A single crystal furnace shaft cleaning device

Abstract

The utility model relates to single crystal furnace technical field, concretely relates to a single crystal furnace cylinder cleaning device, including the support screw of drive motor drive, elevating system and cleaning mechanism, the below of support screw is equipped with electric sucking disc, and the upper end of electric sucking disc is equipped with fixed base, and the upper end of fixed base is equipped with limiting piece, elevating system includes elevating seat and a plurality of support bars, and elevating seat is screwed with support screw, and its outer wall is evenly distributed with a plurality of first telescopic link, and the telescopic end of first telescopic link is equipped with the clamping piece, and support bar is connected with the inner wall of cylinder, cleaning mechanism includes the hollow pipe of hollow shaft motor drive, and hollow shaft motor, hollow pipe all are set up on support screw, and hollow shaft motor is connected with the lower end of elevating seat, and the outer wall of hollow pipe is evenly distributed with a plurality of second telescopic link, and the telescopic end of second telescopic link is equipped with cleaning brush, the cleaning mechanism of the utility model can automatically move up and down along the cylinder axial direction, need not manual adjustment, reduced the labor intensity of worker, convenient to use, cleaning effect is good.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace technology, and specifically relates to a single crystal furnace cylinder cleaning device. Background Technology

[0002] A single crystal furnace is a specialized piece of equipment used to prepare single crystal materials. It mainly operates in an inert gas environment (such as nitrogen or helium) by melting polycrystalline silicon and other materials through a graphite heater, and then growing high-quality single crystal silicon rods without dislocations using the Czochralski method.

[0003] The furnace cylinder of a single crystal furnace needs to be cleaned after processing to ensure the cleanliness of its inner wall. Utility model patent CN222631611U discloses a single crystal furnace cylinder cleaning device, including a base, a motor fixedly mounted on the top of the base, a drive shaft fixedly connected to the motor output end, and the drive shaft rotatably mounted on the base. A three-jaw base is fixedly connected to the bottom end of the drive shaft. Three sets of guide grooves are equidistantly arranged in an annular pattern on the three-jaw base. Each set of guide grooves has a limiting groove on its side wall. An adjusting nut is screwed onto an I-shaped threaded sleeve. A connecting ring is rotatably connected to the bottom end of the adjusting nut. Three sets of transmission plates are hinged equidistantly in an annular pattern on the outer wall of the connecting ring. The three sets of transmission plates are respectively hinged to the top ends of three sets of limiting sliders. A cleaning device is fixedly installed at the bottom end of the three-jaw base and the bottom ends of the three sets of guide rods. The sweeping brush, with its handheld mechanism for workers to grip, effectively improves furnace cleaning efficiency, making cleaning more convenient and thorough, and enhancing the cleaning effect. However, it still has the following problems: 1. When cleaning the furnace, workers need to manually hold the device and move it up and down to adjust the brush's cleaning position, which is inconvenient and labor-intensive. Furthermore, due to deviations during manual movement, the inner wall of the furnace is not cleaned evenly and effectively. 2. When cleaning furnaces of different sizes, the brush position needs to be repeatedly adjusted according to the furnace size, resulting in low efficiency and inconvenience. 3. The device is an integrated structure, large in size, inconvenient for manual handling, occupies a lot of space, and is difficult to install and maintain. Utility Model Content

[0004] To address the existing technical problems, this utility model proposes a single crystal furnace cylinder cleaning device to solve the above-mentioned problems. The purpose of this utility model and the technical problem it solves are achieved by the following technical solution.

[0005] A single crystal furnace cylinder cleaning device according to the present invention includes a support screw driven by a drive motor, a lifting mechanism and a cleaning mechanism; Below the support screw is an electric suction cup that is adsorbed and connected to the bottom surface of the furnace cylinder. The upper end of the electric suction cup is a fixed seat, and the upper end of the fixed seat is a limiting component that is rotatably connected to the bottom of the support screw. The lifting mechanism includes a lifting seat and several support rods. The lifting seat is screwed to the support screws, and several first telescopic rods are evenly distributed on its outer wall along the circumference. The telescopic end of the first telescopic rod is provided with a snap-fit ​​component that cooperates with the support rod. The support rod is detachably connected to the inner wall of the furnace cylinder. The cleaning mechanism includes a hollow tube driven by a hollow shaft motor. Both the hollow shaft motor and the hollow tube are sleeved on the support screw, and the hollow shaft motor is connected to the lower end of the lifting seat. Several second telescopic rods are evenly distributed along the circumference of the outer wall of the hollow tube, and the telescopic ends of the second telescopic rods are equipped with cleaning brushes.

