Tool for correcting offset of single crystal silicon rod and water cooling screen

Abstract

The utility model provides a kind of tool for correcting single crystal silicon rod and water cooling screen offset, it is related to single crystal furnace technical field.The utility model includes water cooling screen, upper tungsten wire rope is located above water cooling screen, weight is located on upper tungsten wire rope, wherein, the weight bottom is connected with centering column, the centering column is cylindrical, the centering column, weight and upper tungsten wire rope are coaxially connected.The utility model single crystal furnace is leveled and centered, and then the single crystal bar offset furnace table is corrected again, so that the single crystal bar is centered with water cooling screen.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to a tooling for correcting the misalignment between a single crystal silicon rod and a water-cooled screen. Background Technology

[0002] In the monocrystalline silicon pulling industry, the monocrystalline furnace is a typical piece of equipment for growing crystals. The stability of the monocrystalline furnace is a decisive factor for the pulling of crystal rods. Influencing factors include pressure, airflow, temperature, alignment, and electromechanical stability. In long-term operation, the equipment may suffer irreparable damage due to accidents such as temperature and silicon leakage, and it is necessary to maintain stable operation under such conditions.

[0003] Currently, in the operation of single crystal furnaces, the crystal rods are offset and close to the water-cooled screen, which will affect the uniformity of the temperature gradient during operation, make it difficult to place seed crystals, and when the diameter is constant, there is a risk of collision, friction and rod falling off during rotation, which will affect the safe operation of the equipment. Utility Model Content

[0004] The purpose of this invention is to develop a tooling for correcting the misalignment of the single crystal silicon rod and the water-cooled screen after the single crystal furnace is horizontally aligned and the furnace platform is corrected again to align the crystal rod with the water-cooled screen.

[0005] This utility model is achieved through the following technical solution:

[0006] A fixture for correcting the misalignment between a single-crystal silicon rod and a water-cooled screen includes:

[0007] Water-cooled screen;

[0008] The upper tungsten wire rope is located above the water-cooled screen;

[0009] The counterweight is mounted on the upper tungsten wire rope;

[0010] The bottom of the hammer is connected to a centering column, which is cylindrical, and the centering column, the hammer, and the upper tungsten wire rope are coaxially connected.

[0011] Optionally, a lower tungsten wire rope is coaxially connected between the counterweight and the centering column.

[0012] Optionally, a hook nut is provided between the lower tungsten wire rope and the counterweight.

[0013] Optionally, the bottom of the hammer is coaxially provided with a connecting post, the outer wall of the connecting post is provided with external threads, and the upper inner wall of the hook nut is covered with internal threads that mate with the external threads and the inner diameter is adapted to the connecting post.

[0014] Optionally, the lower part of the hook nut has a coaxial T-shaped hole, and the T-shaped hole is provided with an open sleeve with a shape adapted to it, and the lower tungsten wire rope is connected to the open sleeve.

[0015] Optionally, the T-hole includes a coarse diameter section at the top and a fine diameter section at the bottom. The inner diameter of the coarse diameter section is larger than that of the fine diameter section. The upper part of the opening sleeve is a coarse cylindrical section whose outer diameter matches the inner diameter of the coarse diameter section. The lower part of the coarse cylindrical section is coaxially connected to a fine cylindrical section whose outer diameter matches the inner diameter of the fine diameter section.

[0016] Optionally, the open sleeve has a through hole coaxially extending through it, the lower tungsten wire rope is disposed in the through hole, the top end of the lower tungsten wire rope has a spherical upper end block coaxially disposed, and the top end of the through hole at the top of the open sleeve has a spherical groove with a shape adapted to the upper end block.

[0017] Optionally, the top of the centering column is provided with a cylindrical connecting block that is coaxial with the bottom end of the lower tungsten wire rope.

[0018] Optionally, the top center of the connecting block is coaxially provided with a rope hole that is adapted to and connected to the lower tungsten wire rope, and a cylindrical cavity is coaxially provided inside the connecting block at the bottom of the rope hole.

