Impurity blocking diffusion device for large-size silicon rod crystal pulling

Abstract

The utility model discloses an impurity blocking diffusion device for large -size silicon rod crystal pulling belongs to the field of silicon rod processing production, including the reaction chamber, the inside of reaction chamber is provided with the adaptation subassembly, the adaptation subassembly includes the flow guide plate of installation reaction chamber outside wall, the quantity of flow guide plate is several, and the inner wall of several flow guide plates is installed with strong magnet pole, and the inner wall of reaction chamber is located the inside of several strong magnet poles and is provided with the crucible seat, and through the cooperation of above -mentioned each device, can adapt the demand of different customers to improve the processing effect of silicon rod and the applicability of the device, utilizes a plurality of strong magnet pole cooperation crucible seat, can utilize magnetism to position crucible seat, further cooperates the heat -proof ring of inside plug -in, thereby utilizes the diameter of different diameter heat -proof ring to change the diameter of silicon rod crystal pulling, and the production quality and efficiency are improved greatly.

Description

Technical Field

[0001] This utility model relates to the field of silicon rod processing and production technology, specifically an impurity blocking and diffusion device for large-size silicon rod crystal pulling. Background Technology

[0002] The impurity blocking and diffusion device for silicon rod pulling is a key component in processes such as Czochralski (CZ) pulling. It uses physical isolation, fluid suppression, magnetic field confinement, and coating shielding to block the diffusion of impurities such as oxygen, metals, and carbon from the crucible and thermal field to the silicon melt and solid-liquid interface. At the same time, it suppresses the impurity inhomogeneity caused by melt convection. It is a key component for improving the purity and resistivity uniformity of silicon rods.

[0003] An investigation revealed that a utility model patent (publication number: CN218600371U) discloses a heat exchanger and a single-crystal silicon rod pulling device, comprising an annular body with an annular cavity within it. The annular cavity includes a first annular cavity at the bottom and a second annular cavity above the first annular cavity; an annular magnetic element disposed within the first annular cavity; a water inlet pipe, at least a portion of which communicates with the first annular cavity and is used to introduce cooling medium into the first annular cavity; multiple guide plates, spaced apart within the second annular cavity to divide it into multiple flow channels, at least one of which communicates with the first annular cavity to guide cooling medium from the first annular cavity into the second annular cavity; and a water outlet pipe, at least a portion of which communicates with the second annular cavity. In this embodiment, the heat exchanger can reduce the impurity content in the silicon melt, balancing the pulling speed and crystal pulling quality of the single-crystal silicon rod.

[0004] Although the aforementioned patent, through the arrangement of components such as the annular body, water inlet pipe, and annular cavity, and the cooperation of these components, provides heat exchange for silicon rod processing through the water inlet and outlet pipes, thereby reducing impurities in the silicon liquid and improving product quality, in production, due to different customer needs, it is often necessary to process silicon rods of different diameters, which requires changing different crucible holders. This increases the labor intensity of operators and is not conducive to improving production efficiency.

[0005] Therefore, this invention provides an impurity blocking diffusion device for large-size silicon rod crystal pulling to solve the above-mentioned problems. Utility Model Content

[0006] (a) Technical problems to be solved

[0007] This invention provides an impurity blocking and diffusion device for large-size silicon rod crystal pulling, aiming to solve the problems mentioned in the background art.

[0008] (II) Technical Solution

[0009] To achieve the above objectives, this utility model provides the following technical solution:

[0010] An impurity blocking diffusion device for large-size silicon rod crystal pulling includes a reaction chamber, wherein an adapter component is disposed inside the reaction chamber;

[0011] The adapter component includes a flow guide plate installed on the outer side wall of the reaction chamber. There are several flow guide plates, and strong magnetic rods are installed on the inner walls of the flow guide plates. A crucible seat is provided on the inner wall of the reaction chamber inside the strong magnetic rods. The crucible seat is magnetically connected to the strong magnetic rods.

[0012] As a preferred technical solution of this application, the adapter component further includes a plug-in seat that is inserted into the top of the crucible holder, and a heat insulation ring is fixedly connected to the inner wall of the plug-in seat, and an anti-slip groove is formed on the inner surface of the heat insulation ring.

[0013] As a preferred technical solution of this application, the reaction chamber is equipped with a circulation pipe, and the number of circulation pipes is several. The outer surface of the circulation pipe is coated with a high-temperature resistant coating.

[0014] As a preferred technical solution of this application, a mounting plate is fixedly connected to the bottom end of the reaction chamber, and a mounting groove is formed on the outer surface of the mounting plate.

[0015] As a preferred technical solution of this application, a flange is welded to the top of the reaction chamber, and a bolt groove is formed on the outer surface of the flange.

