A nickel plating device

Abstract

The utility model belongs to the technical field of semiconductor processing, disclose a kind of nickel plating device.Including brush plate, and the both ends of brush plate are equipped with guide assembly in moving direction, and the inner wall of recess of part is abutted with the both sides of guide assembly, and the bottom of recess is abutted with the downside of guide assembly, and clearance is formed between the bottom of recess and the lower end of brush plate, and plating head is formed in the downside of brush plate, and plating head is dipped with nickel plating solution, and brush plate is connected with positive electrode of power supply;The problem that the brush head cannot brush the bottom of recess under the prior art, resulting in the problem that the final film is not uniform.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a nickel plating apparatus. Background Technology

[0002] In the field of equipment component manufacturing, especially in process equipment, aluminum alloys have become the preferred choice for various precision parts due to their advantages such as easy processing, low density, and high strength. Because semiconductor manufacturing processes involve many vacuum cavities, precision semiconductor components often have numerous groove structures for arranging sealing rings or conductive coils. However, in conventional designs, using bare aluminum surfaces directly as contact surfaces can lead to scratches on the surface of the machined aluminum parts.

[0003] To overcome the deficiencies in surface hardness and wear resistance of aluminum alloys, or to meet the electrical and thermal conductivity requirements of the production process, a uniform nickel layer is usually added to the special locations where sealing rings are installed to increase wear resistance and electrical conductivity, thereby improving the relevant performance of aluminum products.

[0004] Brush nickel plating is a type of electroplating that uses an electrochemical method. A plating head immersed in plating solution acts as the anode, causing metal ions to discharge and crystallize on the surface of the workpiece (the negative electrode), forming a metallic coating. The plating head is typically designed as an insoluble anode, and the plating solution is an aqueous solution of nickel-containing metal salts with organic complexes. During brush plating, the plating head is in contact with the workpiece surface and continuously moves. At these points, metal ions in the solution discharge and crystallize at the points of contact between the workpiece surface and the anode, gradually thickening over time. Under the combined action of current and chemical solution, the reaction continues, eventually accumulating and growing a dense nickel layer on the surface.

[0005] However, due to the relatively small and complex groove structure on aluminum workpieces, conventional brush plating nickel processes can hardly guarantee the quality of the nickel layer at the bottom of the groove. Under current technology, square brush blocks are directly used to cover a large area of ​​the workpiece to promote surface crystallization. However, due to the structural limitations of the groove, the bottom of the groove is far from the brush head, resulting in thinner crystallization at the bottom of the groove. The final film is not uniform, which leads to a large fluctuation in the sealing effect compared to the normal position, ultimately resulting in product quality differences. Utility Model Content

[0006] The purpose of this invention is to provide a nickel plating device that solves the problem that the brush head cannot reach the bottom of the groove in the prior art, resulting in uneven film formation.

[0007] To achieve this objective, the present invention adopts the following technical solution: The present invention provides a nickel plating device, including a brush plate, wherein guide components are installed at both ends of the brush plate in the direction of movement, the two sides of the guide components abut against the inner wall of the groove of the part, the lower side of the guide components abut against the bottom of the groove, a gap is formed between the lower end of the brush plate and the bottom of the groove, a plating head is formed on the lower side of the brush plate, the plating head is coated with nickel plating solution, and the brush plate is connected to the positive terminal of a power supply.

[0008] Preferably, an auxiliary component is installed in the middle section of the brush plate, and the auxiliary component abuts against the bottom surface of the groove.

[0009] Preferably, the guide assembly includes a front guide cone that is projected perpendicularly to the upper surface of the part. The front guide cone is triangular in shape, and its two sides abut against the sidewalls of the groove.

[0010] Preferably, the guide assembly further includes a rear guide cone, which is projected perpendicularly to the upper surface of the part. The rear guide cone is triangular, and its two sides abut against the sidewall of the groove.

[0011] Preferably, the brush plate is made of titanium alloy or stainless steel.