[0019] Optionally, the bottom end of the lower tungsten wire rope is coaxially provided with a spherical lower end block, and the bottom of the rope hole is provided with a plurality of limiting blocks arranged in a circular trajectory. The circular arrangement trajectory of the plurality of limiting blocks is coaxial with the rope hole, and the inner diameter of the virtual circle formed by the inner walls of the plurality of limiting blocks does not exceed the outer diameter of the lower end block.

[0020] The beneficial effects of this utility model are:

[0021] After horizontal alignment, this invention recalibrates the crystal rod offset furnace platform to ensure the centering between the crystal rod and the water-cooled screen, enabling even aging single crystal furnaces to achieve the same stability as new furnaces. Based on field usage, this invention can currently be implemented in batches to solve the problem of crystal rod misalignment. After centering and adjusting the horizontal alignment using this device, the equipment can ensure safe operation, avoid friction with the water-cooled screen, avoid affecting the uniformity of the temperature gradient, and reduce the risks caused by crystal sway. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a structural diagram of the present utility model;

[0024] Figure 2 for Figure 1 Larger image of prescription A;

[0025] Figure 3 for Figure 1Large image of prescription B.

[0026] Reference numerals in the attached diagram: 1. Upper tungsten wire rope; 2. Counterweight; 3. Lower tungsten wire rope; 4. Centering column; 5. Water-cooled screen; 6. Connecting column; 7. Hanging nut; 8. T-hole; 9. Open sleeve; 10. Upper end block; 11. Connecting block; 12. Lower end block; 13. Limiting block; 14. Rope hole. Detailed Implementation

[0027] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0029] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0030] like Figures 1-3 As shown, this utility model discloses a tooling for correcting the misalignment between a single-crystal silicon rod and a water-cooled screen, including a water-cooled screen 5 and an upper tungsten wire rope 1 located above it.

[0031] The bottom of the upper tungsten wire rope 1 is coaxially connected to a counterweight 2, and the bottom of the counterweight 2 is coaxially provided with a connecting post 6, and the outer wall of the connecting post 6 is provided with external threads.

[0032] The lower part of the hammer 2 is provided with a hook nut 7. The hook nut 7 is cylindrical, and its upper inner wall is covered with internal threads and its inner diameter is adapted to the connecting post 6. The hook nut 7 is threadedly connected to the connecting post 6 at the bottom of the hammer 2 through the internal threads on its upper inner wall.

[0033] The lower part of the hook nut 7 has a coaxial T-shaped hole 8, and an open sleeve 9 with a matching shape is provided inside the T-shaped hole 8. The T-shaped hole 8 includes a larger diameter section at the top and a smaller diameter section at the bottom, with the inner diameter of the larger diameter section being larger than that of the smaller diameter section. The shape of the open sleeve 9 is adapted to the T-shaped hole 8. The upper part of the open sleeve 9 is a larger cylindrical section with an outer diameter matching the inner diameter of the larger diameter section, and the lower part of the larger cylindrical section is coaxially connected to a smaller cylindrical section with an outer diameter matching the inner diameter of the smaller diameter section.

[0034] The open sleeve 9 has a through hole coaxially extending through it, and a lower tungsten wire rope 3 is provided in the through hole. The top of the lower tungsten wire rope 3 has a spherical upper end block 10 coaxially provided. The top of the through hole at the top of the open sleeve 9 has a spherical groove with a shape that matches the upper end block 10.

[0035] The lower tungsten wire rope 3 has a spherical lower end block 12 coaxially at its bottom end. A connecting block 11 is connected to the bottom of the lower tungsten wire rope 3. The connecting block 11 is cylindrical. A rope hole 14 adapted to the lower tungsten wire rope 3 is coaxially opened at the top center of the connecting block 11. A cylindrical cavity is coaxially provided inside the connecting block 11 at the bottom of the rope hole 14. Multiple limiting blocks 13 arranged in a circular trajectory are provided at the bottom of the rope hole 14. The circular trajectory of the multiple limiting blocks 13 is coaxial with the rope hole 14. The inner diameter of the virtual circle formed by the inner walls of the multiple limiting blocks 13 does not exceed the outer diameter of the lower end block 12. The lower part of the lower tungsten wire rope 3 enters the rope hole 14. The lower end block 12 is located inside the multiple limiting blocks 13, realizing the coaxial connection between the connecting block 11 and the lower tungsten wire rope 3.

