A feeding module, a single crystal furnace rack structure and a production line

Abstract

The application discloses a feeding module, a single crystal furnace frame structure and a production line. The feeding module comprises a clamping assembly. The clamping assembly can switch between a material obtaining station and a feeding station. The clamping assembly comprises a clamping component and a position adjusting component. The clamping component is used for clamping material. The position adjusting component is used for driving the clamping component to move, so as to adjust the posture of the clamping component. The clamping component clamps material at the material obtaining station and can move to the feeding station to realize feeding. During the switching movement between the material obtaining station and the feeding station, the clamping component is driven by the position adjusting component, so that the clamping component can adjust its posture in a suitable actual state, thereby successfully obtaining material and loading the quartz tube in a narrow space, and improving the working efficiency and convenience of feeding.

Description

Technical Field

[0001] This application relates to the field of crystal growth technology, and in particular to a feeding module, a single crystal furnace rack structure, and a production line. Background Technology

[0002] Gallium arsenide (GaAs) is a widely used microelectronic material, and single-crystal furnaces are the main equipment for preparing GaAs crystal rods. However, the single-crystal furnaces and surrounding space in related technologies are narrow, requiring the furnace to be rotated and the quartz tubes inserted sideways, which is inconvenient and affects work efficiency. Utility Model Content

[0003] This application proposes a feeding module to effectively solve the technical problem in related technologies where the narrow space of the single crystal furnace rack makes it inconvenient to load quartz tubes, thus affecting work efficiency.

[0004] This application also proposes a single-crystal furnace rack structure that includes the above-mentioned feeding module.

[0005] This application also proposes a production line including the above-mentioned single crystal furnace rack structure.

[0006] A first aspect of this application provides a feeding module, including: a clamping component;

[0007] The clamping assembly can switch between the material receiving station and the material loading station;

[0008] The clamping assembly includes a clamping component and an adjusting component. The clamping component is used to clamp materials, and the adjusting component is used to drive the clamping component to move in order to adjust the posture of the clamping component.

[0009] Furthermore, the positioning component includes a rotary drive component for driving the clamping component to rotate, so that the clamping component can rotate around its own axis and adjust its orientation when it reaches at least one of the material receiving station, the material loading station, or during the switching motion.

[0010] Furthermore, the clamping component switches from the material receiving station to the material loading station, and the rotary drive drives the clamping component to rotate 180°;

[0011] And / or, the clamping component switches from the loading station to the receiving station, and the rotary drive drives the clamping component to rotate 180°.

[0012] Furthermore, the rotary drive includes a rotating part, a first mounting part, and a second mounting part. The rotating part is disposed between the first mounting part and the second mounting part. The second mounting part is used to mount the clamping component. The rotating part is used to cause relative rotation between the first mounting part and the second mounting part.

[0013] Furthermore, the positioning component includes a first lifting drive component, which is used to drive the clamping component to rise and fall, so that the clamping component can rise and fall during the switching motion or when it reaches the material receiving station and / or the material loading station.

[0014] Furthermore, the clamping component includes an openable first clamping part and a second clamping part, and the first clamping part and the second clamping part are respectively provided with recessed grooves for limiting the material.

[0015] Furthermore, the feeding module also includes a base plate and a support block. The support block and the clamping assembly are respectively disposed on the base plate. The support block is used to dock and cooperate with the clamping component located at the feeding station.

[0016] Furthermore, the feeding module also includes a feeding guide rail, and the clamping component is movably mounted on the feeding guide rail to switch between the material receiving station and the feeding station.

[0017] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects: the clamping component clamps the material at the acquisition station and can move to the loading station to realize the loading. During the switching movement between the acquisition station and the loading station, the clamping component is driven by the adjustment component, so that the clamping component can adjust its own posture in a suitable way, thereby successfully acquiring the material and inserting the quartz tube in a narrow space, improving the efficiency and convenience of loading.

[0018] A second aspect of this application provides a single-crystal furnace rack structure, including a feeding module as described in the first aspect of this application.

[0019] A third aspect of this application provides a production line, including a single-crystal furnace rack structure as described in the second aspect of this application.

[0020] It is easy to understand that the single crystal furnace rack structure in the second aspect embodiment of this application and the production line in the third aspect embodiment of this application both have the same technical effects as the feeding module in the first aspect embodiment, and therefore will not be described again.

[0021] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a feeding module provided in one embodiment of this application;

[0024] Figure 2 for Figure 1 Enlarged view of A in the middle;

[0025] Figure 3 This is a schematic diagram of a single-crystal furnace rack structure provided in one embodiment of this application.