[0006] Furthermore, the limiting component is tubular, and the bottom of the supporting screw is inserted into the limiting component.

[0007] Furthermore, the top of the support rod is provided with a snap-fit ​​plate so that a snap-fit ​​part can be formed between the snap-fit ​​plate and the support rod, which can be snapped onto the upper edge of the furnace cylinder. The snap-fit ​​plate is provided with bolts, which can abut against the outer wall of the furnace cylinder after passing through the snap-fit ​​plate.

[0008] Furthermore, the side of the support rod that contacts the inner wall of the furnace cylinder and the side of the snap-fit ​​plate that contacts the outer wall of the furnace cylinder are both curved surfaces.

[0009] Furthermore, the hollow shaft motor and the lifting seat are detachably connected.

[0010] Furthermore, the base of the sweeping brush is detachably connected to the telescopic end of the second telescopic rod.

[0011] Furthermore, a fixing rod is provided on the top of the drive motor, and the fixing rod is fixed to the upper edge of the furnace cylinder through a connecting rod.

[0012] In summary, this utility model has the following advantages: 1. The cleaning mechanism is combined with the lifting mechanism, and the lifting mechanism is detachably connected to the inner wall of the furnace cylinder. This allows the cleaning mechanism to move automatically up and down along the axial direction of the furnace cylinder without manual adjustment, reducing the labor intensity of workers. At the same time, the mechanical movement deviation is small, and the inner wall of the furnace cylinder can be cleaned evenly and effectively. It is convenient to use and has a good cleaning effect.

[0013] 2. The first and second telescopic rods can adapt to different sizes of furnace cylinder inner walls, making it easy to adjust and clean, and improving efficiency.

[0014] 3. This device is assembled from multiple detachable parts and is reassembled before use. The equipment is small in size, occupies little space, and is easy to handle, disassemble, and maintain.

[0015] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this utility model more obvious and understandable, preferred embodiments are given below, and detailed descriptions are provided in conjunction with the accompanying drawings. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a single crystal furnace cylinder cleaning device according to the present invention.

[0017] Figure 2 This is a schematic diagram of the connecting rod in this utility model. Detailed Implementation

[0018] The technical solution of this utility model will be further described below with reference to the accompanying drawings and preferred embodiments.

[0019] Please see Figure 1 A single-crystal furnace cylinder cleaning device includes a support screw 1 driven by a drive motor 2, a lifting mechanism, and a cleaning mechanism. An electric suction cup 11 is provided below the support screw 1 and adsorbs onto the bottom surface of the furnace cylinder. A fixed base 10 is provided at the upper end of the electric suction cup 11, and a limiting member 9 is provided at the upper end of the fixed base 10 and rotatably connected to the lower end of the support screw 1. Specifically, the limiting member 9 can be a tubular structure, and the lower end of the support screw 1 must be set to a cylindrical shape matching the limiting member 9 (i.e., a threaded structure without the outer circumference). In use, the electric suction cup 11 is first adsorbed onto the center position of the bottom surface of the furnace cylinder, and then the support screw 11 is inserted into the limiting member 9 to ensure the rotation of the support screw 11.