[0016] As a preferred technical solution of this application, both the inner and outer surfaces of the reaction chamber are coated with a high-temperature resistant coating and an anti-corrosion coating.

[0017] As a preferred technical solution of this application, the outer walls of the plurality of guide plates (2) are coated with a corrosion-resistant coating.

[0018] (III) Beneficial Effects

[0019] 1. This device is equipped with a crucible holder structure that can be flexibly changed and adjusted according to the crucible diameter. This design can precisely adapt to the usage needs of different customers for various sizes of crucibles, effectively solving the pain point of the limited adaptability of traditional fixed-size crucible holders. By adapting to the corresponding crucible size, it can ensure that the crucible is in a stable working state during silicon rod processing, reducing problems such as shaking and offset caused by improper matching between the crucible and the holder, thereby significantly improving the stability and basic processing effect of silicon rod processing, and greatly enhancing the versatility and applicability of the device in different production scenarios.

[0020] 2. The device innovatively adopts a design in which multiple strong magnetic rods work in tandem with the crucible holder. By utilizing the stable magnetic force generated by the strong magnetic rods, the crucible holder is precisely positioned and firmly fixed, further improving the coaxiality and stability of the crucible holder installation and avoiding processing deviations caused by crucible holder displacement during processing. On this basis, the heat insulation ring structure inserted inside the device plays a key role. By replacing the heat insulation rings with different diameter specifications, the thermal field distribution during the silicon rod pulling process can be precisely controlled, thereby flexibly changing the diameter of the silicon rod pulling.

[0021] 3. By using adaptable components, the diverse needs of different customers for silicon rod specifications can be met. The synergistic effect of this series of structures not only effectively ensures the dimensional accuracy and consistency of silicon rod crystal pulling, but also achieves high efficiency in the production process, significantly improving the quality level and overall production efficiency of silicon rod production. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the circulation pipe in this utility model;

[0024] Figure 3 for Figure 2 Schematic diagram of the structure at point A;

[0025] Figure 4 This is a schematic diagram of the installation disk in this utility model.

[0026] In the picture:

[0027] 1. Reaction chamber; 2. Baffle plate; 3. Strong magnetic rod; 4. Crucible holder; 5. Plug-in socket; 6. Heat insulation ring; 7. Circulation pipe; 8. Mounting plate; 9. Flange. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] This invention provides an impurity diffusion blocking device for large-size silicon rod crystal pulling, such as... Figures 1-4 As shown, the impurity blocking diffusion device for large-size silicon rod crystal pulling includes a reaction chamber 1, and an adapter component is disposed inside the reaction chamber 1.

[0030] The adapter components include several guide plates 2 installed on the outer wall of the reaction chamber 1. A strong magnetic rod 3 is installed on the inner wall of each guide plate 2. A crucible seat 4 is located inside the strong magnetic rods 3 on the inner wall of the reaction chamber 1. The crucible seat 4 is magnetically connected to the strong magnetic rods 3. The reaction chamber 1, as the core support cavity for the silicon rod pulling process, can continuously provide a stable and sufficient temperature for the pulling process, precisely meeting the process requirements for silicon material crystallization at high temperatures. This ensures rapid crystal pulling efficiency at high temperatures, laying the foundation for improving the overall pace of silicon rod production. The adapter components provide the device with strong flexibility and adaptability. For silicon rods of different diameters, operators can easily replace the crucible seat 4 with the corresponding size, quickly switching the processing environment for silicon rod pulling without cumbersome debugging procedures, adapting to diverse production tasks. Simultaneously, the multiple guide plates 2 provide a stable limiting and fixing effect for the strong magnetic rods 3, effectively preventing displacement or loosening of the strong magnetic rods 3 during device operation. The magnetic connection between the crucible holder 4 and the crucible holder 4 ensures the stability of the installation of the crucible holder 4 and prevents the dimensional accuracy and forming quality of the silicon rod pulling from being affected by the displacement of the crucible holder 4.

[0031] The adapter also includes a connector 5 that plugs into the top of the crucible holder 4. A heat insulation ring 6 is fixedly connected to the inner wall of the connector 5, and the inner surface of the heat insulation ring 6 has anti-slip grooves. When production needs are adjusted and the silicon rod pulling specifications need to be re-adapted, operators can directly replace the connector 5 with a different size. This operation requires no complex modifications to the main body of the device, making it convenient and efficient. The new-size connector 5, combined with its pre-installed heat insulation ring 6, allows for precise adjustment of the diameter of the pulling area. Simultaneously, the excellent heat insulation performance of the heat insulation ring 6 effectively reduces heat loss, ensuring temperature stability during the pulling process. This not only improves the forming quality and production efficiency of silicon rod pulling but also strengthens the temperature maintenance effect in the core area, contributing to a steady increase in production efficiency.

