A single crystal furnace and production line

Abstract

The application discloses a single crystal furnace and a production line. The single crystal furnace comprises a rack, a driving mechanism, a quartz boat assembly and a heating furnace assembly. The quartz boat assembly is fixedly arranged on the rack, and the heating furnace assembly is movably sleeved outside the quartz boat assembly. The driving mechanism is arranged on the rack and is used for driving the heating furnace assembly to rotate. The heating furnace assembly is used for heating the quartz boat assembly when relative rotation occurs between the quartz boat assembly and the heating furnace assembly. In the application, the quartz boat assembly is fixedly arranged. When heating, the heating furnace assembly is rotated by the driving mechanism, so that the heat radiation uniformly heats the quartz boat assembly, thereby being more beneficial to the crystal growth of a gallium arsenide single crystal rod.

Description

Technical Field

[0001] This application relates to the field of gallium arsenide crystal growth technology, and more particularly to a single crystal furnace and production line. Background Technology

[0002] Gallium arsenide (GaAs) is a compound semiconductor material with advantages such as high electron mobility, high optical transmittance, low noise, and high stability. It is widely used in the manufacture of high-speed communication devices, optical devices, sensors, and lasers. With technological advancements, the crystallization rate of GaAs single crystal rods is continuously improving, and the heating process is becoming increasingly demanding. However, the heating furnaces used in related technologies are fixed and cannot rotate, which can easily lead to uneven heating in actual use, affecting the crystallization of GaAs single crystal rods. Utility Model Content

[0003] This application proposes a single crystal furnace to effectively solve the technical problem of uneven heat radiation in single crystal furnace heating in related technologies.

[0004] This application also proposes a production line including the aforementioned single crystal furnace.

[0005] A first aspect of this application provides a single crystal furnace, including: a frame, a drive mechanism, a quartz boat assembly, and a heating furnace assembly;

[0006] The quartz boat assembly is fixedly mounted on the frame, and the heating furnace assembly is movably fitted over the quartz boat assembly;

[0007] The drive mechanism is mounted on the frame and is used to drive the heating furnace assembly to rotate. The heating furnace assembly is used to heat the quartz boat assembly when it rotates relative to the quartz boat assembly.

[0008] Furthermore, the driving mechanism includes a driving component, a gear transmission component, and a gear seat. The heating furnace component is disposed on the gear seat, the gear transmission component is meshed with the gear seat, and the driving component is used to drive the gear transmission component to rotate, thereby driving the gear seat and the heating furnace component to rotate.

[0009] Furthermore, the drive mechanism also includes a first bearing, which is mounted on the frame and serves to support the gear seat.

[0010] Furthermore, the drive assembly includes a drive element and a coupling, the gear transmission assembly includes a gear body and a gear shaft, the drive element is connected to the coupling, the gear shaft passes through the gear body, and the drive element is connected to the gear shaft through the coupling to drive the gear body to rotate.

[0011] Furthermore, the gear transmission assembly includes a second bearing, which is mounted on the frame and serves to support the gear body.

[0012] Furthermore, the heating furnace assembly includes a furnace body, an upper pressure plate, and a pull rod. One end of the pull rod is disposed on the gear seat, and the other end of the pull rod is connected to the upper pressure plate. The furnace body is disposed between the upper pressure plate and the gear seat.

[0013] Furthermore, the pull rod is connected to the upper pressure plate in a detachable manner.

[0014] Furthermore, the heating furnace assembly includes a conductive slip ring, through which the furnace body transmits power.

[0015] Furthermore, the quartz boat assembly includes a quartz boat body and a quartz boat cover. The quartz boat body forms a cavity for firing crystal rods, and the quartz boat cover is closably disposed on the quartz boat body to open or close the cavity.

[0016] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects: based on the fixed setting of the quartz boat assembly, the heating furnace assembly is rotated by the drive mechanism during heating, so that the heat radiation is uniformly heated to the quartz boat assembly, which is more conducive to the crystal formation of gallium arsenide single crystal rods.

[0017] A second aspect of this application provides a production line, including a single crystal furnace as described in the first aspect of this application.

[0018] It is easy to understand that the production line in the second aspect embodiment of this application has the same technical effect as the single crystal furnace in the first aspect embodiment, and therefore will not be described again.

[0019] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a single crystal furnace provided in one embodiment of this application;

[0022] Figure 2This is a cross-sectional view of a single crystal furnace provided in one embodiment of this application.

