A footplate for a single crystal main heater

Abstract

This invention provides a foot plate for a single-crystal main heater, relating to the field of single-crystal furnace technology. The foot plate includes a connecting plate and a fixing plate. One end of the connecting plate is connected to the main heater, and a gas flow opening is provided on the connecting plate. The fixing plate is located on one side of the other end of the connecting plate. When the fixing plate and the connecting plate are connected, an L-shaped structure is formed. With the gas flow opening on the foot plate, the foot plate is connected in parallel with the main heater. This invention provides a gas flow opening on the connecting plate of the main heater's foot plate, changing the connection relationship between the main heater and the foot plate from series to parallel, thereby increasing the foot plate resistance and reducing the resistance difference between the foot plate and the heating zone of the main heater. Simultaneously, the gas flow opening allows airflow between the foot plate and the insulation cylinder inside the single-crystal furnace, reducing the arcing rate caused by silicon powder during re-injection.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a foot plate for a single crystal main heater. Background Technology

[0002] The feet of the graphite heater in a single-crystal furnace serve to support the graphite heating zone, but the heat generated by the feet is often overlooked. Due to the significant difference in resistance between the heater feet and the heating zone, the heating zone and feet deform inconsistently at high temperatures, leading to cracking in the heating zone. Furthermore, the relatively wide heater feet and small distance between them and the furnace's insulation container make it prone to sparking between the heater feet and the insulation container during re-injection due to silicon sputtering and powder. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a foot plate for a single crystal main heater, which changes the series connection of the heater foot plates to a parallel connection, thereby reducing the resistance difference between the heater foot plates and the heating zone, while increasing the airflow space between the foot plates and the insulation cylinder, thus reducing arcing between the heater foot plates and the insulation cylinder.

[0004] The technical solution adopted in this utility model is: A footplate for a single-crystal main heater, comprising: A connecting plate, one end of which is connected to the main heater, and the connecting plate is provided with a gas flow opening; A fixing plate is disposed on one side of the other end of the connecting plate, and an L-shaped structure is formed when the fixing plate is connected to the connecting plate; When the foot plate is provided with the gas flow opening, the foot plate is connected in parallel with the main heater.

[0005] Optionally, the connecting plate and the fixing plate are integrally formed.

[0006] Optionally, the thickness of the connecting plate is less than the thickness of the fixing plate.

[0007] Optionally, the gas flow opening extends from the bottom of the connecting plate toward the top of the connecting plate.

[0008] Optionally, the connection plate is provided with a connection opening at the connection point with the main heater. The opening size of the connection opening matches the thickness of the main heater, and the connection opening is located above the gas flow opening.

[0009] Optionally, the fixing plate is provided with an auxiliary opening that communicates with the gas flow opening.

[0010] Optionally, both the gas flow opening and the auxiliary opening have rounded corners at their corners.

[0011] Optionally, the side of the connecting plate facing the crucible has an arc-shaped structure.

[0012] Compared with the prior art, the beneficial effects of this utility model are: By changing the heater feet from series connection to parallel connection, the resistance difference between the heater feet and the heating zone is reduced, while the airflow space between the feet and the insulation cylinder is increased, reducing arcing between the heater feet and the insulation cylinder. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a three-dimensional structural diagram of the footplate used in the single-crystal main heater.

[0015] Figure 2 This is a top view of the footplate structure for a single-crystal main heater.

[0016] Figure 3 This is a schematic diagram of the planar structure of the footplate for the single-crystal main heater.

[0017] Figure 4 This is a schematic diagram of the connection between the foot plate and the main heater.

[0018] Figure label: 1. Connecting plate; 11. Gas flow opening; 12. Connection opening; 2. Fixing plate; 21. Auxiliary opening. Detailed Implementation

[0019] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0020] In the description of this utility model, it should be understood that the terms "thickness", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0022] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0024] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0025] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, this embodiment of the invention provides a foot plate for a single-crystal main heater, comprising: a connecting plate 1 and a fixing plate 2. One end of the connecting plate 1 is connected to the main heater, and a gas flow opening 11 is provided on the connecting plate 1. The fixing plate 2 is disposed on one side of the other end of the connecting plate 1. When the fixing plate 2 and the connecting plate 1 are connected, an L-shaped structure is formed. Wherein, when the gas flow opening 11 is provided on the foot plate, the foot plate is connected in parallel with the main heater.

