure Description

[0021] Figure 1 This is a partial structural schematic diagram of an additive feeding device according to an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the additive feeding device according to an embodiment of the present invention;

[0023] Figure 3 This is a signal flow diagram of an additive feeding device according to an embodiment of the present invention.

[0024] In the attached diagram:

[0025] 10-Feeding container; 11-Feeding chamber; 12-Discharge port; 13-Feeding port;

[0026] 20-Acidity / Alkalinity Testing Item;

[0027] 30 - Multiple medicine containers; 31 - First medicine container; 32 - Second medicine container;

[0028] 40 - Discharge control components;

[0029] 50 - Discharge pipe;

[0030] 60 - Feed pipe;

[0031] 70 - Controller; 71 - PLC controller; 72 - Intermediate relay. Detailed Implementation

[0032] The additive feeding device and electroplating equipment proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0033] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0034] This embodiment provides an additive feeding device, including: a feeding container 10, an acid-base detection element 20, multiple reagent containers 30, and a discharge control component 40.

[0035] The feeding container 10 has a feeding chamber 11 for adding additives. The pH detection element 20 is disposed within the feeding chamber 11 to detect the pH of the additives within it. For example, accelerators have a pH < 1, leveling agents S have a pH of 5-7, and leveling agents L have a pH of 3-5. The type of additive can be determined based on the pH detected by the pH detection element 20 to prevent incorrect additive identification. The pH detection element 20, installed on the feeding container 10, provides a foolproof function, not only detecting the type of agent but also preventing losses in case of incorrect addition.

[0036] The feeding container 10 is provided with multiple discharge ports 12 that communicate with the feeding chamber 11, and one of the discharge ports 12 communicates with the inner cavity of one of the reagent containers 30. The reagent container 30 can be directly connected to the electroplating tank of the electroplating equipment, or the reagent container 30 can be used as an independent container, and the additives inside can be added to the electroplating equipment by manually holding the independent container.

[0037] like Figure 1 As shown, in this embodiment, there are two discharge ports 12. Combined with... Figure 2 As shown, two medicine containers 30 are provided corresponding to the two discharge ports 12, namely the first medicine container 31 and the second medicine container 32.

[0038] In other alternative embodiments, the number of discharge ports 12 and the number of medicine containers 30 can be adjusted based on actual needs, for example, three, four or more discharge ports 12 and medicine containers 30.

[0039] The discharge control component 40 is disposed in the feeding container 10 for opening or closing each of the discharge ports 12.

[0040] In the above-mentioned additive feeding device, after the additive solution is added into the feeding container 10, the acidity or alkalinity is detected by the acidity or alkalinity detection device 20, and the type of additive is determined based on the acidity or alkalinity. At this time, the corresponding discharge port can be opened by the discharge control component 40 based on the type of additive, so that the corresponding additive flows into the corresponding reagent container 30.

[0041] The aforementioned additive feeding device can standardize the additive feeding process, avoiding the phenomenon of incorrect additive feeding due to human identification errors. On the one hand, it can avoid additive waste, and on the other hand, it can prevent product scrapping caused by additive errors. Moreover, through the standardized process, it can prevent additives from flowing into the reagent container 30 when they are added incorrectly, thus taking into account both additive detection and error prevention in liquid feeding.

[0042] In this embodiment, of the two reagent containers 30, the first reagent container 31 serves as a standard additive container. If the pH detector 20 identifies the additive type correctly, the discharge control component 40 opens the corresponding discharge port 12 to allow the additive to flow into the first reagent container 31, and the additive is added to the equipment through the first reagent container 31. The second reagent container 32 serves as a waste container. When the pH detector 20 identifies the additive type incorrectly, the discharge control component 40 opens the corresponding discharge port 12 to allow the additive to flow into the second reagent container 32.