[0023] Figure label:

[0024] 100. Rack;

[0025] 200. Drive mechanism; 210. Drive assembly; 211. Drive component; 212. Coupling; 220. Gear transmission assembly; 221. Gear body; 222. Gear shaft; 223. Second bearing; 230. Gear seat; 240. First bearing;

[0026] 300. Quartz boat assembly; 310. Quartz boat body; 311. Cavity; 320. Quartz boat cover;

[0027] 400. Heating furnace assembly; 410. Furnace body; 420. Upper pressure plate; 430. Tie rod; 440. Conductive slip ring. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] See Figures 1 to 2 As shown, an embodiment of the first aspect of this application discloses a single crystal furnace, including a frame 100, a drive mechanism 200, a quartz boat assembly 300, and a heating furnace assembly 400;

[0030] The quartz boat assembly 300 is fixedly mounted on the frame 100, and the heating furnace assembly 400 is movably fitted over the quartz boat assembly 300; the drive mechanism 200 is mounted on the frame 100, and the drive mechanism 200 is used to drive the heating furnace assembly 400 to rotate, and the heating furnace assembly 400 is used to heat the quartz boat assembly 300 when it rotates relative to the quartz boat assembly 300.

[0031] In the embodiments of this application, based on the fixed setting of the quartz boat assembly 300, the heating furnace assembly 400 is rotated by the drive mechanism 200 during heating, so that the heat radiation is uniformly heated to the quartz boat assembly 300, which is more conducive to the crystal formation of gallium arsenide single crystal rods.

[0032] Understandably, the quartz boat assembly 300 is fixed on the frame 100 to support the raw materials for growing single crystals; the heating furnace assembly 400 is movably fitted around the quartz boat assembly 300 to form a surrounding heating space; the drive mechanism 200 provides rotational power to the heating furnace assembly 400, driving it to rotate circumferentially around the quartz boat assembly 300. During the relative rotation, the heat released by the heating furnace assembly 400 is evenly distributed over the entire quartz boat assembly 300, avoiding local temperature deviations.

[0033] It should be noted that the rotation of the heating furnace assembly 400 achieves uniform circumferential heating, reducing the temperature gradient between the quartz boat assembly 300 and the internal raw materials. This avoids defects caused by temperature differences during single crystal growth, thus improving the quality of the finished single crystal product. The structural design of a fixed quartz boat assembly 300 and a movable heating furnace assembly 400 ensures the stability of the raw material load and enhances the uniformity of heat transfer through rotation, resulting in reliable operation. Furthermore, by adjusting the heating power and rotation speed of the heating furnace assembly 400, it can be adapted to the single crystal growth process requirements of different materials and sizes, broadening its applicability.

[0034] The following will combine Figures 1 to 2 The single crystal furnace disclosed in the embodiments of this application will be explained and described in detail.

[0035] In some embodiments of this application, the drive mechanism 200 includes a drive assembly 210, a gear transmission assembly 220, and a gear seat 230. The heating furnace assembly 400 is mounted on the gear seat 230. The gear transmission assembly 220 is meshed with the gear seat 230. The drive assembly 210 drives the gear transmission assembly 220 to rotate, thereby driving the gear seat 230 and the heating furnace assembly 400 to rotate. It is understood that the drive assembly 210 provides a power source, and through the meshing transmission between the gear transmission assembly 220 and the gear seat 230, a stable power transmission path is constructed, ensuring uniform rotation speed and stable torque transmission. When the drive assembly 210 drives the gear transmission assembly 220 to rotate, the meshing action drives the gear seat 230 to rotate synchronously, while the heating furnace assembly 400 is fixed on the gear seat 230, ultimately achieving circumferential rotation of the heating furnace assembly 400 around the quartz boat assembly 300.

[0036] In some embodiments, the gear seat 230 includes a seat body and a tooth structure disposed on the circumferential sidewall of the seat body. The seat body supports the heating furnace assembly 400, and the tooth structure meshes with the gear transmission assembly 220 to ultimately achieve the effects of transmission and load-bearing.

[0037] Furthermore, in some embodiments, the drive mechanism 200 further includes a first bearing 240, which is mounted on the frame 100 and used to support the gear seat 230. It is understood that the first bearing 240 can significantly reduce rotational friction between the gear seat 230 and the frame 100, while limiting the radial offset of the gear seat 230, ensuring the meshing accuracy between the gear transmission assembly 220 and the gear seat 230, making power transmission smooth and rotational posture stable, ultimately driving the heating furnace assembly 400 to rotate smoothly around the quartz boat assembly 300.

[0038] In some embodiments, the first bearing 240 may be mounted on the frame 100 via a structure such as a bearing housing.