[0026] A gas flow opening 11 is provided on the connecting plate 1 of the main heater's foot plate, changing the connection relationship between the main heater and the foot plate from series to parallel. This increases the foot plate resistance and reduces the resistance difference between the main heater's foot plate and the heating zone. Simultaneously, the gas flow opening 11 allows airflow between the foot plate and the insulation cylinder inside the single crystal furnace, reducing the arcing rate caused by silicon powder during re-injection.

[0027] It should be noted that two foot plates are stacked and installed on the main heater, and the fixing plates 2 of the foot plates are set opposite each other after the two foot plates are installed.

[0028] When the silicon material is refilled in the single crystal furnace, the silicon powder in the silicon material will overflow from the top of the crucible and then enter the exhaust pipe at the bottom of the single crystal furnace through the space between the insulation cylinder and the foot plate.

[0029] By changing the heater feet from series connection to parallel connection, the resistance difference between the heater feet and the heating zone is reduced, while the airflow space between the feet and the insulation cylinder is increased, reducing arcing between the heater feet and the insulation cylinder.

[0030] In one embodiment, such as Figure 1 As shown, in order to avoid the structure at the connection point affecting the resistance of the foot plate, the connecting plate 1 and the fixing plate 2 are designed as an integral molding structure.

[0031] In one embodiment, such as Figure 1 , Figure 3 As shown, the thickness of the connecting plate 1 is less than the thickness of the fixing plate 2. Reducing the thickness of the connecting plate 1 increases the resistance at the upper end of the connecting plate 1, which can effectively reduce the heat generation on the foot plate, and thus further reduce the arcing rate.

[0032] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in order to facilitate the smooth discharge of silicon powder entering between the foot plate and the insulation cylinder through the gas flow opening 11, the gas flow opening 11 extends from the bottom of the connecting plate 1 toward the top of the connecting plate 1.

[0033] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in order to facilitate the installation of the main heater, a connection opening 12 is provided at the connection between the connecting plate 1 and the main heater. The opening size of the connection opening 12 matches the thickness of the main heater, and the connection opening 12 is located above the gas flow opening 11.

[0034] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in order to avoid silicon powder accumulating on the fixed plate 2, an auxiliary opening 21 is provided at the connection between the fixed plate 2 and the connecting plate 1. The auxiliary opening 21 is connected to the gas flow opening 11.

[0035] In one embodiment, such as Figure 1 and Figure 4 As shown, to avoid heat concentration, rounded corners are provided at the corners of the gas flow opening 11 and the auxiliary opening 21.

[0036] In one embodiment, such as Figure 1 and Figure 2 As shown, in order to make the foot plate more compatible with the insulation cylinder, the side of the connecting plate 1 facing the crucible has an arc surface structure.

[0037] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A foot plate for a single-crystal main heater, characterized in that, include: A connecting plate, one end of which is connected to the main heater, and the connecting plate is provided with a gas flow opening; A fixing plate is disposed on one side of the other end of the connecting plate, and an L-shaped structure is formed when the fixing plate is connected to the connecting plate; When the foot plate is provided with the gas flow opening, the foot plate is connected in parallel with the main heater.

2. The foot plate for a single-crystal main heater according to claim 1, characterized in that, The connecting plate and the fixing plate are integrally formed.

3. The foot plate for a single-crystal main heater according to claim 1 or 2, characterized in that, The thickness of the connecting plate is less than the thickness of the fixing plate.

4. The foot plate for a single-crystal main heater according to claim 1, characterized in that, The gas flow opening extends from the bottom of the connecting plate toward the top of the connecting plate.

5. The foot plate for a single-crystal main heater according to claim 1 or 4, characterized in that, The connecting plate is provided with a connection opening at the connection point with the main heater. The size of the connection opening matches the thickness of the main heater. The connection opening is located above the gas flow opening.

6. The foot plate for a single-crystal main heater according to claim 1, characterized in that, The fixing plate is provided with an auxiliary opening that communicates with the gas flow opening.

7. The foot plate for a single-crystal main heater according to claim 6, characterized in that, Both the gas flow opening and the auxiliary opening have rounded corners at their corners.

8. The foot plate for a single-crystal main heater according to claim 1, characterized in that, The side of the connecting plate facing the crucible has an arc-shaped structure.

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