[0043] In this embodiment, two reagent containers 30 are provided, and only one standard additive container (first reagent container 31) is provided. Since there are various additives, the standard additive container serves as a universal container to hold various additives. The internal cleanliness of the standard additive container must be ensured. After the additive is introduced into the standard additive container through the discharge port 12, the standard additive container can be manually transferred, and a clean standard additive container can be connected to the corresponding discharge port 12. In other alternative embodiments, multiple reagent containers 30 can be provided, with one reagent container 30 for each type of additive. For example, in this embodiment, there are three types of additives (accelerator, leveling agent S, or leveling agent L), so four reagent containers 30 are provided, one as a waste container and the other three as standard additive containers corresponding to the three types of additives respectively. Four discharge ports 12 are also provided, each corresponding to one of the four reagent containers 30. If the pH detector 20 correctly identifies the additive type, the discharge control component 40 opens the corresponding discharge port 12, allowing the additive to flow into the standard additive container corresponding to that additive. When the pH detector 20 identifies an incorrect additive type, the corresponding discharge port 12 is opened by the discharge control component 40 to allow the additive to flow into the waste container.

[0044] Combination Figure 1 As shown, in this embodiment, the feeding container 10 has a feeding port 13, which has an outwardly expanding flared structure. The feeding port 13 is located at the top of the feeding container 10, and the discharge port 12 is located at the bottom of the feeding container 10. The feeding container 10 as a whole has an upwardly expanding funnel structure to facilitate the addition of the additive solution through the feeding port 13, and the introduction of the additive solution into the corresponding pharmaceutical container 30 through the corresponding discharge port 12.

[0045] In this embodiment, the feeding port 13 of the feeding container 10 is a circular opening, and the feeding container 10 as a whole has a conical structure. In other alternative embodiments, the feeding container 10 can be configured as a cylindrical structure, and its outer contour and the shape of the feeding port 13 can be adjusted according to actual usage requirements.

[0046] In this embodiment, the pharmaceutical container 30 has a cylindrical structure with an open upper end. In other alternative embodiments, the shape of the pharmaceutical container 30 can be adjusted based on actual usage requirements. For example, the upper opening of the pharmaceutical container 30 can be configured as a constricted structure to prevent external contaminants from entering the interior of the pharmaceutical container 30. Furthermore, a sealing cap can be fitted to the upper opening of the pharmaceutical container 30, and the sealing cap is connected to the pharmaceutical container 30 by means of a hanging rope or similar method. When it needs to cooperate with the discharge port 12, the sealing cap is opened so that the discharge port 12 is directly opposite the opening of the pharmaceutical container 30. When the additive solution inside the pharmaceutical container 30 reaches the required amount, the pharmaceutical container 30 can be transferred, and its opening can be sealed by the sealing cap.

[0047] Furthermore, such as Figure 1 and Figure 2 As shown, in this embodiment, the additive feeding device further includes a discharge pipe 50. The discharge port 12 is connected to the inlet end of the discharge pipe 50, and the outlet end of the discharge pipe 50 is connected to the inner cavity of the pharmaceutical container 30. The discharge pipe 50 can be configured as a flexible hose to facilitate mating with the open end of the pharmaceutical container 30. Furthermore, the feeding port 13 of the feeding container 10 can be equipped with a feeding tube 60 for adding additives into the inner cavity of the feeding container 10.

[0048] In this embodiment, the pH detection element 20 is a pH sensor. The pH sensor is used to detect the hydrogen ion concentration in the analyte and convert it into a corresponding usable output signal, thereby determining the acidity or alkalinity of the analyte.

[0049] A pH sensor mainly consists of a pH electrode (also known as a measuring electrode) and a reference electrode. When the pH electrode is immersed in the solution to be measured, its special sensitive material (usually a glass membrane) reacts with hydrogen ions in the water, generating a weak electrical signal. The reference electrode provides a stable and known reference potential (stable voltage) in the same solution. Specifically, the sensitive glass membrane at the top of the pH electrode reacts with hydrogen ions in the solution, resulting in a potential difference (i.e., the pressure difference between positive and negative ions) across the glass membrane. This potential difference causes ion flow, thereby generating a weak electrical signal. When the potential difference between the reference electrode and the pH electrode remains constant, this weak electrical signal can be accurately measured and converted into the corresponding pH value. The common pH measurement range is 0-14. In this embodiment, an existing InPro type sensor can be used as the pH sensor. The pH sensor can be fixed to the inner wall of the feeding container 10, and the measuring electrode of the pH sensor should face downwards to ensure that the measuring electrode is in contact with the additive solution when a certain amount of additive solution is added to the feeding container 10. The structure, installation method, and usage of pH sensors are all existing technologies and will not be elaborated here.