[0012] Preferably, the thickness of the brush plate is 0.4~0.8mm.

[0013] Preferably, the guide assembly is made of Teflon.

[0014] Preferably, the front guide cone is provided with a first mounting groove, the rear guide cone is provided with a second mounting groove, and the two ends of the brush plate are inserted into the first mounting groove and the second mounting groove.

[0015] Preferably, the gap between the brush plate and the bottom of the groove is 2-3 mm.

[0016] Preferably, the auxiliary component is made of Teflon, and the auxiliary component has a third mounting groove, into which the brush plate is inserted.

[0017] Beneficial effects: By setting up a brush plate that is inserted into the groove of the part, the plating head on the lower side of the brush plate will undergo an electrochemical reaction with the bottom of the groove, which can crystallize at the bottom of the groove and improve the nickel plating effect at the bottom of the groove. Attached Figure Description

[0018] Figure 1 This is a side view of the brush plate of this utility model;

[0019] Figure 2 This is a top view of the brush plate of this utility model;

[0020] Figure 3 This is a schematic diagram of the working process of the brush plate of this utility model;

[0021] Figure 4 This is a schematic diagram of the brush plate insertion of this utility model.

[0022] In the diagram: 1. Brush plate; 11. Plating head; 2. Front guide cone; 3. Rear guide cone; 4. Part; 41. Groove; 5. Auxiliary component. Detailed Implementation

[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0024] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0027] In the current technology, a flat brush head is usually used to perform nickel plating on the workpiece. However, during the processing, the groove on the workpiece is far from the brush head, resulting in insufficient nickel plating thickness inside the groove, which makes it impossible to guarantee the quality of the workpiece.

[0028] To solve the above problems, such as Figures 1 to 4 As shown, this utility model provides a nickel plating device, including a brush plate 1. Guide components are installed at both ends of the brush plate 1 in the moving direction. The two sides of the guide components abut against the inner wall of the groove 41 of the part 4, and the lower side of the guide components abuts against the bottom of the groove 41. A gap is formed between the lower end of the brush plate 1 and the bottom of the groove 41. A plating head 11 is formed on the lower side of the brush plate 1. The plating head 11 is coated with nickel plating liquid. The brush plate 1 is connected to the positive terminal of the power supply.

[0029] The brush plate 1 can be inserted into the groove 41. The plating head 11 on the brush plate 1 undergoes an electrochemical reaction with the bottom of the groove 41, achieving a crystallization effect at the bottom of the groove 41. By inserting the brush plate 1 into the groove 41, the plating head 11 is closer to the crystallization area at the bottom of the groove 41, thus improving the crystallization effect at the bottom of the groove 41. If the plating head 11 is far from the surface being processed, increasing the current can also meet the nickel plating requirements, but it will waste energy. This utility model can reduce energy consumption requirements.

[0030] The brush plate 1 is mounted on the guide assembly, which can prevent the brush plate 1 from contacting the groove 41 and the part 4 after being powered on, thus avoiding the problem of short circuit.

[0031] An auxiliary component 5 is installed in the middle section of the brush plate 1. The auxiliary component 5 abuts against the bottom surface of the groove 41. Similarly, the auxiliary component 5 can also prevent the middle part of the brush plate 1 from contacting the groove 41. Since the brush plate 1 of this utility model can be bent in the arc groove 41, the auxiliary component 5 in the middle section can prevent the bent brush plate 1 from contacting the auxiliary component 5, thus avoiding short circuits and improving safety.

[0032] The guide assembly of this utility model includes a front guide cone 2, which is projected perpendicularly to the upper surface of the part 4. The front guide cone 2 is triangular in shape, and its two sides abut against the side wall of the groove 41. The guide assembly also includes a rear guide cone 3, which is projected perpendicularly to the upper surface of the part 4. The rear guide cone 3 is triangular in shape, and its two sides abut against the side wall of the groove 41.