[0026] Figure label:

[0027] 100. Feeding guide rail;

[0028] 200. Clamping assembly; 210. Clamping component; 211. First clamping part; 212. Second clamping part; 213. Recessed groove; 220. Adjustment component; 221. Rotation drive; 2211. Rotating part; 2212. First mounting part; 2213. Second mounting part; 222. First lifting drive;

[0029] 300. Base plate; 310. Support block;

[0030] 400, bracket; 410, second lifting drive component; 420, support bracket. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] See Figures 1 to 3 As shown, an embodiment of the first aspect of this application discloses a feeding module, including a clamping component 200;

[0033] The clamping assembly 200 can switch between the material receiving station and the material loading station. The clamping assembly 200 includes a clamping component 210 and an adjusting component 220. The clamping component 210 is used to clamp the material, and the adjusting component 220 is used to drive the clamping component 210 to move so as to adjust the posture of the clamping component 210.

[0034] In the embodiments of this application, the clamping component 210 clamps the material at the acquisition station and can move to the loading station to load the material. During the switching movement between the acquisition station and the loading station, the clamping component 210 is driven by the positioning component 220, so that the clamping component 210 can adjust its own posture appropriately, thereby successfully acquiring the material and inserting the quartz tube into the narrow space, improving the efficiency and convenience of loading.

[0035] It is understood that in some embodiments, the clamping component 200, relying on a drive structure such as a linear guide or robotic arm transmission, can stably switch between the material receiving station at the upstream material storage area and the material loading station at the downstream material placement area. During material receiving, the positioning component 220 first drives the clamping component 210 to adjust its posture, such as adjusting the rotation angle and height, so that the clamping component 210 can stably grasp the material. After the clamping component 210 clamps the material, the clamping component 200 moves as a whole to the loading station. The positioning component 220 then adjusts the posture of the clamping component 210 a second time according to the material placement requirements of the loading station, so that the material is placed in a suitable posture, thus completing the loading. Based on the adjustment of the positioning component 220, the clamping component 210 can achieve loading in a narrow space.

[0036] The following will combine Figures 1 to 3 The feeding module disclosed in the embodiments of this application will be explained and described in detail.

[0037] In some embodiments of this application, the positioning component 220 includes a rotary drive 221, which drives the clamping component 210 to rotate so that the clamping component 210 can rotate around its own axis and adjust its orientation when it reaches at least one of the material receiving station, the material loading station, or during the switching motion. It is understood that when the clamping component 200 switches between the material receiving station and the material loading station, such as during linear movement along the guide rail, the rotary drive 221 can drive the clamping component 210 to rotate in advance to complete the attitude pre-adjustment. Alternatively, when it reaches the material receiving station or the material loading station, it can drive the clamping component 210 to rotate according to the actual orientation required for the material to be placed, so that the material can be accurately gripped and positioned. By designing the appropriate timing for the rotary drive 221 to drive the clamping component 210 to rotate, it is possible to better achieve material loading in narrow spaces.

[0038] In some embodiments, the rotary drive 221 is used to drive the clamping member 210 to rotate so that the clamping member 210 can rotate around its own axis and adjust its orientation when it reaches the material receiving station and the material loading station.

[0039] In some embodiments, the clamping component 210 switches from the material receiving station to the material loading station, and the rotary drive component 221 drives the clamping component 210 to rotate 180°. It can be understood that after the clamping component 210 switches from the material receiving station to the material loading station, the rotation of the clamping component 210 realizes the reversal, thereby making the design position of the material loading station more reasonable and easier to operate.

[0040] In some embodiments, when the clamping component 210 switches from the loading station to the receiving station, the rotary drive component 221 drives the clamping component 210 to rotate 180°. It can be understood that after the clamping component 210 switches from the loading station to the receiving station, the rotation of the clamping component 210 realizes the reversal, thereby making the design position of the receiving station more reasonable and easier to operate.

[0041] In some embodiments, the rotary drive 221 includes a rotating part 2211, a first mounting part 2212, and a second mounting part 2213. The rotating part 2211 is disposed between the first mounting part 2212 and the second mounting part 2213. The second mounting part 2213 is used to mount the clamping member 210. The rotating part 2211 is used to cause relative rotation between the first mounting part 2212 and the second mounting part 2213. It is understood that the first mounting part 2212 is a fixed end, and the second mounting part 2213 is an actuating end, used to fix the clamping member 210. After receiving a control signal, the rotating part 2211 drives the second mounting part 2213 to rotate relative to the first mounting part 2212 about an axis. The rotational torque output by the rotating part 2211 drives the second mounting part 2213 and the clamping member 210 to rotate synchronously.

[0042] In some embodiments, the first mounting part 2212 and the second mounting part 2213 are mounting plates, and the rotating part 2211 is a rotating module or a component consisting of a drive motor and rotating transmission components such as shafts and gears.