[0020] The lifting mechanism includes a lifting seat 3 and several support rods 5 (three in this embodiment). The lifting seat 3 is screwed to the support screw 1, and several first telescopic rods 4 are evenly distributed along its outer wall in the circumferential direction (the number of first telescopic rods 4 is the same as the number of support rods 5). The telescopic end of the first telescopic rod 4 is provided with a snap-fit ​​piece 6 that matches the shape of the support rod 5. The top of the support rod 5 is provided with a snap-fit ​​plate 15 so that a snap-fit ​​part that can be snapped onto the upper edge of the furnace cylinder is formed between the snap-fit ​​plate 15 and the support rod 5. The snap-fit ​​plate 15 is provided with a bolt 16, which passes through the snap-fit ​​plate 15. It can abut against the outer wall of the furnace cylinder; specifically, the snap-fit ​​plate 15 is an L-shaped plate, which forms a groove-shaped snap-fit ​​part after being spliced ​​with the support rod 5. At the same time, the side of the support rod 5 that contacts the inner wall of the furnace cylinder and the side of the snap-fit ​​plate 15 that contacts the outer wall of the furnace cylinder are both arc-shaped surfaces so that the support rod 5 fits tightly with the inner and outer walls of the furnace cylinder, reducing gaps, ensuring the stability of the support rod 5 and reducing dead corners for cleaning; furthermore, in this embodiment, the support rod 5 is a rectangular rod. When a rectangular rod is used, the snap-fit ​​part 6 is a U-shaped clip to ensure that there is no radial slippage between the two.

[0021] The cleaning mechanism includes a hollow tube 8 driven by a hollow shaft motor 7. Both the hollow shaft motor 7 and the hollow tube 8 are mounted on the support screw 1, and the hollow shaft motor 7 is connected to the lower end of the lifting seat 3. Several second telescopic rods 12 are evenly distributed along the circumference of the outer wall of the hollow tube 8. The telescopic ends of the second telescopic rods 12 are equipped with cleaning brushes 14 (the cleaning brushes 14 are soft brushes, and their length can be determined according to requirements). Specifically, the first telescopic rod 4 and the second telescopic rod 12 can be spring telescopic rods or electric push rods, both of which can quickly adjust their length to improve efficiency. At the same time, with the aforementioned technical features, the cleaning mechanism is combined with the lifting mechanism, and the lifting mechanism is detachably connected to the inner wall of the furnace cylinder. This allows the cleaning mechanism to move automatically up and down along the axial direction of the furnace cylinder without manual adjustment, reducing the labor intensity of workers. Meanwhile, the mechanical movement deviation is small, and the inner wall of the furnace cylinder can be cleaned evenly and effectively, making it convenient to use and providing good cleaning results.

[0022] Furthermore, the hollow shaft motor 7 and the lifting base 3 are detachably connected (for example, by fastening bolts 17 passing through the lifting base 3 and fixing it to the hollow shaft motor 7); at the same time, the base 13 of the cleaning brush 14 is detachably connected to the telescopic end of the second telescopic rod 12 (for example, a snap-fit ​​hole matching the telescopic rod of the second telescopic rod 12 is provided on the base 13 so that the two can be plugged into each other); with the aforementioned technical features, this device is assembled from multiple detachable parts, and is assembled again when in use. The equipment is small in size, occupies little space, and is easy to pick up, disassemble, and maintain.

[0023] Please see Figure 1 , Figure 2 The top of the drive motor 2 is equipped with a fixing rod, on which a connecting rod can be screwed. The end of the connecting rod away from the fixing rod is equipped with a fastening plate 18. The surface of the fastening plate 18 that contacts the inner wall of the furnace cylinder is an arc-shaped surface to eliminate the gap between the two. A fixing bolt is provided through the fastening plate 18, which can pass through the fastening plate 18 and abut against the outer wall of the upper edge of the furnace cylinder; the position of the drive motor 2 can be fixed to ensure the stable operation of the device.

[0024] Working process: When cleaning the furnace cylinder, first attach the electric suction cup 11 to the center of the bottom of the furnace cylinder, and then make the support rod 5 evenly distributed and fixed to the upper edge of the furnace cylinder through the snap-fit ​​part on it. Assemble the sweeping brush 14 with the second telescopic rod 12, the lifting seat 3 with the hollow shaft motor 7, and simultaneously align the bottom of the support screw 1 with the limiting piece 9 and the snap-fit ​​piece 6 at the telescopic end of the first telescopic rod 4 with the support rod 5. After assembly, fasten the drive motor 2 with the connecting rod. Adjust the extension length of the second telescopic rod 14 so that the cleaning brush 14 contacts the inner wall of the furnace cylinder. Then start the hollow shaft motor 7 and the cleaning brush 14 rotates to clean the inner wall of the furnace cylinder (since the cleaning brush 14 is a soft brush, it will not interfere with the support rod 5). At the same time, set the drive motor 2 to rotate forward and reverse, and drive the cleaning mechanism to move up and down through the lifting seat 3 to perform cleaning work. Since the support rod 5 has a certain contact area with the inner wall of the furnace cylinder, for the parts that the cleaning brush 14 cannot clean, a cleaning cloth can be placed on the side of the support rod 5 that contacts the inner wall of the furnace cylinder. After the inside of the furnace cylinder is cleaned and the support screw 1 and the cleaning mechanism are removed, the limit of the support rod 5 is released, and the support rod 5 is moved appropriately along the upper edge of the furnace cylinder to clean the parts that have not been cleaned.