[0033] By adding a front guide cone and a rear guide cone 3 to both ends of the brush plate 1, the triangular front guide cone and rear guide cone 3 can reduce the resistance to movement in the groove 41, prevent the brush plate 1 from getting stuck, and enable the brush plate 1 to slide smoothly in the curved groove 41.

[0034] The brush plate 1 is made of titanium alloy or stainless steel, possessing good conductivity and corrosion resistance. The thickness of the brush plate 1 is 0.4~0.8mm. The brush plate 1 has a certain thickness and is flexible, facilitating bending. The appropriate arc / length can be selected based on the circular groove 41 structure of the product, and can be designed according to a 1 / 8-1 / 4 circle. The brush plate 1 should not be too long, as this can easily deform and lead to direct contact discharge. The brush head body is connected to the positive terminal of the power supply, and the negative terminal is connected to part 4 for current output.

[0035] The guide assembly is made of Teflon, which can separate the brush plate 1 and the part 4, while allowing the guide assembly to slide smoothly in the groove 41.

[0036] The front guide cone 2 is provided with a first mounting groove, and the rear guide cone 3 is provided with a second mounting groove. Both ends of the brush plate 1 are inserted into the first and second mounting grooves. This allows for adjustment of the distance between the brush plate 1 and the bottom surface of the groove 41, facilitating flexible adjustment to adapt to different grooves 41. The gap between the brush plate 1 and the bottom of the groove 41 in this invention is 2-3mm, which improves the nickel plating effect.

[0037] The auxiliary component 5 is made of Teflon. The auxiliary component 5 has a third mounting groove. The brush plate 1 is inserted into the third mounting groove. The guide can also slide up and down in the third mounting groove, so that the auxiliary component 5 can be adjusted synchronously with the front guide cone 2 and the rear guide cone 3.

[0038] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A nickel plating apparatus, characterized in that, The brush plate (1) is provided with guide components at both ends in the moving direction. The guide components are in contact with the inner wall of the groove (41) of the part (4) on both sides. The lower side of the guide components is in contact with the bottom of the groove (41). A gap is formed between the lower end of the brush plate (1) and the bottom of the groove (41). A plating head (11) is formed on the lower side of the brush plate (1). The plating head (11) is coated with nickel plating solution. The brush plate (1) is connected to the positive terminal of the power supply.

2. The nickel plating apparatus according to claim 1, characterized in that, An auxiliary component (5) is installed in the middle section of the brush plate (1), and the auxiliary component (5) abuts against the bottom surface of the groove (41).

3. The nickel plating apparatus according to claim 1, characterized in that, The guide assembly includes a front guide cone (2) that is projected perpendicularly to the upper surface of the part (4). The front guide cone (2) is triangular in shape, and the two sides of the front guide cone (2) abut against the sidewall of the groove (41).

4. The nickel plating apparatus according to claim 3, characterized in that, The guide assembly also includes a rear guide cone (3), which is projected perpendicularly to the upper surface of the part (4). The rear guide cone (3) is triangular, and the two sides of the rear guide cone (3) abut against the side wall of the groove (41).

5. The nickel plating apparatus according to claim 1, characterized in that, The brush plate (1) is made of titanium alloy or stainless steel.

6. The nickel plating apparatus according to claim 1, characterized in that, The thickness of the brush plate (1) is 0.4~0.8mm.

7. The nickel plating apparatus according to claim 1, characterized in that, The guide component is made of Teflon.

8. The nickel plating apparatus according to claim 4, characterized in that, The front guide cone (2) is provided with a first mounting groove, and the rear guide cone (3) is provided with a second mounting groove. The two ends of the brush plate (1) are inserted into the first mounting groove and the second mounting groove.

9. The nickel plating apparatus according to claim 1, characterized in that, The gap between the brush plate (1) and the bottom of the groove (41) is 2-3 mm.

10. The nickel plating apparatus according to claim 2, characterized in that, The auxiliary component (5) is made of Teflon and has a third mounting groove. The brush plate (1) is inserted into the third mounting groove.

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