[0043] In some embodiments of this application, the positioning component 220 includes a first lifting drive 222, which drives the clamping component 210 to rise and fall, so that the clamping component 210 can rise and fall during the switching motion or when it reaches the material receiving station and / or the loading station. It is understood that the first lifting drive 222 can drive the clamping component 210 to rise and fall in the vertical direction; its timing of action is coordinated with station switching and 180° rotation and does not interfere with each other.

[0044] In some embodiments, the first lifting drive 222 may be configured as a miniature cylinder, electric actuator, or ball screw lifting mechanism.

[0045] For example, in some embodiments, the clamping component 210 includes an openable first clamping part 211 and a second clamping part 212, and the first clamping part 211 and the second clamping part 212 are respectively provided with recessed grooves 213 for limiting the material. It can be understood that the first and second clamping parts 212 of the clamping component 210 are opened and closed by a drive structure such as a pneumatic gripper or an electric clamp. When the material receiving station is reached, the first clamping part 211 and the second clamping part 212 open, and the first lifting drive 222 drives them to descend, so that the material falls into the recessed grooves 213 between the two clamping parts. Then the first clamping part 211 and the second clamping part 212 close, and the recessed grooves 213 conform to the contour of the material to form an enclosed limiting space and achieve clamping. During the switching of stations, 180° rotation or lifting, the material is not easily released from the recessed grooves 213. After reaching the loading station, the first clamping part 211 and the second clamping part 212 open to complete the material release.

[0046] In some embodiments, the first clamping part 211 and the second clamping part 212 are clamping blocks, and the recessed groove 213 is a V-shaped groove, so as to better clamp the material tube.

[0047] In some embodiments of this application, the feeding module further includes a base plate 300 and a support block 310. The support block 310 and the clamping assembly 200 are respectively disposed on the base plate 300. The support block 310 is used to dock with the clamping component 210 located at the feeding station. It can be understood that the base plate 300 serves as a load-bearing structure, and both the support block 310 and the clamping assembly 200 are fixed at preset positions on the base plate 300. The position of the support block 310 corresponds to the feeding station, and the support block 310 can dock with the clamping component 210. Its top and side surfaces are designed with positioning structures adapted to the material tube.

[0048] In some embodiments of this application, the feeding module further includes a feeding guide rail 100, and a clamping component 200 is movably mounted on the feeding guide rail 100 to switch between the material receiving station and the feeding station. It is understood that the feeding guide rail 100 is fixed to the base plate 300, and the clamping component 200 is movably mounted by sliding a slider with the guide rail. The extension direction of the feeding guide rail 100 corresponds to the material receiving station and the feeding station, ensuring that the clamping component 200 switches between moving along a preset straight trajectory. Based on the guiding constraint effect of the feeding guide rail 100, the motion accuracy is improved.

[0049] In some embodiments, the first mounting part 2212 is slidably disposed on the feeding guide rail 100, the first lifting drive 222 is disposed on the second mounting part 2213, and the clamping part 210 is disposed on the first lifting drive 222, so that the clamping part 210 can be lifted and rotated to adjust its posture when switching between the material receiving station and the material loading station, thus adapting to the narrow material loading space.

[0050] The second aspect of this application discloses a single crystal furnace rack structure, including: the feeding module of the first aspect of this application.

[0051] In some embodiments, the single crystal furnace rack structure includes a support 400, a second lifting drive 410, and a bracket 420. The second lifting drive 410 is disposed on the support 400 and is used to drive the bracket 420 to lift and lower. The bracket 420 is used to set the furnace body.

[0052] The feeding module and single crystal furnace rack structure of this application are described in detail below with a specific embodiment. It should be noted that the following embodiment is only an exemplary description and should not be construed as limiting the embodiments of this application.

[0053] See Figures 1 to 3 As shown, the single crystal furnace rack structure of this embodiment includes a support 400, a second lifting drive 410, a tray, a heating furnace body, and a feeding module.

[0054] In some embodiments, the bracket 400 and the tray form the support structure of the furnace frame, and the second lifting drive 410 lifts the heating furnace body upward, so that the crystal rod makes lifting and rotating movements and grows upward.

[0055] The feeding module includes a base plate 300, a support block 310, a feeding guide rail 100, and a clamping assembly 200. The support block 310 is fixed on the base plate 300 and is used to place the material pipe, and is coaxial with the heating furnace frame of the bracket 400. The clamping assembly 200 includes a clamping component 210, a rotary drive component 221, and a first lifting drive component 222. The rotary drive component 221 includes a rotating part 2211, a first mounting part 2212, and a second mounting part 2213. The first mounting part 2212 slides. The rotating part 2211 is mounted on the feeding guide rail 100 and is mounted on the first mounting part 2212 and connected to the second mounting part 2213. The first lifting drive 222 is mounted on the second mounting part 2213 and connected to the clamping assembly 200. The clamping assembly 200 includes a clamp and a first clamping part 211 and a second clamping part 212. The slider of the first lifting drive 222 is connected to the clamp. The clamp is connected to the first clamping part 211 and the second clamping part 212 and controls its clamping of the material tube. Specifically, the first lifting drive 222 drives the clamp and the first clamping part 211 and the second clamping part 212 to lift and lower. The clamp controls the first clamping part 211 and the second clamping part 212 to clamp the material tube. The ends of the first clamping part 211 and the second clamping part 212 are equipped with V-grooves, which can guide and clamp the material tube to fix it. Then, the rotating part 2211 rotates 180 degrees. The feeding guide rail 100 is installed on the base plate 300 and connected to the rotating drive 221. The feeding guide rail 100 can drive the rotating drive 221 to move from the material receiving station to the material loading station.