[0032] The reaction chamber 1 is equipped with several circulation pipes 7. The outer surface of each circulation pipe 7 is coated with a high-temperature resistant coating. These circulation pipes 7 play a crucial role in cooling and heat dissipation. After the silicon rod pulling process is completed, the medium flow system of the circulation pipes 7 can be activated. By introducing cooling medium into the circulation pipes 7, the continuous flow of the medium quickly removes residual heat from the reaction chamber 1, thereby efficiently reducing the overall temperature within the reaction chamber 1. This cooling method eliminates the need for additional large-scale heat dissipation equipment, is easy to operate, and provides stable heat dissipation. It can quickly lower the temperature of the reaction chamber 1 to a safe range, allowing personnel to carry out subsequent cleaning, maintenance, and preparation for the next round of production.

[0033] A mounting plate 8 is fixedly connected to the bottom of the reaction chamber 1. The outer surface of the mounting plate 8 has a mounting groove. The mounting plate 8 is the core connecting component that enables quick docking between the reaction chamber 1 and external processing equipment. The mounting plate 8 adopts a standardized structural design, which not only accurately matches the connection interfaces of various external processing equipment, but also allows for quick and secure assembly of the reaction chamber 1 with external equipment through its pre-set positioning holes and fastening components. This stable connection method effectively avoids vibration and displacement problems caused by loose connections during equipment operation, significantly improving the structural stability of the entire processing system during use and providing reliable installation assurance for the smooth operation of the silicon rod crystal pulling process.

[0034] A flange 9 is welded to the top of the reaction chamber 1. Bolt grooves are provided on the outer surface of the flange 9. Both the inner and outer surfaces of the reaction chamber 1 are coated with high-temperature resistant and anti-corrosion coatings. The outer walls of multiple guide plates 2 are also coated with corrosion-resistant coatings. The flange 9 is a key component for achieving precise connection between the reaction chamber 1 and the upper feeding equipment. The flange 9 adopts a high-sealing structure design. Through the clamping of the fastening bolts, the reaction chamber 1 can be firmly and tightly connected to the upper feeding equipment. This ensures the stability of material conveying during the feeding process, preventing material spillage, and creating a reliable sealed environment to prevent external air from entering the reaction chamber 1 and interfering with the crystal pulling process. It also reduces the loss of high-temperature heat within the reaction chamber 1, maintaining the stable thermal environment required for the process. Furthermore, the inner and outer surfaces of the reaction chamber 1 are coated with specialized high-temperature resistant and anti-corrosion coatings, respectively. The inner high-temperature resistant coating effectively resists the continuous high-temperature erosion during the crystal pulling process, preventing deformation and cracking of the inner wall of reaction chamber 1 due to high temperatures. The outer anti-corrosion coating isolates the reaction chamber 1 from corrosive media in the external environment, slowing down its aging process. This dual-coating design significantly improves the structural strength and durability of reaction chamber 1, further ensuring the long-term operational stability of the entire device.

[0035] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An impurity blocking diffusion device for large-size silicon rod crystal pulling, comprising a reaction chamber (1), characterized in that: The reaction chamber (1) is equipped with an adapter component; The adapter component includes a guide plate (2) installed on the outer wall of the reaction chamber (1). There are several guide plates (2). A strong magnetic rod (3) is installed on the inner wall of several guide plates (2). A crucible seat (4) is provided on the inner wall of the reaction chamber (1) inside the several strong magnetic rods (3). The crucible seat (4) is magnetically connected to the strong magnetic rod (3).

2. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 1, characterized in that: The adapter also includes a plug-in seat (5) that is inserted into the top of the crucible holder (4). A heat insulation ring (6) is fixedly connected to the inner wall of the plug-in seat (5), and an anti-slip groove is provided on the inner surface of the heat insulation ring (6).

3. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 2, characterized in that: The reaction chamber (1) is equipped with a circulation pipe (7), and there are several circulation pipes (7). The outer surface of the circulation pipe (7) is coated with a high-temperature resistant coating.

4. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 1, characterized in that: The reaction chamber (1) is fixedly connected to the bottom end of the mounting plate (8), and the outer surface of the mounting plate (8) is provided with a mounting groove.

5. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 4, characterized in that: A flange (9) is welded to the top of the reaction chamber (1), and a bolt groove is provided on the outer surface of the flange (9).

6. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 1, characterized in that: The inner and outer surfaces of the reaction chamber (1) are coated with a high-temperature resistant coating and an anti-corrosion coating.

7. The impurity blocking diffusion device for large-size silicon rod crystal pulling according to claim 6, characterized in that: The outer walls of the multiple guide vanes (2) are coated with a corrosion-resistant coating.

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