[0039] For example, in some embodiments, the drive assembly 210 includes a drive member 211 and a coupling 212, and the gear transmission assembly 220 includes a gear body 221 and a gear shaft 222. The drive member 211 is connected to the coupling 212, and the gear shaft 222 is disposed through the gear body 221. The drive member 211 is connected to the gear shaft 222 through the coupling 212 to drive the gear body 221 to rotate. Understandably, the drive component 211, acting as a power source, is connected to the gear shaft 222 via the coupling 212 and transmits power. The gear shaft 222 is rigidly fixed to the gear body 221. After the drive component 211 starts, it drives the gear shaft 222 to rotate via the coupling 212, thereby driving the gear body 221 to rotate synchronously. The gear body 221 meshes with the gear seat 230 for transmission. With the support and positioning of the gear seat 230 by the first bearing 240 on the frame 100, the gear seat 230 and the heating furnace assembly 400 are driven to rotate smoothly around the quartz boat assembly 300. Through the high precision of the meshing transmission, the rotation speed of the heating furnace assembly 400 is ensured to be uniform, which helps to stabilize the single crystal growth temperature.

[0040] In some embodiments, the drive element 211 is a motor.

[0041] Furthermore, in some embodiments, the gear transmission assembly 220 includes a second bearing 223, which is mounted on the frame 100 and used to support the gear body 221. It is understood that the second bearing 223, fixed to the frame 100 and supporting the gear body 221, forms a support structure with the first bearing 240 supporting the gear seat 230. When the gear shaft 222 drives the gear body 221 to rotate, the second bearing 223 can reduce the rotational friction of the gear body 221 and limit its radial runout, ensuring the meshing accuracy between the gear body 221 and the gear seat 230.

[0042] In some embodiments, the second bearing 223 may be mounted on the frame 100 via a structure such as a bearing housing.

[0043] In some embodiments of this application, the heating furnace assembly 400 includes a furnace body 410, an upper pressure plate 420, and a pull rod 430. One end of the pull rod 430 is mounted on the gear seat 230, and the other end of the pull rod 430 is connected to the upper pressure plate 420. The furnace body 410 is disposed between the upper pressure plate 420 and the gear seat 230. It is understood that both ends of the pull rod 430 are rigidly connected to the gear seat 230 and the upper pressure plate 420 respectively, firmly clamping the furnace body 410 between the upper pressure plate 420 and the gear seat 230, ensuring that the furnace body 410 rotates smoothly without deviation.

[0044] In some embodiments, the tie rod 430 is connected to the upper pressure plate 420 via a detachable connection. It is understood that the modular assembly design facilitates the installation, disassembly, and maintenance of the furnace body 410, reducing equipment maintenance costs.

[0045] In some embodiments, the detachable connection can be achieved using threaded fasteners, or other commonly used mechanical detachable connections such as snap-fit ​​connections.

[0046] For example, in some embodiments, the heating furnace assembly 400 includes a conductive slip ring 440, through which the furnace body 410 transmits power. It is understood that the conductive slip ring 440 is used to achieve stable power transmission, preventing wire tangling or pulling that could cause line damage or power outages, thus ensuring the stability of long-term continuous single-crystal growth operations.

[0047] In some embodiments, the conductive slip ring 440 is an electrical connection component with a rotating end and a fixed end. Its fixed end is connected to an external power supply circuit, and its rotating end is connected to the heating element of the furnace body 410. When the drive mechanism 200 drives the gear seat 230 and the furnace body 410 to rotate around the quartz boat assembly 300, the conductive slip ring 440 can achieve continuous power transmission without winding, which does not interfere with the normal rotation of the furnace body 410, and can provide a stable and continuous power supply to the furnace body 410, ensuring that the heating element continuously generates heat and maintains the surrounding heating state.

[0048] In some embodiments, the quartz boat assembly 300 includes a quartz boat body 310 and a quartz boat cover 320. The quartz boat body 310 forms a cavity 311 for sintering crystal rods. The quartz boat cover 320 is closable on the quartz boat body 310 to open or close the cavity 311. It is understood that the quartz boat body 310 is made of high-temperature resistant quartz material, and the cavity 311 formed inside it is the core space for crystal rod sintering, used to hold the raw materials for single crystal growth. The quartz boat cover 320 adopts an openable / closable design, such as a flip-top or snap-fit ​​type, to fit the quartz boat body 310. When closed, it seals the cavity 311, reducing heat loss and the intrusion of external impurities. When opened, it facilitates raw material loading, crystal rod removal, and cleaning of the cavity 311. The entire assembly is fixed on the frame 100 and, in conjunction with the rotating heating furnace assembly 400, provides a growth environment for single crystal growth.