[0050] In other alternative embodiments, the pH detection element 20 can be a pH test strip, which can be disposed on the inner wall of the feeding container 10 to detect the pH of the additive solution. Other known devices capable of detecting pH can be used for the pH detection element 20, which will not be described in detail here.

[0051] Furthermore, in this embodiment, the discharge control component 40 includes a valve, which is a solenoid valve.

[0052] A solenoid valve is a valve component that uses the energization or de-energization of an electromagnetic coil to control the opening / closing of a pipeline or change the direction of fluid flow. Like a switch, a solenoid valve receives electrical signals from a PLC, microcontroller, or relay to achieve precise control of the fluid medium. A typical solenoid valve includes an electromagnetic coil, a valve core, a valve body, a valve seat, and a spring. When the electromagnetic coil is energized, it generates a magnetic field, providing the driving force for the movement of the valve core. Under the influence of the magnetic field, the valve core moves up and down, opening or closing the fluid passage. The valve body has several through holes, and the valve seat cooperates with the valve core to achieve a seal. When the power is off, the spring pushes the valve core back to its initial position, ensuring the valve resets.

[0053] When the electromagnetic coil is energized, a magnetic field is generated within the coil, attracting the valve core upwards (or downwards). Simultaneously, the pilot orifice opens, and the pressure in the upper chamber (on the valve core side) drops rapidly, creating a pressure differential of "lower at the top and higher at the bottom." The fluid pressure then pushes the valve core to fully open the main orifice, completing the flow of the medium. When the power is cut off, the coil is de-energized, the magnetic force disappears, and the spring force or the medium pressure pushes the valve core back, closing the pilot orifice. The valve is tightly closed under the "higher at the top and lower at the bottom" pressure differential, ensuring no leakage.

[0054] like Figure 2 As shown, in this embodiment, the discharge control component 40 adopts a three-way solenoid valve. The inlet of the three-way solenoid valve is connected to the inner cavity of the feeding container 10, and the two outlets of the three-way solenoid valve serve as two discharge ports 12, which are respectively connected to two discharge pipes 50. The three-way solenoid valve is normally closed, with one inlet and one outlet. It selects to open the corresponding outlet based on the detection result of the pH detector 20, thereby controlling the on / off state of the two discharge ports 12. The installation, structure, and control method of the three-way solenoid valve are all prior art and will not be described in detail here.

[0055] In this embodiment, a single solenoid valve controls the on / off state of the two discharge ports 12. In other alternative embodiments, each discharge port 12 can be equipped with a solenoid valve, in which case a two-way valve is used, and the two solenoid valves control the on / off state of the two discharge ports 12 respectively.

[0056] In other alternative embodiments, the discharge control component 40 may include multiple manual valves, such as multiple butterfly valves, gate valves or ball valves, and each discharge port 12 may be equipped with a manual valve. The type of additive is determined by manually observing the acidity and alkalinity of the acidity and alkalinity detector 20, and then the corresponding manual valve is manually controlled to open the corresponding discharge port 12.

[0057] Furthermore, in this embodiment, the additive feeding device also includes a controller 70, which is connected to the pH detection element 20 and / or the discharge control component 40.

[0058] In this embodiment, the controller 70 includes a transmitter, a PLC controller 71, and an intermediate relay 72.

[0059] Combination Figure 3 As shown, the transmitter is electrically connected to the pH sensor 20 via a signal line. The transmitter can be integrated with the pH sensor 20. The transmitter's output current is 4-20mA.

[0060] The pH electrode of the pH detection element 20 is immersed in the reaction tank (the inner cavity of the feeding container 10) to detect the pH value of the additive and transmit it to the transmitter in the form of an electrical signal. The transmitter is connected to the PLC controller 71 via an analog signal line. The transmitter amplifies the signal from the sensor and converts it into an analog current signal, which is then transmitted to the PLC controller 71. The PLC controller 71 is connected to the intermediate relay 72 via a control signal line, and the intermediate relay 72 is also connected to the power supply via the main circuit. The PLC controller 71 receives the signal from the transmitter, converts it into a digital value, and outputs a switch control signal to the intermediate relay 72 according to the set judgment program.