[0036] The bottom of the connecting block 11 is coaxially connected to a cylindrical centering column 4.

[0037] When the crystal rod shifts from the water-cooled screen 5 due to aging of the single crystal furnace, the hanging nut 7 is connected to the bottom of the counterweight 2, so that the centering column 4 is at the lower opening of the water-cooled screen 5. The centering column 4 simulates the running state of the crystal rod. The tungsten wire rope 1 on the single crystal furnace is adjusted through the CCD camera inside the single crystal furnace and the front observation window (existing structure of the single crystal furnace) to keep the device centered. This simulates the running state of the crystal rod and ensures the absolute centering of the crystal rod. That is, the centering column 4 must be consistent with the distance around the lower opening of the water-cooled screen 5, and the error between the maximum and minimum distances should not exceed 5mm.

[0038] After horizontal alignment, this invention recalibrates the crystal rod offset furnace platform to ensure the centering between the crystal rod and the water-cooled screen 5, enabling even an aging single crystal furnace to achieve the same stability as a new furnace. Based on field usage, this invention can currently be implemented in batches to solve the problem of crystal rod misalignment. After centering and adjusting the horizontal alignment using this device, the equipment can ensure safe operation, avoid friction with the water-cooled screen 5, avoid affecting the uniformity of the temperature gradient, and reduce the risks caused by crystal swaying.

[0039] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.

Claims

1. A fixture for correcting the misalignment between a single-crystal silicon rod and a water-cooled screen, characterized in that, include: Water-cooled screen; The upper tungsten wire rope is located above the water-cooled screen; The counterweight is mounted on the upper tungsten wire rope; The bottom of the hammer is connected to a centering column, which is cylindrical, and the centering column, the hammer, and the upper tungsten wire rope are coaxially connected.

2. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 1, characterized in that, The counterweight is coaxially connected to the centering column by a lower tungsten wire rope.

3. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 2, characterized in that, A hook nut connects the lower tungsten wire rope to the counterweight.

4. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 3, characterized in that, The bottom of the hammer is coaxially provided with a connecting post, the outer wall of the connecting post is provided with external threads, and the upper inner wall of the hook nut is covered with internal threads that mate with the external threads and the inner diameter is adapted to the connecting post.

5. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 3, characterized in that, The lower part of the hook nut has a coaxial T-shaped hole, and an open sleeve with a matching shape is provided in the T-shaped hole. The lower tungsten wire rope is connected to the open sleeve.

6. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 5, characterized in that, The T-shaped hole includes a coarse diameter section at the top and a fine diameter section at the bottom. The inner diameter of the coarse diameter section is larger than that of the fine diameter section. The upper part of the opening sleeve is a coarse cylindrical section whose outer diameter matches the inner diameter of the coarse diameter section. The lower part of the coarse cylindrical section is coaxially connected to a fine cylindrical section whose outer diameter matches the inner diameter of the fine diameter section.

7. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 6, characterized in that, The open sleeve has a through hole coaxially extending through it, the lower tungsten wire rope is disposed in the through hole, the top end of the lower tungsten wire rope has a spherical upper end block coaxially disposed, and the top end of the through hole at the top of the open sleeve has a spherical groove with a shape adapted to the upper end block.

8. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 2, characterized in that, The top of the centering column is coaxially provided with a cylindrical connecting block that is connected to the bottom end of the lower tungsten wire rope.

9. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 8, characterized in that, The top center of the connecting block is coaxially provided with a rope hole that is adapted to and connected to the lower tungsten wire rope, and a cylindrical cavity is coaxially provided inside the connecting block at the bottom of the rope hole.

10. The fixture for correcting the misalignment between the single-crystal silicon rod and the water-cooled screen according to claim 9, characterized in that, The bottom end of the lower tungsten wire rope is coaxially provided with a spherical lower end block, and the bottom of the rope hole is provided with a plurality of limiting blocks arranged in a circular trajectory. The circular arrangement trajectory of the plurality of limiting blocks is coaxial with the rope hole, and the inner diameter of the virtual circle formed by the inner walls of the plurality of limiting blocks does not exceed the outer diameter of the lower end block.

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