[0049] The single crystal furnace of this application is described in detail below with a specific embodiment. It should be noted that the following embodiment is merely an exemplary description and should not be construed as limiting the embodiments of this application.

[0050] See Figures 1 to 2 As shown, in this embodiment, the single crystal furnace uses a motor and gear transmission to rotate the furnace body 410, so that the heat radiation can evenly heat the quartz boat, which is more conducive to the crystal formation of gallium arsenide single crystal rods.

[0051] In this configuration, the quartz boat assembly 300 does not rotate on the frame 100. The drive component 211 drives the coupling 212 and gear shaft 222 to rotate. The gear shaft 222 meshes with the gear seat 230 of the heating furnace assembly 400, causing the heating furnace assembly 400 to rotate and heat the quartz boat assembly 300. Preferably, the power cord of the heating furnace assembly 400 is connected through a conductive slip ring 440 to prevent the power cord from tangling and breaking when the furnace body 410 rotates.

[0052] Specifically, during use, the quartz boat assembly 300 containing the raw materials is manually placed from the top of the heating furnace assembly 400 onto the base of the frame 100. The heating furnace assembly 400 is powered on and begins to heat. The motor drives the coupling 212 and gear shaft 222 to rotate. The gear shaft 222 meshes with the gear seat 230, and the heating furnace assembly 400 rotates, uniformly heating the quartz boat.

[0053] Understandably, in related technologies, the furnace body 410 is a non-rotating structure. This application proposes a solution that uses a motor to drive a gear to rotate the furnace body 410. Because the furnace body 410 is designed to rotate and heat the quartz boat, the heating of the quartz boat is more uniform.

[0054] The second aspect of this application discloses a production line, including: a single crystal furnace as described in the first aspect of this application.

[0055] It is easy to understand that the production line in the second aspect embodiment of this application has the same technical effect as the single crystal furnace in the first aspect embodiment, and therefore will not be described again.

[0056] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0057] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more. It should be noted that the term "and / or" used herein is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. Similarly, at least one of A or B can also represent: A alone, A and B simultaneously, or B alone.

[0058] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0059] In the foregoing description of this specification, references to terms such as "one embodiment," "another embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A single crystal furnace, characterized in that, include: Frame, drive mechanism, quartz boat assembly, and heating furnace assembly; The quartz boat assembly is fixedly mounted on the frame, and the heating furnace assembly is movably fitted over the quartz boat assembly; The drive mechanism is mounted on the frame and is used to drive the heating furnace assembly to rotate. The heating furnace assembly is used to heat the quartz boat assembly when it rotates relative to the quartz boat assembly.

2. The single crystal furnace according to claim 1, characterized in that: The driving mechanism includes a driving component, a gear transmission component, and a gear seat. The heating furnace component is mounted on the gear seat. The gear transmission component is meshed with the gear seat. The driving component is used to drive the gear transmission component to rotate, thereby driving the gear seat and the heating furnace component to rotate.

3. The single crystal furnace according to claim 2, characterized in that: The drive mechanism also includes a first bearing, which is mounted on the frame and serves to support the gear seat.

4. The single crystal furnace according to claim 2, characterized in that: The drive assembly includes a drive element and a coupling. The gear transmission assembly includes a gear body and a gear shaft. The drive element is connected to the coupling. The gear shaft passes through the gear body. The drive element is connected to the gear shaft through the coupling to drive the gear body to rotate.

5. The single crystal furnace according to claim 4, characterized in that: The gear transmission assembly includes a second bearing, which is mounted on the frame and serves to support the gear body.

6. The single crystal furnace according to claim 2, characterized in that: The heating furnace assembly includes a furnace body, an upper pressure plate, and a pull rod. One end of the pull rod is mounted on the gear seat, and the other end of the pull rod is connected to the upper pressure plate. The furnace body is disposed between the upper pressure plate and the gear seat.

7. The single crystal furnace according to claim 6, characterized in that: The pull rod is connected to the upper pressure plate in a detachable manner.

8. The single crystal furnace according to claim 6, characterized in that: The heating furnace assembly includes a conductive slip ring, through which the furnace body transmits power.

9. The single crystal furnace according to claim 1, characterized in that: The quartz boat assembly includes a quartz boat body and a quartz boat cover. The quartz boat body forms a cavity for firing crystal rods, and the quartz boat cover is closably disposed on the quartz boat body to open or close the cavity.

10. A production line, characterized in that, include: The single crystal furnace as described in any one of claims 1 to 9.

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