[0025] In other embodiments of this example, provided that radial slippage does not occur between the snap-fit ​​6 and the support rod 5, the support rod 5 can be selected as an elliptical rod (i.e., the surface of the support rod 5 that contacts the snap-fit ​​6 is also an arc-shaped surface, and the arc of the surface that contacts the inner wall of the furnace cylinder is the same; correspondingly, the snap-fit ​​6 is an arc-shaped snap-fit). This can reduce the dead angle between the support rod 5 and the inner wall of the furnace cylinder and improve cleanliness.

[0026] The above description is merely a preferred embodiment of this utility model. Any simple modifications, equivalent changes, and alterations made by those skilled in the art to the above embodiments based on the technical essence of this utility model without departing from the scope of the technical solution of this utility model shall still fall within the scope of the technical solution of this utility model.

Claims

1. A single crystal furnace cylinder cleaning device, characterized in that: Includes a support screw (1) driven by a drive motor (2), a lifting mechanism, and a cleaning mechanism; Below the support screw (1) is an electric suction cup (11) that is adsorbed and connected to the bottom surface of the furnace cylinder. The upper end of the electric suction cup (11) is provided with a fixed seat (10). The upper end of the fixed seat (10) is provided with a limiting member (9) that is rotatably connected to the bottom of the support screw (1). The lifting mechanism includes a lifting seat (3) and several support rods (5). The lifting seat (3) is screwed to the support screw (1), and several first telescopic rods (4) are evenly distributed on its outer wall along the circumference. The telescopic end of the first telescopic rod (4) is provided with a snap-fit ​​part (6) that cooperates with the support rod (5). The support rod (5) is detachably connected to the inner wall of the furnace cylinder. The cleaning mechanism includes a hollow tube (8) driven by a hollow shaft motor (7). The hollow shaft motor (7) and the hollow tube (8) are both mounted on the support screw (1), and the hollow shaft motor (7) is connected to the lower end of the lifting seat (3). Several second telescopic rods (12) are evenly distributed along the circumference of the outer wall of the hollow tube (8). The telescopic end of the second telescopic rod (12) is provided with a cleaning brush (14).

2. The single crystal furnace cylinder cleaning device according to claim 1, characterized in that: The limiting member (9) is tubular, and the bottom of the supporting screw (1) is inserted into the limiting member (9).

3. The single crystal furnace cylinder cleaning device according to claim 1, characterized in that: The top of the support rod (5) is provided with a snap-fit ​​plate (15) so that a snap-fit ​​part that can be snapped onto the upper edge of the furnace cylinder is formed between the snap-fit ​​plate (15) and the support rod (5). The snap-fit ​​plate (15) is provided with a bolt (16), which can abut against the outer wall of the furnace cylinder after passing through the snap-fit ​​plate (15).

4. The single crystal furnace cylinder cleaning device according to claim 3, characterized in that: The side of the support rod (5) that contacts the inner wall of the furnace cylinder and the side of the snap-fit ​​plate (15) that contacts the outer wall of the furnace cylinder are both arc-shaped surfaces.

5. The single crystal furnace cylinder cleaning device according to claim 1, characterized in that: The hollow shaft motor (7) and the lifting seat (3) are detachably connected.

6. The single crystal furnace cylinder cleaning device according to claim 1, characterized in that: The base (13) of the cleaning brush (14) is detachably connected to the telescopic end of the second telescopic rod (12).

7. The single crystal furnace cylinder cleaning device according to claim 1, characterized in that: The top of the drive motor (2) is provided with a fixing rod, which is fixed to the upper edge of the furnace cylinder through a connecting rod.

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