[0061] Intermediate relay 72 receives a signal from PLC controller 71 and uses a small signal to safely control a high-voltage circuit. PLC controller 71 can be connected to a solenoid valve via a power line. The solenoid valve receives 220VAC power from intermediate relay 72 and controls the corresponding opening channel, thereby controlling the on / off state of outlet 12. For example, when the detected pH value is within the set range, PLC controller 71 further transmits the control signal to intermediate relay 72, which controls the solenoid valve to open the corresponding outlet 12, allowing the additive to flow into the standard additive container. When the detected pH value is outside the set range, PLC controller 71 further transmits the control signal to intermediate relay 72, which controls the solenoid valve to open the corresponding outlet 12, allowing the additive to flow into the waste container. Figure 1 As shown, when the pH is less than or equal to 1, the corresponding white discharge port 12 opens, and when the pH is greater than 1, the corresponding red discharge port 12 opens.

[0062] The aforementioned controller 70 uses an electronic control method in conjunction with a solenoid valve to achieve automatic control of the discharge port 12. In other alternative embodiments, the controller 70 can be connected to the valve stem of the discharge control component 40 to control the movement of the valve stem and thus control the valve core. For example, the controller 70 can be a motor, with the motor shaft connected to the valve stem. Alternatively, the controller 70 can be a pneumatic structure connected to the valve stem. Furthermore, the controller 70 can also be a mechanical structure, such as a handle, which can be connected to the valve stem for convenient manual valve control.

[0063] In other alternative embodiments, the controller 70 may include at least one processor, which may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0064] This embodiment also provides a semiconductor electroplating apparatus, including the additive feeding device described above.

[0065] In addition, semiconductor electroplating equipment also includes wafer transfer robotic arms, electroplating chambers, electroplating tanks, anode and cathode systems, chemical management systems, etc.

[0066] Wafer transfer robotic arms are used to move wafers between various process modules. They must be vibration-free, free of particulate contamination, and precisely positioned.

[0067] The equipment typically has multiple parallel electroplating chambers to increase production capacity. Each chamber is an independent reaction vessel. The electroplating tank, located inside the electroplating chamber, is a container used to hold the electrolyte (such as copper sulfate solution).

[0068] In an anode and cathode system, the anode typically uses either a soluble anode (such as a phosphor bronze ball) or an insoluble anode (such as a platinum-plated titanium mesh). The wafer clamp usually acts as the cathode, serving both to vacuum hold and seal the back and edges of the wafer, and simultaneously acting as the cathode, connected to an external power source.

[0069] The chemical management system is responsible for the preparation, delivery, circulation, and regulation of the electrolyte, and is crucial for ensuring the uniformity and consistency of the coating.

[0070] The difference between the semiconductor electroplating equipment and the existing equipment lies in the additive feeding device mentioned above. The other structures are consistent with the existing equipment and will not be described in detail here.

[0071] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0072] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. An additive feeding device, characterized in that, include: Feeding container, pH detection device, multiple reagent containers, and discharge control components; The feeding container has a feeding chamber, and the pH detection device is disposed in the feeding chamber for detecting the pH of the additive in the feeding chamber; The feeding container is provided with multiple discharge ports that communicate with the feeding chamber, and one of the discharge ports communicates with the inner cavity of one of the medicine containers; The discharge control component is located in the feeding container and is used to open or close each of the discharge ports.

2. The additive feeding device as described in claim 1, characterized in that, The feeding container has a feeding port that is connected to the feeding chamber, and the feeding port has an outwardly expanding structure.

3. The additive feeding device as described in claim 2, characterized in that, The feeding port is located at the top of the feeding container, and the discharge port is located at the bottom of the feeding container.

4. The additive feeding device as described in claim 1, characterized in that, The acidity / alkalinity detection device is a pH sensor.

5. The additive feeding device as described in claim 1, characterized in that, The discharge control component includes valves.

6. The additive feeding device as described in claim 5, characterized in that, The valve is a solenoid valve.

7. The additive feeding device as described in claim 1, characterized in that, The additive feeding device also includes a discharge pipe, the discharge port is connected to the inlet end of the discharge pipe, and the outlet end of the discharge pipe is connected to the inner cavity of the pharmaceutical container.

8. The additive feeding device as described in claim 1, characterized in that, At least one pharmaceutical container serves as a waste container.

9. The additive feeding device as described in claim 1, characterized in that, The additive feeding device also includes a controller, which is connected to the pH detection element and / or the discharge control component.

10. An electroplating device, characterized in that, Includes the additive feeding device according to any one of claims 1 to 9.

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