[0056] In use, the feeding guide 100 drives the first lifting drive 222 to move to the clamping position at the material receiving station. The clamp drives the first clamping part 211 and the second clamping part 212 to move inward to clamp the material tube. The lifting guide moves upward to disengage the material tube. The rotating part 2211 drives the material tube to rotate 180 degrees. Then, the feeding guide 100 drives the rotating module and the material tube to move directly above the support block 310. The lifting guide moves downward until the material tube is placed on the support block 310. At the same time, the clamp and the first clamping part 211 and the second clamping part 212 move outward to disengage the material tube. The feeding guide 100 and the rotating part 2211 reset. Then, the second lifting drive 410 of the bracket 400 slowly descends, and the heating furnace body slowly descends to the heating position to complete the material tube feeding and crystal growth.

[0057] It is understandable that the material tube is clamped by the cooperation of the first lifting drive 222 and the clamping component 210, the rotation drive 221 rotates the material tube 180 degrees, and the material tube is placed above the support block 310 by the feeding guide rail 100. The material tube is placed on the support block 310 by the cooperation of the first lifting drive 222 and the clamping component 210, thereby quickly and effectively feeding the material tube automatically, which can improve production efficiency, reduce labor intensity, and the automatic feeding structure is compact and can be used in narrow positions.

[0058] The production line of the third aspect of this application may be an electronic equipment production line, and the production line includes: the single crystal furnace rack structure of the second aspect of this application.

[0059] It is easy to understand that the single crystal furnace rack structure in the second aspect embodiment of this application and the production line in the third aspect embodiment of this application both have the same technical effects as the feeding module in the first aspect embodiment, and therefore will not be described again.

[0060] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0061] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more. It should be noted that the term "and / or" used herein is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. Similarly, at least one of A or B can also represent: A alone, A and B simultaneously, or B alone.

[0062] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0063] In the foregoing description of this specification, references to terms such as "one embodiment," "another embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A feeding module, characterized in that, include: Clamping components; The clamping assembly can switch between the material receiving station and the material loading station; The clamping assembly includes a clamping component and an adjusting component. The clamping component is used to clamp materials, and the adjusting component is used to drive the clamping component to move in order to adjust the posture of the clamping component.

2. The feeding module according to claim 1, characterized in that: The positioning component includes a rotary drive component, which drives the clamping component to rotate so that the clamping component can rotate around its own axis and adjust its orientation when it reaches at least one of the material receiving station, the material loading station, or during the switching motion.

3. The feeding module according to claim 2, characterized in that: The clamping component switches from the material receiving station to the material loading station, and the rotary drive drives the clamping component to rotate 180°; And / or, the clamping component switches from the loading station to the receiving station, and the rotary drive drives the clamping component to rotate 180°.

4. The feeding module according to claim 2, characterized in that: The rotary drive includes a rotating part, a first mounting part, and a second mounting part. The rotating part is disposed between the first mounting part and the second mounting part. The second mounting part is used to mount the clamping component. The rotating part is used to cause relative rotation between the first mounting part and the second mounting part.

5. The feeding module according to claim 1, characterized in that: The adjustment component includes a first lifting drive component, which is used to drive the clamping component to rise and fall, so that the clamping component can rise and fall during the switching motion or when it reaches the material receiving station and / or the material loading station.

6. The feeding module according to claim 1, characterized in that: The clamping component includes an openable first clamping part and a second clamping part, and the first clamping part and the second clamping part are respectively provided with recessed grooves for limiting the material.

7. The feeding module according to claim 1, characterized in that: The feeding module also includes a base plate and a support block. The support block and the clamping assembly are respectively disposed on the base plate. The support block is used to dock and cooperate with the clamping component located at the feeding station.

8. The feeding module according to claim 1, characterized in that: The feeding module also includes a feeding guide rail, and the clamping component is movably mounted on the feeding guide rail to switch between the material receiving station and the feeding station.

9. A single-crystal furnace rack structure, characterized in that, include: The feeding module as described in any one of claims 1 to 8.

10. A production line, characterized in that, include: The single-crystal furnace rack structure as described in claim 9.

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